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131. 发明公开

KR1020070093464A 초협대역이고 2챔버를 갖는 고반복율 가스 방전 레이저시스템 有权
标题翻译：非常窄带，两个室，高倍率气体放电激光系统
公开(公告)号：KR1020070093464A
公开(公告)日：2007-09-18
申请号：KR1020077019695
申请日：2002-08-28
申请人： 사이머 엘엘씨
发明人： 노울레스데이비드에스. , 브라운다니엘제이.,더블유. , 베사첼레허브에이. , 마이어스데이비드더블유. , 어쇼프알렉산더아이. , 파르틀로윌리암엔. , 샌드스트롬리차드엘. , 다스플래쉬피. , 앤더슨스튜어트엘. , 포멘코프이고르브이. , 우자즈도우스키리차드씨 , 온켈스에커하드디. , 네스리차드엠. , 스미스스코트티. , 헐버드윌리암지. , 오이클레스제프리
IPC分类号： H01S3/10
CPC分类号： G01J1/4257 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： An injection seeded modular gas discharge laser system (2) capable of producing high quality pulsed beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater. Two separate discharge chambers are provided, one of which is a part of a master oscillator (10) producing a very narrow band seed beam, which is amplified (12) in the second discharge chamber. The chambers can be controlled separately permitting separate optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber. A preferred embodiment in the ArF excimer laser system configured as a MOPA and specifically designed for use as a light source for integrated circuit lithography. In the preferred MOPA embodiment, each chamber comprises a single tangential fan (10A) providing sufficient gas flow to permit operation at pulse rates of 4,000 Hz or greater by cleaning debris from the discharge region in less time that the approximately 0.25 milliseconds between pulses. The masters oscillation is equipped with a line narrowing package having a very fast tuning mirror capable of controlling centerline wavelength on a pulse-to-pulse basis at repetition rates of 4000 Hz or greater to a precision of less than 0.2 pm.
摘要翻译：一种注射接种的模块化气体放电激光系统（2），其能够以约4,000Hz或更大的脉冲速率和约5mJ或更大的脉冲能量产生高质量的脉冲光束。提供两个单独的放电室，其中之一是主振荡器（10）的一部分，其产生非常窄的带状晶体束，其在第二放电室中放大（12）。可以单独控制室，允许主振荡器中的波长参数的单独优化和放大室中的脉冲能量参数的优化。配置为MOPA并被专门用于集成电路光刻的光源的ArF准分子激光系统中的优选实施例。在优选的MOPA实施例中，每个腔室包括单个切向风扇（10A），该切向风扇（10A）提供足够的气流，以允许在脉冲之间的大约0.25毫秒的时间内清除来自放电区域的碎屑。主机振荡配备有具有非常快的调谐镜的线窄化包，能够以4000Hz或更大的重复频率在脉冲到脉冲的基础上控制中心线波长，精度低于0.2μm。

132. 发明公开

KR1020050010786A 빔 전달 및 빔 포인팅 컨트롤을 갖춘 리소그래피 레이저 无效
标题翻译：光刻激光器，光束传输和光束指向控制
公开(公告)号：KR1020050010786A
公开(公告)日：2005-01-28
申请号：KR1020047017915
申请日：2003-05-05
申请人： 사이머 엘엘씨
发明人： 다스팔라시피. , 지오바날디마르코 , 프란시스그레고리 , 돈허클베리비. , 엘란센킬피. , 넬슨존더블유. , 샌드스트롬리차드엘. , 오쇼프알렉산더아이.
IPC分类号： H01L21/027
CPC分类号： G03F7/7055 , G02B26/0816 , G02B27/0972 , G03F7/70025 , G03F7/70041 , G03F7/70058 , H01S3/005 , H01S3/0057 , H01S3/036 , H01S3/041 , H01S3/0971 , H01S3/136 , H01S3/137 , H01S3/225 , H01S3/2333 , H01S3/2366 , H01S3/2308
摘要： The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam to a desired location such as the entrance port of the production line machine. Preferred embodiments include equipment for beam attenuation, equipment for automatic feedback beam alignment and equipment for accurate optics module positioning at installation and during maintenance. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.

133. 发明授权

KR100368670B1 광학적스위치와그러한스위치를포함하는다중전송장치및그러한다중전송장치용송수신기 失效
公开(公告)号：KR100368670B1
公开(公告)日：2003-04-08
申请号：KR1019950705691
申请日：1995-04-06
申请人： 코닌클리케 필립스 엔.브이.
发明人： 코엔테오도러스유베르투스프란시스커스리덴봄 , 죤제임스엘리스리드
IPC分类号： G02F1/00
CPC分类号： H04Q11/0003 , H01S3/0057 , H01S5/06216 , H01S5/065 , H01S5/141 , H01S5/4006 , H01S5/4025 , H04B10/572 , H04J14/02 , H04J14/08 , H04Q2011/0024
摘要： 본 발명은 빛에 의해 스위칭될 수 있는 광학적 스위치(1)에 관한 것이다. 그러한 스위치(1)는 신호가 적용될 수 있는 입구(5)와 출구(7)를 갖는 광파안내장치(3)를 포함한다. 광파안내장치(3)의 굴절률은 빛의 강도에 의해 변할 수 있다. 스위치(1)는 또한 상기 광파안내장치(3) 속에 주사될 수 있는 방사선(radiation)을 내보내는 방사원 유닛(15)을 부가적으로 포함한다. 이 방사원 유닛(15)은 일정한 반복시간(T)과 펄스지속시간(p)을 갖는 펄스식 레이저(17) 및 상기 레이저(17)에 의해 공급되는 방사선을 전송하는 분산매체(19)를 포함한다. 방사원 유닛(15)은 레이저(17)에 의해 공급되는 동일한 펄스 내에서 선택 가능한 모디의 수(N)로부터 선택된 패브리 페로트 모디의 수(n)로 상기 레이저(17)의 파장을 안정시키기 위한 설정수단(21)을 구비한다. 또한, 상기 분산매체(19)는 이송시의 파장대역들이 분산의 결과로 시간대별로 분리될 수 있는 파장 종속적 진행 시간(t
P )에서 분산된다.
摘要翻译：本发明涉及一种可通过光切换的光开关（1）。开关（1）包括具有可施加信号的入口（5）和出口（7）的光学波导结构（3）。波导结构（30）的折射率通过光强度可变。开关（1）还包括辐射源单元（15），辐射源单元（15）可以将辐射注入到波导结构（3）中。辐射源单元（15）包括具有重复时间T和脉冲持续时间p的脉冲激光器（17）和用于传输由激光器（17）提供的辐射的介质（19）。辐射源单元（15）配备有设置装置（21），用于在由所提供的同一脉冲内的可能可选择的波长带的数目N中选择波长带的数量n处稳定激光器（17）的波长激光器（17）。此外，介质（19）在与波长相关的传播时间tD处是分散的，其中传输时的波段因分散而在时间上可分离。

134. 发明公开

KR1020030022974A 분산 보상된 광섬유 증폭기 失效
标题翻译：分散补偿光纤放大器
公开(公告)号：KR1020030022974A
公开(公告)日：2003-03-19
申请号：KR1020010055834
申请日：2001-09-11
申请人： 삼성전자주식회사
发明人： 황성택 , 송관웅 , 김성태 , 주영훈 , 박성진
IPC分类号： G02B6/00
CPC分类号： H01S3/06754 , H01S3/0057 , H01S3/0064 , H01S3/06758 , H01S3/094003
摘要： PURPOSE: A dispersion compensating fiber amplifier is provided, which is capable of improving an integrity degree while fabrication costs is low. CONSTITUTION: A circulator(610) outputs an optical signal input via the first terminal connected to an optical fiber into the second terminal and an optical signal re-input via the second terminal into the third terminal connected to the optical fiber. The first amplification part(620) amplifies the optical signal input via the second terminal and the re-input optical signal using inductive emission of pumped excitation ions. A dispersion compensating fiber(680) compensates dispersion of an output signal of the first amplification part and the re-input optical signal. The second amplification part(700) amplifies the optical signal input via the dispersion compensating fiber and the re-input optical signal using inductive emission of pumped excited ions. A divergence part(660) outputs an optical signal input via the dispersion compensating fiber and the re-input optical signal to the dispersion compensating fiber and outputs pumping light input via one end to the other end without passing the dispersion compensating fiber. A reflection part(710) reflects an optical signal input from the second amplification part so as to be re-input sequentially to the second amplification part, the divergence part, the first amplification part, and the circulator.
摘要翻译：目的：提供一种色散补偿光纤放大器，能够提高制造成本低廉的完整性。构成：循环器（610）将经由连接到光纤的第一端子的光信号输入到第二端子，经由第二端子重新输入到与光纤连接的第三端子的光信号。第一放大部分（620）通过使用所激发的激发离子的感应发射来放大通过第二端子输入的光信号和再输入的光信号。色散补偿光纤（680）补偿第一放大部分和再输入光信号的输出信号的色散。第二放大部分（700）通过使用经激发的激发离子的感应发射，经由色散补偿光纤和重新输入的光信号放大输入的光信号。发散部分（660）将通过色散补偿光纤输入的光信号和再输入的光信号输出到色散补偿光纤，并将经由一端输入的泵浦光输出到另一端，而不通过色散补偿光纤。反射部（710）反射从第二放大部输入的光信号，依次重新输入到第二放大部分，发散部分，第一放大部分和循环器。

135. 发明公开

KR1020000048927A 단펄스 레이저 시스템 失效
标题翻译： PICOSECOND激光
公开(公告)号：KR1020000048927A
公开(公告)日：2000-07-25
申请号：KR1019997002961
申请日：1997-10-03
申请人： 제이엠에이알 테크놀로지 컴페니
发明人： 헤리리거 , 헨리실즈 , 리챠드포스터
IPC分类号： H01S3/00
CPC分类号： H01S3/2341 , H01S3/0057 , H01S3/0085 , H01S3/082 , H01S3/094076 , H01S3/0941 , H01S3/09415 , H01S3/1024 , H01S3/1075 , H01S3/1103 , H01S3/1109 , H01S3/1127 , H01S3/115 , H01S3/117 , H01S3/127 , H01S3/23 , H01S3/2316 , H01S3/2333 , H01S3/2383 , H01S2301/08
摘要： PURPOSE: A picosecond laser is provided to generate pulses with a duration in the range of about 60 to 300 ps at an energy level of up to a few milli-Joules per pulse (mJ/p) with near diffraction limited beam quality. CONSTITUTION: A crystal(8) composed of Nd:YAG rod is operated by a diode laser and a resonator composed of two reflection mirror and polarization beam splitter(12) is forming a beam path passing laser crystal. The beam path in the resonator is periodically blocked by a first optical shutter(14) consisted of an acousto-optic Q-switch permitting pump energy to build up in the laser crystal, except for a short period near the end of each pumping period. While the first optical shutter(14) is open, a second optical shutter(16) consisted of an acousto-optic mode locker blocks the light in the resonator except for periodic subnano-second intervals, the intervals being spaced such that at least one light pulse traveling at the speed of light in the resonator is able to make a plurality of transits through the resonator, increasing in intensity by extracting energy from the excited laser crystal on each transit. After the light pulse has built up in intensity, an optical release mechanism releases the pulse from resonator.
摘要翻译：目的：提供皮秒激光以产生持续时间在约60至300ps范围内的脉冲，其能量水平高达几毫安每脉冲（mJ / p），近衍射受限束质量。构成：由Nd：YAG棒构成的晶体（8）由二极管激光器工作，由两个反射镜和偏振分束器（12）组成的谐振器形成通过激光晶体的光束路径。谐振器中的光束路径被包括声光Q开关的第一光学快门（14）周期地阻挡，声光Q开关允许泵浦能量积聚在激光晶体中，除了接近每个泵送周期结束的短周期之外。当第一光学快门（14）打开时，由声光模式锁定器组成的第二光学快门（16）阻挡除了周期性亚纳秒级间隔之外的谐振器中的光，间隔被间隔开，使得至少一个光在谐振器中以光速行进的脉冲能够通过谐振器进行多个过渡，通过在每次运送时从激发的激光晶体提取能量而增加强度。在光脉冲强度累积之后，光学释放机构从谐振器释放脉冲。

136. 发明授权

KR1019930010132B1 순간 구형 펄스를 갖고 있는 위상 공액 레이저 및 순간 구형 펄스 형성방법 失效
标题翻译：具有时间平方脉冲的相位激光器及其形成方法
公开(公告)号：KR1019930010132B1
公开(公告)日：1993-10-14
申请号：KR1019900009542
申请日：1990-06-27
申请人： 레이티언 컴파니
发明人： 에드워드그리거 , 알렉산더알.뮤어 , 제임스에스.소스
IPC分类号： H01S3/10
CPC分类号： H01S3/2333 , G02F1/3538 , H01S3/0057 , H01S3/10076 , H01S2301/206
摘要： 내용 없음.

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