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1. 发明申请

WO2006071886A3 HIGH VOLTAGE PULSE GENERATOR 审中-公开
公开(公告)号：WO2006071886A3
公开(公告)日：2006-07-06
申请号：PCT/US2005/047121
申请日：2005-12-27
申请人： KAISER SYSTEMS, INC. , OICLES, Jeffrey Alan , JOHNS, David
发明人： OICLES, Jeffrey Alan , JOHNS, David
IPC分类号： H02M3/18 , H02M9/04
摘要： A high voltage pulse generator (11) utilizes an even number of Marx cells (13) using L-C inversion topology. Each Marx cell is associated with an individual inverter transformer (T1 and T2) having a primary winding connected to the output o an ac power supply such as a series resonant inverter (12). The secondary of each inverter transformer is half-wave rectified to charge the energy storage capacitors in each Marx cell. A distributed voltage-sensing scheme can be provided for accurate feedback to the inverter's controller. An inductive element can be used to achieve a magnetic diode effect in the L-C inversion circuit to reduce component stress and improve efficiency. A transformer-coupled floating gate drive circuit can be used as one method of providing local power conditioning and trigger timing for discharge of the energy storage capacitors.

2. 发明申请

WO2003021728A3 VERY NARROW BAND, TWO CHAMBER, HIGH REP RATE GAS DISCHARGE LASER SYSTEM 审中-公开
公开(公告)号：WO2003021728A3
公开(公告)日：2003-03-13
申请号：PCT/US2002/027925
申请日：2002-08-28
申请人： CYMER, INC. , KNOWLES, David, S. , BROWN, Daniel, J., W. , BESAUCELE, Herve, A. , MYERS, David, W. , ERSHOV, Alexander, I. , PARTLO, William, N. , SANDSTROM, Richard, L. , DAS, Plash, P. , ANDERSON, Stuart, L. , FOMENKOV, Igor, V. , UJAZDOWSKI, Richard, C. , ONKELS, Eckehard, D. , NESS, Richard, M. , SMITH, Scott, T. , HULBURD, William, G. , OICLES, Jeffrey
发明人： KNOWLES, David, S. , BROWN, Daniel, J., W. , BESAUCELE, Herve, A. , MYERS, David, W. , ERSHOV, Alexander, I. , PARTLO, William, N. , SANDSTROM, Richard, L. , DAS, Plash, P. , ANDERSON, Stuart, L. , FOMENKOV, Igor, V. , UJAZDOWSKI, Richard, C. , ONKELS, Eckehard, D. , NESS, Richard, M. , SMITH, Scott, T. , HULBURD, William, G. , OICLES, Jeffrey
IPC分类号： H01S3/11
摘要： An injection seeded modular gas discharge laser system (2) capable of producing high quality pulsed beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater. Two separate discharge chambers are provided, one of which is a part of a master oscillator (10) producing a very narrow band seed beam, which is amplified (12) in the second discharge chamber. The chambers can be controlled separately permitting separate optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber. A preferred embodiment in the ArF excimer laser system configured as a MOPA and specifically designed for use as a light source for integrated circuit lithography. In the preferred MOPA embodiment, each chamber comprises a single tangential fan (10A) providing sufficient gas flow to permit operation at pulse rates of 4,000 Hz or greater by cleaning debris from the discharge region in less time that the approximately 0.25 milliseconds between pulses. The masters oscillation is equipped with a line narrowing package having a very fast tuning mirror capable of controlling centerline wavelength on a pulse-to-pulse basis at repetition rates of 4000 Hz or greater to a precision of less than 0.2 pm.

3. 发明申请

WO2006071886A2 HIGH VOLTAGE PULSE GENERATOR 审中-公开
标题翻译：高压脉冲发生器
公开(公告)号：WO2006071886A2
公开(公告)日：2006-07-06
申请号：PCT/US2005047121
申请日：2005-12-27
申请人： KAISER SYSTEMS INC , OICLES JEFFREY ALAN , JOHNS DAVID
发明人： OICLES JEFFREY ALAN , JOHNS DAVID
IPC分类号： H02M3/335
CPC分类号： H02M3/3376 , H02M3/285 , H02M2001/009 , Y02B70/1433
摘要： A high voltage pulse generator utilizes an even number of Marx cells using L-C inversion topology. Each Marx cell is associated with an individual inverter transformer having a primary winding connected to the output of an ac power supply such as a series resonant inverter. The secondary of each inverter transformer is half-wave rectified to charge the energy storage capacitors in each Marx cell. A distributed voltage sensing scheme can be provided for accurate feedback to the inverter's controller. An inductive element can be used to achieve a magnetic diode effect in the L-C inversion circuit to reduce component stress and improve efficiency. A transformer-coupled floating gate drive circuit can be used as one method of providing local power conditioning and trigger timing for discharge of the energy storage capacitors.
摘要翻译：高压脉冲发生器利用偶数个使用L-C反转拓扑的Marx单元。每个Marx单元都与一个单独的逆变器变压器相关联，该逆变器具有连接到诸如串联谐振逆变器之类的交流电源的输出的初级绕组。每个逆变器变压器的次级被半波整流以对每个Marx单元中的储能电容器充电。可以提供分布式电压检测方案，以准确反馈至变频器的控制器。可以使用电感元件在L-C反转电路中实现磁性二极管效应，以降低组件应力并提高效率。变压器耦合的浮动栅极驱动电路可以用作为储能电容器的放电提供本地功率调节和触发定时的一种方法。

4. 发明申请

WO2006071886A9 HIGH VOLTAGE PULSE GENERATOR 审中-公开
标题翻译：高电压脉冲发生器
公开(公告)号：WO2006071886A9
公开(公告)日：2006-08-17
申请号：PCT/US2005047121
申请日：2005-12-27
申请人： KAISER SYSTEMS INC , OICLES JEFFREY ALAN , JOHNS DAVID
发明人： OICLES JEFFREY ALAN , JOHNS DAVID
IPC分类号： H02M3/335
CPC分类号： H02M3/3376 , H02M3/285 , H02M2001/009 , Y02B70/1433
摘要： A high voltage pulse generator utilizes an even number of Marx cells using L-C inversion topology. Each Marx cell is associated with an individual inverter transformer having a primary winding connected to the output of an ac power supply such as a series resonant inverter. The secondary of each inverter transformer is half-wave rectified to charge the energy storage capacitors in each Marx cell. A distributed voltage sensing scheme can be provided for accurate feedback to the inverter's controller. An inductive element can be used to achieve a magnetic diode effect in the L-C inversion circuit to reduce component stress and improve efficiency. A transformer-coupled floating gate drive circuit can be used as one method of providing local power conditioning and trigger timing for discharge of the energy storage capacitors.
摘要翻译：高压脉冲发生器利用使用L-C反演拓扑的偶数个马克思单元。每个马克思单元与具有连接到诸如串联谐振逆变器的交流电源的输出的初级绕组的单个逆变器变压器相关联。每个逆变变压器的次级半波整流，为每个马克思单元中的储能电容器充电。可以提供分布式电压检测方案，以便对变频器的控制器进行准确的反馈。可以使用电感元件在L-C反相电路中实现磁二极管效应，以减少元件应力并提高效率。变压器耦合的浮栅驱动电路可以用作为能量存储电容器放电的本地功率调节和触发定时的一种方法。

5. 发明申请

WO2003021728A2 VERY NARROW BAND, TWO CHAMBER, HIGH REP RATE GAS DISCHARGE LASER SYSTEM 审中-公开
标题翻译：非常窄带，两个室，高倍率气体放电激光系统
公开(公告)号：WO2003021728A2
公开(公告)日：2003-03-13
申请号：PCT/US2002/027925
申请日：2002-08-28
申请人： CYMER, INC. (a Nevada corporation) , KNOWLES, David, S. , BROWN, Daniel, J., W. , BESAUCELE, Herve, A. , MYERS, David, W. , ERSHOV, Alexander, I. , PARTLO, William, N. , SANDSTROM, Richard, L. , DAS, Plash, P. , ANDERSON, Stuart, L. , FOMENKOV, Igor, V. , UJAZDOWSKI, Richard, C. , ONKELS, Eckehard, D. , NESS, Richard, M. , SMITH, Scott, T. , HULBURD, William, G. , OICLES, Jeffrey
发明人： KNOWLES, David, S. , BROWN, Daniel, J., W. , BESAUCELE, Herve, A. , MYERS, David, W. , ERSHOV, Alexander, I. , PARTLO, William, N. , SANDSTROM, Richard, L. , DAS, Plash, P. , ANDERSON, Stuart, L. , FOMENKOV, Igor, V. , UJAZDOWSKI, Richard, C. , ONKELS, Eckehard, D. , NESS, Richard, M. , SMITH, Scott, T. , HULBURD, William, G. , OICLES, Jeffrey
IPC分类号： H01S
CPC分类号： G01J1/4257 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： An injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting separate optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber. A preferred embodiment in an ArF excimer laser system configured as a MOPA and specifically designed for use as a light source for integrated circuit lithography. In the preferred MOPA embodiment, each chamber comprises a single tangential fan providing sufficient gas flow to permit operation at pulse rates of 4000 Hz or greater by clearing debris from the discharge region in less time than the approximately 0.25 milliseconds between pulses. The master oscillator is equipped with a line narrowing package having a very fast tuning mirror capable of controlling centerline wavelength on a pulse-to-pulse basis at repetition rates of 4000 Hz or greater to a precision of less than 0.2 pm.
摘要翻译：一种注射种子模块化气体放电激光系统，其能够以约4,000Hz或更大的脉冲速率和约5mJ或更大的脉冲能量产生高质量的脉冲激光束。提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中放大的非常窄的带状晶体束。可以单独控制室，允许主振荡器中的波长参数的单独优化和放大室中的脉冲能量参数的优化。配置为MOPA并被专门用于集成电路光刻的光源的ArF准分子激光系统中的优选实施例。在优选的MOPA实施例中，每个腔室包括单个切向风扇，其通过在比脉冲之间的大约0.25毫秒更短的时间内清除来自放电区域的碎屑来提供足够的气流以允许以4000Hz或更高的脉冲速率操作。主振荡器配备有具有非常快的调谐镜的线窄化封装，能够以4000Hz或更高的重复频率在脉冲到脉冲的基础上控制中心线波长，精度低于0.2μm。

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