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1. 发明申请

WO2011063318A3 APPARATUS AND METHODS FOR MEASURING SOLAR CELL MODULE PERFORMANCE 审中-公开
公开(公告)号：WO2011063318A3
公开(公告)日：2011-05-26
申请号：PCT/US2010/057569
申请日：2010-11-22
申请人： APPLIED MATERIALS, INC. , SULLIVAN, Jeffrey S. , LU, Danny C. , WANG, Peter , MAQSOOD, Kashif , MARTIN, Todd W. , MEGGS, Connie , VELLORE, Kim
发明人： SULLIVAN, Jeffrey S. , LU, Danny C. , WANG, Peter , MAQSOOD, Kashif , MARTIN, Todd W. , MEGGS, Connie , VELLORE, Kim
IPC分类号： H01L31/18 , H01L31/042 , H01L21/66
摘要： Methods and apparatus for moving and evaluating the performance of solar cell modules are described. Specifically, embodiments of the invention are directed to apparatus and methods including a transparent plate having a plurality of fluid conduits therethrough, where the fluid conduits are configured to direct a fluid with sufficient force to elevate/support a solar cell module during measurement of the solar cell performance.

2. 发明申请

WO2013138216A1 APPARATUS AND PROCESS FOR ATOMIC LAYER DEPOSITION WITH HORIZONTAL LASER 审中-公开
标题翻译：用水平激光沉积原子层的装置和方法
公开(公告)号：WO2013138216A1
公开(公告)日：2013-09-19
申请号：PCT/US2013/030118
申请日：2013-03-11
申请人： APPLIED MATERIALS, INC. , THOMPSON, David , NARWANKAR, Pravin, K. , SRINIVASAN, Swaminathan , CHATTERJEE, Sukti , MAYUR, Abhilash , MAQSOOD, Kashif
发明人： THOMPSON, David , NARWANKAR, Pravin, K. , SRINIVASAN, Swaminathan , CHATTERJEE, Sukti , MAYUR, Abhilash , MAQSOOD, Kashif
IPC分类号： C23C16/50 , C23C16/44
CPC分类号： C23C16/45551 , C23C16/45548 , C23C16/483
摘要： Provided are atomic layer deposition apparatus and methods including a gas distribution plate and at least one laser source emitting a laser beam adjacent the gas distribution plate to activate gaseous species from the gas distribution plate. Also provided are gas distribution plates with elongate gas injector ports where the at least one laser beam is directed along the length of the elongate gas injectors.
摘要翻译：提供了原子层沉积设备和方法，包括气体分配板和发射与气体分配板相邻的激光束的至少一个激光源，以激活来自气体分配板的气态物质。还提供了具有细长气体喷射器端口的气体分配板，其中至少一个激光束沿着细长气体喷射器的长度被引导。

3. 发明申请

WO2010091025A2 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：太阳能生产线的计量和检验套件
公开(公告)号：WO2010091025A2
公开(公告)日：2010-08-12
申请号：PCT/US2010/022915
申请日：2010-02-02
申请人： APPLIED MATERIALS, INC. , SCHLEZINGER, Asaf , FREI, Michel, R. , WANG, Dapeng , SU, Tzay-Fa , SVIDENKO, Vicky , MAQSOOD, Kashif
发明人： FREI, Michel, R. , WANG, Dapeng , SU, Tzay-Fa , SVIDENKO, Vicky , MAQSOOD, Kashif
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

4. 发明申请

WO2011063318A2 APPARATUS AND METHODS FOR MEASURING SOLAR CELL MODULE PERFORMANCE 审中-公开
标题翻译：用于测量太阳能电池模块性能的装置和方法
公开(公告)号：WO2011063318A2
公开(公告)日：2011-05-26
申请号：PCT/US2010057569
申请日：2010-11-22
申请人： APPLIED MATERIALS INC , SULLIVAN JEFFREY S , LU DANNY C , WANG PETER , MAQSOOD KASHIF , MARTIN TODD W , MEGGS CONNIE , VELLORE KIM
发明人： SULLIVAN JEFFREY S , LU DANNY C , WANG PETER , MAQSOOD KASHIF , MARTIN TODD W , MEGGS CONNIE , VELLORE KIM
IPC分类号： H01L31/18 , H01L21/66 , H01L31/042
CPC分类号： H02S50/10
摘要： Methods and apparatus for moving and evaluating the performance of solar cell modules are described. Specifically, embodiments of the invention are directed to apparatus and methods including a transparent plate having a plurality of fluid conduits therethrough, where the fluid conduits are configured to direct a fluid with sufficient force to elevate/support a solar cell module during measurement of the solar cell performance.
摘要翻译：描述了用于移动和评估太阳能电池模块的性能的方法和设备。具体而言，本发明的实施例涉及包括透明板的设备和方法，所述透明板具有穿过其中的多个流体导管，其中流体导管被配置为在测量太阳能期间以足够的力引导流体以提升/支撑太阳能电池模块电池性能。

5. 发明申请

WO2010091025A3 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：用于太阳能生产线的计量和检测套件
公开(公告)号：WO2010091025A3
公开(公告)日：2010-11-25
申请号：PCT/US2010022915
申请日：2010-02-02
申请人： APPLIED MATERIALS INC , SCHLEZINGER ASAF , FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
发明人： FREI MICHEL R , WANG DAPENG , SU TZAY-FA , SVIDENKO VICKY , MAQSOOD KASHIF
IPC分类号： H01L31/042 , H01L21/66
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例总体上涉及一种系统，该系统用于使用处理模块形成太阳能电池器件，所述处理模块适于在形成太阳能电池器件中执行一个或多个处理。在一个实施例中，该系统适于通过接受大的未处理的基板并且执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程以形成多个完整的，功能性的和测试的来形成薄膜太阳能电池器件太阳能电池装置然后可以被运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供各种形成等级的太阳能电池装置的检查，同时收集和使用度量数据来诊断，调整或改善太阳能电池装置制造期间的生产线过程。

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