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1. 发明授权

EP3249676B1 DUAL-BEAM CHARGED-PARTICLE MICROSCOPE WITH IN SITU DEPOSITION FUNCTIONALITY 有权
公开(公告)号：EP3249676B1
公开(公告)日：2018-10-03
申请号：EP16171645.1
申请日：2016-05-27
申请人： FEI Company
发明人： Mitchels, John , Schampers, Ruud , Hrouzek, Michal , Gardelka, Tomas
IPC分类号： H01J37/28 , H01J37/34 , C23C14/35
CPC分类号： H01J37/3405 , C23C14/35 , H01J37/06 , H01J37/08 , H01J37/18 , H01J37/20 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/32623 , H01J37/3464 , H01J2237/3137
摘要： A charged-particle microscope M, comprising a vacuum chamber in which are provided: - A specimen holder 7 for holding a specimen in an irradiation position Pi; - A particle-optical column 1;31, for producing a charged particle beam 3';33 and directing it so as to irradiate the specimen; - A detector 19, for detecting a flux of radiation emanating from the specimen in response to irradiation by said beam, wherein: - Said vacuum chamber comprises an in situ magnetron sputter deposition module D, comprising a magnetron sputter source for producing a vapor stream of target material; - A stage 7,7' is configured to move a sample comprising at least part of said specimen between said irradiation position and a separate deposition position Pd at said deposition module; - Said deposition module is configured to deposit a layer of said target material onto said sample when held at said deposition position.

2. 发明公开

EP1879011A3 Method for separating a minute sample from a work piece 有权
标题翻译：一种用于分离的工件的一个小样本方法
公开(公告)号：EP1879011A3
公开(公告)日：2009-09-02
申请号：EP07112014.1
申请日：2007-07-09
申请人： FEI COMPANY
发明人： Schampers, Ruud , Verkleij, Dick , Venema, Sjoerd
IPC分类号： G01N1/28 , H01J37/305 , H01J37/31 , G01N1/32 , G01N1/06
CPC分类号： H01J37/3056 , G01N1/06 , G01N1/286 , G01N1/32 , H01J2237/31732 , H01J2237/31745
摘要： The invention pertains to a method for separating a minute sample (1) from a work piece (2). Such a method is routinely used in the semiconductor industry to obtain samples from wafers to be inspected in a TEM. It occurred to the inventor that approximately 20% of the obtained samples could not be properly finished (thinned) due to a misalignment of specimen carrier (6) and sample. It turned out that this misalignment is caused by the specimen carrier contacting the sample prior to welding. By not contacting the sample while welding, but leaving a small gap between specimen carrier and sample, this misalignment is avoided. To avoid movement of the specimen carrier during welding, due to e.g. vibration, the specimen carrier can be landed on the wafer on a position (8) close to the sample.

3. 发明授权

EP2626886B1 Forming a vitrified sample for an electron microscopy 有权
标题翻译： Proenfürein Elektronenmikroskop的Formen einer schockgefrorenen
公开(公告)号：EP2626886B1
公开(公告)日：2017-04-05
申请号：EP13154508.9
申请日：2013-02-08
申请人： FEI COMPANY
发明人： Mulders, Johannes , Schampers, Ruud , Piet, Trompenaars
IPC分类号： H01J37/28 , G01N1/42
CPC分类号： H01J37/28 , G01N1/42 , H01J2237/006 , H01J2237/31745

4. 发明授权

EP2685234B1 Forming an electron microscope sample from high-pressure frozen material 有权
标题翻译：形成高压的冷冻材料的电子显微镜的样品
公开(公告)号：EP2685234B1
公开(公告)日：2014-12-17
申请号：EP13176233.8
申请日：2013-07-12
申请人： FEI COMPANY
发明人： Schampers, Ruud , Hayles, Michael , De Winter, Matthijs , Schneijdenberg, Chris
IPC分类号： G01N1/42 , G01N1/28
CPC分类号： B23K15/08 , G01N1/06 , G01N1/42 , G01N2001/2873

5. 发明公开

EP2765591A1 Sample preparation stage 有权
标题翻译： Probenvorbereitungshalter
公开(公告)号：EP2765591A1
公开(公告)日：2014-08-13
申请号：EP13154537.8
申请日：2013-02-08
申请人： FEI Company
发明人： Persoon, Johannes , Van den Boogaard, Ron , Engelen, Andreas , Schampers, Ruud , Hayles, Michael
IPC分类号： H01J37/20 , G01N1/06
CPC分类号： H01J37/20 , G01N2001/2873 , H01J37/3056 , H01J2237/2001 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/31745
摘要： Described is a system and method for in situ sample preparation and imaging. The system includes a multi-axis stage 100 having a bulk stage 110 and a grid stage 150 with various degrees of freedom to allow for sample preparation. In some embodiments, a focused ion beam system is used to prepare a lamella on the bulk stage 110. The lamella can then be transferred to the grid stage 150 from the bulk stage 110 without needing to move the multi-axis stage 100 from the focused ion beam system.
摘要翻译：描述了用于原位样品制备和成像的系统和方法。该系统包括具有大块台110和具有不同自由度以允许样品制备的网格台150的多轴台100。在一些实施例中，使用聚焦离子束系统来在体台110上制备薄片。然后可以将薄片从大体积台110转移到网格台150，而不需要将多轴台100从聚焦离子束系统。

6. 发明授权

EP2765591B1 Sample preparation stage 有权
标题翻译：样品制备架
公开(公告)号：EP2765591B1
公开(公告)日：2016-07-13
申请号：EP13154537.8
申请日：2013-02-08
申请人： FEI Company
发明人： Persoon, Johannes , Van den Boogaard, Ron , Engelen, Andreas , Schampers, Ruud , Hayles, Michael
IPC分类号： H01J37/20 , G01N1/06 , H01J37/305
CPC分类号： H01J37/20 , G01N2001/2873 , H01J37/3056 , H01J2237/2001 , H01J2237/202 , H01J2237/204 , H01J2237/206 , H01J2237/208 , H01J2237/31745

7. 发明授权

EP2706342B1 Cooperating capillary and cap for use in a high-pressure freezer 有权
标题翻译：相互作用毛细管和闭合用在高压冷冻
公开(公告)号：EP2706342B1
公开(公告)日：2015-07-08
申请号：EP12183821.3
申请日：2012-09-11
申请人： FEI COMPANY
发明人： Schampers, Ruud , Persoon, Hans , Engelen, Andre
IPC分类号： G01N1/42
CPC分类号： G01N1/30 , G01N1/42

8. 发明公开

EP2813835A1 Method of welding a frozen aqueous sample to a microprobe 有权
标题翻译：探索一个黑社会主义者
公开(公告)号：EP2813835A1
公开(公告)日：2014-12-17
申请号：EP13172127.6
申请日：2013-06-14
申请人： FEI COMPANY
发明人： Schampers, Ruud , Persoon, Johannes , Engelen, Andreas
IPC分类号： G01N1/28 , G01N1/42 , G02B21/32 , H01J37/20
CPC分类号： H01J37/20 , G01N1/28 , G01N1/42 , G02B21/32 , H01J37/26 , H01J37/315 , H01J2237/002 , H01J2237/2065 , H01J2237/31744 , H01J2237/31745
摘要： The invention relates to a method of welding a vitreous biological sample at a temperature below the glass transition temperature of approximately -137°C to a micromanipulator, also kept at a temperature below the glass transition temperature. Where prior art methods used IBID with, for example, propane, or a heated needle (heated resistively or by e/g/ laser), the invention uses a vibrating needle to locally melt the sample. By stopping the vibration, the sample freezes to the micromanipulator. The heat capacity of the heated parts is small, and the amount of material that stays in a vitreous condition thus large.
摘要翻译：本发明涉及一种将玻璃体生物样品在低于约-137℃的玻璃化转变温度的温度下焊接到也保持在低于玻璃化转变温度的温度下的显微操纵器的方法。在现有技术方法中使用IBID与例如丙烷或加热的针（电阻加热或通过e / g /激光）进行比较，本发明使用振动针来局部熔化样品。通过停止振动，样品冻结到显微操纵器。加热部件的热容量小，因此玻璃状态下的材料量变大。

9. 发明公开

EP2706342A1 Cooperating capillary and cap for use in a high-pressure freezer 有权
标题翻译： ZusammenwirkendesKapillarröhrchenund Verschluss zur Verwendung in einemHochdrucktiefkühlgerät
公开(公告)号：EP2706342A1
公开(公告)日：2014-03-12
申请号：EP12183821.3
申请日：2012-09-11
申请人： FEI COMPANY
发明人： Schampers, Ruud , Persoon, Hans , Engelen, Andre
IPC分类号： G01N1/42
CPC分类号： G01N1/30 , G01N1/42
摘要： Assembly of cooperating capillary (1) and cap (2) for containing an aqueous solution (3) in an inner volume of the capillary, the assembly equipped to be used in a high pressure freezer in which the aqueous solution is frozen at a high pressure to form an amorphous frozen sample at a cryogenic temperature, the inner volume of the capillary having a diameter of less than 500 µm, preferably less than 350 µm, and the cap equipped to form a closure to one end of the capillary, characterized in that the part of the cap that is in contact with the inner volume of the capillary when the cap forms a closure, shows an indent, as a result of which the cap, after freezing the aqueous solution, can be removed from the capillary and a free standing pillar of frozen aqueous material extends from the capillary.
As a result of this the metal of the capillary need not be cut and related artifacts are eliminated. Further inspection is preferably done using a focused ion beam forming block-face or lamella and an electron beam for the inspection of the sample.
摘要翻译：用于在毛细管的内部容积中含有水溶液（3）的配合毛细管（1）和盖（2）的组装，该组件装备用于高压冷冻机中，其中水溶液在高压下冷冻在低温下形成无定形冷冻样品，毛细管的内部体积具有小于500μm，优选小于350μm的直径，并且帽被设置成在毛细管的一端形成封闭物，其特征在于，当盖形成闭合件时，与毛细管的内部容积接触的帽的部分显示凹口，结果是在冷冻水溶液之后，帽可以从毛细管中除去，并且自由冷冻水性材料的立柱从毛细管延伸。作为其结果，毛细管的金属不需要被切割并消除相关的伪像。优选使用聚焦离子束形成阻挡面或薄片和用于检查样品的电子束进行进一步的检查。

10. 发明公开

EP2685233A1 Forming an electron microscope sample from high-pressure frozen material 审中-公开
标题翻译：用高压冷冻材料形成电子显微镜样品
公开(公告)号：EP2685233A1
公开(公告)日：2014-01-15
申请号：EP12176254.6
申请日：2012-07-13
申请人： FEI COMPANY
发明人： Schampers, Ruud , Hayles, Mike , De Winter, Matthijs , Schneijdenberg, Chris
IPC分类号： G01N1/42
CPC分类号： B23K15/08 , G01N1/06 , G01N1/42 , G01N2001/2873
摘要： Method of forming a sample from a capillary with high-pressure frozen sample material, the method comprising: a step (102) of providing a high-pressure capillary with vitrified sample material at a temperature T 1 below the glass transition temperature Tg, and a step (104) of cutting the capillary, characterized by a step (106) of warming the capillary to a temperature T 2 between temperature T 1 and temperature Tg, a subsequent step (108) of cooling the capillary to a temperature T 3 below temperature T 2 , as a result of which material is extruded from the capillary, and a step (112) of freeing a sample from the extruded sample material at a temperature below temperature T g . Vitrified biological material could be extruded from a capillary at liquid at a temperature of T = 88 K (liquid nitrogen by raising the temperature to, for example 130 K and then cooling the capillary to 88 K. Not only did this result to extrusion material, but even more surprising is that a repeated temperature cycle often results in further extrusion of sample material.
摘要翻译：用高压冷冻样品材料从毛细管形成样品的方法，所述方法包括：在低于玻璃化转变温度Tg的温度T1下向玻璃化样品材料提供高压毛细管的步骤（102）;以及步骤（104），其特征在于将毛细管加热至温度T1与温度Tg之间的温度T2的步骤（106），将毛细管冷却至低于温度T2的温度T3的后续步骤（108），作为从毛细管挤出材料的结果，以及在低于温度Tg的温度下从挤出的样品材料中释放样品的步骤（112）。玻璃化的生物材料可以在温度为T = 88K的液体（液氮通过将温度升高至例如130K，然后将毛细管冷却至88K）从毛细管挤出。不仅产生挤出材料，但更令人惊讶的是，重复的温度循环常常导致样品材料的进一步挤出。

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