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1. 发明申请

WO2010054244A2 METHOD OF USING A PLURALITY OF SMALLER MEMS DEVICES TO REPLACE A LARGER MEMS DEVICE 审中-公开
标题翻译：使用多个小型MEMS器件来替代大型MEMS器件的方法
公开(公告)号：WO2010054244A2
公开(公告)日：2010-05-14
申请号：PCT/US2009/063616
申请日：2009-11-06
申请人： CAVENDISH KINETICS, INC. , SMITH, Charles Gordon , KNIPE, Richard L. , JOSHI, Vikram , GADDI, Roberto , UNAMUNO, Anartz , VAN KAMPEN, Robertus Petrus
发明人： SMITH, Charles Gordon , KNIPE, Richard L. , JOSHI, Vikram , GADDI, Roberto , UNAMUNO, Anartz , VAN KAMPEN, Robertus Petrus
IPC分类号： B81C1/00
CPC分类号： B81B7/04 , B81B2201/0221 , B81B2201/0235 , B81B2207/053 , G01P15/0802 , G01P15/125 , G01P15/135 , H01G5/18 , H01G5/40
摘要： Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.
摘要翻译：本文公开的实施例通常包括使用大量的小MEMS器件来代替单个更大的MEMS器件或数字可变电容器的功能。大量较小的MEMS器件具有与较大器件相同的功能，但是由于尺寸较小，因此可以使用互补金属氧化物半导体（CMOS）兼容工艺封装在腔中。通过大量较小器件的信号平均，允许较小器件阵列的精度等同于较大的器件。通过考虑使用具有惯性响应的集成模数转换的基于MEMS的加速度计开关阵列来举例说明该过程。还通过考虑使用MEMS器件结构（其中MEMS器件并行地作为数字可变电容器）来使用该过程。

2. 发明申请

WO2006105265A2 MICRO-ELECTRO MECHANICAL SWITCH DESIGNS 审中-公开
标题翻译：微电机械开关设计
公开(公告)号：WO2006105265A2
公开(公告)日：2006-10-05
申请号：PCT/US2006/011589
申请日：2006-03-29
申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY , BOZLER, Carl, O. , BERRY, Shaun, R. , MULDAVIN, Jeremy , KEAST, Craig, L.
发明人： BOZLER, Carl, O. , BERRY, Shaun, R. , MULDAVIN, Jeremy , KEAST, Craig, L.
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H2059/0081
摘要： A capacitive RF switch and DC RF switch include a fixed electrode having a thin layer of metal and at least one pull-down electrode. A moving plate has a plurality of corrugations and a selective finger design. The capacitive switch includes a selective finger that comes into contact with the fixed electrode so as to minimize the stiction between the moving plate and the fixed electrode when the switch is closed. The DC switch comprises a plurality of dimples that are formed on the selective portion of the moving plate and are positioned to come into contact with the fixed electrode when the switch is closed so as to increase the contact force and lower the resistance between the moving plate and fixed electrode.
摘要翻译：电容RF开关和DC RF开关包括具有薄层金属和至少一个下拉电极的固定电极。移动板具有多个波纹和选择性手指设计。电容开关包括与固定电极接触的选择性手指，以便当开关闭合时使移动板和固定电极之间的静摩擦最小化。 DC开关包括形成在移动板的选择部分上并且当开关闭合时定位成与固定电极接触的多个凹坑，以便增加接触力并降低移动板之间的电阻和固定电极。

3. 发明申请

WO2005023699A1 FILM ACTUATOR BASED MEMS DEVICE AND METHOD 审中-公开
标题翻译：基于FILM执行器的MEMS器件及方法
公开(公告)号：WO2005023699A1
公开(公告)日：2005-03-17
申请号：PCT/IB2004/051732
申请日：2004-09-09
申请人： NORDIA INNOVATION AB , OBERHAMMER, Joachim , STEMME, Göran
发明人： OBERHAMMER, Joachim , STEMME, Göran
IPC分类号： B81B3/00
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H2059/0045 , H01H2059/0072 , Y10T29/49105
摘要： The present invention discloses a Micro-Electro-Mechanical systems (MEMS) device suitable for use in a range of applications from DC, such as switching electrical signal lines, to RF applications such as tunable capacitors and switches. In an embodiment of the invention, the device comprises a bottom substrate and a top substrate separated at a fixed distance from each other. Disposed between the substrates is a flexible S-shaped membrane having an electrode or an electrically conducting electrode layer with one end attached to the top substrate and the other end in contact with the bottom substrate. An electrically conducting contact block is attached to the underside of the membrane actuator for short circuiting a signal line when the switch is in the closed position. When a voltage is applied between the membrane and an electrode layer on the bottom substrate, the membrane is induced by electrostatic force to deflect in a rolling wave-like motion such that the contact block is displaced into contact with the signal line. The device can be actively opened when a voltage is applied between the membrane actuator and a electrode layer on the top substrate causing the contact block to displace upward breaking contact with the signal line. The MEMS switching device is applicable for use in a switch matrix board for automatically switching telephone lines or in RF applications in the form of a tunable capacitor.
摘要翻译：本发明公开了适用于从诸如切换电信号线的DC到可变电容器和开关等RF应用的一系列应用的微机电系统（MEMS）装置。在本发明的一个实施例中，该装置包括底部基板和彼此隔开固定距离的顶部基板。设置在基板之间的是具有电极或导电电极层的柔性S形膜，其一端连接到顶部基板，另一端与底部基板接触。当开关处于闭合位置时，导电接触块附接到膜致动器的下侧，以使信号线短路。当在膜和底部基板上的电极层之间施加电压时，通过静电力诱导膜以滚动波状的运动偏转，使得接触块移位成与信号线接触。当膜致动器和顶部基板上的电极层之间施加电压时，该装置可以被主动地打开，导致接触块向上移动与信号线的断开接触。 MEMS开关器件适用于用于自动切换电话线或以可调电容器形式的RF应用的开关矩阵板。

4. 发明申请

WO2004054088A3 DRIVING OF AN ARRAY OF MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) ELEMENTS 审中-公开
标题翻译：驱动一系列微电子机械系统（MEMS）元件
公开(公告)号：WO2004054088A3
公开(公告)日：2004-12-02
申请号：PCT/IB0305590
申请日：2003-12-01
申请人： KONINKL PHILIPS ELECTRONICS NV , RIJKS THEODOOR G S M , MATTERS MARCO , VAN BEEK JOZEF T M
发明人： RIJKS THEODOOR G S M , MATTERS MARCO , VAN BEEK JOZEF T M
IPC分类号： H01H59/00 , H03B5/08 , H03B5/12 , H03H7/01
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40
摘要： Method for driving an array of micro-electro mechanical system (MEMS) devices, said array providing a plurality of logical or memory states at it output, wherein the MEMS devices are given a characteristic hysteresis curve differing from one MEMS device to another MEMS device, and wherein a single control voltage applied to all the MEMS devices while the various states of the array are to be obtained by varying the single control voltage.
摘要翻译：用于驱动微机电系统（MEMS）装置阵列的方法，所述阵列在其输出处提供多个逻辑或存储器状态，其中所述MEMS装置被给予不同于一个MEMS装置到另一个MEMS装置的特性磁滞曲线，并且其中在通过改变单个控制电压来获得阵列的各种状态的同时向所有MEMS器件施加单个控制电压。

5. 发明申请

WO2003054938A1 METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SWITCHES ON CMOS COMPATIBLE SUBSTRATES 审中-公开
标题翻译：在CMOS兼容基板上制作微电子开关的方法
公开(公告)号：WO2003054938A1
公开(公告)日：2003-07-03
申请号：PCT/US2002/036088
申请日：2002-11-07
申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人： VOLANT, Richard, P. , BISSON, John, C. , COTE, Donna, R. , DALTON, Timothy, J. , GROVES, Robert, A. , PETRARCA, Kevin, S. , STEIN, Kenneth, J. , SUBBANNA, Seshadri
IPC分类号： H01L21/20
CPC分类号： B81C1/00246 , B81B2201/016 , B81B2201/018 , B81B2203/0127 , B81B2207/07 , B81C1/00611 , B81C2201/0122 , B81C2203/0735 , H01G5/40 , H01H59/0009
摘要： A method of fabricating micro-electromechanical switches (MEMS) using a process starting with a copper damascene interconnect layer, made of metal conductors inlaid in a dielectric (150). All, or portions, of the interconnects are recessed to a degree sufficient to provide a capacitive air gap when the switch is in the closed state, as well as provide space for a protective layer of, for example, Ta/TaN. The metal structures defined within the area specified for the switch act as actuator electrodes to pull down the movable beam (160) and provide one or more paths for the switched signal to traverse. The advantage of an air gap is that air is not subject to charge storage or trapping that can cause reliability and voltage drift problems. Instead of recessing the electrodes to provide a gap, one may just add dielectric on or around the electrode. The next layer is another dielectric layer which is deposited to the desired thickness of the gap formed between the moveable beam (160) that forms the switching device. Vias are fabricated through this dielectric to provide connections between the metal interconnect layer and the next metal layer which will also contain the switchable beam. The via layer is then patterned and etched to provide a cavity area which contains the lower activation electrodes as well as the signal paths. The cavity is then back-filled with a sacrificial release material.
摘要翻译：一种使用由铜镶嵌互连层开始的工艺来制造微机电开关（MEMS）的方法，由介于电介质（150）中的金属导体制成。当开关处于闭合状态时，互连件的全部或部分凹陷到足以提供电容气隙的程度，以及为例如Ta / TaN的保护层提供空间。在为开关指定的区域内限定的金属结构用作致动器电极以下拉可移动光束（160）并且提供用于切换信号穿过的一个或多个路径。气隙的优点是空气不会受到可能导致可靠性和电压漂移问题的电荷储存或捕集。代替使电极凹陷以提供间隙，可以仅在电极上或周围添加电介质。下一层是沉积到形成开关装置的可移动梁（160）之间形成的间隙的所需厚度的另一介电层。通过该电介质制造通孔以提供金属互连层和还包含可切换光束的下一个金属层之间的连接。然后对通孔层进行图案化和蚀刻以提供包含下部激活电极以及信号路径的空腔区域。然后用牺牲脱模材料填充空腔。

6. 发明申请

WO2002096166A1 RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES ON LOW-TEMPERATURE CO-FIRED CERAMIC (LTCC) SUBSTRATES 审中-公开
标题翻译：低温合成陶瓷（LTCC）衬底的无线电频率微电子系统（MEMS）器件
公开(公告)号：WO2002096166A1
公开(公告)日：2002-11-28
申请号：PCT/US2002/015602
申请日：2002-05-20
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES
发明人： OZGUR, Mehmet , HUFF, Michael, A.
IPC分类号： H05K1/16
CPC分类号： B82Y30/00 , B81B7/0064 , B81B2201/016 , B81B2207/015 , B81B2207/092 , B81B2207/095 , B81B2207/096 , B81C2203/0118 , B81C2203/035 , H01G5/16 , H01G5/18 , H01G5/40 , H01H59/0009 , H01H2057/006 , H01H2059/0072 , H01L2224/16225 , H01L2924/15153 , H01P1/127 , H01P1/184 , H01Q1/38 , H01Q3/26 , H01Q15/0013 , H01Q15/004 , H01Q21/0087 , H05K1/0306 , H05K1/16
摘要： A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches ("MEMS") and low-temperature co-fired ceramic ("LTCC") technology and a method of fabricating such phased-array antenna system and other types of radio frequency (RF) devices are disclosed. Each antenna or other type of device includes at least two multilayer ceramic modules (212, 214) and a MEMS device (211) fabricated on one of the modules (212). Once fabrication of the MEMS device (211) is completed, the two ceramic modules (212, 214) are bonded together, hermetically sealing the MEMS device, as well as allowing electrical connections between all device layers. The bottom ceramic module (212) has also cavities (241) at the backside for mounting integrated circuits (220). The internal layers (236) are formed using conducting, resistive and high-k dielectric pastes available in standard LTCC fabrication and low-loss dielectric LTCC tape materials.
摘要翻译：使用微机电开关（“MEMS”）和低温共烧陶瓷（“LTCC”）技术的相控阵天线系统和其它类型的射频（RF）装置和系统以及制造这种相控阵天线的方法系统和其他类型的射频（RF）设备。每个天线或其他类型的装置包括至少两个多层陶瓷模块（212,214）和在其中一个模块（212）上制造的MEMS装置（211）。一旦完成了MEMS器件（211）的制造，两个陶瓷模块（212,214）被结合在一起，气密地密封MEMS器件，以及允许所有器件层之间的电连接。底部陶瓷模块（212）在背面还具有用于安装集成电路（220）的空腔（241）。使用在标准LTCC制造和低损耗介电LTCC带材料中可获得的导电，电阻和高k电介质浆料形成内层（236）。

7. 发明申请

WO02052592A2 MEMS-SWITCHED STEPPED VARIABLE CAPACITOR AND METHOD OF MAKING GAME 审中-公开
标题翻译： MEMS切换式可变电容器及其制造方法
公开(公告)号：WO02052592A2
公开(公告)日：2002-07-04
申请号：PCT/US2001/044454
申请日：2001-11-26
IPC分类号： H01G5/38 , B81B3/00 , H01G5/00 , H01G5/16 , H01G
CPC分类号： H01G5/16 , H01G5/40 , Y10T307/724 , Y10T307/729
摘要： The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.
摘要翻译：本发明涉及由多个MEMS开关驱动的阶梯式微机电结构（MEMS）电容器，其可以在阶梯式电容器电路内，或者它们可由独立电路驱动。通过在阶梯式MEMS电容器结构中提供至少一个可变电容器，阶梯式电容器也可以随着电容的中间步骤而变化。

8. 发明申请

WO00055936A1 HIGH TEMPERATURE SUPERCONDUCTOR TUNABLE FILTER 审中-公开
标题翻译：高温超导体滤芯
公开(公告)号：WO00055936A1
公开(公告)日：2000-09-21
申请号：PCT/US2000/006023
申请日：2000-03-08
IPC分类号： H01L39/00 , H01P1/20 , H01P1/203 , H01P7/00 , H01P7/08 , H01B12/02
CPC分类号： H01P7/088 , H01G5/16 , H01G5/40 , H01P7/082 , H03J2200/10 , Y10S505/70 , Y10S505/705 , Y10S505/866
摘要： A tunable filter having a fixed substrate (20), first and second plates (10, 15) comprising a high temperature superconducting material is fixed on the substrate. A movable substrate (35) includes a mechanical driver (70) attached to the fixed and movable substrates. A floating plate (30) of a high temperature superconducting material is fixed to the movable substrate. The floating plate and the first and second plates are arranged to define a gap (50) therebetween, and wherein the gap is varied by length changes effected by the mechanical driver.
摘要翻译：具有固定基板（20）的可调滤波器，包括高温超导材料的第一和第二板（10,15）固定在基板上。可移动基板（35）包括附接到固定和可移动基板的机械驱动器（70）。高温超导材料的浮板（30）固定在可动基板上。浮动板和第一和第二板被布置成在它们之间限定间隙（50），并且其中间隙通过由机械驱动器实现的长度变化而变化。

9. 发明申请

WO00031819A1 METHOD AND APPARATUS FOR SWITCHING HIGH FREQUENCY SIGNALS 审中-公开
标题翻译：用于切换高频信号的方法和装置
公开(公告)号：WO00031819A1
公开(公告)日：2000-06-02
申请号：PCT/US1999/025643
申请日：1999-11-01
IPC分类号： H01H59/00 , H01P1/12
CPC分类号： H01P1/127 , H01G5/16 , H01G5/40 , H01H59/0009 , H01H2059/0018
摘要： A switch includes a conductive region, a membrane, and a dielectric region. The dielectric region is formed from a dielectric material and is disposed between the membrane and the conductive region. When a sufficient voltage is applied between the conductive region and the membrane, a capacitive coupling between the membrane nd the conductive region is effected. The dielectric material has a resistivity sufficiently low to inhibit charge accumulation in the dielectric region during operation of the switch.
摘要翻译：开关包括导电区域，膜和电介质区域。电介质区域由电介质材料形成，并且设置在膜与导电区域之间。当在导电区域和膜之间施加足够的电压时，实现膜和导电区域之间的电容耦合。电介质材料具有足够低的电阻以在开关的操作期间阻止电介质区域中的电荷累积。

10. 发明申请

WO2013033613A2 RF MEMS ISOLATION, SERIES AND SHUNT DVC, AND SMALL MEMS 审中-公开
标题翻译： RF MEMS隔离，串联和分流DVC，以及小型MEMS
公开(公告)号：WO2013033613A2
公开(公告)日：2013-03-07
申请号：PCT/US2012053481
申请日：2012-08-31
申请人： CAVENDISH KINETICS INC , GADDI ROBERTO , KNIPE RICHARD L , VAN KAMPEN ROBERTUS PETRUS , UNAMUNO ANARTZ
发明人： GADDI ROBERTO , KNIPE RICHARD L , VAN KAMPEN ROBERTUS PETRUS , UNAMUNO ANARTZ
IPC分类号： H01G5/18
CPC分类号： H01L28/60 , B81B3/0086 , B81B2201/016 , B81B2207/015 , H01G5/18 , H01G5/38 , H01G5/40 , H01H59/0009 , H03K17/162 , H03K17/6872 , H03K2217/0009 , H03K2217/0036 , H03K2217/009
摘要： The present invention generally relates to an architecture for isolating an RF MEMS device from a substrate and driving circuit, series and shunt DVC die architectures, and smaller MEMS arrays for high frequency communications. The semiconductor device has one or more cells with a plurality of MEMS devices therein. The MEMS device operates by applying an electrical bias to either a pull-up electrode or a pull-down electrode to move a switching element of the MEMS device between a first position spaced a first distance from an RF electrode and a second position spaced a second distance different than the first distance from the RF electrode. The pull-up and/or pull-off electrode may be coupled to a resistor to isolate the MEMS device from the substrate.
摘要翻译：本发明总体上涉及用于将RF MEMS器件与衬底和驱动电路，串联和并联DVC管芯结构以及用于高频通信的更小的MEMS阵列隔离的架构。半导体器件具有其中具有多个MEMS器件的一个或多个单元。 MEMS器件通过向上拉电极或下拉电极施加电偏压来操作，以使MEMS器件的开关元件在与RF电极隔开第一距离的第一位置和隔开第二位置的第二位置之间移动距离不同于距RF电极的第一距离。上拉和/或拉出电极可以耦合到电阻器以将MEMS器件与衬底隔离。

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