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1. 发明申请

WO2006047410A2 FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL 审中-公开
标题翻译：流体储存和分配系统，包括流体储存和分配容器的动态流体监测
公开(公告)号：WO2006047410A2
公开(公告)日：2006-05-04
申请号：PCT/US2005038173
申请日：2005-10-24
申请人： ADVANCED TECH MATERIALS , DIETZ JAMES , BISHOP STEVEN E , MCMANUS JAMES V , LURCOTT STEVEN M , WODJENSKI MICHAEL J , KAIM ROBERT , DIMEO FRANK JR
发明人： DIETZ JAMES , BISHOP STEVEN E , MCMANUS JAMES V , LURCOTT STEVEN M , WODJENSKI MICHAEL J , KAIM ROBERT , DIMEO FRANK JR
IPC分类号： H01L21/66 , B67D7/06 , B67D99/00
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
摘要翻译：一种监视系统（100），用于在操作期间监视流体供给容器（22,24,26,28,108）中的流体，包括从流体供给容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）数据采集模块（40,132,146），其可操作地耦合到所述一个或更多传感器以从其接收监测数据并响应地产生与由所述一个或更多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），可操作地与所述数据采集模块并且布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费文档，使用报告和/或再供应请求。

2. 发明申请

WO2006047410A8 FLUID STORAGE AND DISPENSING SYSTEM INCLUDING DYNAMIC FLUID MONITORING OF FLUID STORAGE AND DISPENSING VESSEL 审中-公开
标题翻译：流体储存和分配系统，包括流体储存和分配容器的动态流体监测
公开(公告)号：WO2006047410A8
公开(公告)日：2006-07-27
申请号：PCT/US2005038173
申请日：2005-10-24
申请人： ADVANCED TECH MATERIALS , DIETZ JAMES , BISHOP STEVEN E , MCMANUS JAMES V , LURCOTT STEVEN M , WODJENSKI MICHAEL J , KAIM ROBERT , DIMEO FRANK JR
发明人： DIETZ JAMES , BISHOP STEVEN E , MCMANUS JAMES V , LURCOTT STEVEN M , WODJENSKI MICHAEL J , KAIM ROBERT , DIMEO FRANK JR
IPC分类号： H01L21/66 , B67D7/06 , B67D99/00
CPC分类号： G01N33/00 , F17C11/00 , G01F15/063 , G01F22/02 , G01F23/0076 , G01M3/32 , G01M3/3236 , G06Q10/087 , G06Q30/04 , G06Q50/04 , H01L21/561 , H01L21/568 , H01L21/6835 , H01L22/10 , H01L23/5389 , H01L24/24 , H01L24/48 , H01L24/82 , H01L25/03 , H01L25/0652 , H01L25/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/24011 , H01L2224/2518 , H01L2224/48091 , H01L2224/48227 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01058 , H01L2924/01076 , H01L2924/01078 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/19042 , H05K1/185 , H05K3/4602 , H05K2203/0165 , H05K2203/085 , H05K2203/1469 , Y02P90/30 , Y10T29/4913 , Y10T29/49133 , Y10T29/49165 , Y10T29/53183 , H01L2224/45099
摘要： A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.
摘要翻译：一种用于在操作期间监测流体供应容器（22,24,26,28,108）中的流体的监测系统（100），包括从所述流体供应容器分配流体。监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）可操作地耦合到一个的数据采集模块（40,132,146）或多个传感器以从其接收监测数据并且响应地产生与由所述一个或多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），其与所述数据采集模块并且被布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费凭证，使用报告和/或再供应请求。

3. 发明申请

WO2007136887A2 NANOPOROUS CARBON MATERIALS, AND SYSTEMS AND METHODS UTILIZING SAME 审中-公开
标题翻译：纳米碳材料，以及使用其的系统和方法
公开(公告)号：WO2007136887A2
公开(公告)日：2007-11-29
申请号：PCT/US2007061256
申请日：2007-01-29
申请人： ADVANCED TECH MATERIALS , DIMEO FRANK JR , CARRUTHERS J DONALD , WODJENSKI MICHAEL J , MCMANUS JAMES V , MARZULLO JOSEPH
发明人： DIMEO FRANK JR , CARRUTHERS J DONALD , WODJENSKI MICHAEL J , MCMANUS JAMES V , MARZULLO JOSEPH
IPC分类号： H01L21/31
CPC分类号： B01D53/0415 , B01D53/0446 , B01D2253/102 , B01D2253/1122 , B01D2253/202 , B01D2253/308 , B01D2253/311 , B01D2253/342 , B01D2256/24 , B01D2257/30 , B01D2258/0216 , B01D2259/40096 , B01D2259/4146 , B01D2259/4525 , B01D2259/455 , B01J20/20 , B01J20/28011 , B01J20/28014 , B01J20/28023 , B01J20/28033 , B01J20/28042 , B01J20/28052 , B01J20/2808 , B01J20/28097 , B01J2220/66 , B82Y30/00 , C01B3/0021 , C01B13/0251 , C10G25/003 , C10G45/02 , C10G67/06 , C10G2300/1033 , C10G2300/1044 , C10G2300/1051 , C10G2300/1055 , C10G2300/202 , C10G2300/207 , F17C11/00 , F17C11/007 , Y02E60/321 , Y02E60/325 , Y10S95/903 , Y10T428/249956 , Y10T428/249957
摘要： A porous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone. Porous carbon material is also described as a storage medium for chlorine gas, or as a hydrogen storage medium, e.g., for hydrogen fuel cells.
摘要翻译：与单独的纳米多孔碳相比，具有至少部分填充有赋予复合材料的材料相对于选自硬度，耐磨性和韧性的特性的增强特性的多孔碳复合材料。多孔碳材料也被描述为用于氯气的储存介质，或作为储氢介质，例如氢燃料电池。

4. 发明申请

WO2007090104A2 CARBONACEOUS MATERIALS USEFUL FOR FLUID STORAGE/DISPENSING, DESULFURIZATION, AND INFRARED RADIATION EMISSION, AND APPARATUS AND METHODS UTILIZING SAME 审中-公开
标题翻译：用于流体储存/分配，脱硫和红外辐射排放的碳质材料，以及使用其的装置和方法
公开(公告)号：WO2007090104A2
公开(公告)日：2007-08-09
申请号：PCT/US2007061255
申请日：2007-01-29
申请人： ADVANCED TECH MATERIALS , DIMEO FRANK , CARRUTHERS DONALD J , WODJENSKI MICHAEL J , MCMANUS JAMES V , MARZULLO JOSEPH , LURCOTT STEVEN M , SWEENEY JOSEPH D , KING MACKENZIE , BOBITA BRIAN
发明人： DIMEO FRANK , CARRUTHERS DONALD J , WODJENSKI MICHAEL J , MCMANUS JAMES V , MARZULLO JOSEPH , LURCOTT STEVEN M , SWEENEY JOSEPH D , KING MACKENZIE , BOBITA BRIAN
IPC分类号： B60K15/06
CPC分类号： B01D53/0415 , B01D53/0446 , B01D2253/102 , B01D2253/1122 , B01D2253/202 , B01D2253/308 , B01D2253/311 , B01D2253/342 , B01D2256/24 , B01D2257/30 , B01D2258/0216 , B01D2259/40096 , B01D2259/4146 , B01D2259/4525 , B01D2259/455 , B01J20/20 , B01J20/28011 , B01J20/28014 , B01J20/28023 , B01J20/28033 , B01J20/28042 , B01J20/28052 , B01J20/2808 , B01J20/28097 , B01J2220/66 , B82Y30/00 , C01B3/0021 , C01B13/0251 , C10G25/003 , C10G45/02 , C10G67/06 , C10G2300/1033 , C10G2300/1044 , C10G2300/1051 , C10G2300/1055 , C10G2300/202 , C10G2300/207 , F17C11/00 , F17C11/007 , Y02E60/321 , Y02E60/325 , Y10S95/903 , Y10T428/249956 , Y10T428/249957
摘要： Carbonaceous materials are described, having utility for fluid storage/dispensing and desulfurization applications. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage medium, e.g., for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. Infrared emitter devices are described, which utilize carbon adsorbent to store silane for reaction with oxygen in a controlled manner. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described. Also described is a method of increasing the loading capacity of a porous carbon adsorbent, by contacting of the carbon adsorbent with a swelling agent, followed by contacting of the carbon adsorbent with a pressurized gaseous penetration agent, and by removal of the swelling agent and penetration agent.
摘要翻译：描述了碳质材料，其用于流体储存/分配和脱硫应用。一种实施方案中的含碳材料是具有孔隙率的纳米多孔碳复合材料，其与至少部分填充有赋予复合材料的材料相比，与由硬度，耐磨性和韧性组成的组相比的特性相比具有增强特性纳米多孔碳。另一个实施方案是利用多孔碳材料作为氯气的储存介质。另外的实施例使用多孔碳材料作为储氢介质，例如用于氢燃料电池。在另一个实施方案中，多孔碳材料用作流体储存和分配系统中的吸附剂介质，在多个多孔碳制品的布置中，并且使用位置稳定结构来限制该装置的移动。描述了红外发射器件，其利用碳吸附剂以可控的方式存储硅烷与氧反应。描述了通过吸附剂的电阻和/或感应加热使碳吸附剂解吸剩余流体的布置。还描述了一种通过使碳吸附剂与溶胀剂接触，然后使碳吸附剂与加压的气体渗透剂接触，并且通过除去溶胀剂和渗透物来增加多孔碳吸附剂的负载能力的方法剂。

5. 发明申请

WO2005051510A2 GAS DELIVERY SYSTEM WITH INTEGRATED VALVE MANIFOLD FUNCTIONALITY FOR SUB-ATMOSPHERIC AND SUPER-ATMOSPHERIC PRESSURE APPLICATIONS 审中-公开
标题翻译：用于亚大气和超大气压力应用的集成阀门多功能气体输送系统
公开(公告)号：WO2005051510A2
公开(公告)日：2005-06-09
申请号：PCT/US2004039405
申请日：2004-11-23
申请人： ADVANCED TECH MATERIALS , WODJENSKI MICHAEL J , DIETZ JAMES A
发明人： WODJENSKI MICHAEL J , DIETZ JAMES A
IPC分类号： B01D20060101 , F17C13/04 , G05D7/00 , B01D
CPC分类号： F17C13/04 , F17C2205/0142 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0338 , F17C2223/033 , F17C2223/035 , F17C2223/036 , F17C2223/038 , F17C2227/0114 , F17C2227/044 , F17C2270/0518 , Y10T137/0396 , Y10T137/0419 , Y10T137/4259 , Y10T137/7043 , Y10T137/87877
摘要： A gas cabinet including an enclosure containing at least one gas supply vessel and flow circuitry coupled to the gas supply vessel(s). The flow circuitry is constructed and arranged to flow dispensed gas from an on-stream gas supply vessel to multiple sticks of the flow circuitry, with each of the multiple sticks being joined in gas flow communication to a respective gas-utilizing process unit. The flow circuitry is valved to enable sections of the flow circuitry associated with respective ones of the multiple sticks to be isolated from other sections of the flow circuitry, so that process gas can be flowed to one or more of the sticks, while other sticks are being evacuated and purged, or otherwise are closed to dispensed gas flow therethrough.
摘要翻译：一种包括外壳的气柜，所述外壳包含至少一个气体供应容器和联接到所述气体供应容器的流动回路。流动回路被构造和布置成使分配的气体从在线气体供应容器流动到流动回路的多个支杆，其中多个支杆中的每一个以气流连通的方式连接到相应的气体利用处理单元。流动回路被阀门控制以使得与多个杆中的相应杆相关联的流动回路的部分能够与流动回路的其他部分隔离，使得处理气体可以流到一个或多个杆，而其他杆是被抽空并被吹扫，或者被关闭以分配通过其中的气流。

6. 发明申请

WO2008028170A2 SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY 审中-公开
标题翻译：使用固体前驱体的流体利用控制固体物质的流体
公开(公告)号：WO2008028170A2
公开(公告)日：2008-03-06
申请号：PCT/US2007077466
申请日：2007-08-31
申请人： ADVANCED TECH MATERIALS , CLEARY JOHN M , ARNO JOSE I , HENDRIX BRYAN C , NAITO DONN , BATTLE SCOTT , GREGG JOHN , WODJENSKI MICHAEL J , XU CHONGYING
发明人： CLEARY JOHN M , ARNO JOSE I , HENDRIX BRYAN C , NAITO DONN , BATTLE SCOTT , GREGG JOHN , WODJENSKI MICHAEL J , XU CHONGYING
IPC分类号： B01J7/00
CPC分类号： C23C16/4481 , C23C14/48 , C23C16/08 , C23C16/16 , C23C16/18 , C23C16/30 , C23C16/4402 , C23C16/45525 , C23C16/45544
摘要： Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.
摘要翻译：用于挥发容易产生颗粒或在相应的源试剂蒸气中存在颗粒的源试剂的装置和方法，其中通过蒸气产生系统的结构或加工特征抑制了这种颗粒产生或存在。这种装置和方法适用于液体和固体源试剂，特别是固体源试剂如金属卤化物，例如氯化铪。一种具体实施方案中的源试剂由源试剂材料的多孔整体块形式构成。本发明的装置和方法有用地用于提供用于例如原子层沉积（ALD）和离子注入的应用的源试剂蒸气。

7. 发明申请

WO2011160105A3 ENDPOINT DETERMINATION FOR CAPILLARY-ASSISTED FLOW CONTROL 审中-公开
标题翻译：毛细管理流量控制的终点确定
公开(公告)号：WO2011160105A3
公开(公告)日：2012-04-05
申请号：PCT/US2011041013
申请日：2011-06-18
申请人： ADVANCED TECH MATERIALS , SWEENEY JOSEPH D , AVILA ANTHONY M , WODJENSKI MICHAEL J , DESPRES JOSEPH R , BAUM THOMAS H
发明人： SWEENEY JOSEPH D , AVILA ANTHONY M , WODJENSKI MICHAEL J , DESPRES JOSEPH R , BAUM THOMAS H
IPC分类号： H01L21/66 , H01L21/02
CPC分类号： F17D3/01 , F17D3/00 , G05D7/0635 , H01J37/3171 , H01J2237/006 , H01J2237/30466 , H01L21/67017 , H01L21/67253 , Y10T137/0324 , Y10T137/86389
摘要： Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.
摘要翻译：用于确定流体供应容器的端点的装置和方法，其中通过设置在流体供应容器的内部容积中的流动通道在流体流动建立时具有静态流动限制装置和可选择性致动的阀元件来控制流体流动。端点确定可以用于终止从流体供应容器供应的流体和/或从流体耗尽的供应容器切换到新鲜容器，以便连续或更新流体供应操作。该设备和方法适用于诸如离子注入机之类的流体分解装置。

8. 发明申请

WO2008101257A3 DELIVERY OF GASES FROM INTERNALLY REGULATED CYLINDERS 审中-公开
标题翻译：从内部调节气瓶输送气体
公开(公告)号：WO2008101257A3
公开(公告)日：2011-07-21
申请号：PCT/US2008054336
申请日：2008-02-19
申请人： ADVANCED TECH MATERIALS , WODJENSKI MICHAEL J , WANG LUPING , ARNO JOSE I
发明人： WODJENSKI MICHAEL J , WANG LUPING , ARNO JOSE I
IPC分类号： B65D83/14 , B65D83/44 , F17C11/00
CPC分类号： B65D83/32 , B65D83/44 , F17C2205/035 , Y02E60/321
摘要： A gas supply package, including a material storage and gas dispensing vessel defining an interior volume adapted to hold source material for the gas, with a gas dispensing stick in the interior volume. The gas dispensing stick includes at least one regulator coupled with a flow passage, with at least one generally planar filter element arranged to filter gas flowed through the flow passage prior to its flow through the regulator(s). The flow passage and the at least one generally planar filter element are arranged to produce: (i) a change in gas flow conductance in the vicinity of the filter element, and/or (ii) a direction of flow of gas at a non-zero angle with respect to the longitudinal axis of the vessel and/or to the longitudinal axis of the flow passage, for enhancement of capture efficiency of said filter element.
摘要翻译：一种气体供应包，其包括限定适于保持用于气体的源材料的内部容积的材料储存和气体分配容器，在内部容积中具有气体分配棒。气体分配棒包括与流动通道耦合的至少一个调节器，至少一个大体上平面的过滤器元件布置成过滤流过通道的气体在流过调节器之前。流动通道和至少一个大体上平面的过滤器元件被布置成产生：（i）过滤元件附近的气体流动传导的变化，和/或（ii）在非过滤元件的气体流动方向，相对于容器的纵向轴线和/或流动通道的纵向轴线成零角度，以增强所述过滤元件的捕获效率。

9. 发明申请

WO2005025715A3 AUTO-SWITCHING SYSTEM FOR SWITCH-OVER OF GAS STORAGE AND DISPENSING VESSELS IN A MULTI-VESSEL ARRAY 审中-公开
标题翻译：用于多容器阵列中气体存储和分配容器的切换的自动切换系统
公开(公告)号：WO2005025715A3
公开(公告)日：2005-07-28
申请号：PCT/US2004028877
申请日：2004-09-07
申请人： ADVANCED TECH MATERIALS , WODJENSKI MICHAEL J
发明人： WODJENSKI MICHAEL J
IPC分类号： B01D20060101 , B65B1/04 , F17C7/00 , F17C13/02 , F17C13/04
CPC分类号： F17C13/025 , F17C7/00 , F17C13/045 , F17C2205/0111 , F17C2205/013 , F17C2205/0341 , F17C2223/0123 , F17C2223/035 , F17C2227/042 , F17C2227/044 , F17C2227/045 , F17C2250/032 , F17C2250/043 , F17C2270/0518
摘要： A gas storage and dispensing system, including multi-vessel arrays of gas dispensing vessels that require successive change-over to provide ongoing supply of gas to a gas-consuming process, with a pump coupled in gas flow communication with the array. The system is provided with capability for time delay auto-switchover sequencing of the switchover operation in which an endpoint limit sensing of an on-stream gas dispensing vessel is responsively followed by termination of gas flow to the pump, inactivation of the pump, autoswitching of vessels, reinitiation of gas flow to the pump and reactivation of the pump. The system minimizes the occurrence of pressure spikes at the pump outlet in response to pressure variation at the pump inlet incident to switchover of gas supply from one vessel to another in the multi-vessel array.
摘要翻译：一种气体储存和分配系统，包括气体分配容器的多容器阵列，其需要连续的切换以向气体消耗过程提供持续的气体供应，并且具有与阵列气流连通的泵。该系统具有用于切换操作的延时自动切换排序的能力，其中切换操作的终点限制感测响应地随后是到达泵的气流的终止，泵的停用，自动切换容器中的气体流量的重新启动以及泵的重新启动。响应于在多容器阵列中从一个容器向另一个容器切换气体供应时泵入口处的压力变化，该系统最小化了泵出口处的压力峰值的发生。

10. 发明申请

WO2004052487A8 RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL 审中-公开
标题翻译：长方形平行印刷的流体储存和分配容器
公开(公告)号：WO2004052487A8
公开(公告)日：2005-08-25
申请号：PCT/US0337719
申请日：2003-11-25
申请人： ADVANCED TECH MATERIALS
发明人： BRESTOVANSKY DENNIS , WODJENSKI MICHAEL J , ARNO JOSE I , CARRUTHERS J DONALD
IPC分类号： B01D20060101 , B01D53/02 , B01D53/04 , B01D59/26 , B67D7/74 , B67D99/00 , F17C11/00
CPC分类号： B01D53/053 , B01D53/0407 , B01D2253/102 , B01D2253/304 , B01D2253/342 , B01D2257/40 , B01D2257/704 , B01D2257/706 , B01D2257/93 , B01D2258/0216 , B01D2259/4525 , F17C11/00 , F17C13/084 , F17C2201/0157 , F17C2205/0103 , F17C2205/0338 , F17C2205/0391 , F17C2270/0518 , Y02E60/321 , Y10T137/0318
摘要： A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
摘要翻译：一种流体储存和分配设备，包括具有长方体形状的流体储存和分配容器以及在通气气柜中包括这种流体储存和分配设备和/或使用点通风气体洗涤器的集成气柜组件。通过使用物理吸附剂和化学吸附剂介质，可以提高气柜的操作安全性，例如在从气柜供应的处理气体具有毒性或其他危险特性的情况下。

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