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1. 发明申请

WO2012110708A1 NOVEL MICROMECHANICAL DEVICES 审中-公开
标题翻译：新型微生物装置
公开(公告)号：WO2012110708A1
公开(公告)日：2012-08-23
申请号：PCT/FI2012/050157
申请日：2012-02-17
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT , PENSALA, Tuomas , JAAKKOLA, Antti , GANCHENKOVA, Maria , PRUNNILA, Mika , KIIHAMÄKI, Jyrki
发明人： PENSALA, Tuomas , JAAKKOLA, Antti , GANCHENKOVA, Maria , PRUNNILA, Mika , KIIHAMÄKI, Jyrki
IPC分类号： H03H9/02 , H03H3/007 , B81B3/00
CPC分类号： H03H9/02448 , B81B3/0078 , B81B2201/0271 , H01L41/18 , H03H3/0072 , H03H3/0076 , H03H9/2405 , H03H9/2447 , H03H2009/02503 , H03H2009/02519 , H03H2009/241 , H03H2009/2442 , Y10T29/42
摘要： The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element (16) made of semiconductor material comprising n-type doping agent and excitation or sensing means (10, 14) functionally connected to said oscillating or deflecting element (16). According to the invention, the oscillating or deflecting element (16) is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.
摘要翻译：本发明涉及一种微机械装置及其制造方法。该装置包括由半导体材料制成的振荡或偏转元件（16），其包括n型掺杂剂和功能性地连接到所述振荡或偏转元件（16）的激励或感测装置（10,14）。根据本发明，振荡或偏转元件（16）基本均匀地掺杂有所述n型掺杂剂。本发明允许设计具有低温度漂移的各种实用谐振器。

2. 发明申请

WO2012020173A1 MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF 审中-公开
标题翻译：微机电谐振器阵列及其制造方法
公开(公告)号：WO2012020173A1
公开(公告)日：2012-02-16
申请号：PCT/FI2011/050711
申请日：2011-08-11
申请人： Teknologian tutkimuskeskus VTT , JAAKKOLA, Antti , PENSALA, Tuomas , KIIHAMÄKI, Jyrki
发明人： JAAKKOLA, Antti , PENSALA, Tuomas , KIIHAMÄKI, Jyrki
IPC分类号： H03H3/007 , H03H9/24 , H03H9/02
CPC分类号： H03H3/0072 , H03H3/0076 , H03H9/02448 , H03H9/2463 , H03H9/505 , H03H2009/02385 , H03H2009/02503 , H03H2009/2442
摘要： The invention relates to a microelectromechanical resonator and a method of manufacturing thereof. The resonator comprises at least two resonator elements (10A, 10B) made from semiconductor material, the resonator elements being arranged laterally with respect to each other as an array, at least one transducer element (12) coupled to said resonator elements (10A, 10B) and capable of exciting a resonance mode to the resonator elements (10A,10B). According to the invention, said at least one transducer element (12) is a piezoelectric transducer element arranged laterally with respect to the at least two resonator elements (10A, 10B) between the at least two resonator elements (10A, 10B) and adapted to excite to the resonator elements (10A, 10B) as said resonance mode a resonance mode whose resonance frequency is dependent essentially only on the C44 elastic parameter of the elastic modulus of the material of the resonator elements. By means of the invention, electrostatic actuation and problems associated therewith can be avoided and accurate resonators can be manufactured.
摘要翻译：本发明涉及一种微机电谐振器及其制造方法。谐振器包括由半导体材料制成的至少两个谐振器元件（10A，10B），所述谐振器元件相对于彼此横向地布置为阵列;耦合到所述谐振器元件（10A，10B）的至少一个换能器元件）并且能够激励谐振元件（10A，10B）的谐振模式。根据本发明，所述至少一个换能器元件（12）是在所述至少两个谐振器元件（10A，10B）之间相对于所述至少两个谐振器元件（10A，10B）横向布置的压电换能器元件，并适于作为谐振模式将谐振模式激励到谐振器元件（10A，10B），谐振模式的谐振频率基本上仅取决于谐振器元件的材料的弹性模量的C44弹性参数。通过本发明，可以避免静电致动和与之相关的问题，并且可以制造精确的谐振器。

3. 发明申请

WO2011141342A1 MICROELECTROMECHANICAL RESONATOR AND A METHOD FOR PRODUCING THE SAME 审中-公开
标题翻译：微电子谐振器及其制造方法
公开(公告)号：WO2011141342A1
公开(公告)日：2011-11-17
申请号：PCT/EP2011/057178
申请日：2011-05-05
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT , PENSALA, Tuomas , JAAKKOLA, Antti
发明人： PENSALA, Tuomas , JAAKKOLA, Antti
IPC分类号： H03H3/007 , H03H9/24
CPC分类号： H03H3/0076 , H03H9/1057 , H03H9/2436 , H03H2009/02503 , H03H2009/2442
摘要： The invention relates to temperature compensated microelectro-mechanical (MEMS) resonators (300) preferably made of silicon Prior art MEMS resonators have a significant temperature coefficient of resonance frequency, whereby it is difficult to achieve a sufficiently good frequency stability. The inventive MEMS resonator has a resonance plate (310) which resonates in Lamé mode. The resonance plate is p+ doped material, such as silicon doped with boron, and the concentrationof the p+ doping is such that the plate has a temperature coefficient of resonance frequency near to zero. The tensile stress and the second order temperature coefficient can further be reduced by doping the plate with germanium.
摘要翻译：本发明涉及优选由硅制成的温度补偿微电机械（MEMS）谐振器（300）。现有技术的MEMS谐振器具有显着的谐振频率温度系数，从而难以实现足够好的频率稳定性。本发明的MEMS谐振器具有以Lamé模式谐振的谐振板（310）。共振板是p +掺杂材料，例如掺杂硼的硅，并且p +掺杂的浓度使得该板具有接近于零的共振频率的温度系数。通过用锗掺杂板可以进一步降低拉伸应力和二次温度系数。

4. 发明申请

WO2012156585A1 MICROMECHANICAL DEVICE AND METHOD OF DESIGNING THEREOF 审中-公开
标题翻译：微机电设备及其设计方法
公开(公告)号：WO2012156585A1
公开(公告)日：2012-11-22
申请号：PCT/FI2012/050456
申请日：2012-05-11
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT , PRUNNILA, Mika , JAAKKOLA, Antti , PENSALA, Tuomas
发明人： PRUNNILA, Mika , JAAKKOLA, Antti , PENSALA, Tuomas
IPC分类号： H03H9/02 , H03H9/24 , B81B3/00
CPC分类号： B81B3/0072 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81C2201/0164 , B81C2201/0167 , B81C2201/0177 , G06F17/5045 , H03H9/02448 , H03H9/2447 , H03H2009/2442
摘要： The invention relates to a micromechanical device comprising a semiconductor element capable of deflecting or resonating and comprising at least two regions having different material properties and drive or sense means functionally coupled to said semiconductor element. According to the invention, at least one of said regions comprises one or more n-type doping agents, and the relative volumes, doping concentrations, doping agents and/or crystal orientations of the regions being configured so that the temperature sensitivities of the generalized stiffness are opposite in sign at least at one temperature for the regions, and the overall temperature drift of the generalized stiffness of the semiconductor element is 50 ppm or less on a temperature range of 100°C. The device can be a resonator. Also a method of designing the device is disclosed.
摘要翻译：本发明涉及一种微机械装置，其包括能够偏转或谐振并且包括具有不同材料特性的至少两个区域的半导体元件和功能性耦合到所述半导体元件的驱动或感测装置。根据本发明，所述区域中的至少一个包括一种或多种n型掺杂剂，并且所述区域的相对体积，掺杂浓度，掺杂剂和/或晶体取向被构造成使得广义刚度的温度敏感度至少在区域的一个温度下符号相反，半导体元件的整体刚度的总体温度漂移在100℃的温度范围内为50ppm以下。该器件可以是谐振器。还公开了一种设计该设备的方法。

5. 发明申请

WO2012020172A1 MICROMECHANICAL RESONATOR AND METHOD FOR MANUFACTURING THEREOF 审中-公开
标题翻译：微机电谐振器及其制造方法
公开(公告)号：WO2012020172A1
公开(公告)日：2012-02-16
申请号：PCT/FI2011/050710
申请日：2011-08-11
申请人： Teknologian tutkimuskeskus VTT , JAAKKOLA, Antti , PENSALA, Tuomas
发明人： JAAKKOLA, Antti , PENSALA, Tuomas
IPC分类号： H03H3/013 , H03H9/02 , H03H9/24 , B81B3/00
CPC分类号： H03H9/19 , H03H3/013 , H03H9/02448 , H03H2009/02496 , H03H2009/02511 , H03H2009/02519 , H03H2009/2442 , Y10T29/41
摘要： The invention relates to a temperature compensated micromechanical resonator and method of manufacturing thereof. The resonator comprises a resonator element comprising a semiconductor crystal structure, which is doped so as to reduce its temperature coefficient of frequency, transducer means for exciting to the resonator element a vibrational mode. According to the invention the crystal orientation and shape of the resonator element are chosen to allow for a shear mode having a saddle point to be excited to the resonator element, and said transducer means are adapted to excite said shear mode to the resonator element. Accurate micromechanical resonators with low temperature drift can be achieved by means of the invention.
摘要翻译：本发明涉及一种温度补偿微机械谐振器及其制造方法。谐振器包括谐振元件，其包括被掺杂以便降低其频率的温度系数的半导体晶体结构，用于激励谐振器元件的振动模式的振动器装置。根据本发明，谐振器元件的晶体取向和形状被选择为允许具有鞍点的剪切模式被激发到谐振器元件，并且所述换能器装置适于将谐振器元件的所述剪切模式激发。通过本发明可以实现具有低温度漂移的精确的微机械谐振器。

6. 发明申请

WO2016051022A1 TEMPERATURE COMPENSATED BEAM RESONATOR 审中-公开
标题翻译：温度补偿光束谐振器
公开(公告)号：WO2016051022A1
公开(公告)日：2016-04-07
申请号：PCT/FI2015/050657
申请日：2015-10-02
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
发明人： JAAKKOLA, Antti , PEKKO, Panu , PRUNNILA, Mika , PENSALA, Tuomas
IPC分类号： H03H9/24 , H03H9/02
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/2405 , H03H9/2447 , H03H2009/241
摘要： The invention provides a microelectromechanical resonator device comprising a support structure and a resonator manufactured on a (100) or (110) semiconductor wafer, wherein the resonator is suspended to the support structure and comprises at least one beam being doped to a doping concentration of 1.1*10 20 cm -3 or more with an n-type doping agent and is being capable of resonating in a length-extensional, flexural resonance or torsional mode upon suitable actuation. In particular, the doping concentration and angle of the beam are chosen so as to simultaneously produce zero or close to zero second order TCF, and even more preferably zero or close to zero first and second order TCFs, for the resonator in said resonance mode, thus providing a temperature stable resonator.
摘要翻译：本发明提供一种微机电谐振器装置，其包括在（100）或（110）半导体晶片上制造的支撑结构和谐振器，其中所述谐振器悬挂于所述支撑结构，并且包括掺杂至掺杂浓度为1.1 * 1020cm-3以上的n型掺杂剂，并且在适当的致动下能够以长度拉伸的弯曲共振或扭转模式共振。特别地，选择光束的掺杂浓度和角度，以便在所述共振模式中为谐振器同时产生零或接近零二阶TCF，甚至更优选为零或接近零的一阶和二阶TCF，从而提供温度稳定的谐振器。

7. 发明申请

WO2018002440A1 MICROMECHANICAL RESONATOR AND METHOD FOR TRIMMING MICROMECHANICAL RESONATOR 审中-公开
标题翻译：微机械谐振器和修整微机械谐振器的方法
公开(公告)号：WO2018002440A1
公开(公告)日：2018-01-04
申请号：PCT/FI2017/050487
申请日：2017-06-29
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
发明人： JAAKKOLA, Antti , PENSALA, Tuomas , OJA, Aarne , PEKKO, Panu , DEKKER, James R
IPC分类号： H03H9/02 , H03H9/24 , H03H3/007
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/02393 , H03H9/2447
摘要： The present disclosure describes micromechanical resonator, a resonator element for the resonator, and a method for trimming the resonator. The resonator comprises a resonator element having a length, a width, and a thickness, where the length and the width define a plane of the resonator element. The resonator element comprises at least two regions (52, 53) in the plane of the resonator element, wherein the at least two regions have different thicknesses.
摘要翻译：本公开描述了微机械谐振器，用于谐振器的谐振器元件以及用于微调谐振器的方法。谐振器包括具有长度，宽度和厚度的谐振器元件，其中长度和宽度限定谐振器元件的平面。谐振器元件在谐振器元件的平面中包括至少两个区域（52,53），其中至少两个区域具有不同的厚度。

8. 发明申请

WO2018002439A1 MICROMECHANICAL RESONATOR 审中-公开
标题翻译：微机械谐振器
公开(公告)号：WO2018002439A1
公开(公告)日：2018-01-04
申请号：PCT/FI2017/050486
申请日：2017-06-29
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
发明人： JAAKKOLA, Antti , PEKKO, Panu
IPC分类号： H03H9/24 , H03H9/02
摘要： The present disclosure describes a micromechanical resonator comprising a resonator element (40) having a length ( l 1 ) and a width ( w 1 ) that is perpendicular to the length. The resonator element has a length-to-width aspect ratio in a range of 1,8 to 2,2. The resonator element is suspended to a support structure with two or more anchors (41, 43). Each of the two or more anchors is attached to a first location or a second location. The first location is at a shorter side (42) of the resonator element. The first location divides the width ( w 1 ) of the resonator element into a larger portion ( w 3 ) and a smaller portion ( w 2 ) such that a ratio between said smaller portion ( w 2 ) and the whole width ( w 1 ) is in a range of 0,10 to 0,28. The second location is at a longer side (44). The second location divides the length ( l 1 ) of the resonator element into a larger portion ( l 3 ) and a smaller portion ( l 2 ) such that a ratio between said smaller portion ( l 2 ) and the whole length ( l 1 ) is in a range of 0,36 to 0,48.
摘要翻译：本公开描述了一种微机械谐振器，该微机械谐振器包括具有长度（1/1） i> ）和与长度垂直的宽度（＆lt; i> 1 ）。谐振器元件具有在1,8至2,2范围内的长宽比。谐振器元件利用两个或更多个锚（41,43）悬挂到支撑结构。两个或更多个锚中的每一个都连接到第一位置或第二位置。第一位置在谐振器元件的较短侧（42）处。第一个位置将谐振器元件的宽度（i = 1/2）分成一个较大的部分（（例如，小于3分之一）和小部分（小于2分之一）这样，所述较小部分（w2）与所述较小部分（w2） / i>）和整个宽度（w 1 ）在0,10到0的范围内 28。第二个位置在较长的一侧（44）。第二位置将谐振器元件的长度（l 1 / l）分成较大的部分（ 1 （小于3分之一）和较小部分（小于1分之一）的情况下，使得所述较小部分（1≤i≤2）与所述较小部分（1≤i≤2）之间的比值小于所述较小部分 / i>）和整个长度（i 1 ）在0.36到0的范围内，48。

9. 发明申请

WO2017168055A1 STABILE MICROMECHANICAL DEVICES 审中-公开
标题翻译：稳定的微机械装置
公开(公告)号：WO2017168055A1
公开(公告)日：2017-10-05
申请号：PCT/FI2017/050230
申请日：2017-03-31
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
发明人： JAAKKOLA, Antti , PENSALA, Tuomas , PRUNNILA, Mika , PEKKO, Panu , KIIHAMÄKI, Jyrki , OJA, Aarne
IPC分类号： B81B3/00 , B81C1/00
CPC分类号： B81B3/0078 , B81B2201/0235 , B81B2201/0242 , B81B2201/0257 , B81B2201/0264 , B81B2201/038 , B81B2203/0118 , B81B2203/0154 , B81B2203/0163 , B81C1/00293 , B81C2201/013
摘要： The invention provides a micromechanical device comprising a support structure and a deflecting element connected to the support structure, wherein the deflecting element comprises at least one deformable member adapted to deform extensionally, flexurally or torsionally with respect to a deformation axis for allowing deflection of the deflecting element with respect to the support structure. Further, there are means for statically deflecting the deflecting element or detecting the magnitude of static deflection of the deflecting element. According to the invention, the deformable member is made of silicon doped with an n-type doping agent to a doping concentration of at least 1.1*10 20 cm -3 . The invention allows for manufacturing micromechanical devices whose mechanical operation is not affected by prevailing temperature conditions.
摘要翻译：本发明提供了一种微机械装置，其包括支撑结构和连接到支撑结构的偏转元件，其中偏转元件包括至少一个可变形构件，该至少一个可变形构件适于相对于支撑结构弯曲地或扭转地用于允许偏转元件相对于支撑结构偏转的变形轴线。此外，存在用于使偏转元件静态偏转或检测偏转元件的静态偏转量的装置。根据本发明，可变形构件由掺杂有n型掺杂剂的硅制成，掺杂浓度至少为1.1×10 20 cm -3。本发明允许制造机械操作不受主要温度条件影响的微机械装置。

10. 发明申请

WO2016051025A1 TEMPERATURE COMPENSATED PLATE RESONATOR 审中-公开
标题翻译：温度补偿板谐振器
公开(公告)号：WO2016051025A1
公开(公告)日：2016-04-07
申请号：PCT/FI2015/050661
申请日：2015-10-02
申请人： TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
发明人： JAAKKOLA, Antti , PEKKO, Panu , PRUNNILA, Mika , PENSALA, Tuomas
IPC分类号： H03H9/02 , H03H9/24
CPC分类号： H03H9/17 , H01L41/18 , H03H9/02448 , H03H9/2436 , H03H2009/02503 , H03H2009/02527 , H03H2009/2442
摘要： The invention relates to a microelectromechanical resonator device comprising a support structure and a semiconductor resonator plate doped to a doping concentration with an n-type doping agent and being capable of resonating in a width-extensional resonance mode In addition, there is at least one anchor suspending the resonator plate to the support structure and an actuator for exciting the width-extensional resonance mode into the resonator plate. According to the invention, the resonator plate is doped to a doping concentration of 1.2*10 20 cm -3 or more and has a shape which, in combination with said doping concentration and in said width-extensional resonance mode, provides the second order temperature coefficient of frequency (TCF 2 ) to be 12 ppb/C 2 or less at least at one temperature. Several practical implementations are presented.
摘要翻译：本发明涉及一种微机电谐振器装置，其包括支撑结构和掺杂到具有n型掺杂剂的掺杂浓度并且能够以宽 - 拉伸共振模式谐振的半导体谐振器板。此外，存在至少一个锚将谐振器板悬挂到支撑结构上，以及致动器，用于将宽 - 拉伸谐振模式激励到谐振器板中。根据本发明，谐振器板被掺杂到1.2×10 20 cm -3以上的掺杂浓度，并且具有与所述掺杂浓度结合并且在所述宽度 - 拉伸共振模式下提供二阶温度系数的形状的频率（TCF2）至少在一个温度下为12ppb / C2或更小。介绍了几个实际的实现。

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