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1. 发明申请

WO2002096166A1 RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES ON LOW-TEMPERATURE CO-FIRED CERAMIC (LTCC) SUBSTRATES 审中-公开
标题翻译：低温合成陶瓷（LTCC）衬底的无线电频率微电子系统（MEMS）器件
公开(公告)号：WO2002096166A1
公开(公告)日：2002-11-28
申请号：PCT/US2002/015602
申请日：2002-05-20
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES
发明人： OZGUR, Mehmet , HUFF, Michael, A.
IPC分类号： H05K1/16
CPC分类号： B82Y30/00 , B81B7/0064 , B81B2201/016 , B81B2207/015 , B81B2207/092 , B81B2207/095 , B81B2207/096 , B81C2203/0118 , B81C2203/035 , H01G5/16 , H01G5/18 , H01G5/40 , H01H59/0009 , H01H2057/006 , H01H2059/0072 , H01L2224/16225 , H01L2924/15153 , H01P1/127 , H01P1/184 , H01Q1/38 , H01Q3/26 , H01Q15/0013 , H01Q15/004 , H01Q21/0087 , H05K1/0306 , H05K1/16
摘要： A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches ("MEMS") and low-temperature co-fired ceramic ("LTCC") technology and a method of fabricating such phased-array antenna system and other types of radio frequency (RF) devices are disclosed. Each antenna or other type of device includes at least two multilayer ceramic modules (212, 214) and a MEMS device (211) fabricated on one of the modules (212). Once fabrication of the MEMS device (211) is completed, the two ceramic modules (212, 214) are bonded together, hermetically sealing the MEMS device, as well as allowing electrical connections between all device layers. The bottom ceramic module (212) has also cavities (241) at the backside for mounting integrated circuits (220). The internal layers (236) are formed using conducting, resistive and high-k dielectric pastes available in standard LTCC fabrication and low-loss dielectric LTCC tape materials.
摘要翻译：使用微机电开关（“MEMS”）和低温共烧陶瓷（“LTCC”）技术的相控阵天线系统和其它类型的射频（RF）装置和系统以及制造这种相控阵天线的方法系统和其他类型的射频（RF）设备。每个天线或其他类型的装置包括至少两个多层陶瓷模块（212,214）和在其中一个模块（212）上制造的MEMS装置（211）。一旦完成了MEMS器件（211）的制造，两个陶瓷模块（212,214）被结合在一起，气密地密封MEMS器件，以及允许所有器件层之间的电连接。底部陶瓷模块（212）在背面还具有用于安装集成电路（220）的空腔（241）。使用在标准LTCC制造和低损耗介电LTCC带材料中可获得的导电，电阻和高k电介质浆料形成内层（236）。

2. 发明申请

WO2003106952A3 A MICRO-MECHANICAL CAPACITIVE INDUCTIVE SENSOR FOR WIRELESS DETECTION OF RELATIVE OR ABSOLUTE PRESSURE 审中-公开
公开(公告)号：WO2003106952A3
公开(公告)日：2003-12-24
申请号：PCT/US2003/019121
申请日：2003-06-18
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES , PEDERSEN, Michael , OZGUR, Mehmet , HUFF, Michael, A.
发明人： PEDERSEN, Michael , OZGUR, Mehmet , HUFF, Michael, A.
IPC分类号： H04R25/00
摘要： A micro-mechanical pressure transducer (100) is disclosed in which a capacitive transducer structure is integrated with an inductor coil (105) to form a LC tank circuit, resonance frequency of which may be detected remotely by imposing an electromagnetic field in the transducer (100). The capacitive transducer structure (100) comprises a conductive movable diaphragm (106), a fixed counter electrode (107), and a predetermined air gap (109) between said diaphragm (106) and electrode (107). The diaphragm (106) deflects in response to an applied pressure differential, leading to a change of capacitance in the structure and hence a shift of resonance frequency of the LC tank circuit. The resonance frequency of the LC circuit can be remotely detected by measuring and determining the corresponding peak in electromagnetic impedance of the transducer (100).

3. 发明申请

WO2003015128A2 AN ELECTROMECHANICAL SWITCH AND METHOD OF FABRICATION 审中-公开
标题翻译：机电开关及制造方法
公开(公告)号：WO2003015128A2
公开(公告)日：2003-02-20
申请号：PCT/US2002/024927
申请日：2002-08-07
申请人： CORPORATION FOR NATIONAL RESEARCH INITIATIVES
发明人： PEDERSEN, Michael , OZGUR, Mehmet
IPC分类号： H01L
CPC分类号： H01H59/0009 , H01G5/18 , H01G5/40 , H01H2059/0018 , H01H2059/0072
摘要： A micro-electro-mechanical (MEM) switch formed on a substrate allows switching of various types of electrical conductor structures, depending on the desired frequency range of switch transmission and isolation. The switch contains a tilting cantilever arm, which tilts around central points of attachment. At least two conducting electrodes on the cantilever arm and the substrate form at least two air gap capacitors, which when electrically charged provide electrostatic attraction forces that cause the cantilever arm to deflect and tilt until conducting electrodes near the tips of the cantilever arm make electrical contact with fixed electrodes on the underlying substrate. The air gap capacitors on either side of the cantilever points of attachment allow the switch to be driven into both ON and OFF states, thereby eliminating dependence on cantilever mechanical restoring forces One or more holes in the cantilever arm near the air gap capacitors allow air within the gap to escape, thereby reducing the squeeze film damping and increasing the mechanical bandwidth of the switch. Low-temperature, IC compatible processing allows the switch structure to be fabricated directly on substrates containing pre-processed circuits, such as monolithic microwave integrated circuits (MMICs), and on low-cost substrates, such as low temperature co-fired ceramic (LTCC), for the realization of low-cost vertical integration of complex switching circuits, such as RF phase shifter networks.
摘要翻译：形成在基板上的微机电（MEM）开关允许根据所需的开关传输和隔离的频率范围来切换各种类型的电导体结构。开关包含一个倾斜的悬臂，它围绕中心点倾斜。悬臂和基板上的至少两个导电电极形成至少两个气隙电容器，当电荷充电时，静电吸引力使悬臂臂偏转和倾斜，直到靠近悬臂臂顶端的电极进行电接触在底层基板上固定电极。悬臂连接点两侧的气隙电容允许开关被驱动到ON和OFF状态，从而消除对悬臂机械恢复力的依赖性气隙电容器附近的悬臂中的一个或多个孔允许空气内的空气间隙逃脱，从而减少挤压膜阻尼并增加开关的机械带宽。低温，IC兼容处理允许开关结构直接在包含预处理电路的基板上制造，例如单片微波集成电路（MMIC），以及低成本基板，如低温共烧陶瓷（LTCC）），用于实现复杂开关电路（如RF移相器网络）的低成本垂直整合。

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