基本信息:
- 专利标题： SCANNING ELECTRON MICROSCOPE
- 专利标题（中）：RASTERELEKTRONENMIKROSKOP
- 申请号：EP97912354.4 申请日：1997-11-14
- 公开(公告)号：EP0939969B1 公开(公告)日：2010-01-13
- 发明人： SUDRAUD, Pierre, Résidence de l'Arche , CORBIN, Antoine, Résidence de l'Arche , SAILER, Rainer , BATE, David, John
- 申请人： Carl Zeiss SMT Limited
- 申请人地址： 511 Coldhams Lane Cambridge Cambridgeshire CB1 3JS GB
- 专利权人： Carl Zeiss SMT Limited
- 当前专利权人： Carl Zeiss SMT Limited
- 当前专利权人地址： 511 Coldhams Lane Cambridge Cambridgeshire CB1 3JS GB
- 代理机构： Roberts, David Leslie
- 优先权： GB9623768 19961115
- 国际公布： WO1998022971 19980528
- 主分类号： H01J37/00
- IPC分类号： H01J37/00
摘要：
A scanning electron microscope has means (1, 3) for generating a beam of electrons which is scanned over a specimen (11) held within a holder (12) in a chamber (5) which contains a gaseous medium. A negative potential is applied to the holder (12) so as to generate an electric field which accelerates secondary electrons, formed by the interaction of the primary beam with the specimen (11), in a direction away from the specimen surface and into a collision zone (21) in the chamber. In that zone, the accelerated secondary electrons collide with gas molecules of the gaseous medium, thereby initiating a cascade of collisions which, in effect, amplifies the secondary electron signal. That signal (which may take the form of photons generated as a result of the collisions) is detected by detecting means (10, 7), such as a photo-multiplier.