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1. 发明申请

WO2005119360A1 MODIFIED METAL MOLD FOR USE IN IMPRINTING PROCESSES 审中-公开
标题翻译：改进的金属模具用于加工工艺
公开(公告)号：WO2005119360A1
公开(公告)日：2005-12-15
申请号：PCT/EP2005/052423
申请日：2005-05-27
申请人： OBDUCAT AB , KEIL, Matthias , FRENNESSON, Göran , BECK, Marc , HEIDARI, Babak
发明人： KEIL, Matthias , FRENNESSON, Göran , BECK, Marc , HEIDARI, Babak
IPC分类号： G03F7/00
CPC分类号： B05D1/60 , B05D1/185 , B29C33/56 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/31678
摘要： The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected from the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
摘要翻译：本发明涉及一种具有抗粘性的新型金属模具，其特征在于包括贱金属模和包含磷原子和烷基链的氟化烷基磷酸衍生物或氟化烷基聚磷酸衍生物的防粘层。抗粘剂层直接粘结在母模金属模的表面上。贱金属模可以是例如。镍和所述氟化烷基磷酸衍生物或所述氟化烷基聚磷酸衍生物可以选自膦酸，次膦酸，膦酸盐和膦酸盐，次膦酸盐和次膦酸盐或它们各自的低聚物，使得磷原子直接与烷基链结合，使得磷原子直接与烷基链结合。

2. 发明申请

WO2022189313A1 METHOD FOR FACILITATING DEMOLDING UPON PATTERN TRANSFER 审中-公开
公开(公告)号：WO2022189313A1
公开(公告)日：2022-09-15
申请号：PCT/EP2022/055653
申请日：2022-03-05
申请人： OBDUCAT AB
发明人： VENKATESH KRISHNAN, Prasanna
IPC分类号： G03F7/00
摘要： A method for facilitating demolding of a substrate from an imprint template, the method comprising: providing (S510) the template and the substrate in a sandwich arrangement with a structured surface of the template in contact with a target surface of the substrate; applying heat (S520) to soften a molding layer on the target surface, wherein said molding layer is a thermoplastic material having a minimum glass transition temperature, Tg. > 50°C and Young's modulus > 1000 MPa, and wherein the molding layer is heated above Tg.; pressing (S530) the sandwich arrangement together to imprint a pattern of the structured surface into the heated molding layer; submerging (S550) the sandwich arrangement in a cooling liquid to harden the molding layer; and separating (S560) the template from the patterned substrate.

3. 发明申请

WO2016102125A1 MOUNTING AND DEMOLDING DEVICE 审中-公开
标题翻译：安装和拆卸设备
公开(公告)号：WO2016102125A1
公开(公告)日：2016-06-30
申请号：PCT/EP2015/076936
申请日：2015-11-18
申请人： OBDUCAT AB
发明人： HEIDARI, Babak , LARSSON, Göran
IPC分类号： B29C37/00 , B29C59/04 , G03F7/00
CPC分类号： B29C37/0017 , B29C59/046 , G03F7/0002
摘要： A demolding device (3) for use in an imprint machine, in which machine a foil (31) is intermittently passed in a feed direction over a press region (7) where a stamp is pressed against the foil for imprinting a surface pattern. The demolding device comprises a carrier (12), a pressing roller (9) mounted in the carrier, and a demolding roller (8) mounted parallel to the pressing roller in the carrier, wherein the carrier is configured to slide over the press region against the feed direction while rolling the foil under the pressing roller and over the demolding roller for detaching the foil from the stamp after imprinting of the pattern.
摘要翻译：一种在压印机中使用的脱模装置（3），其中机器将箔片（31）沿进给方向间歇地通过挤压区域（7），其中印模被压靠在箔上以压印表面图案。脱模装置包括载体（12），安装在载体中的加压辊（9）和平行于载体中的加压辊安装的脱模辊（8），其中载体构造成在压榨区域上滑动抵抗进给方向，同时在加压辊下滚动箔片并在脱模辊上滚动以在印模图案之后将箔从印模上分离。

4. 发明申请

WO03024172A8 A METHOD OF ETCHING COPPER ON CARDS 审中-公开
标题翻译：铜的蚀刻方法
公开(公告)号：WO03024172A8
公开(公告)日：2004-05-06
申请号：PCT/SE0201602
申请日：2002-09-09
申请人： OBDUCAT AB , FRENNESSON GOERAN , BIERINGS GUST , BJARNASON BJARNI , SJOEBERG JENNY
发明人： FRENNESSON GOERAN , BIERINGS GUST , BJARNASON BJARNI , SJOEBERG JENNY
IPC分类号： C25F3/02 , C25F7/00 , H05K3/07
CPC分类号： H05K3/07 , C25F3/02 , C25F7/00
摘要： Etching of copper on a card is achieved by applying an electrical voltage between a cathode (102) and the card (42), the card (42) thereby forming an anode. The cathode (102) and the card (42) are immersed in an electrolyte comprising a first component, which may be reduced from a first state in the form of an ion having a metal atom with a first positive oxidation number to a second state in the form of an ion having said metal atom with a second positive oxidation number, which is less than said first positive oxidation number. A first redox potential in the electrolyte for reduction from the first to the second state is larger than a second redox potential in the electrolyte for reduction of divalent copper ions to metallic copper. During the etching metallic copper on the card is oxidised and transferred into positively charged copper ions while the first component is reduced from its first state to its second state. The quality of the etched structures on the card is improved since no metallic copper is precipitated on the cathode.
摘要翻译：通过在阴极（102）和卡（42）之间施加电压，卡（42）从而形成阳极来实现卡上铜的蚀刻。将阴极（102）和卡（42）浸入包含第一组分的电解质中，该第一组分可以从具有第一正氧化数的金属原子的离子形式的第一状态还原为第二状态具有第二正氧化数的具有所述金属原子的离子的形式，其小于所述第一正氧化数。用于从第一状态到第二状态还原的电解质中的第一氧化还原电位大于用于还原二价铜离子至金属铜的电解质中的第二氧化还原电位。在蚀刻期间，卡上的金属铜被氧化并转移到带正电荷的铜离子中，同时第一组分从第一状态降低到其第二状态。卡上蚀刻结构的质量得到改善，因为阴极上没有金属铜沉淀。

5. 发明申请

WO2004021083A1 DEVICE FOR TRANSFERRING A PATTERN TO AN OBJECT 审中-公开
标题翻译：用于将图案传送到对象的设备
公开(公告)号：WO2004021083A1
公开(公告)日：2004-03-11
申请号：PCT/SE2003/001245
申请日：2003-07-31
申请人： OBDUCAT AB , OLSSON, Lennart , ANDERSSON, Peter
发明人： OLSSON, Lennart , ANDERSSON, Peter
IPC分类号： G03F7/00
CPC分类号： G03F9/7003 , B29C59/022 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , G03F9/7042 , G03F9/7053 , G11B5/855
摘要： A device (4) for transferring a pattern to an object (2). The invention relates especially to production of micro and nanostructures. The device comprises an alignment means (10) arranged in connection with a first contacting means (7) for controlling the motion of the first stamp (8) in a direction perpendicular to the pressing direction (A), and a second contacting means (11) having a second stamp (12) adapted to imprint a second pattern in the second surface (6) of the object (2), and a pressing means (9) further adapted to press the second stamp (12) into contact with the second surface (6) of the object (2) in the pressing direction (A). Hereby is obtained a device of a simple design, which has a high accuracy of the alignment of the stamps in relation to the object.
摘要翻译：一种用于将图案转印到物体（2）的装置（4）。本发明特别涉及微结构和纳米结构的生产。该装置包括与第一接触装置（7）连接的对准装置（10），用于在垂直于按压方向（A）的方向上控制第一印模（8）的运动;以及第二接触装置）具有适于将第二图案压印在所述物体（2）的第二表面（6）中的第二印模（12）和进一步适于将所述第二印模（12）按压到所述第二印模（12）的第二印模物体（2）的按压方向（A）的表面（6）。由此获得了简单设计的装置，其具有相对于物体的邮票的对准的高精度。

6. 发明申请

WO1997016896A1 CRYPTOSYSTEM FOR OPTICAL STORAGE 审中-公开
标题翻译：用于光存储的CRYPTOSYSTEM
公开(公告)号：WO1997016896A1
公开(公告)日：1997-05-09
申请号：PCT/SE1996001391
申请日：1996-10-30
申请人： OBDUCAT AB , JIAWOOK, Rizgar, Nabi , HEIDARI, Babak , OLSSON, Lennart
发明人： OBDUCAT AB
IPC分类号： H04K01/00
CPC分类号： G06F21/80 , G06F2211/007 , G06F2221/2107 , G11B20/00086 , G11B20/0021 , G11B20/1806 , H04N5/913 , H04N2005/91364
摘要： A method of encrypting and decrypting digital data such as text, numeric, images, pictures, especially tailored for optical compact discs; said method comprising of ciphering/deciphering and error detection and correction using algebraic method, namely Reed-Solomon code.
摘要翻译：一种加密和解密诸如文本，数字，图像，图片等数字数据的方法，特别是针对光学光盘; 所述方法包括使用代数方法的加密/解密和错误检测和校正，即Reed-Solomon码。

7. 发明申请

WO2006131153A1 PATTERN REPLICATION WITH INTERMEDIATE STAMP 审中-公开
标题翻译：图案复印与中间印章
公开(公告)号：WO2006131153A1
公开(公告)日：2006-12-14
申请号：PCT/EP2005/055729
申请日：2005-11-03
申请人： OBDUCAT AB , HEIDARI, Babak , LÖFSTRAND, Anette , BOLMSJÖ, Erik , THEANDER, Erik , BECK, Marc
发明人： HEIDARI, Babak , LÖFSTRAND, Anette , BOLMSJÖ, Erik , THEANDER, Erik , BECK, Marc
IPC分类号： G03F7/00 , B29C39/26
CPC分类号： B29C33/3857 , B29C35/0888 , B29C59/022 , B29C59/026 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The invention relates to a two-step process for transferring a pattern from a template (1) to a target surface of a substrate, by creating an intermediate flexible polymer stamp (5) from the template in a primary step, and then using the polymer stamp to make an imprint in a radiation-sensitive moldable layer on the target surface in a secondary step. In the secondary step, the process steps of pressing the polymer stamp and the substrate against each other, UV exposure of the moldable layer through the polymer stamp, and postbaking of the radiated moldable layer, are all performed at a control constant temperature, in order to eliminate damages to the pattern created in the moldable layer caused by thermal expansion effects.
摘要翻译：本发明涉及通过在初级步骤中从模板中生成中间柔性聚合物印模（5），然后使用聚合物（2），将图案从模板（1）转移到基材的目标表面的两步法在第二步骤中对目标表面上的辐射敏感的可成型层进行压印。在第二步骤中，将聚合物印模和基板彼此挤压，通过聚合物印模的可模制层的UV曝光和辐射的可模塑层的后烘烤的工艺步骤全部按照控制恒温进行以消除由热膨胀效应引起的在可模塑层中产生的图案的损坏。

8. 发明申请

WO2006114369A2 MEANS FOR TRANSFERRING A PATTERN TO AN OBJECT 审中-公开
标题翻译：将图案传送到对象的手段
公开(公告)号：WO2006114369A2
公开(公告)日：2006-11-02
申请号：PCT/EP2006061571
申请日：2006-04-13
申请人： OBDUCAT AB , BECK MARC
发明人： BECK MARC
IPC分类号： G03F7/00 , G03F1/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F1/50 , G03F7/2014
摘要： A template (10) having a first surface (13, 14), usable for transferring a pattern of the first surface to an object (20) having a second surface (23) covered by a light-sensitive coating (22), by contacting the patterned first surface with the coating, wherein the template comprises a carrier base (11) of e.g. nickel, and a waveguide (14) is disposed on the carrier base at the first surface. The waveguide is devised to lead light therein, introduced at a radiation input, and to leak evanescent waves to portions (24) of the coating corresponding to said pattern. The template may also be devised with an opaque shield (15), disposed at the first surface over selected portions of the waveguide, which serves to define where the evanescent waves can leak to the coating. The invention also relates to a method and an apparatus for using the template, and a method for manufacturing it.
摘要翻译：具有第一表面（13,14）的模板（10,14），其可用于将第一表面的图案转印到具有被感光涂层（22）覆盖的第二表面（23）的物体（20）上，通过接触所述图案化的第一表面具有所述涂层，其中所述模板包括载体基底（11）镍，并且波导（14）在第一表面处设置在载体基座上。波导被设计成在其中引入光，在辐射输入处引入，并且将ev逝波泄漏到对应于所述图案的涂层的部分（24）。模板也可以用不透明屏蔽（15）设计，该屏蔽层设置在波导的选定部分上的第一表面处，其用于限定ev逝波可以泄漏到涂层的位置。本发明还涉及一种使用该模板的方法和装置及其制造方法。

9. 发明申请

WO2005109095A3 METHOD FOR IMPRINT LITHOGRAPHY AT CONSTANT TEMPERATURE 审中-公开
标题翻译：用于在恒定温度下绘制平版印刷的方法
公开(公告)号：WO2005109095A3
公开(公告)日：2006-08-10
申请号：PCT/EP2004053106
申请日：2004-11-25
申请人： OBDUCAT AB , BECK MARC , HEIDARI BABAK , BOLMSJOE ERIK , THEANDER ERIK
发明人： BECK MARC , HEIDARI BABAK , BOLMSJOE ERIK , THEANDER ERIK
IPC分类号： G03F7/00 , B29C43/02 , B29C43/10 , B81C99/00 , G03F1/00 , G03F7/20 , H01L21/00
CPC分类号： G03F7/0002 , B29C35/0888 , B29C43/003 , B29C43/021 , B29C43/10 , B29C59/022 , B29C2035/0827 , B29C2043/025 , B29C2043/3647 , B29C2059/023 , B82Y10/00 , B82Y40/00
摘要： Method for transferring a pattern from a template (10) having a structured surface (11) to a substrate (12) carrying a surface layer (14) of a material devised to 5 solidify upon exposure to radiation, comprising: arranging said template and substrate mutually parallel in an imprint apparatus, with said structured surface facing said surface layer; heating the template and the substrate to a temperature T p by means of a heater device (20); and while maintaining said temperature T p , performing the steps of: pressing the template towards the substrate for imprinting said pattern into said layer; exposing said layer to radiation (19) for solidifying the layer, and - postbaking the layer.
摘要翻译：用于将图案从具有结构化表面（11）的模板（10）转移到承载设计为5的材料的表面层（14）的基底（12）的方法，其在暴露于辐射时固化，包括：布置所述模板和基底在压印装置中相互平行，所述结构化表面面向所述表面层; 通过加热器装置（20）将模板和衬底加热到温度T 。并且在保持所述温度的同时，执行以下步骤：将模板压向衬底以将所述图案压印到所述层中; 将所述层暴露于辐射（19）以固化该层，以及 - 对该层进行后烘烤。

10. 发明申请

WO2005040932A3 APPARATUS AND METHOD FOR ALIGNING SURFACES 审中-公开
公开(公告)号：WO2005040932A3
公开(公告)日：2005-05-06
申请号：PCT/EP2004/052656
申请日：2004-10-25
申请人： OBDUCAT AB , MONTELIUS, Lars , BECK, Marc , CARLBERG, Patrick , WAHLSTRÖM, Claes-Göran , PERSSON, Anders , ANDERSSON-ENGELS, Stefan
发明人： MONTELIUS, Lars , BECK, Marc , CARLBERG, Patrick , WAHLSTRÖM, Claes-Göran , PERSSON, Anders , ANDERSSON-ENGELS, Stefan
IPC分类号： G03F9/00
摘要： Method, apparatus and stamp for aligning a first surface (11) of a first object (10) with a second surface (22) of a second object (20), facing said first surface, wherein light of a predetermined wavelength is introduced into one (10) of said objects and caused to propagate by internal reflection therein. The first and second surfaces carry correlating structures (13,25) which, when arranged at close distance from each other, couple light from said one object to the other of said objects by near-field tunnelling, to a degree dependent on the overlap of said structures. A light detector (26) is devised to detect a signal which is dependent on the amount of light coupled between said objects, for producing an alignment control signal. The invention is suitable for use in nanoimprint lithography.

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