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    • 10. 发明申请
    • CLAMP ARRANGEMENT FOR A SUBSTRATE CARRIER, AND METHOD FOR OPENING AND FASTENING A CLAMP ARRANGEMENT
    • 底板承载件的夹紧装置,以及打开和紧固夹紧装置的方法
    • WO2015188878A1
    • 2015-12-17
    • PCT/EP2014/062420
    • 2014-06-13
    • APPLIED MATERIALS, INC.BRÜNING, AndreHINTERSCHUSTER, Reiner
    • BRÜNING, AndreHINTERSCHUSTER, Reiner
    • H01L21/67H01L21/687
    • H01L21/68707H01L21/67115H01L21/68728
    • A clamp device (100), a clamp tool (200), and a clamp arrangement (300) for clamping a substrate (480) to be processed in a substrate carrier (500) are described. The clamp device includes a first lever (110) and a second lever (120), wherein the first lever (110) is movably supported in a first joint (115), the second lever (120) is movably supported in a second joint (125), and wherein the first lever (110) and the second lever (120) are movably connected to each other by a first common joint (140). The second lever (120) includes a clamping portion (121) adapted for being pressed against the substrate (480; 510) to be processed. At least one of the first lever (110) and the second lever (120) comprises a contact portion (116; 126) for providing functional contact to a clamp tool (200; 610). The clamp tool is adapted for opening and fastening the clamp device.
    • 描述了夹持装置(100),夹紧工具(200)和用于夹持待处理衬底(480)在衬底载体(500)中的夹具装置(300)。 夹持装置包括第一杆(110)和第二杆(120),其中第一杆(110)可移动地支撑在第一接头(115)中,第二杆(120)可移动地支撑在第二接头 125),并且其中所述第一杆(110)和所述第二杆(120)通过第一公共接头(140)可移动地彼此连接。 第二杆(120)包括适于被压靠待加工的衬底(480; 510)的夹紧部分(121)。 所述第一杆(110)和所述第二杆(120)中的至少一个包括用于向夹具(200; 610)提供功能接触的接触部分(116; 126)。 夹具用于打开和固定夹紧装置。