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41. 发明授权

EP1332510B1 REAL TIME MONITORING FOR SIMULTANEOUS IMAGING AND EXPOSURE IN CHARGED PARTICLE BEAM SYSTEMS 有权
标题翻译：为方便系统PICTURE法同时和曝光实时监测带电粒子
公开(公告)号：EP1332510B1
公开(公告)日：2011-11-16
申请号：EP01973743.6
申请日：2001-09-20
申请人： FEI COMPANY
发明人： CHAO, Peter, S. , ROSENBERG, Steve
IPC分类号： H01J37/30
CPC分类号： H01J37/3005 , H01J37/304 , H01J2237/30466 , H01J2237/3175
摘要： A beam processing system, such as a focused ion beam or an electron beam (232) system addressing an arbitrary series of points and receives data from the point in real time. The data can be used to image or to alter the processing, even within a single dwell period, thereby allowing closed feedback loop for processing. A delay calculator (324) automatically determines the delay between instructing the system to move the beam and detecting a signal from the work piece surface so that the detector signal can be matched with the location on the work piece (239) at which the signal was generated.

42. 发明公开

EP2367195A2 Measurement and endpointing of sample thickness 有权
标题翻译： Messung der Probendicke und Endpunkbestimmung
公开(公告)号：EP2367195A2
公开(公告)日：2011-09-21
申请号：EP11165381.2
申请日：2009-11-02
申请人： FEI Company
发明人： Young, Richard , Peterson, Brennan , Moriarty, Michael , Schampers, Ruud
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.
摘要翻译：一种改进的TEM样品创建方法。在双光束FIB / SEM中使用SEM-STEM检测器允许使用FIB对样品进行稀释，而STEM信号用于监测样品厚度。本发明的一个优选实施例可以通过使用可重复且适合自动化的精确终点检测方法来测量S / TEM样品的厚度或产生S / TEM样品。优选实施例还可以在TEM薄片创建期间实现自动终点，并且在手动稀疏期间向用户提供关于样品厚度的直接反馈。因此，本发明的优选实施例提供了用于终止样品稀释的改进方法以及部分或全部自动化终点以提高TEM样品产生的生产量和再现性的方法。

43. 发明公开

EP2351062A2 MEASUREMENT AND ENDPOINTING OF SAMPLE THICKNESS 审中-公开
标题翻译：试样厚度测量和终点测定
公开(公告)号：EP2351062A2
公开(公告)日：2011-08-03
申请号：EP09824231.6
申请日：2009-11-02
申请人： FEI Company
发明人： YOUNG, Richard J. , PETERSON, Brennan , MORIARTY, Michael , SCHAMPERS, Rudolf Johannes Peter Gerardus
IPC分类号： H01J37/00 , H01J37/26
CPC分类号： H01J37/3056 , G01N1/286 , H01J37/304 , H01J2237/24455 , H01J2237/30466 , H01J2237/31745 , H01J2237/31749
摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.

44. 发明公开

EP2257853A2 METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES 有权转让
标题翻译：一种用于处理一个对象，具有微型化结构
公开(公告)号：EP2257853A2
公开(公告)日：2010-12-08
申请号：EP09715092.4
申请日：2009-02-24
申请人： Carl Zeiss SMS GmbH
发明人： BUDACH, Michael , BRET, Tristan , EDINGER, Klaus , HOFMANN, Thorsten
IPC分类号： G03F1/00
CPC分类号： G03F1/74 , C23C16/047 , H01J37/304 , H01J37/3056 , H01J2237/24495 , H01J2237/30466 , H01J2237/30483 , H01J2237/31732 , H01J2237/31744
摘要： The present invention relates to a method for processing an object with miniaturized structures, having the steps of : feeding a reaction gas onto a surface of the object; processing the object by directing an energetic beam onto a processing site in a region, which is to be processed, on the surface of the object, in order to deposit material on the object or to remove material from the object, detecting interaction products of the beam with the object, and deciding whether the processing of the object must be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the beam with the object, the region to be processed being subdivided into a number of surface segments, and the interaction products detected upon the beam striking regions of the same surface segment being integrated to form a total signal in order to determine whether processing of the object must be continued or can be terminated.

45. 发明公开

EP2068343A1 Charged particle source with automated tip formation 有权
标题翻译： Quellefürgeladene Teilchen mit automatischer Spitzenformierung
公开(公告)号：EP2068343A1
公开(公告)日：2009-06-10
申请号：EP07022031.4
申请日：2007-11-13
申请人： ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
发明人： Winkler, Dieter , Weigel, Udo , Grimm, Stefan
IPC分类号： H01J37/073 , H01J37/08 , H01J37/26 , H01J37/304 , H01J9/00 , H01J27/26
CPC分类号： H01J37/073 , H01J27/26 , H01J37/08 , H01J37/265 , H01J37/304 , H01J2237/06341 , H01J2237/0805 , H01J2237/0807 , H01J2237/30466 , H01J2237/30477 , H01J2237/31749
摘要： A charged particle beam device is described. The device includes an emitter unit including an emitter tip (13); a voltage supply unit (222) adapted for providing a stable voltage to generate a stable extraction field at the emitter tip; a pulsed voltage supply member (224, 228) adapted for providing a pulsed voltage to generate a pulsed extraction field on top of the stable extraction field; a measuring unit (142; 142', 142") for measuring an emitter characteristic; and a control unit (130) adapted for receiving a signal from the measuring unit and for control of the pulsed voltage supply member.
摘要翻译：描述带电粒子束装置。该装置包括发射器单元，其包括发射极尖端（13）; 电压供应单元（222），适于提供稳定的电压以在发射极尖端处产生稳定的提取场; 脉冲电压供应构件（224,228），其适于提供脉冲电压以在所述稳定提取场的顶部产生脉冲提取场; 用于测量发射极特性的测量单元（142; 142'，142“）;以及适于接收来自测量单元的信号并用于控制脉冲电压供应构件的控制单元（130）。

46. 发明公开

EP2041770A1 VERFAHREN UND VORRICHTUNG ZUR BEARBEITUNG VON WERKSTÜCKEN 有权转让
标题翻译：方法和设备处理WORKPIECES
公开(公告)号：EP2041770A1
公开(公告)日：2009-04-01
申请号：EP07725671.7
申请日：2007-05-30
申请人： EADS Deutschland GmbH , pro-beam AG & Co. KGaA
发明人： FRIEDBERGER, Alois , LÖWER, Thorsten , FRICKE, Sören , SCHMID, Ulrich
IPC分类号： H01J37/256 , H01J37/304 , H01J37/305 , G01N23/225 , B01J19/08 , H01L21/66
CPC分类号： H01J37/3056 , H01J37/244 , H01J37/256 , H01J37/3045 , H01J2237/2561 , H01J2237/2807 , H01J2237/30466
摘要： X-rays (8) are generated in a workpiece (3) by means of an electron beam (4), said x-rays emerging on the rear side (3b) of the workpiece in sufficiently thin areas of the workpiece (3) and being detected by means of an x-ray radiation sensor (5). The surface structure on both sides and the local material thickness can be determined by means of the x-ray intensity and the momentaneous irradiation of the electron beam (4). On the basis of such values, workpieces and/or workpiece machining devices can be adjusted, and the vertical material removal controlled in a material-removing workpiece-machining device.

47. 发明公开

EP1732102A2 Method and apparatus for preparing specimen 有权
标题翻译： Verfahren und Vorrichtung zur Herstellung von Proben
公开(公告)号：EP1732102A2
公开(公告)日：2006-12-13
申请号：EP06252156.2
申请日：2006-04-21
申请人： JEOL Ltd.
发明人： Yoshioka, Tadanori , Kawatsu, Kiyoshi , Miyao, Hirofumi
IPC分类号： H01J37/304 , H01J37/305 , G01N1/28
CPC分类号： G01N1/32 , H01J37/304 , H01J37/3056 , H01J2237/30466 , H01J2237/3174
摘要： A method and apparatus for reliably preparing a good thin-film specimen (3) adapted for TEM (transmission electron microscopy) observation is offered. The apparatus has a high-brightness pixel extraction unit (10) for extracting high-brightness pixels (P nm ) which form a specimen image taken by an imaging unit (8) and which have intensities becoming greater than a given threshold value as the specimen is thinned. The apparatus further includes a decision unit (11) that makes a decision as to whether the high-brightness pixels extracted by the high-brightness pixel extraction unit form a continuous sequence of pixels whose number is in excess of a given number on the specimen image. If the decision is affirmative, the decision unit sends a signal to an ion gun control unit (12) to stop the ion-beam irradiation of the specimen.
摘要翻译：提供了一种用于可靠地制备适用于TEM（透射电子显微镜）观察的良好薄膜试样（3）的方法和装置。该装置具有高亮度像素提取单元（10），用于提取形成由成像单元（8）拍摄的样本图像并且具有大于给定阈值的强度的高亮度像素（Pnm），作为样本变薄了该装置还包括判定单元（11），判定由高亮度像素提取单元提取的高亮度像素是否在样本图像上形成数量超过给定数量的连续的像素序列。如果判定为肯定，判定单元向离子枪控制单元（12）发送信号，停止对样本的离子束照射。

48. 发明授权

EP0687897B1 Method for making specimen 失效
标题翻译：样品制备方法
公开(公告)号：EP0687897B1
公开(公告)日：2003-09-10
申请号：EP95109035.6
申请日：1995-06-12
申请人： Hitachi, Ltd.
发明人： Itoh, Fumikazu , Nakata, Toshihiko , Ishitani, Tohru , Shimase, Akira , Yamaguchi, Hiroshi , Kamimura, Takashi
IPC分类号： G01N1/00 , H01J37/304
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/226 , H01J37/3005 , H01J37/304 , H01J2237/30466 , H01J2237/3114 , H01J2237/31745

49. 发明公开

EP0687897A1 Method for making specimen and apparatus thereof 失效
标题翻译： Verfahren und Vorrichtung zur Probenherstellung
公开(公告)号：EP0687897A1
公开(公告)日：1995-12-20
申请号：EP95109035.6
申请日：1995-06-12
申请人： HITACHI, LTD.
发明人： Itoh, Fumikazu , Nakata, Toshihiko , Ishitani, Tohru , Shimase, Akira , Yamaguchi, Hiroshi , Kamimura, Takashi
IPC分类号： G01N1/00 , H01J37/304
CPC分类号： H01J37/3056 , G01N1/32 , H01J37/226 , H01J37/3005 , H01J37/304 , H01J2237/30466 , H01J2237/3114 , H01J2237/31745
摘要： The present invention is intended to provide a method and an apparatus for making a specimen for use in observation through a transparent electron microscope, including a step for milling part of the specimen into a thin film part, which can be observed through a transparent electron microscope, by scanning and irradiating a focused ion beam onto the specimen, a step for observing a mark for detection of position provided on the specimen as a secondary charged particle image by scanning and irradiating a charged particle beam onto the specimen without irradiating the charged particle beam onto the portion to be milled into the thin film part during the step for milling, and a step for compensating positional drift of the focused ion beam during said step for milling in accordance with a result of the observation.
The present invention provides an effect to strikingly raise the efficiency of TEM observation since a specimen for use in TEM observation can be made by precisely milling a thin film part of the specimen even though positional drift of the focused ion beam is caused during milling.
摘要翻译：本发明旨在提供一种通过透明电子显微镜制造用于观察的样本的方法和装置，包括将部分样品切成薄膜部分的步骤，其可以通过透明电子显微镜观察通过将聚焦离子束扫描并照射到样本上，通过扫描并将带电粒子束照射到样本上而不照射带电粒子束来观察用于检测在样本上提供的位置的标记作为二次带电粒子图像的步骤在用于研磨的步骤期间在待研磨到薄膜部分的部分上，以及根据观察结果在所述铣削步骤期间补偿聚焦离子束的位置漂移的步骤。本发明提供了显着提高TEM观察效率的效果，因为即使在研磨中发生聚焦离子束的位置漂移，也可以通过精确地研磨试样的薄膜部分来进行TEM观察用的试样。

50. 发明授权

EP0468897B1 Procédé de détermination de l'élimination complète d'une couche mince sur un substrat non plan 有权
标题翻译：一种用于确定一个非平面基片上的薄膜的完全烧蚀法。
公开(公告)号：EP0468897B1
公开(公告)日：1995-11-15
申请号：EP91420256.9
申请日：1991-07-16
申请人： FRANCE TELECOM
发明人： Galvier, Jean , Gayet, Philippe , Tissier, Annie
IPC分类号： H01J37/32 , G01B11/06 , H01L21/321 , H01L21/66 , H01L21/768
CPC分类号： B24B37/013 , H01J37/32935 , H01J37/32963 , H01J2237/30466 , H01J2237/334 , H01L21/32137 , H01L21/76877 , H01L22/26

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