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1. 发明申请

WO2011043852A1 HIGH EFFICIENCY MULTI WAVELENGTH LINE LIGHT SOURCE 审中-公开
标题翻译：高效率多波长线路光源
公开(公告)号：WO2011043852A1
公开(公告)日：2011-04-14
申请号：PCT/US2010/039319
申请日：2010-06-21
申请人： APPLIED MATERIALS, INC. , SCHLEZINGER, Asaf
发明人： SCHLEZINGER, Asaf
IPC分类号： H01L31/18 , H01L31/042
CPC分类号： G01N21/894 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the present invention provide apparatus and method for inspecting a substrate. Particularly, embodiments of the present invention provide apparatus and method for detecting pinholes in one or more light absorbing films deposited on a substrate. One embodiment of the present invention provides an inspection station comprising an illumination assembly having a first light source providing light of wavelengths in a first spectrum and a second light source providing light of wavelengths in a second spectrum, wherein light in the first spectrum and second spectrum can be absorbed by light absorbing films on the substrate.
摘要翻译：本发明的实施例提供了用于检查基板的装置和方法。特别地，本发明的实施例提供了用于检测沉积在基板上的一个或多个光吸收膜中的针孔的装置和方法。本发明的一个实施例提供了一种检查站，其包括照明组件，其具有提供第一光谱波长的光的第一光源和提供第二光谱中的波长的光的第二光源，其中第一光谱和第二光谱中的光可以被基板上的光吸收膜吸收。

2. 发明申请

WO2010091025A2 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：太阳能生产线的计量和检验套件
公开(公告)号：WO2010091025A2
公开(公告)日：2010-08-12
申请号：PCT/US2010/022915
申请日：2010-02-02
申请人： APPLIED MATERIALS, INC. , SCHLEZINGER, Asaf , FREI, Michel, R. , WANG, Dapeng , SU, Tzay-Fa , SVIDENKO, Vicky , MAQSOOD, Kashif
发明人： FREI, Michel, R. , WANG, Dapeng , SU, Tzay-Fa , SVIDENKO, Vicky , MAQSOOD, Kashif
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

3. 发明申请

WO2010135321A3 METHOD AND APPARATUS FOR SOLAR CELL PRODUCTION LINE CONTROL AND PROCESS ANALYSIS 审中-公开
标题翻译：太阳能电池生产线控制和过程分析的方法和装置
公开(公告)号：WO2010135321A3
公开(公告)日：2011-02-03
申请号：PCT/US2010035247
申请日：2010-05-18
申请人： APPLIED MATERIALS INC , SVIDENKO VICKY , ABRAHAM MATHEW , KINCAL SERKAN , SCHLEZINGER ASAF , FREI MICHEL , WANG DAPENG , SU TZAY-FA
发明人： SVIDENKO VICKY , ABRAHAM MATHEW , KINCAL SERKAN , SCHLEZINGER ASAF , FREI MICHEL , WANG DAPENG , SU TZAY-FA
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/1876 , G05B2219/31449 , G05B2219/31459 , H01L31/03762 , H01L31/075 , H02S50/10 , Y02E10/50 , Y02P70/521 , Y02P80/114 , Y02P90/86
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

4. 发明申请

WO2010151364A1 METHOD AND APPARATUS FOR INSPECTING SCRIBES IN SOLAR MODULES 审中-公开
标题翻译：用于检查太阳能模块中的筛选的方法和装置
公开(公告)号：WO2010151364A1
公开(公告)日：2010-12-29
申请号：PCT/US2010/031728
申请日：2010-04-20
申请人： APPLIED MATERIALS, INC. , SCHLEZINGER, Asaf
发明人： SCHLEZINGER, Asaf
IPC分类号： H01L31/18 , H01L31/042
CPC分类号： G01N21/956 , H01L31/0463 , H02S50/00 , H02S50/10 , H02S50/15 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a method and apparatus for inspecting and analyzing the spacing of isolation trenches scribed in a solar module during the fabrication process. In one embodiment, images of the scribed trenches are captured and analyzed at various points in the fabrication process. The results may then be used either manually or in an automated fashion to diagnose, alter, and tune upstream processes for improved scribe spacing on subsequently processed solar modules.
摘要翻译：本发明的实施例一般涉及一种用于检查和分析在制造过程中在太阳能模块中刻划的隔离沟的间隔的方法和装置。在一个实施例中，在制造过程中的各个点捕获和分析划线沟槽的图像。然后可以手动或以自动方式将结果用于诊断，改变和调整上游过程，以改善随后处理的太阳能模块上的划痕间距。

5. 发明申请

WO2009029902A1 PHOTOVOLTAIC PRODUCTION LINE 审中-公开
标题翻译：光伏生产线
公开(公告)号：WO2009029902A1
公开(公告)日：2009-03-05
申请号：PCT/US2008/074931
申请日：2008-08-29
申请人： APPLIED MATERIALS, INC. , BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
发明人： BACHRACH, Robert Z. , CHAE, Yong-Kee , CHOI, Soo Young , DE VRIES, Nicholas G. J. , ELGAR, Yacov , ENGLHARDT, Eric A. , FREI, Michel R. , GAY, Charles , HAWKINS, Parris , HO, Choi , HUNTER, James Craig , KANKANALA, Penchala N. , LI, Liwei , LO, Wing Hoo , LU, Danny Cam Toan , MEI, Fang , MURPHY, Stephen P. , PATEL, Srujal , SAUNDERS, Matthew J. B. , SCHLEZINGER, Asaf , SHENG, Shuran , SU, Tzay-Fa , SULLIVAN, Jeffrey S. , TANNER, David , TROWBRIDGE, Teresa , WALKER, Brice , WHITE, John M. , WON, Tae K.
IPC分类号： G06F7/10 , H01L31/06 , H01L21/4763
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明涉及一种可用于使用处理模块来形成光伏器件的系统，所述处理模块适于在太阳能电池形成过程中执行步骤。自动化太阳能电池制造厂通常是自动化处理模块和用于形成太阳能电池器件的自动化设备。因此，自动化太阳能加工厂通常将包括适于接纳衬底的衬底接收模块，具有至少一个处理室的一个或多个吸收层沉积群集工具，该处理室适于在衬底的表面上沉积含硅层，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压灭菌器模块，自动化接线盒附接模块，以及一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

6. 发明申请

WO2013138611A1 PROCESS AND APPARATUS FOR MEASURING THE CRYSTAL FRACTION OF CRYSTALLINE SILICON CASTED MONO WAFERS 审中-公开
标题翻译：用于测量晶体硅酸钠单晶波形晶体分离的方法和装置
公开(公告)号：WO2013138611A1
公开(公告)日：2013-09-19
申请号：PCT/US2013/031452
申请日：2013-03-14
申请人： APPLIED MATERIALS, INC. , SCHLEZINGER, Asaf , AL-BAYATI, Amir
发明人： SCHLEZINGER, Asaf , AL-BAYATI, Amir
IPC分类号： G01N21/35 , H01L21/66
CPC分类号： G01N21/59
摘要： Provided are methods and apparatus for determining the crystal fraction of a casted-mono silicon wafer. A light source is directed at the wafer and the transmission or reflection is measured by a detector. An image of the wafer is generated by a processor and the crystal fraction is calculated from the generated image. The crystal fraction is correlated to the efficiency of the solar cell produced, allowing for the rejection of inferior wafers prior to processing.
摘要翻译：提供了用于确定铸造单晶硅晶片的晶体分数的方法和装置。光源指向晶片，透射或反射由检测器测量。由处理器生成晶片的图像，并根据所生成的图像计算晶体分数。晶体分数与所制造的太阳能电池的效率相关，允许在处理之前排出劣质晶片。

7. 发明申请

WO2010121112A3 METHOD AND APPARATUS FOR RESIDUE DETECTION IN THE EDGE DELETED AREA OF A SUBSTRATE 审中-公开
标题翻译：基板边缘检测区域中的残留检测方法和装置
公开(公告)号：WO2010121112A3
公开(公告)日：2011-01-13
申请号：PCT/US2010031364
申请日：2010-04-16
申请人： APPLIED MATERIALS INC , TSAI KENNETH CHIEN-QUEN , SCHLEZINGER ASAF
发明人： TSAI KENNETH CHIEN-QUEN , SCHLEZINGER ASAF
IPC分类号： G01N21/88 , G01B11/06 , G01B11/30 , G01N21/47 , H01L21/67
CPC分类号： G01N21/474 , G01N21/8422 , G01N21/94 , G01N21/958
摘要： Apparatus and methods for detecting residue on a glass substrate and method of use are disclosed. The apparatus comprises a substrate support, a sensor, a controller and a peripheral device in communication with the controller. The apparatus measures the height or thickness of a main surface and an edge delete surface of a substrate to determine if film residue is present on the edge delete surface.
摘要翻译：公开了一种用于检测玻璃基板上的残留物的方法和方法。该装置包括与控制器通信的基板支撑件，传感器，控制器和外围设备。该装置测量衬底的主表面和边缘删除表面的高度或厚度，以确定边缘删除表面上是否存在膜残留物。

8. 发明申请

WO2010091025A3 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：用于太阳能生产线的计量和检测套件
公开(公告)号：WO2010091025A3
公开(公告)日：2010-11-25
申请号：PCT/US2010022915
申请日：2010-02-02
申请人： APPLIED MATERIALS INC , SCHLEZINGER ASAF , FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
发明人： FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例总体上涉及一种系统，该系统用于使用处理模块形成太阳能电池器件，所述处理模块适于在形成太阳能电池器件中执行一个或多个处理。在一个实施例中，该系统适于通过接受大的未处理的基板并且执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程以形成多个完整的，功能性的和测试的来形成薄膜太阳能电池器件太阳能电池装置然后可以被运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供各种形成等级的太阳能电池装置的检查，同时收集和使用度量数据来诊断，调整或改善太阳能电池装置制造期间的生产线过程。

9. 发明申请

WO2010121112A2 METHOD AND APPARATUS FOR RESIDUE DETECTION IN THE EDGE DELETED AREA OF A SUBSTRATE 审中-公开
标题翻译：基板边缘检测区域中的残留检测方法和装置
公开(公告)号：WO2010121112A2
公开(公告)日：2010-10-21
申请号：PCT/US2010/031364
申请日：2010-04-16
申请人： APPLIED MATERIALS, INC. , TSAI, Kenneth Chien-Quen , SCHLEZINGER, Asaf
发明人： TSAI, Kenneth Chien-Quen , SCHLEZINGER, Asaf
IPC分类号： G01N21/88 , G01N21/47 , G01B11/06 , G01B11/30 , H01L21/67
CPC分类号： G01N21/474 , G01N21/8422 , G01N21/94 , G01N21/958
摘要： Apparatus and methods for detecting residue on a glass substrate and method of use are disclosed. The apparatus comprises a substrate support, a sensor, a controller and a peripheral device in communication with the controller. The apparatus measures the height or thickness of a main surface and an edge delete surface of a substrate to determine if film residue is present on the edge delete surface.
摘要翻译：公开了一种用于检测玻璃基板上的残留物的方法和方法。该装置包括与控制器通信的基板支撑件，传感器，控制器和外围设备。该装置测量衬底的主表面和边缘删除表面的高度或厚度，以确定边缘删除表面上是否存在膜残留物。

10. 发明申请

WO2010135321A2 METHOD AND APPARATUS FOR SOLAR CELL PRODUCTION LINE CONTROL AND PROCESS ANALYSIS 审中-公开
标题翻译：太阳能电池生产线控制和过程分析的方法和装置
公开(公告)号：WO2010135321A2
公开(公告)日：2010-11-25
申请号：PCT/US2010/035247
申请日：2010-05-18
申请人： APPLIED MATERIALS, INC. , SVIDENKO, Vicky , ABRAHAM, Mathew , KINCAL, Serkan , SCHLEZINGER, Asaf , FREI, Michel , WANG, Dapeng , SU, Tzay-Fa
发明人： SVIDENKO, Vicky , ABRAHAM, Mathew , KINCAL, Serkan , SCHLEZINGER, Asaf , FREI, Michel , WANG, Dapeng , SU, Tzay-Fa
IPC分类号： H01L31/042 , H01L31/18
CPC分类号： H01L31/1876 , G05B2219/31449 , G05B2219/31459 , H01L31/03762 , H01L31/075 , H02S50/10 , Y02E10/50 , Y02P70/521 , Y02P80/114 , Y02P90/86
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

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