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1. 发明申请

WO2005119360A1 MODIFIED METAL MOLD FOR USE IN IMPRINTING PROCESSES 审中-公开
标题翻译：改进的金属模具用于加工工艺
公开(公告)号：WO2005119360A1
公开(公告)日：2005-12-15
申请号：PCT/EP2005/052423
申请日：2005-05-27
申请人： OBDUCAT AB , KEIL, Matthias , FRENNESSON, Göran , BECK, Marc , HEIDARI, Babak
发明人： KEIL, Matthias , FRENNESSON, Göran , BECK, Marc , HEIDARI, Babak
IPC分类号： G03F7/00
CPC分类号： B05D1/60 , B05D1/185 , B29C33/56 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/31678
摘要： The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected from the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
摘要翻译：本发明涉及一种具有抗粘性的新型金属模具，其特征在于包括贱金属模和包含磷原子和烷基链的氟化烷基磷酸衍生物或氟化烷基聚磷酸衍生物的防粘层。抗粘剂层直接粘结在母模金属模的表面上。贱金属模可以是例如。镍和所述氟化烷基磷酸衍生物或所述氟化烷基聚磷酸衍生物可以选自膦酸，次膦酸，膦酸盐和膦酸盐，次膦酸盐和次膦酸盐或它们各自的低聚物，使得磷原子直接与烷基链结合，使得磷原子直接与烷基链结合。

2. 发明申请

WO2006131153A1 PATTERN REPLICATION WITH INTERMEDIATE STAMP 审中-公开
标题翻译：图案复印与中间印章
公开(公告)号：WO2006131153A1
公开(公告)日：2006-12-14
申请号：PCT/EP2005/055729
申请日：2005-11-03
申请人： OBDUCAT AB , HEIDARI, Babak , LÖFSTRAND, Anette , BOLMSJÖ, Erik , THEANDER, Erik , BECK, Marc
发明人： HEIDARI, Babak , LÖFSTRAND, Anette , BOLMSJÖ, Erik , THEANDER, Erik , BECK, Marc
IPC分类号： G03F7/00 , B29C39/26
CPC分类号： B29C33/3857 , B29C35/0888 , B29C59/022 , B29C59/026 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The invention relates to a two-step process for transferring a pattern from a template (1) to a target surface of a substrate, by creating an intermediate flexible polymer stamp (5) from the template in a primary step, and then using the polymer stamp to make an imprint in a radiation-sensitive moldable layer on the target surface in a secondary step. In the secondary step, the process steps of pressing the polymer stamp and the substrate against each other, UV exposure of the moldable layer through the polymer stamp, and postbaking of the radiated moldable layer, are all performed at a control constant temperature, in order to eliminate damages to the pattern created in the moldable layer caused by thermal expansion effects.
摘要翻译：本发明涉及通过在初级步骤中从模板中生成中间柔性聚合物印模（5），然后使用聚合物（2），将图案从模板（1）转移到基材的目标表面的两步法在第二步骤中对目标表面上的辐射敏感的可成型层进行压印。在第二步骤中，将聚合物印模和基板彼此挤压，通过聚合物印模的可模制层的UV曝光和辐射的可模塑层的后烘烤的工艺步骤全部按照控制恒温进行以消除由热膨胀效应引起的在可模塑层中产生的图案的损坏。

3. 发明申请

WO2005109095A2 METHOD FOR IMPRINT LITHOGRAPHY AT CONSTANT TEMPERATURE 审中-公开
标题翻译：用于在恒定温度下绘制平版印刷的方法
公开(公告)号：WO2005109095A2
公开(公告)日：2005-11-17
申请号：PCT/EP2004/053106
申请日：2004-11-25
申请人： OBDUCAT AB , BECK, Marc , HEIDARI, Babak , BOLMSJÖ, Erik , THEANDER, Erik
发明人： BECK, Marc , HEIDARI, Babak , BOLMSJÖ, Erik , THEANDER, Erik
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , B29C35/0888 , B29C43/003 , B29C43/021 , B29C43/10 , B29C59/022 , B29C2035/0827 , B29C2043/025 , B29C2043/3647 , B29C2059/023 , B82Y10/00 , B82Y40/00
摘要： Method for transferring a pattern from a template (10) having a structured surface (11) to a substrate (12) carrying a surface layer (14) of a material devised to 5 solidify upon exposure to radiation, comprising: arranging said template and substrate mutually parallel in an imprint apparatus, with said structured surface facing said surface layer; heating the template and the substrate to a temperature T p by means of a heater device (20); and while maintaining said temperature T p , performing the steps of: pressing the template towards the substrate for imprinting said pattern into said layer; exposing said layer to radiation (19) for solidifying the layer, and - postbaking the layer.
摘要翻译：用于将图案从具有结构化表面（11）的模板（10）转移到承载设计为5的材料的表面层（14）的基底（12）的方法，其在暴露于辐射时固化，包括：布置所述模板和基底在压印装置中相互平行，所述结构化表面面向所述表面层; 通过加热器装置（20）将模板和衬底加热至温度Tp; 并且在保持所述温度Tp的同时，执行以下步骤：将模板压向基板以将所述图案压印到所述层中; 将所述层暴露于辐射（19）以固化该层，以及 - 对该层进行后烘烤。

4. 发明申请

WO2005054948A2 DEVICE AND METHOD FOR LARGE AREA LITHOGRAPHY 审中-公开
标题翻译：用于大面积地平线的装置和方法
公开(公告)号：WO2005054948A2
公开(公告)日：2005-06-16
申请号：PCT/EP2004/052769
申请日：2004-11-03
申请人： OBDUCAT AB , HEIDARI, Babak , BECK, Marc
发明人： HEIDARI, Babak , BECK, Marc
IPC分类号： G03F
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/2012 , H05K3/0014 , H05K3/0023 , H05K3/107 , H05K2201/0108 , H05K2203/0108
摘要： Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104;105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114; 116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template.
摘要翻译：用于将图案从具有结构化表面的模板（10）传送到承载可辐射聚合流体（14）的表面层的基底（12）的装置和方法。该设备包括具有相对表面（104; 105）的第一主要部分（101）和第二主要部分（102），用于调节所述主要部分之间的间距（115），用于支撑所述模板的支撑装置（106）在与所述结构化表面相对于所述表面层的所述间隔中相互平行接合的衬底，设计成将辐射发射到所述间隔中的辐射源（110）。空腔（115）具有第一壁，该第一壁包括被设计为接合所述模板或基底的柔性膜（113），并且提供装置（114; 116），用于将可调节的超压施加到存在于所述空腔中的介质，由此均匀分布在基板和模板之间的整个接触表面上获得力。

5. 发明申请

WO2003005124A1 A STAMP HAVING AN ANTISTICKING LAYER AND A METHOD OF FORMING OF REPAIRING SUCH A STAMP 审中-公开
标题翻译：具有防伪层的印章和修复这种印章的形成方法
公开(公告)号：WO2003005124A1
公开(公告)日：2003-01-16
申请号：PCT/SE2002/001334
申请日：2002-07-04
申请人： OBDUCAT AKTIEBOLAG , HEIDARI, Babak , LING, Torbjörn
发明人： HEIDARI, Babak , LING, Torbjörn
IPC分类号： G03F7/00
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017
摘要： A stamp for use in transferring a pattern in nano-scale has a monomolecular antisticking layer. The anti-sticking layer comprises molecular chains, which are covalently bound to the surface of the stamp and which each comprise at least one fluorine-containing group. Each molecular chain contains a group Q, which comprises a bond which is weaker than the other bonds in the molecular chain as well as the covalent bond that binds the molecular chain to the surface of the stamp. Splitting of said bond in the group Q creates a group Q1, which is attached to the part of the molecular chain being left on the surface of the stamp and which is capable of reacting with a fluorine-containing compound to restore the antisticking layer. In a method of manufacturing a stamp for use in transferring a pattern in nanoscale, the stamp is provided with the above-mentioned molecular chain. In a method of repairing a damaged antisticking layer of the above-mentioned stamp, the stamp is treated with a repairing reagent, which has a coupling end, which is capable of reacting with the group Q1, and a fluorine-containing group located at the other end of the repairing reagent.
摘要翻译：用于转印纳米级图案的印花具有单分子抗粘层。防粘层包括分子链，其共价结合到印模的表面，并且每个包含至少一个含氟基团。每个分子链包含基团Q，其包含弱于分子链中的其它键的键以及将分子链结合到印模表面的共价键。分组Q中的所述键形成组Q1，其连接到分子链的部分留在印模的表面上，并且能够与含氟化合物反应以还原防粘层。在制造用于以纳米级转印图案的印模的方法中，印模具有上述分子链。在修复上述印模的损伤抗粘层的方法中，用能够与基团Q1反应的具有偶合端的修复试剂和位于所述印模的含氟基团的修饰试剂进行处理修复试剂的另一端。

6. 发明申请

WO2016102125A1 MOUNTING AND DEMOLDING DEVICE 审中-公开
标题翻译：安装和拆卸设备
公开(公告)号：WO2016102125A1
公开(公告)日：2016-06-30
申请号：PCT/EP2015/076936
申请日：2015-11-18
申请人： OBDUCAT AB
发明人： HEIDARI, Babak , LARSSON, Göran
IPC分类号： B29C37/00 , B29C59/04 , G03F7/00
CPC分类号： B29C37/0017 , B29C59/046 , G03F7/0002
摘要： A demolding device (3) for use in an imprint machine, in which machine a foil (31) is intermittently passed in a feed direction over a press region (7) where a stamp is pressed against the foil for imprinting a surface pattern. The demolding device comprises a carrier (12), a pressing roller (9) mounted in the carrier, and a demolding roller (8) mounted parallel to the pressing roller in the carrier, wherein the carrier is configured to slide over the press region against the feed direction while rolling the foil under the pressing roller and over the demolding roller for detaching the foil from the stamp after imprinting of the pattern.
摘要翻译：一种在压印机中使用的脱模装置（3），其中机器将箔片（31）沿进给方向间歇地通过挤压区域（7），其中印模被压靠在箔上以压印表面图案。脱模装置包括载体（12），安装在载体中的加压辊（9）和平行于载体中的加压辊安装的脱模辊（8），其中载体构造成在压榨区域上滑动抵抗进给方向，同时在加压辊下滚动箔片并在脱模辊上滚动以在印模图案之后将箔从印模上分离。

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