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1. 发明公开

EP2595172A1 IMAGE PROCESSING METHOD, IMAGE PROCESSING SYSTEM, AND X-RAY COMPUTED TOMOGRAPHY SYSTEM 有权
标题翻译：比利时 - CT系统的BILDVERARBEITUNGSVERFAHREN，BILDVERARBEITUNGSSYSTEM
公开(公告)号：EP2595172A1
公开(公告)日：2013-05-22
申请号：EP11806842.8
申请日：2011-07-14
申请人： Hitachi High-Technologies Corporation
发明人： KUBO Takashi , HASHIMOTO Takahito , YAGUCHI Toshie , BABA Norio
IPC分类号： H01J37/22 , G01N23/04
CPC分类号： G06T11/003 , G01N23/046 , G01N2223/419 , G06T11/006 , G06T2211/424 , H01J37/20 , H01J37/222 , H01J37/26 , H01J2237/20207
摘要： Disclosed is image processing: that significantly reduces false images and missing images in reconstructed images, improves reconstruction accuracy; and that can be applied to objects to be observed that are composed of a plurality of components, and to samples having an unknown number of structural compositions. An image processing device is provided with: a means , in an electron microscope having an imaging device and a a tilting device that tilts an object to be observed, for tilting said object to be observed in an angle step, and storing the obtained tiled image; a means for aligning the position of said tilted images; a means for generating an initial reconstructed image based on said tilted images; a means for projecting said initial reconstructed image at arbitrarily-defined angles and generating a plurality of projected images; a means for calculating errors in the corresponding pixels between the tilted images and the projection images; a means for determining a processing priority from said errors; a means for calculating the density for each gradation level; a means for determining the processing priority from said densities; and a means for changing the density value of each pixel in the initial reconstructed image in each of the above-mentioned priorities.
摘要翻译：公开了图像处理：显着减少重建图像中的伪图像和丢失图像，提高重建精度; 并且可以应用于由多个部件组成的观察对象和具有未知数量的结构组成的样品。一种图像处理装置具有：具有成像装置的电子显微镜和倾斜被观察物体的倾斜装置的装置，用于以角度步骤倾斜所述被观察物体，并存储所获得的平铺图像; 用于对准所述倾斜图像的位置的装置; 用于基于所述倾斜图像生成初始重建图像的装置; 用于以任意定义的角度投影所述初始重建图像并产生多个投影图像的装置; 用于计算倾斜图像和投影图像之间的对应像素中的误差的装置; 用于从所述错误确定处理优先级的装置; 用于计算每个灰度级的密度的装置; 用于从所述密度确定处理优先级的装置; 以及用于在每个上述优先级中改变初始重建图像中的每个像素的浓度值的装置。

2. 发明授权

EP2595172B1 IMAGE PROCESSING METHOD, IMAGE PROCESSING SYSTEM, AND X-RAY COMPUTED TOMOGRAPHY SYSTEM 有权
标题翻译：图像处理，图像处理系统和X射线CT系统
公开(公告)号：EP2595172B1
公开(公告)日：2016-04-13
申请号：EP11806842.8
申请日：2011-07-14
申请人： Hitachi High-Technologies Corporation
发明人： KUBO Takashi , HASHIMOTO Takahito , YAGUCHI Toshie , BABA Norio
IPC分类号： H01J37/22 , G01N23/04 , G06T11/00
CPC分类号： G06T11/003 , G01N23/046 , G01N2223/419 , G06T11/006 , G06T2211/424 , H01J37/20 , H01J37/222 , H01J37/26 , H01J2237/20207

3. 发明授权

EP2495748B1 CHARGED PARTICLE RADIATION APPARATUS, AND METHOD FOR DISPLAYING THREE-DIMENSIONAL INFORMATION IN CHARGED PARTICLE RADIATION APPARATUS 有权
标题翻译：带电粒子辐射装置和用于在带电粒子辐射装置中显示三维信息的方法
公开(公告)号：EP2495748B1
公开(公告)日：2017-12-20
申请号：EP10826621.4
申请日：2010-10-22
申请人： Hitachi High-Technologies Corporation
发明人： YAGUCHI Toshie , NAGAKUBO Yasuhira , AZUMA Junzo , WATABE Akira
IPC分类号： H01J37/18 , H01J37/20 , H01J37/26 , G01N23/225 , G01N23/22
CPC分类号： H01J37/26 , G01N23/2204 , G01N23/2251 , H01J37/18 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/24578 , H01J2237/2608 , H01J2237/2611
摘要： Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.

4. 发明公开

EP2495748A1 CHARGED PARTICLE RADIATION APPARATUS, AND METHOD FOR DISPLAYING THREE-DIMENSIONAL INFORMATION IN CHARGED PARTICLE RADIATION APPARATUS 有权
标题翻译：辐射装置用于显示三维信息在辐射装置用于带电粒子带电粒子和方法
公开(公告)号：EP2495748A1
公开(公告)日：2012-09-05
申请号：EP10826621.4
申请日：2010-10-22
申请人： Hitachi High-Technologies Corporation
发明人： YAGUCHI Toshie , NAGAKUBO Yasuhira , AZUMA Junzo , WATABE Akira
IPC分类号： H01J37/20 , G01N1/28 , G01N23/225 , H01J37/24
CPC分类号： H01J37/26 , G01N23/2204 , G01N23/2251 , H01J37/18 , H01J37/20 , H01J2237/006 , H01J2237/2003 , H01J2237/24578 , H01J2237/2608 , H01J2237/2611
摘要： Disclosed is a charged particle radiation apparatus capable of capturing a change in a sample due to gaseous atmosphere, light irradiation, heating or the like without exposing the sample to atmosphere. The present invention relates to a sample holder provided with a sample stage that is rotatable around a rotation axis perpendicular to an electron beam irradiation direction, the sample holder being capable of forming an airtight chamber around the sample stage. A sample is allowed to chemically react in any atmosphere, and three-dimensional analysis on the reaction is enabled. A sample liable to change in atmosphere can be three-dimensionally analyzed without exposing the sample to the atmosphere.
摘要翻译：公开的是能够捕获由于气态气氛，光照射，加热或不将样品暴露于大气等的样品中的改变的带电粒子射线装置。本发明涉及一种设置有样品台上的样品保持器所做的是在电子束照射方向，将样品保持器能够在围绕样品台气密室形成的围绕旋转轴线可旋转的基座垂直。样品被允许在化学任何气氛发生反应，并且被使能对反应进行三维分析。容易在大气来改变样品可以是三维分析，而不必使样品暴露于大气中。

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