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    • 6. 发明公开
    • SEMICONDUCTOR LASER DIODE AND METHOD OF MANUFACTURE THEREOF
    • 半导体激光二极管及其制造方法
    • EP3211736A1
    • 2017-08-30
    • EP17157316.5
    • 2017-02-22
    • Prima Electro S.p.A.
    • PAOLETTI, RobertoCORIASSO, ClaudioCALEFATI, Paolo
    • H01S5/028H01S5/125H01S5/12H01S5/02
    • H01S5/34H01S5/0206H01S5/028H01S5/1231H01S5/125
    • Laser-diode device comprising:
      - a substrate;
      - at least one first cladding layer placed on the substrate;
      - an active layer placed on the first cladding layer and arranged to emit a radiation;
      - at least one second cladding layer placed on the active layer, said cladding layers being adapted to form a heterojunction, thereby allowing an efficient injection of current into the active layer and the optical confinement;
      - a first terminal facet and a second terminal facet placed transversally relative to the cladding layers and to the active layer, and formed within said layers by means of dry or wet etchings techniques and/or combinations thereof;
      - a periodic structure, placed in proximity to the second terminal facet and within the second cladding layer, and belonging to an optical cavity, wherein the first terminal facet represents the output mirror from which the radiation generated by the active layer exits, and the second terminal facet, integrated by the periodic structure, represents a second mirror having high reflectivity, so that the radiation produced by the active layer exits almost totally through the first mirror.
    • 激光二极管器件,包括: - 衬底; - 至少一个放置在衬底上的第一包层; - 放置在第一包层上并布置成发射辐射的有源层; - 至少一个放置在有源层上的第二包层,所述包层适于形成异质结,从而允许有效地将电流注入到有源层和光限制中; - 第一终端小面和第二终端小面,所述第一终端小面和第二终端小面相对于所述包覆层和所述有源层横向放置,并且借助于干或湿蚀刻技术和/或其组合形成在所述层内; - 周期性结构,放置在第二端子面附近并且在第二包层内,并且属于光学腔,其中第一端面表示输出镜,由有源层产生的辐射从该输出镜出射,并且第二端面 由周期性结构整合的末端小面代表具有高反射率的第二反射镜,使得由有源层产生的辐射几乎完全通过第一反射镜射出。