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    • 8. 发明申请
    • 3次元イオン散乱分光法及び分光装置
    • 三维离子散射光谱法和光谱仪器
    • WO2003081632A1
    • 2003-10-02
    • PCT/JP2003/003502
    • 2003-03-24
    • 理化学研究所小林 峰青野 正和
    • 小林 峰青野 正和
    • H01J37/252
    • G01N23/20H01J37/252
    • A pulse ion beam (4) is applied from a pulse ion beam source (1) to a sample (3) contained in a vacuum chamber (2), so that scattering particles scattering from the sample (3) are detected by a 3-dimensional detection device. The 3-dimensional detection device includes a 3-dimensional detector (5), a pre-stage electric circuit (6), and a computer (7), and is configured so as to simultaneously obtain information on the energy of the scattering particles (information on the flying time) and the total 3-dimensional information on the total of 2-dimensional position information on the scattering particles. This enables analysis of a detailed structure in a short time as compared to the conventional method and suppresses damage to the sample by the beam application.
    • 脉冲离子束(4)从脉冲离子束源(1)施加到包含在真空室(2)中的样品(3),使得从样品(3)散射的散射颗粒被3- 尺寸检测装置。 三维检测装置包括三维检测器(5),前级电路(6)和计算机(7),并且被配置为同时获得关于散射粒子的能量的信息 关于飞行时间的信息)以及关于散射粒子的二维位置信息的总和的总体三维信息。 与传统方法相比,这能够在短时间内分析详细结构,并且通过光束施加来抑制对样品的损伤。