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    • 1. 发明申请
    • LATERAL SOI SEMICONDUCTOR DEVICE
    • 横向SOI半导体器件
    • WO2004102672A1
    • 2004-11-25
    • PCT/GB2003/002025
    • 2003-05-13
    • CAMBRIDGE SEMICONDUCTORS LIMITEDUDREA, FlorinGARNER, David
    • UDREA, FlorinGARNER, David
    • H01L29/78
    • H01L29/7824H01L29/0653H01L29/0692H01L29/0696H01L29/7394H01L29/8086H01L29/861
    • This invention is generally concerned with semiconductor-on-insulator devices, particularly for high voltage applications. A lateral semiconductor-on-insulator device is described, comprising: a semiconductor substrate; an insulating layer on said semiconductor substrate; and a lateral semiconductor device on said insulator; said lateral semiconductor device having: a first region of a first conductivity type; a second region of a second conductivity type laterally spaced apart from said first region; and a drift region extending in a lateral direction between said first region and said second region; and wherein said drift region comprises at least one first zone and at least one second zone adjacent a said first zone, a said first zone having said second conductivity type, a said second zone being an insulating zone, a said first zone being tapered to narrow towards said first region.
    • 本发明通常涉及绝缘体上半导体器件,特别是对于高电压应用。 描述了一种绝缘体侧向半导体器件,包括:半导体衬底; 在所述半导体衬底上的绝缘层; 和在所述绝缘体上的横向半导体器件; 所述横向半导体器件具有:第一导电类型的第一区域; 与所述第一区域横向间隔开的第二导电类型的第二区域; 以及在所述第一区域和所述第二区域之间沿横向方向延伸的漂移区域; 并且其中所述漂移区包括至少一个第一区和邻近所述第一区的至少一个第二区,具有所述第二导电类型的所述第一区,所述第二区是绝缘区,所述第一区逐渐缩窄 朝向第一个地区。
    • 5. 发明申请
    • TRENCH DMOS DEVICE WITH IMPROVED TERMINATION STRUCTURE FOR HIGH VOLTAGE APPLICATIONS
    • TRENCH DMOS器件具有改进的高压应用终止结构
    • WO2012054686A3
    • 2012-07-05
    • PCT/US2011057020
    • 2011-10-20
    • VISHAY GEN SEMICONDUCTOR LLCHSU CHIH-WEIUDREA FLORINLIN YIH-YIN
    • HSU CHIH-WEIUDREA FLORINLIN YIH-YIN
    • H01L29/78H01L21/336
    • H01L29/063H01L29/0615H01L29/0661H01L29/407H01L29/66143H01L29/7811H01L29/7813H01L29/872H01L29/8725
    • A termination structure for a power transistor includes a semiconductor substrate having an active region and a termination region. The substrate has a first type of conductivity. A termination trench is located in the termination region and extends from a boundary of the active region to within a certain distance of an edge of the semiconductor substrate. A doped region has a second type of conductivity disposed in the substrate below the termination trench. A MOS gate is formed on a sidewall adjacent the boundary. The doped region extends from below a portion of the MOS gate spaced apart from the boundary toward a remote sidewall of the termination trench. A termination structure oxide layer is formed on the termination trench and covers a portion of the MOS gate and extends toward the edge of the substrate. A first conductive layer is formed on a backside surface of the semiconductor substrate. A second conductive layer is formed atop the active region, an exposed portion of the MOS gate, and extends to cover at least a portion of the termination structure oxide layer.
    • 功率晶体管的端接结构包括具有有源区和端接区的半导体衬底。 衬底具有第一类导电性。 终端沟槽位于终端区域中并且从有源区域的边界延伸到半导体衬底的边缘的一定距离内。 掺杂区域具有设置在终端沟槽下方的衬底中的第二类型的导电体。 在与边界相邻的侧壁上形成MOS栅极。 掺杂区域从与边界间隔开的部分MOS栅极的下方延伸到终端沟槽的远侧侧壁。 端接结构氧化物层形成在终端沟槽上并且覆盖MOS栅极的一部分并朝向衬底的边缘延伸。 第一导电层形成在半导体衬底的背面上。 第二导电层形成在有源区顶部,MOS栅极的暴露部分的顶部,并延伸以覆盖端接结构氧化物层的至少一部分。
    • 9. 发明申请
    • POWER SEMICONDUCTOR DEVICE
    • 功率半导体器件
    • WO2010142342A1
    • 2010-12-16
    • PCT/EP2009/057261
    • 2009-06-12
    • ABB RESEARCH LTDANTONIOU, MarinaUDREA, FlorinBAUER-HOLZER, Friedhelm
    • ANTONIOU, MarinaUDREA, FlorinBAUER-HOLZER, Friedhelm
    • H01L29/739H01L29/06H01L29/08H01L29/10
    • H01L29/7395H01L29/0634H01L29/0834H01L29/1066H01L29/7392H01L29/7397
    • A power semiconductor device (1) is provided with a semiconductor wafer (10) and a first electrical contact (8) being formed on a first main side (101) of the wafer and a second electrical contact (9) being formed on a second main side (102) of the wafer opposite the first main side (101). The wafer (10) comprises a structure with a plurality of layers of different conductivity types. It comprises at least one source region (2) of the first conductivity type contacting the first electrical contact (8), at least one base region (2) of a second conductivity type contacting the first electrical contact (8), a base layer (4) and a gate electrode, which is electrically insulated by an insulation layer (51) from the source region (2) and the base region (3). The base layer (4) comprises at least one first pillar (41) of the first conductivity type and at least one second pillar (42) of the second conductivity type, the first and second pillars (41, 42) being arranged alternately in the same plane. At least one second pillar (42) is not in contact with the base region (3).
    • 功率半导体器件(1)设置有半导体晶片(10)和形成在晶片的第一主侧(101)上的第一电触点(8),第二电触点(9)形成在第二 所述晶片的与所述第一主侧(101)相对的主侧(102)。 晶片(10)包括具有多层不同导电类型的结构。 它包括与第一电触点(8)接触的至少一个第一导电类型的源区(2),与第一电接触(8)接触的第二导电类型的至少一个基区(2),基层( 4)和通过绝缘层(51)与源极区域(2)和基极区域(3)电绝缘的栅电极。 基底层(4)包括至少一个第一导电类型的第一支柱(41)和至少一个第二导电类型的第二支柱(42),第一和第二支柱(41,42)交替布置在 同一架飞机。 至少一个第二柱(42)不与基部区域(3)接触。