会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明申请
    • TRENCH DMOS DEVICE WITH IMPROVED TERMINATION STRUCTURE FOR HIGH VOLTAGE APPLICATIONS
    • 带有改进的终端结构的高电压应用的沟槽式DMOS器件
    • WO2012054686A2
    • 2012-04-26
    • PCT/US2011/057020
    • 2011-10-20
    • VISHAY GENERAL SEMICONDUCTOR LLCHSU, Chih-WeiUDREA, FlorinLIN, Yih-Yin
    • HSU, Chih-WeiUDREA, FlorinLIN, Yih-Yin
    • H01L29/78H01L21/336
    • H01L29/7811H01L29/0615H01L29/063H01L29/0661H01L29/407H01L29/66143H01L29/7813H01L29/872H01L29/8725
    • A termination structure for a power transistor includes a semiconductor substrate having an active region and a termination region. The substrate has a first type of conductivity. A termination trench is located in the termination region and extends from a boundary of the active region to within a certain distance of an edge of the semiconductor substrate. A doped region has a second type of conductivity disposed in the substrate below the termination trench. A MOS gate is formed on a sidewall adjacent the boundary. The doped region extends from below a portion of the MOS gate spaced apart from the boundary toward a remote sidewall of the termination trench. A termination structure oxide layer is formed on the termination trench and covers a portion of the MOS gate and extends toward the edge of the substrate. A first conductive layer is formed on a backside surface of the semiconductor substrate. A second conductive layer is formed atop the active region, an exposed portion of the MOS gate, and extends to cover at least a portion of the termination structure oxide layer.
    • 用于功率晶体管的终端结构包括具有有源区和终端区的半导体衬底。 衬底具有第一类型的导电性。 终止沟槽位于终止区域中并且从有源区域的边界延伸到半导体衬底的边缘的一定距离内。 掺杂区域具有设置在终止沟槽下方的衬底中的第二类型的导电性。 MOS栅极形成在与边界相邻的侧壁上。 掺杂区域从与边界间隔开的MOS栅极的一部分的下方朝向终端沟槽的远端侧壁延伸。 端接结构氧化物层形成在终端沟槽上并且覆盖MOS栅极的一部分并且朝向衬底的边缘延伸。 第一导电层形成在半导体衬底的背侧表面上。 第二导电层形成在MOS栅极的暴露部分的有源区顶上,并且延伸以覆盖终止结构氧化物层的至少一部分。