专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2010014553A2 CONCRETE VACUUM CHAMBER 审中-公开
标题翻译：混凝土真空室
公开(公告)号：WO2010014553A2
公开(公告)日：2010-02-04
申请号：PCT/US2009/051860
申请日：2009-07-27
申请人： APPLIED MATERIALS, INC. , POLYAK, Alexander, S. , CHO, Tom, K. , YUDOVSKY, Joseph , VESCI, Anthony
发明人： POLYAK, Alexander, S. , CHO, Tom, K. , YUDOVSKY, Joseph , VESCI, Anthony
IPC分类号： H01L21/00 , H01L21/02 , H01L21/205 , H01L21/203 , H01L21/265 , H01L21/3065
CPC分类号： C23C14/56 , C23C16/44 , H01J37/32467 , H01L21/67236 , H01L21/67772
摘要： The present invention embodies processing systems and vacuum chambers equipped to process substrates for flat panel displays, solar cells, or other electronic devices. The processing system and/or the vacuum chambers as well as their components and supporting structure are constructed of less costly materials and in a more energy efficient manner than that of current large area substrate processing systems. In one embodiment, the processing system chamber bodies and their supporting structures are constructed of reinforced concrete. In one embodiment, system processing chambers include a vacuum tight lining disposed inside reinforced concrete chamber bodies.
摘要翻译：本发明体现了用于处理平板显示器，太阳能电池或其他电子设备的基板的处理系统和真空室。处理系统和/或真空室以及它们的部件和支撑结构由比当前的大面积基板处理系统的成本较低的材料和更节能的方式构成。在一个实施例中，处理系统室主体及其支撑结构由钢筋混凝土构成。在一个实施例中，系统处理室包括设置在钢筋混凝土室体内的真空密封衬里。

2. 发明申请

WO2005044474A1 SCRUBBER BOX AND METHOD FOR USING THE SAME 审中-公开
标题翻译： SCRUBBER BOX及其使用方法
公开(公告)号：WO2005044474A1
公开(公告)日：2005-05-19
申请号：PCT/US2004/035745
申请日：2004-10-28
申请人： APPLIED MATERIALS, INC.
发明人： YUDOVSKY, Joseph , TEPMAN, Avi , REYNOLDS, Kenneth, R. , ACHKIRE, Younes , MAROHL, Dan, A. , GHANAYEM, Steve, G. , POLYAK, Alexander, S. , ETTINGER, Gary , ZHANG, Haochuan , CHEN, Hui?
IPC分类号： B08B1/04
CPC分类号： H01L21/67046 , B08B1/04
摘要： A scrubber box (101) is provided that includes a tank (103) adapted to receive a substrate (w) for cleaning, supports (107, 109) outside of the tank and adapted to couple to ends of scrubber brushes (106a, 106b) disposed within the tank, a motor (111) mounted to each of the supports and adapted to rotate the scrubber brushes, a base (113) to which the supports are pivotally mounted via spherical bearings (127) adapted to permit toe-in of the scrubber brushes, brush gap actuator adapted, via a crank and rocker mechanism, (117) to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.
摘要翻译：提供了一种洗涤器箱（101），其包括适于接收用于清洁罐的支撑件（107,109）并适于联接到洗涤器刷（106a，106b）的端部的衬底（w）的罐（103）设置在所述罐内的马达（111），其安装到每个所述支撑件上并且适于旋转所述洗涤器刷;基座（113），所述支撑件通过经由球形轴承（127）可枢转地安装到所述基座上，洗涤器刷子，刷间隙致动器，其经由曲柄和摇臂机构（117）适当地基本上同时地将支撑件朝向或远离彼此枢转，以便允许洗涤器刷基本上同时实现或断开与衬底的接触，并且适于将两个球面轴承朝向或远离彼此移动的脚趾致动器，以便调节洗涤器刷之间的趾角。

3. 发明申请

WO2011008805A2 PROCESSING CHAMBER WITH TRANSLATING WEAR PLATE FOR LIFT PIN 审中-公开
标题翻译：加工室用翻转式打码机
公开(公告)号：WO2011008805A2
公开(公告)日：2011-01-20
申请号：PCT/US2010/041895
申请日：2010-07-14
申请人： APPLIED MATERIALS, INC. , WHITE, John, M. , OH, Jeonghoon , CHO, Tom, K. , JAMES, Silja , PAI, Uday , LOPEZ, Oscar , POLYAK, Alexander, S.
发明人： WHITE, John, M. , OH, Jeonghoon , CHO, Tom, K. , JAMES, Silja , PAI, Uday , LOPEZ, Oscar , POLYAK, Alexander, S.
IPC分类号： H01L21/68 , H01L21/683 , H01L21/02 , G02F1/13
CPC分类号： H01L21/68742
摘要： Embodiments of a method and apparatus for processing large area substrates including a translational wear plate and/or bushing assembly are provided for reducing the stress on a lift pin used to space substrates from a substrate support in a processing or other type of chamber. In another embodiment, an apparatus for processing substrates includes processing chamber comprising a substrate support disposed in a chamber body. A bushing assembly is disposed in the substrate support. A lift pin is disposed through the bushing assembly. A wear plate is provided that is coupled to the chamber body and aligned with the lift pin. The wear plate is movable laterally relative to a centerline of the chamber body to accommodate lateral motion of the lift pin when contacting the wear plate.
摘要翻译：提供了用于处理包括平移耐磨板和/或衬套组件的大面积衬底的方法和装置的实施例，用于减小用于将衬底从处理或其它类型的室中的衬底支撑件定位的升降销上的应力。在另一个实施例中，一种用于处理衬底的设备包括处理室，其包括设置在室主体中的衬底支撑件。衬套组件设置在衬底支撑件中。提升销设置穿过套管组件。提供了耐磨板，其连接到腔室主体并与提升销对准。耐磨板相对于室主体的中心线横向运动，以在接触耐磨板时适应提升销的横向运动。

4. 发明申请

WO2008141194A1 BATCH EQUIPMENT ROBOTS AND METHODS OF STACK TO ARRAY WORK-PIECE TRANSFER 审中-公开
标题翻译：批量设备机器人和堆栈工作方式转移
公开(公告)号：WO2008141194A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/063264
申请日：2008-05-09
申请人： APPLIED MATERIALS, INC. , BACHRACH, Robert, Z. , TEPMAN, Avi , POLYAK, Alexander, S.
发明人： BACHRACH, Robert, Z. , TEPMAN, Avi , POLYAK, Alexander, S.
IPC分类号： B65G57/00 , B65H29/00
CPC分类号： B65G65/00 , B65G37/02 , B65G2201/0297 , H01L21/67236 , H01L21/67276 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/67733 , H01L21/67748 , H01L21/67769
摘要： The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work- pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.
摘要翻译：本发明通常包括用于自动化大批量批量工件制造工厂的设备，其包括能够每小时生产1,000个或更多个工件的高生产率工厂结构中的工件处理和工件加工。工件可以从堆叠的供应提供给设备到并行阵列。此外，工件可以通过阵列在阵列批量传输之间在制造架构之间传输。工件可以在并行批量传输操作的同时在制造架构内转移。机器人操作可以在机器人设备之间，机器人设备和处理设备之间以及处理设备内。

5. 发明申请

WO2015126439A1 METHOD AND APPARATUS FOR PASSIVATING CRYSTALLINE SILICON SOLAR CELLS 审中-公开
标题翻译：用于过滤晶体硅太阳能电池的方法和装置
公开(公告)号：WO2015126439A1
公开(公告)日：2015-08-27
申请号：PCT/US2014/035335
申请日：2014-04-24
申请人： APPLIED MATERIALS, INC.
发明人： PONNEKANTI, Hari, K. , POLYAK, Alexander, S. , L'HEUREUX, James , LIU, Yongsheng , KARISIDDAPPA, Marulasiddeswara , STEWART, Michael, P. , NGUYEN, Van, H. , UPADHYE, Bahubali, S. , MURTHY, Ch. P.P.C. Srinivasa , HAMMOND, Edward , KAPSASKIS, Dionysio , LANE, Christopher, T.
IPC分类号： H01L31/18 , H01L31/042 , H01L21/66 , H01L21/02
CPC分类号： H01L31/18 , C23C16/345 , C23C16/403 , C23C16/45572 , C23C16/54 , H01L21/67115 , H01L21/67173 , H01L21/6719 , H01L21/67706 , H01L21/6776 , H01L22/12 , H01L31/02167 , H01L31/056 , Y02E10/52
摘要： The present invention generally provides a high throughput substrate processing system that is used to form one or more regions of a solar cell device. In one configuration of a processing system, one or more solar cell passivating or dielectric layers are deposited and further processed within one or more processing chambers contained within the high throughput substrate processing system. The processing chambers may be, for example, plasma enhanced chemical vapor deposition (PECVD) chambers, low pressure chemical vapor deposition (LPCVD) chambers, atomic layer deposition (ALD) chambers, physical vapor deposition (PVD) or sputtering chambers, thermal processing chambers (e.g., RTA or RTO chambers), substrate reorientation chambers (e.g., flipping chambers) and/or other similar processing chambers.
摘要翻译：本发明通常提供用于形成太阳能电池器件的一个或多个区域的高通量衬底处理系统。在处理系统的一种配置中，一个或多个太阳能电池钝化或电介质层被沉积并在包含在高通量衬底处理系统内的一个或多个处理室内进一步处理。处理室可以是例如等离子体增强化学气相沉积（PECVD）室，低压化学气相沉积（LPCVD）室，原子层沉积（ALD）室，物理气相沉积（PVD）或溅射室，热处理室（例如，RTA或RTO室），基板重新定向室（例如，翻转室）和/或其它类似的处理室。

6. 发明申请

WO2008141193A1 BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY 审中-公开
标题翻译：批量设备机器人和方法阵列工程转让光伏工厂
公开(公告)号：WO2008141193A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/063261
申请日：2008-05-09
申请人： APPLIED MATERIALS, INC. , BACHRACH, Robert, Z. , TEPMAN, Avi , POLYAK, Alexander, S.
发明人： BACHRACH, Robert, Z. , TEPMAN, Avi , POLYAK, Alexander, S.
IPC分类号： C23C16/00
CPC分类号： C23C16/54 , C23C14/568 , H01L31/18
摘要： The present invention generally comprises equipment for an automated high volume batch work-piece manufacturing factory comprising work-piece handling and work-piece processing in a high productivity factory architecture capable of producing 1,000 or more work-piece an hour. The work-pieces may be presented to the equipment from a stacked supply to a parallel array. Additionally, the work-pieces may be transferred between manufacturing architectures by an array to array batch transfer. The work-pieces may be transferred within the manufacturing architecture in a parallel to parallel batch transfer operation. The robotic operations may be between robotic devices, between robotic devices and processing equipment, and within processing equipment.
摘要翻译：本发明通常包括用于自动化大批量批量工件制造工厂的设备，其包括能够每小时生产1,000个或更多个工件的高生产率工厂结构中的工件处理和工件加工。工件可以从堆叠的供应提供给设备到并行阵列。另外，工件可以通过阵列在制造架构之间转移到阵列批量传输。工件可以在并行批量传输操作的同时在制造架构内转移。机器人操作可以在机器人设备之间，机器人设备和处理设备之间以及处理设备内。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式