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    • 8. 发明申请
    • LOW PROFILE IMAGE SENSOR PACKAGE
    • 低剖面图像传感器包装
    • WO2007059193A2
    • 2007-05-24
    • PCT/US2006044301
    • 2006-11-14
    • TESSERA INCHUMPSTON GILESNYSTROM MICHAEL J
    • HUMPSTON GILESNYSTROM MICHAEL J
    • H01L21/00
    • H01L27/14618H01L2224/48091H01L2224/48464H01L2924/00014
    • A microelectronic element such as an imaging semiconductor chip (72) is packaged by bonding a lid wafer (20') having recesses (32) open to its bottom surface to a device wafer (50) including a plurality of the microelectronic elements or chips, so that the recesses overlie active regions such as imaging regions (58) of the device wafer. Where the devices include microlenses (60) associated with an imaging region of each chip, the microlenses may be received in the recesses. Land regions (24') of the lid wafer may be disposed very close to the top surface (52) of the device wafer, as for example, abutting the top surface of the device wafer or separated from such top surface only by an extremely thin coating of a bonding material such as an adhesive or solder. The bonded lid wafer and device wafer may be severed to form individual units (70) . The top surface (22) of the lid wafer may be precisely parallel with the top surface of the device wafer.
    • 诸如成像半导体芯片(72)的微电子元件通过将具有其底表面开口的凹口(32)的盖晶片(20')结合到包括多个微电子元件或芯片的器件晶片(50)而被封装, 使得凹槽覆盖诸如器件晶片的成像区域(58)的有源区域。 在装置包括与每个芯片的成像区域相关联的微透镜(60)的情况下,微透镜可以被容纳在凹部中。 盖晶片的区域(24')可以非常靠近器件晶片的顶表面(52)设置,例如,邻接器件晶片的顶表面或与顶表面分离,仅极薄 粘合材料如粘合剂或焊料的涂覆。 接合的盖子晶片和器件晶片可以被切断以形成单独的单元(70)。 盖晶片的顶表面(22)可以精确地平行于器件晶片的顶表面。