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    • 8. 发明公开
    • TUNABLE LASER WITH INTEGRATED WAVELENGTH REFERENCE
    • 具有集成波长参考的可调谐激光器
    • EP3267537A1
    • 2018-01-10
    • EP17180806.6
    • 2012-10-01
    • Aurrion, Inc.
    • FANG, Alexander W.FISH, Gregory A.HUTCHINSON, John
    • H01S5/06H01S5/026
    • H01S5/068H01S3/0014H01S3/0637H01S3/0675H01S3/10015H01S3/10023H01S3/1003H01S3/1055H01S3/1305H01S5/021H01S5/02453H01S5/026H01S5/0265H01S5/0612H01S5/1028H01S5/1209H01S5/142
    • In the prior art, tunable lasers utilizing silicon-based tunable ring filters and III-V semiconductor-based gain regions required the heterogeneous integration of independently formed silicon and III-V semiconductor based optical elements, resulting in large optical devices requiring a complex manufacturing process (e.g., airtight packaging to couple the devices formed on different substrates, precise alignment for the elements, etc.). Embodiments of the invention eliminate the need for bulk optical elements and hermetic packaging, via the use of hybridized III-V/silicon gain regions (120) and silicon optical components, such as silicon wavelength filters (110) and silicon wavelength references (150), thereby reducing the size and manufacturing complexity of tunable lasing devices. For example, embodiments of the invention may utilize hybridized III-V/silicon gain regions with ring filters on silicon form a tunable laser with efficient gain from the III-V region, while providing wide tunability, efficient tunability, and narrow linewidth due to the nature of the silicon rings.
    • 在现有技术中,利用硅基可调谐环滤波器和基于III-V半导体的增益区的可调激光器需要独立形成的硅和基于III-V半导体的光学元件的异构集成,导致需要复杂制造工艺的大型光学器件 (例如,气密封装以耦合形成在不同衬底上的器件,元件的精确对准等)。 通过使用诸如硅波长滤波器(110)和硅波长基准(150)的混合III-V /硅增益区域(120)和硅光学部件,本发明的实施例消除了对块状光学元件和气密封装的需要。 从而减小可调谐激光器件的尺寸和制造复杂性。 例如,本发明的实施例可利用具有硅上的环形滤波器的杂化III-V /硅增益区域形成具有来自III-V区域的有效增益的可调谐激光器,同时提供宽的可调谐性,有效的可调谐性和由于 硅环的性质。