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1. 发明授权

EP3096343B1 METHOD OF IMAGING A SAMPLE WITH CHARGED PARTICLE BEAM USING AN IMAGING GAS 有权
标题翻译：用成像气体成像带电荷粒子束的样品的方法
公开(公告)号：EP3096343B1
公开(公告)日：2017-12-27
申请号：EP16169828.7
申请日：2016-05-17
申请人： FEI Company
发明人： Shanley, Toby , Scott, John , Toth, Milos
IPC分类号： H01J37/244 , H01J37/18 , H01J37/22 , H01J37/28
CPC分类号： H01J37/18 , H01J37/22 , H01J37/244 , H01J37/28 , H01J2237/182 , H01J2237/2448 , H01J2237/2605 , H01J2237/2608 , H01J2237/2801 , H01J2237/2806
摘要： Charged particle beam imaging and measurement systems are provided using gas amplification with an improved imaging gas. The system includes a charged particle beam source for directing a charged particle beam to work piece, a focusing lens for focusing the charged particles onto the work piece, and an electrode for accelerating secondary electrons generated from the work piece irradiation by the charged practice beam, or another gas cascade detection scheme. The gas imaging is performed in a high pressure scanning electron microscope (HPSEM) chamber for enclosing the improved imaging gas including CH 3 CH 2 OH (ethanol) vapor. The electrode accelerates the secondary electrons though the CH 3 CH 2 OH to ionize the CH 3 CH 2 OH through ionization cascade to amplify the number of secondary electrons for detection. An optimal configuration is provided for use of the improved imaging gas, and techniques are provided to conduct imaging studies of organic liquids and solvents, and other CH 3 CH 2 OH-based processes.

2. 发明授权

EP2495748B1 CHARGED PARTICLE RADIATION APPARATUS, AND METHOD FOR DISPLAYING THREE-DIMENSIONAL INFORMATION IN CHARGED PARTICLE RADIATION APPARATUS 有权
标题翻译：带电粒子辐射装置和用于在带电粒子辐射装置中显示三维信息的方法
公开(公告)号：EP2495748B1
公开(公告)日：2017-12-20
申请号：EP10826621.4
申请日：2010-10-22
申请人： Hitachi High-Technologies Corporation
发明人： YAGUCHI Toshie , NAGAKUBO Yasuhira , AZUMA Junzo , WATABE Akira
IPC分类号： H01J37/18 , H01J37/20 , H01J37/26 , G01N23/225 , G01N23/22
CPC分类号： H01J37/26 , G01N23/2204 , G01N23/2251 , H01J37/18 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/24578 , H01J2237/2608 , H01J2237/2611
摘要： Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.

3. 发明授权

EP2105943B1 Environmental cell for a particle-optical apparatus 有权
标题翻译：具有用于粒子装置的受控环境样品池
公开(公告)号：EP2105943B1
公开(公告)日：2014-05-07
申请号：EP09156379.1
申请日：2009-03-27
申请人： FEI COMPANY
发明人： Buijsse, Bart
IPC分类号： H01J37/02 , H01J37/16 , H01J37/28 , H01J37/305
CPC分类号： H01J37/023 , H01J37/16 , H01J37/28 , H01J37/3056 , H01J2237/188 , H01J2237/2003 , H01J2237/2608 , H01J2237/31749

4. 发明公开

EP2495748A1 CHARGED PARTICLE RADIATION APPARATUS, AND METHOD FOR DISPLAYING THREE-DIMENSIONAL INFORMATION IN CHARGED PARTICLE RADIATION APPARATUS 有权
标题翻译：辐射装置用于显示三维信息在辐射装置用于带电粒子带电粒子和方法
公开(公告)号：EP2495748A1
公开(公告)日：2012-09-05
申请号：EP10826621.4
申请日：2010-10-22
申请人： Hitachi High-Technologies Corporation
发明人： YAGUCHI Toshie , NAGAKUBO Yasuhira , AZUMA Junzo , WATABE Akira
IPC分类号： H01J37/20 , G01N1/28 , G01N23/225 , H01J37/24
CPC分类号： H01J37/26 , G01N23/2204 , G01N23/2251 , H01J37/18 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/24578 , H01J2237/2608 , H01J2237/2611
摘要： Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.
摘要翻译：公开的是能够捕获由于气态气氛，光照射，加热或不将样品暴露于大气等的样品中的改变的带电粒子射线装置。本发明涉及一种设置有样品台上的样品保持器所做的是在电子束照射方向，将样品保持器能够在围绕样品台气密室形成的围绕旋转轴线可旋转的基座垂直。样品被允许在化学任何气氛发生反应，并且被使能对反应进行三维分析。容易在大气来改变样品可以是三维分析，而不必使样品暴露于大气中。

5. 发明公开

EP2442346A1 Improvements in and relating to charged particle beam devices 有权转让
标题翻译： Verbesserungen bei und im Zusammenhang mit Strahlenvorrichtungen mit geladenen Teilchen
公开(公告)号：EP2442346A1
公开(公告)日：2012-04-18
申请号：EP11184931.1
申请日：2011-10-12
申请人： Carl Zeiss NTS Limited
发明人： Bean, Stewart John
IPC分类号： H01J37/26 , H01J37/30
CPC分类号： H01J37/28 , H01J37/18 , H01J2237/022 , H01J2237/1415 , H01J2237/188 , H01J2237/2608
摘要： In a charged particle beam device, such as an electron microscope, a beam generating means (101) generates a focussed charged particle beam e- that is incident on a specimen (104) in a specimen chamber (102) which holds the specimen in a gaseous environment. A pressure limiting aperture (144) provides partial gaseous isolation of the specimen chamber from the beam generating means, and is located in a lens (114) of the latter. The device includes a conduit, such as an intermediate chamber (132) in the lens, through which, in use, gas is supplied to set up a flow of gas from the region of the lens towards the specimen, thereby to prevent material released from the specimen from impinging on the pressure limiting aperture, to prevent contamination of the latter. The device can be used in a method of scanning a specimen with a charged particle beam, for example in a method of electron microscopy.
摘要翻译：在诸如电子显微镜的带电粒子束装置中，光束产生装置（101）产生聚焦的带电粒子束e，其入射在样本室（102）中的样本（104）上，样本室（102）将样本保持在气体环境。压力限制孔（144）提供样品室与束发生装置的部分气体隔离，并且位于后者的透镜（114）中。该装置包括导管，例如透镜中的中间室（132），在使用中通过该导管供应气体以从透镜区域朝向试样建立气体流，从而防止材料从试样撞击压力限制孔，防止后者污染。该装置可以用于以带电粒子束扫描样品的方法，例如在电子显微镜的方法中。

6. 发明授权

EP2195822B1 IONISATION DETECTOR FOR ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE 有权
标题翻译：电离FOR环境扫描电子显微镜
公开(公告)号：EP2195822B1
公开(公告)日：2011-11-23
申请号：EP08835573.0
申请日：2008-09-24
申请人： Ustav Pristrojové Techniky Av Cr, V.v.i.
发明人： NEDELA, Vilém , JIRÁK, Josef
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/2444 , H01J2237/24475 , H01J2237/2448 , H01J2237/2449 , H01J2237/2608
摘要： lonisation detector of an environmental scanning electron microscope consists of a specimen chamber (1) separated from a pole piece (4) of the microscope with an aperture (2) for pass of a primary electron beam (3) and with a sample holder (6) and at least one detection electrode (7). A flat detection electrode (7) surrounds the sample on the sample plane or under the sample plane and the active side of the detection electrode (7) faces the incoming primary electron beam (3). Electrostatic field defining the trajectories of the secondary electrons is formed with separation electrodes, including a retarding electrode (8), a suction electrode (9) and a ring electrode (11).

7. 发明授权

EP0939969B1 SCANNING ELECTRON MICROSCOPE 失效
标题翻译： RASTERELEKTRONENMIKROSKOP
公开(公告)号：EP0939969B1
公开(公告)日：2010-01-13
申请号：EP97912354.4
申请日：1997-11-14
申请人： Carl Zeiss SMT Limited
发明人： SUDRAUD, Pierre, Résidence de l'Arche , CORBIN, Antoine, Résidence de l'Arche , SAILER, Rainer , BATE, David, John
IPC分类号： H01J37/00
CPC分类号： H01J37/28 , H01J2237/04735 , H01J2237/188 , H01J2237/2003 , H01J2237/24445 , H01J2237/2445 , H01J2237/2608
摘要： A scanning electron microscope has means (1, 3) for generating a beam of electrons which is scanned over a specimen (11) held within a holder (12) in a chamber (5) which contains a gaseous medium. A negative potential is applied to the holder (12) so as to generate an electric field which accelerates secondary electrons, formed by the interaction of the primary beam with the specimen (11), in a direction away from the specimen surface and into a collision zone (21) in the chamber. In that zone, the accelerated secondary electrons collide with gas molecules of the gaseous medium, thereby initiating a cascade of collisions which, in effect, amplifies the secondary electron signal. That signal (which may take the form of photons generated as a result of the collisions) is detected by detecting means (10, 7), such as a photo-multiplier.

8. 发明公开

EP2108947A2 Apparatus and method for inspection 有权
标题翻译： Vorrichtung und Verfahren zur Inspektion
公开(公告)号：EP2108947A2
公开(公告)日：2009-10-14
申请号：EP08254165.7
申请日：2008-12-24
申请人： JEOL Ltd.
发明人： Nishiyama, Hidetoshi
IPC分类号： G01N23/22
CPC分类号： G01N23/2204 , H01J37/20 , H01J37/228 , H01J37/28 , H01J2237/208 , H01J2237/2608 , H01J2237/2808
摘要： Inspection method and apparatus capable of observing or inspecting a liquid sample (20) well. An optical image of the sample and an image using a primary beam such as an electron beam (7) or charged particle beam can be obtained at the same time. The inspection apparatus has a film (32) including a first surface (32a) on which the liquid sample is held, a vacuum chamber (11) for reducing the pressure of an ambient in contact with a second surface (32b) of the film, primary beam irradiation means (1) connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means (4) for detecting a secondary signal produced from a specimen (38) contained in the sample in response to the primary beam irradiation, and optical image acquisition means (27) for obtaining an optical image of the specimen. The primary beam irradiation means and optical image acquisition means are located on opposite sides of the film that acts to block the light.
摘要翻译：能够很好地观察或检查液体样品（20）的检查方法和装置。可以同时获得样品的光学图像和使用诸如电子束（7）或带电粒子束的主光束的图像。该检查装置具有：膜（32），其具有保持液体试样的第一表面（32a），用于降低与膜的第二表面（32b）接触的环境的压力的真空室（11）一次束照射装置（1），与真空室连接，并通过该膜用一次束照射样品;信号检测装置（4），用于检测由样品中包含的试样（38）产生的二次信号，一次束照射和用于获得样本的光学图像的光学图像获取装置（27）。主光束照射装置和光学图像获取装置位于胶片的阻挡光线的两侧。

9. 发明公开

EP2105944A1 Environmental cell for a particle-optical apparatus 审中-公开
标题翻译：用于粒子光学设备的环境单元
公开(公告)号：EP2105944A1
公开(公告)日：2009-09-30
申请号：EP08153482.8
申请日：2008-03-28
申请人： FEI Company
发明人： Buijsse, Bart
IPC分类号： H01J37/02 , H01J37/16 , H01J37/28 , H01J37/305
CPC分类号： H01J37/023 , H01J37/16 , H01J37/28 , H01J37/3056 , H01J2237/188 , H01J2237/2003 , H01J2237/2608 , H01J2237/31749
摘要： The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.
摘要翻译：本发明涉及一种用于例如环境中的环境细胞。电子显微镜。环境单元显示用于将由电子显微镜产生的光束传递到放置在环境单元内的样品（6）的孔（15）。根据本发明的环境单元的特征在于，一部分环境单元（14）对诸如背散射电子或X射线的二次辐射是透明的。这使得能够通过放置在环境单元外部的检测器来检测这种辐射，并因此能够更简单地构造单元。

10. 发明公开

EP2105943A2 Environmental cell for a particle-optical apparatus 有权
标题翻译： Proilelle mit kontrollierter Umgebungfüreinen Teilchenoptischen Apparat
公开(公告)号：EP2105943A2
公开(公告)日：2009-09-30
申请号：EP09156379.1
申请日：2009-03-27
申请人： FEI COMPANY
发明人： Buijsse, Bart
IPC分类号： H01J37/02 , H01J37/16 , H01J37/28 , H01J37/305
CPC分类号： H01J37/023 , H01J37/16 , H01J37/28 , H01J37/3056 , H01J2237/188 , H01J2237/2003 , H01J2237/2608 , H01J2237/31749
摘要： The invention relates to an environmental cell for use in e.g. an electron microscope. The environmental cell shows an aperture (15) for passing the beam produced by the electron microscope to a sample (6) placed inside the environmental cell. The environmental cell according to the invention is characterized in that a part of the environmental cell (14) is transparent to secondary radiation such as back-scattered electrons or X-rays. This enables the detection of this radiation by a detector placed outside the environmental cell and thus a much simpler construction of the cell.
摘要翻译：本发明涉及一种用于例如环境的环境细胞。电子显微镜。环境细胞显示用于将由电子显微镜产生的光束传递到放置在环境细胞内的样品（6）的孔（15）。根据本发明的环境细胞的特征在于，一部分环境细胞（14）对于二次辐射如背散电子或X射线是透明的。这使得能够通过放置在环境单元外部的检测器来检测该辐射，从而使得单元的结构更简单。

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