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    • 8. 发明公开
    • Distributed Feedback Semiconductor Laser for Outputting Beam of Single Wavelength
    • 分布式反馈半导体激光器输出单波长光束
    • EP1376789A2
    • 2004-01-02
    • EP03013736.8
    • 2003-06-17
    • ANRITSU CORPORATION
    • Mori, HiroshiKikugawa, TomoyukiTakahashi, YoshioFujita, Motoaki
    • H01S5/12
    • H01S5/12H01S5/0654H01S5/1203H01S5/1225H01S5/1231H01S5/124H01S5/1243
    • A distributed feedback semiconductor laser includes a semiconductor substrate (11), first and second diffraction grating layers (12a, 12b), a connecting layer (13), an active layer (18) and a cladding layer (19). The first and second diffraction grating layers (12a, 12b) are provided above the semiconductor substrate (11), and spaced from each other in an output direction of a beam (23). The connecting layer (13) is flat and sandwiched between the first and second diffraction grating layers (12a, 12b). The active layer (18) is disposed above or below the first and second diffraction grating layers (12a, 12b) and the connecting layer (13). The cladding layer (19) is disposed above the active layer (18) or above the first and second diffraction grating layers (12a, 12b) and the connecting layer (f). A diffraction grating (16) including the first and second diffraction grating layers (12a, 12b) has a plurality of slits (15) penetrating from an upper surface to a lower surface and perpendicular to the output direction of the beam (23). The connecting layer (13) is formed from two layers (13a, 13b) grown epitaxially in a direction perpendicular to the output direction of the beam (23). One (13a) of the two layers is formed of the same material as the first and second diffraction grating layers.
    • 分布反馈半导体激光器包括半导体衬底(11),第一和第二衍射光栅层(12a,12b),连接层(13),有源层(18)和包层(19)。 第一和第二衍射光栅层(12a,12b)设置在半导体衬底(11)的上方,并且在光束(23)的输出方向上彼此间隔开。 连接层(13)是平坦的并夹在第一和第二衍射光栅层(12a,12b)之间。 有源层(18)设置在第一和第二衍射光栅层(12a,12b)和连接层(13)的上方或下方。 包层(19)设置在有源层(18)的上方或第一和第二衍射光栅层(12a,12b)和连接层(f)的上方。 包括第一衍射光栅层和第二衍射光栅层(12a,12b)的衍射光栅(16)具有多个狭缝(15),所述狭缝从上表面贯穿到下表面并垂直于光束(23)的输出方向。 连接层(13)由在与光束(23)的输出方向垂直的方向上外延生长的两层(13a,13b)形成。 两层中的一个(13a)由与第一和第二衍射光栅层相同的材料形成。