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    • 8. 发明申请
    • THIN FILM DEVICE FABRICATION METHODS AND APPARATUS
    • 薄膜装置制造方法和装置
    • WO2016016466A1
    • 2016-02-04
    • PCT/EP2015/067758
    • 2015-07-31
    • KATHOLIEKE UNIVERSITEIT LEUVEN
    • LOCQUET, Jean-PierreSU, Chen-Yi
    • C23C14/00C23C14/54C23C14/58
    • H01L21/67253C23C14/0021C23C14/548C23C14/5806C30B23/002C30B23/02C30B29/16C30B29/20C30B33/02H01L21/02178H01L21/022H01L21/02318
    • A deposition device (100) for providing a thin film on a substrate (130). The device comprises a material source (110) for providing at least one first metallic element which does not re- evaporate substantially from the substrate (130) under particular growth conditions, at least one second metallic element or metal based molecule which does re-evaporate substantially from the substrate (130) under the same growth conditions, and a component suitable for forming an at least one first compound with the at least one first metallic element and an at least one second compound with the at least one second metallic element or metal based molecule. The device comprises a controller (120) configured to control the growth conditions, and the amounts of the at least one first metallic element, the at least one second metallic element or metal based molecule, and the component so as to obtain a substantially stoichiometric thin film.
    • 一种用于在衬底(130)上提供薄膜的沉积装置(100)。 该装置包括用于提供在特定生长条件下基本上不从基底(130)中重新蒸发的至少一种第一金属元素的材料源(110),至少一种第二金属元素或基于金属的分子,其可再蒸发 基本上在相同生长条件下从基底(130)和适于与至少一种第一金属元素和至少一种第二化合物形成至少一种第一化合物的成分与至少一种第二金属元素或金属 基分子。 该装置包括被配置为控制生长条件的控制器(120)以及至少一个第一金属元件,至少一个第二金属元素或金属基分子和该成分的量,以便获得基本上化学计量的薄 电影。
    • 10. 发明申请
    • GRAIN SIZE TUNING FOR RADIATION RESISTANCE
    • 颗粒尺寸调谐耐辐射
    • WO2015147933A3
    • 2015-12-10
    • PCT/US2014071932
    • 2014-12-22
    • UNIV DREXELTAHERI MITRA LENOREVETTERICK GREG
    • TAHERI MITRA LENOREVETTERICK GREG
    • H01L21/203
    • C23C14/5806C23C14/16C23C14/345C23C14/351C23C14/541
    • A process for producing a radiation resistant nanocrystalline material having a polycrystalline microstructure from a starting material selected from metals and metal alloys. The process including depositing the starting material by physical vapor deposition onto a substrate that is maintained at a substrate temperature from about room temperature to about 850 °C to produce the nanocrystalline material. The process may also include heating the nanocrystalline material to a temperature of from about 450 °C to about 800 °C at a rate of temperature increase of from about 2 °C/minute to about 30 °C/minute; and maintaining the nanocrystalline material at the temperature of from about 450 °C to about 800 °C for a period from about 5 minutes to about 35 minutes. The nanocrystalline materials produced by the above process are also described. The nanocrystalline materials produced by the process are resistant to radiation damage.
    • 一种制造具有选自金属和金属合金的起始材料的具有多晶微结构的耐辐射纳米晶体材料的方法。 该方法包括通过物理气相沉积将起始材料沉积在保持在约室温至约850℃的衬底温度的衬底上以产生纳米晶体材料。 该方法还可以包括以约2℃/分钟至约30℃/分钟的升温速率将纳米晶体材料加热至约450℃至约800℃的温度; 并将纳米晶体材料保持在约450℃至约800℃的温度下约5分钟至约35分钟的时间。 还描述了通过上述方法生产的纳米晶体材料。 由该方法生产的纳米晶体材料具有耐辐射损伤。