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    • 1. 发明申请
    • LASER CHARACTERIZATION SYSTEM AND PROCESS
    • 激光特性系统与工艺
    • WO2012075215A2
    • 2012-06-07
    • PCT/US2011062752
    • 2011-12-01
    • CORNING INCWANG YINWYSOCKI GERARD PXIE FENGZAH CHUNG-EN
    • WANG YINWYSOCKI GERARD PXIE FENGZAH CHUNG-EN
    • H01S3/1055H01S3/101
    • H01S5/0042B82Y20/00G01J1/0403G01J1/0407G01J1/0414G01J3/021G01J3/1804G01J2001/4247G01R31/2635H01S5/141H01S5/3401
    • A system and process for automatically characterizing a plurality of external cavity semiconductor laser chips on a semiconductor laser bar separated from a semiconductor wafer. The system includes a diffraction grating mounted on a rotary stage for rotating the diffraction grating through a range of diffraction angles; a steering mirror mounted on the rotary stage and oriented perpendicular to a surface of the diffraction grating; and a laser analyzer; and a laser bar positioning stage. The positioning stage is automatically moved to aligning each laser chip in a laser bar on the stage, one chip at a time, with the diffraction grating, such that a part of the laser beam emitted from a laser chip in a laser bar is reflected back to the same laser chip by the 1st order diffraction of the grating to lock the lasing wavelength and the rest of the laser beam reflected by the steering mirror is received and characterized by the laser analyzer. For each laser ship, the rotary stage is automatically rotated to rotate the diffraction grating through a range of diffraction angles relative the laser beam emitted by the laser chip, and the laser analyzer automatically characterizes the laser optical properties such as spectra, power, or spatial modes at each diffraction angle.
    • 一种用于在与半导体晶片分离的半导体激光棒上自动表征多个外腔半导体激光器芯片的系统和工艺。 该系统包括安装在旋转台上的衍射光栅,用于通过衍射角范围旋转衍射光栅; 转向镜安装在旋转台上并垂直于衍射光栅的表面定向; 和激光分析仪; 和激光条定位台。 自动移动定位台,使激光棒上的每个激光条与激光条中的激光芯片一次发射的部分激光束一起反射回到激光棒上,使激光棒的一部分激光束反射回来 通过光栅的1阶衍射对相同的激光器芯片进行锁定以锁定激光波长,并且由转向反射镜反射的其余激光束被激光分析仪接收并表征。 对于每个激光船,旋转台自动旋转以使衍射光栅相对于激光芯片发射的激光束的衍射角度旋转,并且激光分析仪自动表征激光光学特性,例如光谱,功率或空间 每个衍射角的模式。