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    • 1. 发明申请
    • LASER CHARACTERIZATION SYSTEM AND PROCESS
    • 激光特性系统与工艺
    • WO2012075215A2
    • 2012-06-07
    • PCT/US2011062752
    • 2011-12-01
    • CORNING INCWANG YINWYSOCKI GERARD PXIE FENGZAH CHUNG-EN
    • WANG YINWYSOCKI GERARD PXIE FENGZAH CHUNG-EN
    • H01S3/1055H01S3/101
    • H01S5/0042B82Y20/00G01J1/0403G01J1/0407G01J1/0414G01J3/021G01J3/1804G01J2001/4247G01R31/2635H01S5/141H01S5/3401
    • A system and process for automatically characterizing a plurality of external cavity semiconductor laser chips on a semiconductor laser bar separated from a semiconductor wafer. The system includes a diffraction grating mounted on a rotary stage for rotating the diffraction grating through a range of diffraction angles; a steering mirror mounted on the rotary stage and oriented perpendicular to a surface of the diffraction grating; and a laser analyzer; and a laser bar positioning stage. The positioning stage is automatically moved to aligning each laser chip in a laser bar on the stage, one chip at a time, with the diffraction grating, such that a part of the laser beam emitted from a laser chip in a laser bar is reflected back to the same laser chip by the 1st order diffraction of the grating to lock the lasing wavelength and the rest of the laser beam reflected by the steering mirror is received and characterized by the laser analyzer. For each laser ship, the rotary stage is automatically rotated to rotate the diffraction grating through a range of diffraction angles relative the laser beam emitted by the laser chip, and the laser analyzer automatically characterizes the laser optical properties such as spectra, power, or spatial modes at each diffraction angle.
    • 一种用于在与半导体晶片分离的半导体激光棒上自动表征多个外腔半导体激光器芯片的系统和工艺。 该系统包括安装在旋转台上的衍射光栅,用于通过衍射角范围旋转衍射光栅; 转向镜安装在旋转台上并垂直于衍射光栅的表面定向; 和激光分析仪; 和激光条定位台。 自动移动定位台,使激光棒上的每个激光条与激光条中的激光芯片一次发射的部分激光束一起反射回到激光棒上,使激光棒的一部分激光束反射回来 通过光栅的1阶衍射对相同的激光器芯片进行锁定以锁定激光波长,并且由转向反射镜反射的其余激光束被激光分析仪接收并表征。 对于每个激光船,旋转台自动旋转以使衍射光栅相对于激光芯片发射的激光束的衍射角度旋转,并且激光分析仪自动表征激光光学特性,例如光谱,功率或空间 每个衍射角的模式。
    • 4. 发明申请
    • SEMICONDUCTOR BURIED GRATING FABRICATION METHOD
    • SEMICONDUCTOR BURIED GRATING FABRICATION方法
    • WO2009120353A3
    • 2009-12-30
    • PCT/US2009001889
    • 2009-03-27
    • CORNING INCLI YABOSONG KECHANGVISOVSKY NICHOLAS JZAH CHUNG-EN
    • LI YABOSONG KECHANGVISOVSKY NICHOLAS JZAH CHUNG-EN
    • H01L21/00
    • G03F7/0005G02B6/124G02B6/136H01S5/12
    • Methods for forming grating profiles in semiconductor laser structures comprise the steps of providing a semiconductor wafer comprising a wafer substrate, an etch stop layer disposed over the wafer substrate, a grating layer disposed over the etch stop layer, an etch mask layer disposed over the grating layer, and a photoresist layer disposed over the etch mask layer, forming a photoresist grating pattern, transferring the photoresist grating pattern into the grating layers via dry etching, and removing the photoresist layer, selectively wet etching the grating layer to form the grating profile in the grating layer. The placement of the grating layer between the etch mask and etch stop layers controls the selective wet etching step. The method also comprises removing the etch mask layer via selective wet etching without altering the grating profile, and regrowing an upper cladding layer to produce the semiconductor laser structure.
    • 在半导体激光器结构中形成光栅轮廓的方法包括以下步骤:提供包括晶片衬底的半导体晶片,设置在晶片衬底上的蚀刻停止层,设置在蚀刻停止层上方的光栅层,设置在光栅上的蚀刻掩模层 层和设置在蚀刻掩模层上的光致抗蚀剂层,形成光致抗蚀剂光栅图案,通过干蚀刻将光致抗蚀剂光栅图案转移到光栅层中,以及去除光致抗蚀剂层,选择性地湿蚀刻光栅层以形成光栅轮廓 光栅层。 在蚀刻掩模和蚀刻停止层之间放置光栅层控制选择性湿蚀刻步骤。 该方法还包括通过选择性湿蚀刻去除蚀刻掩模层而不改变光栅轮廓,并且重新生长上覆层以产生半导体激光器结构。
    • 6. 发明申请
    • QUANTUM WELL INTERMIXING
    • WO2009045394A1
    • 2009-04-09
    • PCT/US2008/011306
    • 2008-09-30
    • CORNING INCORPORATEDLI, YaboSONG, KechangZAH, Chung-En
    • LI, YaboSONG, KechangZAH, Chung-En
    • H01L21/18H01S5/34H01L21/324
    • H01S5/34B82Y20/00H01L21/02546H01L21/02664H01L29/205H01S5/3414
    • Embodiments of a method of quantum well intermixing (QWI) comprise providing a wafer (1) comprising upper and lower epitaxial layers (10, 13), which each include barrier layers, and a quantum well layer (11) disposed between the upper and lower epitaxial layers (10, 13), applying at least one sacrificial layer (21) over the upper epitaxial layer, and forming a QWI enhanced region and a QWI suppressed region by applying a QWI enhancing layer (31) over a portion of the sacrificial layer, wherein the portion under the QWI enhancing layer (31) is the QWI enhanced region, and the other portion is the QWI suppressed region. The method further comprises the steps of applying a QWI suppressing layer (41) over the QWI enhanced region and the QWI suppressed region, and annealing at a temperature sufficient to cause interdif fusion of atoms between the quantum well layer (11) and the barrier layers of the upper epitaxial layer and the lower epitaxial layer (10, 13).
    • 量子阱混合(QWI)的方法的实施例包括提供包括上和下外延层(10,13)的晶片(1),每个外延层各自包括阻挡层,以及设置在上和下之间的量子阱层(11) 外延层(10,13),通过在牺牲层的一部分上施加QWI增强层(31),在上部外延层上施加至少一个牺牲层(21),并形成QWI增强区域和QWI抑制区域 其中QWI增强层(31)下的部分是QWI增强区域,另一部分是QWI抑制区域。 该方法还包括以下步骤:在QWI增强区域和QWI抑制区域上施加QWI抑制层(41),并且在足以导致量子阱层(11)和阻挡层(11)之间的原子间隙融合的温度下进行退火 的上外延层和下外延层(10,13)。
    • 8. 发明申请
    • SYSTEM AND METHOD FOR OPTICALLY POWERING A REMOTE NETWORK COMPONENT
    • 用于光学地驱动远程网络组件的系统和方法
    • WO2006066050A2
    • 2006-06-22
    • PCT/US2005/045518
    • 2005-12-15
    • CORNING INCORPORATEDNISHIYAMA, NobuhikoSAUER, MichaelZAH, Chung-en
    • NISHIYAMA, NobuhikoSAUER, MichaelZAH, Chung-en
    • H01S3/00
    • H04B10/807
    • Both a system and method for optically powering a network component, such as the transponder of a picocell, is provided. The system includes a vertical cavity surface emitting laser (VCSEL) for processing an input signal, a remotely-located optical power source, and an optical fiber for conducting optical power from the source to the VCSEL. The VCSEL may be electrically biased from current generated by an optical-electro converter coupled to the fiber, or directly optically biased from light from the optical power source. A bias tee is connected between an input signal and an input of the VCSEL such that the VCSEL generates a modulated optical signal. The system may be the transponder of a picocell system where the VCSEL generates an optical uplink signal conducted to a head-end circuit via the same or a separate optical fiber.
    • 提供了用于给诸如微微小区的应答器之类的网络组件进行光学供电的系统和方法。 该系统包括用于处理输入信号的垂直腔表面发射激光器(VCSEL),位于远处的光功率源,以及用于将光功率从光源传导至VCSEL的光纤。 VCSEL可以由耦合到光纤的光电转换器产生的电流电偏置,或者从来自光功率源的光直接光偏置。 偏置三通连接在输入信号和VCSEL的输入之间,使得VCSEL产生调制的光信号。 该系统可以是微微小区系统的应答器,其中VCSEL产生通过相同或分离的光纤传导到头端电路的光上行链路信号。