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1. 发明授权

EP1632980B1 Scanning particle beam instrument 有权
标题翻译：粒子束扫描仪
公开(公告)号：EP1632980B1
公开(公告)日：2012-01-18
申请号：EP05018964.6
申请日：2005-08-31
申请人： Carl Zeiss NTS Limited
发明人： Armit, Andrew Philip
IPC分类号： H01J37/244 , H01J37/28 , H01J37/26 , H04N5/57
CPC分类号： H01J37/244 , H01J37/265 , H01J37/28 , H01J2237/043 , H01J2237/1501 , H01J2237/2487 , H01J2237/2826

2. 发明公开

EP2442346A1 Improvements in and relating to charged particle beam devices 有权转让
标题翻译： Verbesserungen bei und im Zusammenhang mit Strahlenvorrichtungen mit geladenen Teilchen
公开(公告)号：EP2442346A1
公开(公告)日：2012-04-18
申请号：EP11184931.1
申请日：2011-10-12
申请人： Carl Zeiss NTS Limited
发明人： Bean, Stewart John
IPC分类号： H01J37/26 , H01J37/30
CPC分类号： H01J37/28 , H01J37/18 , H01J2237/022 , H01J2237/1415 , H01J2237/188 , H01J2237/2608
摘要： In a charged particle beam device, such as an electron microscope, a beam generating means (101) generates a focussed charged particle beam e- that is incident on a specimen (104) in a specimen chamber (102) which holds the specimen in a gaseous environment. A pressure limiting aperture (144) provides partial gaseous isolation of the specimen chamber from the beam generating means, and is located in a lens (114) of the latter. The device includes a conduit, such as an intermediate chamber (132) in the lens, through which, in use, gas is supplied to set up a flow of gas from the region of the lens towards the specimen, thereby to prevent material released from the specimen from impinging on the pressure limiting aperture, to prevent contamination of the latter. The device can be used in a method of scanning a specimen with a charged particle beam, for example in a method of electron microscopy.
摘要翻译：在诸如电子显微镜的带电粒子束装置中，光束产生装置（101）产生聚焦的带电粒子束e，其入射在样本室（102）中的样本（104）上，样本室（102）将样本保持在气体环境。压力限制孔（144）提供样品室与束发生装置的部分气体隔离，并且位于后者的透镜（114）中。该装置包括导管，例如透镜中的中间室（132），在使用中通过该导管供应气体以从透镜区域朝向试样建立气体流，从而防止材料从试样撞击压力限制孔，防止后者污染。该装置可以用于以带电粒子束扫描样品的方法，例如在电子显微镜的方法中。

3. 发明授权

EP2393104B1 Charged particle beam device 有权转让
标题翻译：粒子束
公开(公告)号：EP2393104B1
公开(公告)日：2014-03-19
申请号：EP11179620.7
申请日：2007-01-08
申请人： Carl Zeiss NTS Limited
发明人： Subbs, Tim Robert
IPC分类号： H01J37/26 , H01J37/30 , H01J37/28
CPC分类号： H01J37/265 , H01J37/304 , H01J2237/28 , H01J2237/31749

4. 发明公开

EP2573796A1 Particle beam system having a hollow light guide 有权转让
标题翻译： Teilchenstrahlsystem mit hohlem Lichtleiter
公开(公告)号：EP2573796A1
公开(公告)日：2013-03-27
申请号：EP11007726.0
申请日：2011-09-22
申请人： Carl Zeiss NTS Limited
发明人： Bean, Stewart , Astley, Mike
IPC分类号： H01J37/22
CPC分类号： H01J37/226 , H01J37/228 , H01J2237/2445 , H01J2237/2808
摘要： A system having a particle beam path and a light beam path, wherein the system comprises: a particle optical system comprising: a charged particle beam source (40) configured to generate a charged particle beam traveling along the particle beam path; and an objective lens (11), which is configured to focus the particle beam onto an object plane (OP) of the particle optical system; wherein the system further comprises a photosensitive detector (29), wherein the system is configured such that the light beam path extends from the object plane to the photosensitive detector.
摘要翻译：一种具有粒子束路径和光束路径的系统，其中所述系统包括：粒子光学系统，包括：带电粒子束源（40），被配置为产生沿所述粒子束路径行进的带电粒子束; 以及物镜（11），其被配置为将所述粒子束聚焦到所述粒子光学系统的物平面（OP）上; 其中所述系统还包括光敏检测器（29），其中所述系统被配置为使得所述光束路径从所述物平面延伸到所述光敏检测器。

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