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1. 发明公开

EP0413330A3 Method and apparatus for detecting photoacoustic signal 失效
标题翻译：用于检测光电信号的方法和装置
公开(公告)号：EP0413330A3
公开(公告)日：1992-10-14
申请号：EP90115692.7
申请日：1990-08-16
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Kembo, Yukio , Sawada, Tsuguo , Kitamori, Takehiko
IPC分类号： G01N21/17 , G01N21/88 , G01N29/00 , G02B21/00
CPC分类号： G01N21/88 , G01N21/1702 , G01N2021/1765
摘要： Disclosed is a photoacoustic signal detecting apparatus and method. The photoacoustic signal detecting apparatus comprises a laser (31) emitting a laser beam, modulating means (32) for intensity-modulating the laser beam emitted from the laser to provide an intensity-modulated laser beam having a desired frequency, focusing means (39) for focusing the intensity-modulated laser beam on a sample (7) thereby inducing a photoacoustic effect inside the sample, detecting means (140) for detecting the photoacoustic effect in two-dimensional directions of the sample, composing means (160) for composing a two-dimensional photoacoustic image on the basis of the detected photoacoustic effect, information extracting means (160) for extracting surface and internal information of the sample from the two-dimensional photoacoustic image, scanning means (140) for two-dimensionally scanning the laser beam from the sample or the laser, computing means (68) for computing a thermal impulse response of the sample, computing means (68) for computing, on the basis of the thermal impulse response, an inverse filtering factor for compensating degradation of the resolution of the photoacoustic image, and means (68) for applying the computed inverse filtering factor to the detected photoacoustic image.

2. 发明公开

EP0459392A2 Method and apparatus for processing a minute portion of a specimen 失效
标题翻译：用于治疗的样品的非常小的区域的方法和装置。
公开(公告)号：EP0459392A2
公开(公告)日：1991-12-04
申请号：EP91108685.8
申请日：1991-05-28
申请人： HITACHI, LTD.
发明人： Yamaguchi, Hiroshi , Noguchi, Minori , Kohno, Makiko, of No.203 Sutooku-haimu , Nakata, Toshihiko
IPC分类号： G02B21/00 , G01N27/00 , G01N21/17 , H01L21/30
CPC分类号： G01Q30/02 , G01Q60/22 , H01J37/28 , Y10S977/859 , Y10S977/861 , Y10S977/862 , Y10S977/879
摘要： An image of a specimen which is to be processed is detected by a near-field optical scanning microscope. An image with extremely high resolution for identifying a minute portion of several tens nm is detected. The detected minute portion is processed by, for example, a tunnel current of a scanning tunneling microscope.
摘要翻译：试样的所有要被处理的图像是由近场光学扫描显微镜检测。具有极高的分辨率，识别被检测纳米几十的微小部分的图像。所检测到的微小部分被处理，例如，一个扫描隧道显微镜的隧道电流。

3. 发明公开

EP0148477A3 Exposure apparatus and method of aligning exposure mask with workpiece 失效
标题翻译：曝光装置和工作接触掩模的方法
公开(公告)号：EP0148477A3
公开(公告)日：1985-09-04
申请号：EP84115889
申请日：1984-12-20
申请人： HITACHI, LTD.
发明人： Oshida, Yoshitada , Shiba, Masataka , Nakata, Toshihiko , Koizumi, Mitsuyoshi , Nakashima, Naoto
IPC分类号： G03B41/00
CPC分类号： G03F9/7049
摘要： An exposure apparatus comprises a light source (4), a mask plate (1) having an exposure pattern area section (11) and an alignment/reflection area section (30; 60), a projection lens (3), a movable stage (7) for holding a workpiece (2) having a workpiece alignment mark (22,22'), an alignment control (5, 80) and a driver for the movable stage. Before the exposure pattern area section (11) is illuminated by the light source (4) to be projected through the projection lens (3) onto the workpiece (2), the workpiece is properly aligned with the mask. Alignment between the mask plate and the workpiece is performed by the effective use of the alignment/reflection area section specifically arranged and having a specific structure. The alignment/reflection area section (30; 60) is on that surface of the mask plate (1) which does not face the light source (4) and includes a reflection portion for conducting light from another light source (503; 521-524; 51"; 90) to the workpiece and conducting light scattered from the workpiece and passing through the projection lens to the alignment control and a mask alignment mark portion for providing, when illuminated, an image of the mask alignment mark portion to the alignment control so that it detects the positional relation between the mask alignment mark portion and the workpiece alignment mark and produces a control signal for achieving alignment between the mask plate and the workpiece.

4. 发明公开

EP0352789A3 Photoacoustic signal detecting device 失效
标题翻译：光电信号检测装置
公开(公告)号：EP0352789A3
公开(公告)日：1991-05-15
申请号：EP89113875.2
申请日：1989-07-27
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Kembo, Yukio
IPC分类号： G01N21/17 , G01N29/00
CPC分类号： G01N21/1702 , G01N2021/1782
摘要： A photoacoustic signal detecting device irradiates a modulated light on a sample (170) using focusing means (300, 400), detects a photoacoustic signal created in the sample using light interference detection means (310, 410) and finally displays the information relative to the surface and inside of the sample. The focusing means (300, 400) and light interference detection means (310, 410) are constructed in a confocal optical system, respectively, and a pin-hole(s) is used to remove unnecessary high order diffraction light components around the light spot of the modulated light so that the photoacoustic signal can be detected with a high accuracy. Further, an auto-focusing function (330, 430) is added to the photoacoustic signal detection so that the photoacoustic signal can be detected with a high accuracy also for a sample with rugged surface.

5. 发明授权

EP0182251B1 Alignment method for reduction projection type aligner 失效
标题翻译：减少投影类型对准器的对准方法
公开(公告)号：EP0182251B1
公开(公告)日：1989-10-18
申请号：EP85114364.4
申请日：1985-11-12
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Shiba, Masataka , Oshida, Yoshitada , Uto, Sachio , Yoshizaki, Atsuhiro
IPC分类号： H01L21/68 , G03F9/00 , G03B27/53 , G02B27/00
CPC分类号： G03F9/7076

6. 发明公开

EP0182251A1 Alignment method for reduction projection type aligner 失效
标题翻译：用于Ausrichtprojektor还原类型的调整过程。
公开(公告)号：EP0182251A1
公开(公告)日：1986-05-28
申请号：EP85114364.4
申请日：1985-11-12
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Shiba, Masataka , Oshida, Yoshitada , Uto, Sachio , Yoshizaki, Atsuhiro
IPC分类号： H01L21/68 , G03F9/00 , G03B27/53 , G02B27/00
CPC分类号： G03F9/7076
摘要： An alignment method for reduction projection type aligner is disclosed in which the rough detection of reticle position in the reticle alignment process at the time of mounting a reticle (1) and the fine detection of reticle position in the wafer alignment for the alignment between a wafer (3) and the reticle (1) are performed automatically by the same reticle alignment pattern (18) and the same optical alignment detection system (38). A plurality of one- or two-dimensional Fresnel zone plates (19, 20) having different shapes of diffraction patterns formed outside of a reticle circuit pattern (16) and arranged at a position outward of the entrance pupil (2') of the reduction projection lens (2) are used as a a reticle alignment pattern (18) to detect the absolute position of the reticle (1). The detection field of view of the optical alignment detection system (38) is thus effectively widened to make pattern detection possible with high magnification for an improved detection accuracy. The same reticle alignment pattern (18) and the same optical alignment detection system (38) are used for rough detection of reticle position in reticle alignment and fine detection of reti- cie position in wafer alignment. In the optical alignment detection system (38), on the other hand, the image position of the diffraction pattern (39a to 39c) from the reticle alignment pattern (18) and the image position of the wafer alignment pattern (14) are located at the same distance from the recticle surface.

7. 发明授权

EP0352789B1 Photoacoustic signal detecting device 失效
标题翻译：装置，用于检测光声信号。
公开(公告)号：EP0352789B1
公开(公告)日：1995-03-08
申请号：EP89113875.2
申请日：1989-07-27
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Kembo, Yukio
IPC分类号： G01N21/17 , G01N29/00
CPC分类号： G01N21/1702 , G01N2021/1782

8. 发明公开

EP0459392A3 Method and apparatus for processing a minute portion of a specimen 失效
标题翻译：用于处理样品的分钟部分的方法和装置
公开(公告)号：EP0459392A3
公开(公告)日：1992-12-09
申请号：EP91108685.8
申请日：1991-05-28
申请人： HITACHI, LTD.
发明人： Yamaguchi, Hiroshi , Noguchi, Minori , Kohno, Makiko, of No.203 Sutooku-haimu , Nakata, Toshihiko
IPC分类号： G02B21/00 , G01N27/00 , G01N21/17 , H01L21/30
CPC分类号： G01Q30/02 , G01Q60/22 , H01J37/28 , Y10S977/859 , Y10S977/861 , Y10S977/862 , Y10S977/879
摘要： An image of a specimen which is to be processed is detected by a near-field optical scanning microscope. An image with extremely high resolution for identifying a minute portion of several tens nm is detected. The detected minute portion is processed by, for example, a tunnel current of a scanning tunneling microscope.

9. 发明公开

EP0352789A2 Photoacoustic signal detecting device 失效
标题翻译： Vorrichtung zur Detektion eines photoakustischen信号。
公开(公告)号：EP0352789A2
公开(公告)日：1990-01-31
申请号：EP89113875.2
申请日：1989-07-27
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Kembo, Yukio
IPC分类号： G01N21/17 , G01N29/00
CPC分类号： G01N21/1702 , G01N2021/1782
摘要： A photoacoustic signal detecting device irradiates a modulated light on a sample (170) using focusing means (300, 400), detects a photoacoustic signal created in the sample using light interference detection means (310, 410) and finally displays the information relative to the surface and inside of the sample. The focusing means (300, 400) and light interference detection means (310, 410) are constructed in a confocal optical system, respectively, and a pin-hole(s) is used to remove unnecessary high order diffraction light components around the light spot of the modulated light so that the photoacoustic signal can be detected with a high accuracy. Further, an auto-focusing function (330, 430) is added to the photoacoustic signal detection so that the photoacoustic signal can be detected with a high accuracy also for a sample with rugged surface.
摘要翻译：光声信号检测装置使用聚焦装置（300,400）将调制光照射在样品（170）上，使用光干涉检测装置（310,410）检测样品中产生的光声信号，并最终显示关于表面和样品内部。聚焦装置（300,400）和光干涉检测装置（310,410）分别构造在共焦光学系统中，并且使用针孔来去除光点周围的不必要的高阶衍射光分量的调制光，使得可以高精度地检测光声信号。此外，将自动对焦功能（330,430）添加到光声信号检测中，使得对于具有粗糙表面的样品，可以以高精度检测光声信号。

10. 发明授权

EP0413330B1 Method and apparatus for detecting photoacoustic signal 失效
标题翻译：用于检测光声信号的方法和装置。
公开(公告)号：EP0413330B1
公开(公告)日：1995-11-02
申请号：EP90115692.7
申请日：1990-08-16
申请人： HITACHI, LTD.
发明人： Nakata, Toshihiko , Kembo, Yukio , Sawada, Tsuguo , Kitamori, Takehiko
IPC分类号： G01N21/17 , G01N21/88 , G01N29/00 , G02B21/00
CPC分类号： G01N21/88 , G01N21/1702 , G01N2021/1765

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