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    • 10. 发明申请
    • EVAPORATION SOURCE FOR ORGANIC MATERIAL
    • 有机材料蒸发源
    • WO2015139777A1
    • 2015-09-24
    • PCT/EP2014/055744
    • 2014-03-21
    • APPLIED MATERIALS, INC.DIEGUEZ-CAMPO, Jose, ManuelBANGERT, StefanLOPP, AndreasSCHÜSSLER, Uwe
    • DIEGUEZ-CAMPO, Jose, ManuelBANGERT, StefanLOPP, AndreasSCHÜSSLER, Uwe
    • C23C14/24C23C14/04C23C14/56
    • C23C14/243C23C14/042C23C14/56H01L51/001H01L51/0011H01L51/56
    • An evaporation source array for depositing two or more organic materials on a substrate is described. The evaporation source array includes two or more evaporation crucibles, wherein the two or more evaporation crucibles are configured to evaporate the two or more organic materials, two or more distribution pipes with outlets provided along the length of the two or more distribution pipes, wherein a first distribution pipe of the two or more distribution pipes is in fluid communication with a first evaporation crucible of the two or more evaporation crucibles, two or more heat shields, which surround the first distribution pipe, a cooling shield arrangement provided at at least one side of the two or more distribution pipes, wherein the at least one side is the side at which the outlets are provided, and a cooling element provided at or in the cooling shield arrangement for active cooling of the cooling shield arrangement.
    • 描述了用于在衬底上沉积两种或更多种有机材料的蒸发源阵列。 蒸发源阵列包括两个或更多个蒸发坩埚,其中两个或更多个蒸发坩埚被配置为蒸发两个或更多个有机材料,两个或更多个分配管,其具有沿着两个或更多个分配管的长度设置的出口,其中 两个或更多个分配管的第一分配管与两个或更多个蒸发坩埚的第一蒸发坩埚,围绕第一分配管的两个或更多个隔热罩流体连通,设置在至少一个侧面上的冷却屏蔽装置 的两个或更多个分配管,其中所述至少一个侧面是设置所述出口的一侧,以及设置在所述冷却屏蔽装置中或所述冷却屏蔽装置中的用于主动冷却所述冷却屏蔽装置的冷却元件。