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1. 发明申请

WO2017194098A1 METHODS OF OPERATING A DEPOSITION APPARATUS, AND DEPOSITION APPARATUS 审中-公开
标题翻译：操作沉积设备的方法和沉积设备
公开(公告)号：WO2017194098A1
公开(公告)日：2017-11-16
申请号：PCT/EP2016/060440
申请日：2016-05-10
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LOPP, Andreas , WURSTER, Harald , HAAS, Dieter
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LOPP, Andreas , WURSTER, Harald , HAAS, Dieter
IPC分类号： C23C14/12 , C23C14/24 , C23C14/04 , C23C16/44 , C23C16/455 , C23C14/56 , H01L51/56
摘要： A method of operating a deposition apparatus is provided. The method comprises: Deposition of an evaporated source material on a substrate (10) by guiding the evaporated source material from one or more outlets (22) of an evaporation source (20) toward the substrate (10), wherein part of the evaporated source material is blocked by and attaches to a shielding device (30) arranged between the one or more outlets (22) and the substrate (10), followed by a cleaning of the shielding device (30) by at least locally heating the shielding device (30) for releasing at least part of the attached source material from the shielding device (30). According to a further aspect, a deposition apparatus is provided that can be operated according to the described methods.
摘要翻译：提供了一种操作沉积装置的方法。该方法包括：通过将蒸发源材料从蒸发源（20）的一个或多个出口（22）引向衬底（10）而将蒸发源材料沉积在衬底（10）上，其中部分蒸发源材料被设置在一个或多个出口（22）和衬底（10）之间的防护装置（30）阻挡并附接到防护装置（30），接着通过至少局部加热防护装置（30）来清洁防护装置（30）用于从所述防护装置（30）释放至少部分所附着的源材料。根据另一方面，提供了一种可根据所述方法操作的沉积设备。

2. 发明申请

WO2017194097A1 EVAPORATION SOURCE FOR DEPOSITING AN EVAPORATED MATERIAL, AND METHOD FOR DEPOSITING AN EVAPORATED MATERIAL 审中-公开
标题翻译：用于沉积蒸发材料的蒸发源以及沉积蒸发材料的方法
公开(公告)号：WO2017194097A1
公开(公告)日：2017-11-16
申请号：PCT/EP2016/060439
申请日：2016-05-10
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , WURSTER, Harald , LOPP, Andreas , HAAS, Dieter
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , WURSTER, Harald , LOPP, Andreas , HAAS, Dieter
IPC分类号： C23C14/04 , C23C14/12 , C23C14/24 , H01L51/00
CPC分类号： C23C14/24 , C23C14/04 , C23C14/042 , C23C14/12 , C23C14/243 , H01L51/001 , H01L51/50
摘要： Embodiments described herein relate to an evaporation source (20) for depositing an evaporated source material on a substrate. The evaporation source (20) comprises one or more distribution pipes (106) with a plurality of nozzles (22), wherein each nozzle of the plurality of nozzles (22) is configured for directing a plume of evaporated source material toward the substrate (10); and a shielding device (30) comprising a plurality of apertures (32), wherein at least one aperture of the plurality of apertures (32) is configured to shape the plume (318) of evaporated source material emitted from a single associated nozzle. According to a further aspect, a shielding device for an evaporation source as well as methods of depositing an evaporated source material on a substrate are described.
摘要翻译：这里描述的实施例涉及用于将蒸发的源材料沉积在基底上的蒸发源（20）。所述蒸发源（20）包括具有多个喷嘴（22）的一个或多个分配管（106），其中所述多个喷嘴（22）中的每个喷嘴被配置用于将蒸发源材料的羽流朝向所述衬底（10 ）; 以及包括多个孔（32）的防护装置（30），其中所述多个孔（32）中的至少一个孔配置成对从单个相关联的喷嘴发射的蒸发源材料的羽流（318）进行成形。根据另一方面，描述了用于蒸发源的屏蔽装置以及在基底上沉积蒸发的源材料的方法。

3. 发明申请

WO2015139777A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料蒸发源
公开(公告)号：WO2015139777A1
公开(公告)日：2015-09-24
申请号：PCT/EP2014/055744
申请日：2014-03-21
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose, Manuel , BANGERT, Stefan , LOPP, Andreas , SCHÜSSLER, Uwe
发明人： DIEGUEZ-CAMPO, Jose, Manuel , BANGERT, Stefan , LOPP, Andreas , SCHÜSSLER, Uwe
IPC分类号： C23C14/24 , C23C14/04 , C23C14/56
CPC分类号： C23C14/243 , C23C14/042 , C23C14/56 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source array for depositing two or more organic materials on a substrate is described. The evaporation source array includes two or more evaporation crucibles, wherein the two or more evaporation crucibles are configured to evaporate the two or more organic materials, two or more distribution pipes with outlets provided along the length of the two or more distribution pipes, wherein a first distribution pipe of the two or more distribution pipes is in fluid communication with a first evaporation crucible of the two or more evaporation crucibles, two or more heat shields, which surround the first distribution pipe, a cooling shield arrangement provided at at least one side of the two or more distribution pipes, wherein the at least one side is the side at which the outlets are provided, and a cooling element provided at or in the cooling shield arrangement for active cooling of the cooling shield arrangement.
摘要翻译：描述了用于在衬底上沉积两种或更多种有机材料的蒸发源阵列。蒸发源阵列包括两个或更多个蒸发坩埚，其中两个或更多个蒸发坩埚被配置为蒸发两个或更多个有机材料，两个或更多个分配管，其具有沿着两个或更多个分配管的长度设置的出口，其中两个或更多个分配管的第一分配管与两个或更多个蒸发坩埚的第一蒸发坩埚，围绕第一分配管的两个或更多个隔热罩流体连通，设置在至少一个侧面上的冷却屏蔽装置的两个或更多个分配管，其中所述至少一个侧面是设置所述出口的一侧，以及设置在所述冷却屏蔽装置中或所述冷却屏蔽装置中的用于主动冷却所述冷却屏蔽装置的冷却元件。

4. 发明申请

WO2017054890A1 VARIABLE SHAPER SHIELD FOR EVAPORATORS AND METHOD FOR DEPOSITING AN EVAPORATED SOURCE MATERIAL ON A SUBSTRATE 审中-公开
标题翻译：用于蒸发器的可变形状防护罩和在基底上沉积蒸发源材料的方法
公开(公告)号：WO2017054890A1
公开(公告)日：2017-04-06
申请号：PCT/EP2015/072865
申请日：2015-10-02
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LANDGRAF, Heike , LOPP, Andreas
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LANDGRAF, Heike , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/04 , H01L51/00
CPC分类号： C23C14/24 , C23C14/042 , C23C14/044 , H01L51/0011
摘要： A shielding device (320) for an evaporation source configured to guide evaporated source material through a plurality of outlets distributed along a length direction of the evaporation source. The shielding device including three or more spaced-apart shaper shield segments (325) configured for blocking evaporated source material (312) depending on the emission angle of the plume of evaporated source material from the plurality of outlets in a plane parallel to the length direction of the evaporation source.
摘要翻译：一种用于蒸发源的屏蔽装置（320），其构造成将蒸发的源材料引导通过沿蒸发源的长度方向分布的多个出口。所述屏蔽装置包括三个或更多个间隔开的成形器屏蔽段（325），其构造成用于根据来自多个出口的蒸发源材料的羽流在与长度方向平行的平面中的发射角来阻挡蒸发的源材料（312）的蒸发源。

5. 发明申请

WO2015139776A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料蒸发源
公开(公告)号：WO2015139776A1
公开(公告)日：2015-09-24
申请号：PCT/EP2014/055741
申请日：2014-03-21
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
发明人： BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/04
CPC分类号： H01L51/56 , C23C14/042 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/0011 , H01L51/0012
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚被配置为蒸发有机材料，分配管具有沿着分配管的长度设置的一个或多个出口，其中分配管与蒸发坩埚流体连通，并且其中所述分配管具有垂直于所述分配管的长度的横截面，所述分布管是非圆形的，并且包括：设置所述一个或多个出口的出口侧，其中出口侧的宽度横截面为横截面最大尺寸的30％以下。

6. 发明申请

WO2016082874A1 CRUCIBLE ASSEMBLY FOR EVAPORATION PURPOSES 审中-公开
标题翻译：用于蒸发目的的大会
公开(公告)号：WO2016082874A1
公开(公告)日：2016-06-02
申请号：PCT/EP2014/075686
申请日：2014-11-26
申请人： APPLIED MATERIALS, INC. , SCHÜSSLER, Uwe , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
发明人： SCHÜSSLER, Uwe , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/12 , C23C14/54 , F27B14/10 , F27B14/00
CPC分类号： C23C14/243 , C23C14/12 , C23C14/542 , F27D5/0037
摘要： In general, the present disclosure relates to systems, apparatuses and methods for depositing materials. In particular, the present disclosure relates to a crucible for evaporating a source material. The crucible has a wall with an inner surface surrounding an inner volume for receiving the source material and one or more heat transfer elements arranged within the inner volume of the crucible.
摘要翻译：通常，本公开涉及用于沉积材料的系统，装置和方法。特别地，本公开涉及用于蒸发源材料的坩埚。坩埚具有壁，内壁包围着用于容纳源材料的内部容积和布置在坩埚的内部容积内的一个或多个传热元件。

7. 发明申请

WO2016070942A1 MATERIAL DEPOSITION ARRANGEMENT AND MATERIAL DISTRIBUTION ARRANGEMENT FOR VACUUM DEPOSITION 审中-公开
标题翻译：真空沉积物的材料沉积布置和材料分配布置
公开(公告)号：WO2016070942A1
公开(公告)日：2016-05-12
申请号：PCT/EP2014/074089
申请日：2014-11-07
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , LOPP, Andreas , GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel
发明人： BANGERT, Stefan , LOPP, Andreas , GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel
IPC分类号： C23C14/12 , C23C14/24 , C23C16/455 , C23C14/04 , H05B33/10
CPC分类号： C23C14/12 , C23C14/042 , C23C14/24 , C23C16/45578
摘要： A material deposition arrangement (100) for depositing evaporated materials on a substrate (121) in a vacuum chamber (110) is described. The material deposition arrangement includes two material deposition sources (100a, 100b), each having a distribution pipe (106a, 106b) and one or more nozzles (712). Further, a vacuum deposition chamber including a material deposition arrangement and a method for depositing an evaporated material on a substrate in a vacuum deposition chamber is described.
摘要翻译：描述了用于在真空室（110）中的衬底（121）上沉积蒸发材料的材料沉积装置（100）。材料沉积装置包括两个材料沉积源（100a，100b），每个具有分配管（106a，106b）和一个或多个喷嘴（712）。此外，描述了包括材料沉积装置的真空沉积室和用于在真空沉积室中在基板上沉积蒸发材料的方法。

8. 发明申请

WO2018077388A1 MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE, EVAPORATION SOURCE, DEPOSITION APPARATUS, AND METHOD THEREFOR 审中-公开
标题翻译：用于测量沉积速率的测量组件，蒸发源，沉积装置及其方法
公开(公告)号：WO2018077388A1
公开(公告)日：2018-05-03
申请号：PCT/EP2016/075681
申请日：2016-10-25
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , LANDGRAF, Heike , LOPP, Andreas , STAAF, Hans
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , LANDGRAF, Heike , LOPP, Andreas , STAAF, Hans
IPC分类号： C23C14/04 , C23C14/12 , C23C14/24 , C23C14/54 , G01B7/06
CPC分类号： C23C14/546 , C23C14/042 , C23C14/12 , C23C14/24
摘要： A measurement assembly (100) for measuring a deposition rate of an evaporated material is described. The measurement assembly (100) includes: a first oscillation crystal (110) for measuring the deposition rate; a second oscillation crystal (120) for measuring the deposition rate; and a movable shutter (140). The movable shutter (140) is configured for blocking the evaporated material provided from a first measurement outlet (151), the first measurement outlet directed for providing evaporated material to the first oscillation crystal (110). Further, the movable shutter (140) is configured for blocking the evaporated material provided from a second measurement outlet (152), the second measurement outlet directed for providing evaporated material to the second oscillation crystal (120).
摘要翻译：描述用于测量蒸发材料的沉积速率的测量组件（100）。测量组件（100）包括：用于测量沉积速率的第一振荡晶体（110）第二振荡晶体（120），用于测量沉积速率; 和可动快门（140）。可移动遮光器（140）被配置用于阻挡从第一测量出口（151）提供的蒸发材料，第一测量出口指向用于将蒸发材料提供给第一振荡晶体（110）。此外，可动快门（140）被配置用于阻挡从第二测量出口（152）提供的蒸发材料，第二测量出口指向用于向第二振荡晶体（120）提供蒸发材料。

9. 发明申请

WO2017050349A1 MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THEREFORE 审中-公开
标题翻译：用于测量沉积速率的测量装置及其方法
公开(公告)号：WO2017050349A1
公开(公告)日：2017-03-30
申请号：PCT/EP2015/071608
申请日：2015-09-21
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas , SCHÜSSLER, Uwe , BANGERT, Stefan
发明人： DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas , SCHÜSSLER, Uwe , BANGERT, Stefan
IPC分类号： G01N29/02 , C23C14/54 , G01N29/24 , H01L41/113
CPC分类号： C23C14/546 , C23C14/24 , G01N29/022 , G01N29/2443 , G01N2291/0256
摘要： A measurement assembly (100) for measuring a deposition rate of an evaporated material is described. The measurement assembly (100) includes an oscillation crystal (110) for measuring the deposition rate, a measurement outlet (150) for providing evaporated material to the oscillation crystal (110), and a magnetic closing mechanism (160) configured for opening and closing the measurement outlet (150) by magnetic force.
摘要翻译：描述了用于测量蒸发材料的沉积速率的测量组件（100）。测量组件（100）包括用于测量沉积速率的振荡晶体（110），用于向振荡晶体（110）提供蒸发材料的测量出口（150）以及用于打开和关闭的磁性关闭机构（160）测量出口（150）通过磁力。

10. 发明申请

WO2016070943A1 MATERIAL SOURCE ARRANGMENT AND MATERIAL DISTRIBUTION ARRANGEMENT FOR VACUUM DEPOSITION 审中-公开
标题翻译：真空沉积物的材料来源安排和材料分配布置
公开(公告)号：WO2016070943A1
公开(公告)日：2016-05-12
申请号：PCT/EP2014/074090
申请日：2014-11-07
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , SCHÜSSLER, Uwe , LOPP, Andreas , DIEGUEZ-CAMPO, Jose Manuel
发明人： BANGERT, Stefan , SCHÜSSLER, Uwe , LOPP, Andreas , DIEGUEZ-CAMPO, Jose Manuel
IPC分类号： H01L51/00 , C23C14/12 , C23C14/24 , C23C16/455
CPC分类号： C23C14/12 , C23C14/042 , C23C14/24 , H01L51/001
摘要： A linear distribution pipe (106) for depositing evaporated material on a substrate (121) in a vacuum chamber (110) is described. The distribution pipe (106) includes a distribution pipe housing (116) extending along a first direction (136), wherein the first direction provides the linear extension of the linear distribution pipe, and wherein the distribution pipe housing comprises a first housing material. The distribution pipe (106) further includes a plurality of openings in the distribution pipe housing (116), wherein the plurality of openings is distributed along the linear extension of the linear distribution pipe. Further, the distribution pipe housing (116) includes a plurality of nozzles (712) for the linear distribution pipe (106), wherein the plurality of nozzles (712) is configured for guiding the evaporated material in the vacuum chamber (110). The nozzles (712) include a first nozzle material having a thermal conductivity larger than the first housing material and/or larger than 21 W/mK.
摘要翻译：描述了用于在真空室（110）中的衬底（121）上沉积蒸发材料的线性分布管（106）。分配管（106）包括沿着第一方向（136）延伸的分配管壳（116），其中第一方向提供线性分配管的线性延伸，并且其中分配管壳体包括第一壳体材料。分配管（106）还包括在分配管壳体（116）中的多个开口，其中多个开口沿着线性分配管的线性延伸部分布。此外，分配管壳体116包括用于线性分配管106的多个喷嘴712，其中多个喷嘴构造成用于引导真空室110内的蒸发材料。喷嘴（712）包括热导率大于第一壳体材料的第一喷嘴材料和/或大于21W / mK。

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