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1. 发明申请

WO2016151101A3 METHOD FOR CORRECTING COORDINATE MEASUREMENT MACHINE ERRORS 审中-公开
标题翻译：校正坐标测量机错误的方法
公开(公告)号：WO2016151101A3
公开(公告)日：2016-10-27
申请号：PCT/EP2016056623
申请日：2016-03-24
申请人： NIKON METROLOGY NV
发明人： STOTT CHRISTOPHER , OSBORNE NICHOLAS PATRICK , VANDENHOUDT GEERT
IPC分类号： G01B21/04 , H01B7/00 , H01B11/00
CPC分类号： G01B21/045 , G01B21/047
摘要： The invention provides a method for creating or refining a mathematical correction model for correcting dybamic measurement errors in a co-ordinate measurement machine having at least 3 linear machine axes X, Y, and Z, each comprising a machine linear scale, and provided with a measurement probe. An error model for considering acceleration errors is created and refined using actual measurements of the probe position when accelerating. Also the probe offset from the linear translation axes is considered.
摘要翻译：本发明提供了一种用于在具有至少3个线性机器轴X，Y和Z的坐标测量机器中产生或精炼用于校正动态测量误差的数学校正模型的方法，每个线性机器轴线X，Y和Z各自包括机器线性刻度，测量探头。考虑加速度误差的误差模型是通过加速时探头位置的实际测量来创建和改进的。此外，考虑了与线性平移轴偏移的探头。

2. 发明申请

WO2016023949A1 X-RAY APPARATUS 审中-公开
标题翻译： X-RAY装置
公开(公告)号：WO2016023949A1
公开(公告)日：2016-02-18
申请号：PCT/EP2015/068555
申请日：2015-08-12
申请人： NIKON METROLOGY NV
发明人： PRICE, Ben , BEECHEY, Michael , SMITH, James
IPC分类号： G01N23/20 , G01N23/22 , G01Q30/18 , H01J35/16 , H01J37/16
CPC分类号： G01N23/02 , G01N23/20025 , G01N23/2204 , G01N2223/308 , G01N2223/309 , G01N2223/419
摘要： An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.
摘要翻译：公开了一种用于X射线设备的设备安装座。安装座包括主屏蔽元件，外围屏蔽元件和辅助屏蔽元件，其被布置成允许安装元件以屏蔽方式穿过主屏蔽元件。还公开了一种用于X射线装置的支撑装置。支撑装置包括用于在第一位置和第二位置之间平移支撑部分的可分离轴承和用于将支撑部件从第二位置平移到第三位置的升降机构，从而分离轴承。还公开了一种用于X射线设备的操纵台。舞台包括布置成支撑样本台并且通过第二和第三支撑结构在样品台的任一侧的第一和第二位置处被支撑的第一支撑结构，第二和第三支撑结构构造成允许第一支撑结构升高，较低，同时在两端保持支撑。

3. 发明申请

WO2016018508A2 METHOD FOR PACKAGING OPTICAL FIBER ARRAY FOR LASER RADAR 审中-公开
标题翻译：用于激光雷达包装光纤阵列的方法
公开(公告)号：WO2016018508A2
公开(公告)日：2016-02-04
申请号：PCT/US2015/033828
申请日：2015-06-02
申请人： NIKON METROLOGY NV
发明人： SLOTWINSKI, Anthony R. , REZK, Mina A. , SLYUSAREV, Pavel
IPC分类号： G01S3/789
CPC分类号： G02B6/29398 , G01S7/484 , G01S7/486 , G02B6/02395 , G02B6/29346
摘要： An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.
摘要翻译：通过组合具有不同热路径长度变化的光纤来对第一光纤和第二光纤之间的光学延迟进行温度补偿。在一些实例中，具有不同缓冲涂层的纤维在每单位长度和温度上表现出不同的路径长度变化。将这种纤维组合在纤维阵列中提供了基本上与温度无关的路径长度差。

4. 发明申请

WO2014081043A2 SCAN MIRRORS FOR LASER RADAR 审中-公开
标题翻译：扫射镜用于激光雷达
公开(公告)号：WO2014081043A2
公开(公告)日：2014-05-30
申请号：PCT/JP2013/081827
申请日：2013-11-20
申请人： NIKON CORPORATION , NIKON METROLOGY NV
发明人： GOODWIN, Eric Peter , SMITH, Daniel Gene , COOPER, Alexander , REZK, Mina , SLOTWINSKI, Anthony , HEDGES, Thomas
IPC分类号： G01S7/481 , G01S7/491 , G01S17/32
CPC分类号： G01S17/102 , G01S7/4812 , G01S7/4817 , G01S7/4818 , G01S7/4917 , G01S17/325 , G01S17/66 , G02B26/101 , G02B26/108
摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
摘要翻译：激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。聚焦光学组件包括用于调节测量光束聚焦的角立方体。基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

5. 发明申请

WO2016045905A1 HIGH VOLTAGE GENERATOR 审中-公开
标题翻译：高压发电机
公开(公告)号：WO2016045905A1
公开(公告)日：2016-03-31
申请号：PCT/EP2015/069632
申请日：2015-08-27
申请人： NIKON METROLOGY NV
发明人： ZYWICKI, Janusz , HADLAND, Roger
IPC分类号： H05G1/20 , H05G1/32 , H05G1/26
CPC分类号： H05G1/20 , H01F27/29 , H01F27/30 , H01F29/02 , H01F29/12 , H02M7/043 , H05G1/265 , H05G1/32
摘要： Disclosed is a high-voltage generator for an x-ray apparatus. The generator comprises a voltage multiplier having a high-voltage output terminal and first and second alternating-current input terminals, an output transformer coil (12) having first and second output terminals respectively electrically connected to the first and second input terminals of the voltage multiplier, and an input transformer coil (11) having first and second input terminals and being arranged coaxially with and inductively coupled to the output transformer coil. The input and output transformer coils are relatively axially movable. Disclosed is also an x-ray apparatus using the high-voltage generator, a method of configuring a high-voltage generator and a method of configuring a high-voltage apparatus.
摘要翻译：公开了一种用于X射线装置的高压发生器。发电机包括具有高压输出端和第一和第二交流输入端的电压倍增器，输出变压器线圈（12）具有分别电连接到电压倍增器的第一和第二输入端的第一和第二输出端和输入变压器线圈（11），其具有第一和第二输入端子并且与输出变压器线圈同轴并且电感耦合。输入和输出变压器线圈相对轴向移动。还公开了使用高压发生器的X射线装置，高电压发生器的配置方法和配置高压装置的方法。

6. 发明申请

WO2014184127A1 ENCLOSED X-RAY IMAGING SYSTEM 审中-公开
标题翻译：封装的X射线成像系统
公开(公告)号：WO2014184127A1
公开(公告)日：2014-11-20
申请号：PCT/EP2014/059619
申请日：2014-05-12
申请人： NIKON METROLOGY NV
发明人： SUZUKI, Kazuaki
IPC分类号： G01N23/04
CPC分类号： G01N23/046 , G01N2223/1016 , G01N2223/31 , G01N2223/419
摘要： According to the present disclosure, there is provided an x-ray imaging system, comprising: an x-ray source; an x-ray detector; a sample mount for mounting a sample in a beam path between the x-ray source and the x-ray detector; an enclosure enclosing at least the sample mount in an interior of the enclosure; and a climate control system for regulating the climate inside the enclosure, wherein: the enclosure has an aperture for enabling access to at least the sample mount from outside the enclosure; the enclosure is provided with a door operable between an open position in which the aperture is open and a closed position in which the aperture is closed by the door; and the climate control system is operable to provide a positive pressure differential between the interior of the enclosure and an exterior of the enclosure such that the interior of the enclosure is maintained at a higher pressure than the exterior of the enclosure when the door is open. Such a system is able to better regulate the temperature inside the enclosure even when the door is opened.
摘要翻译：根据本公开，提供了一种x射线成像系统，包括：x射线源; x射线探测器; 用于将样品安装在x射线源和x射线检测器之间的光束路径中的样品座; 至少将样品架安装在外壳内部的外壳; 以及用于调节所述外壳内的气候的气候控制系统，其中：所述外壳具有用于使得能够从所述外壳外部进入至少所述样品座的孔径; 所述外壳设置有门，其可在所述孔打开的打开位置和所述孔被所述门关闭的关闭位置之间操作; 并且气候控制系统可操作以在外壳的内部和外壳的外部之间提供正压差，使得当门打开时，外壳的内部保持在比外壳的外部更高的压力。这样的系统即使在门被打开时也能够更好地调节外壳内部的温度。

7. 发明申请

WO2014154627A1 REGISTRATION OBJECT, CORRECTION METHOD AND APPARATUS FOR COMPUTED RADIOGRAPHIC TOMOGRAPHY 审中-公开
标题翻译：注册对象，校正方法和计算机无线电图的设备
公开(公告)号：WO2014154627A1
公开(公告)日：2014-10-02
申请号：PCT/EP2014/055827
申请日：2014-03-24
申请人： NIKON METROLOGY NV
发明人： RAMSEY, Andrew Timothy , RAY, Andrew Robert
IPC分类号： A61B6/00 , A61B6/03
CPC分类号： A61B19/54 , A61B6/032 , A61B6/5258 , A61B6/583 , A61B90/39 , A61B2090/3966 , G01N23/046 , G21K1/10
摘要： Disclosed is a registration object for computed radiographic tomography. The object has a body portion defining a void for including at least part of a target object. The registration object comprises one or more relatively radiopaque or relatively radiolucent features. Said feature or features provide, in a suitable proportion of radiographic projections of the registration object with respect to angle about a predetermined axis, a pair of identifiable registration points which are spaced apart in a direction parallel to the predetermined axis by a first distance, and whose positions in that direction are each either a constant or a function only of the angle of the projection about the predetermined axis. Said feature or features define, in the suitable proportion of radiographic projections of the object with respect to angle about a predetermined axis, a pair of identifiable registration points which are spaced apart in a direction perpendicular to the predetermined axis by a second distance whose positions in that direction are each either a constant or a continuous function only of the angle of the projection about the predetermined axis. The suitable proportion can be substantially all or all radiographic projections, Also disclosed are a method, an apparatus, a storage medium and a signal for correcting computerised radiographic tomography data, optionally using such an object.
摘要翻译：公开了用于计算放射照相层析成像的登记对象。对象具有限定用于包括目标对象的至少一部分的空白的主体部分。登记对象包括一个或多个相对不透射线或相对放射线可透过的特征。所述特征或特征在对准物体的相对于预定轴线的角度的射线照相投影的合适比例中提供一对可沿着平行于预定轴线的方向间隔开第一距离的可识别对准点，以及其在该方向上的位置分别是仅围绕预定轴线的突起的角度的常数或函数。所述特征或特征在相对于围绕预定轴线的角度的物体的射线照相投影的合适比例中限定一对可标识的对准点，其沿垂直于预定轴线的方向间隔开第二距离，该方向分别是仅围绕预定轴线的突起的角度的恒定或连续的函数。合适的比例可以是基本上全部或全部射线照相投影。还公开了可选地使用这样的物体的方法，装置，存储介质和用于校正计算机放射摄影断层摄影数据的信号。

8. 发明申请

WO2014140099A2 X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY VACUUM SEAL 审中-公开
标题翻译： X射线源，高压发生器，电子束枪，旋转靶组件，旋转靶和旋转真空密封
公开(公告)号：WO2014140099A2
公开(公告)日：2014-09-18
申请号：PCT/EP2014/054837
申请日：2014-03-12
申请人： NIKON METROLOGY NV
发明人： HADLAND, Roger
IPC分类号： H01J35/02
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了一种用于x射线源，x射线枪，电子束装置，旋转真空密封件，用于x射线源的靶组件，旋转x射线发射靶和一个x射线源。这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用如计算机断层摄影。特别地，高电压发生器包括电连接在第一电压倍增器和第二电压倍增器之间的屏蔽电极。电子束装置包括控制光电检测器和光电发射器，其间布置有透明导电屏蔽。旋转真空密封件包括位于中间位于用于旋转轴的孔的高压和低压端之间的位置的可泵送室。旋转目标组件被构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射目标具有支撑在轮毂上的多个目标板，所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极。

9. 发明申请

WO2014081043A3 OPTICAL POINTING SYSTEM 审中-公开
标题翻译：光点指示系统
公开(公告)号：WO2014081043A3
公开(公告)日：2014-07-17
申请号：PCT/JP2013081827
申请日：2013-11-20
申请人： NIPPON KOGAKU KK , NIKON METROLOGY NV
发明人： GOODWIN ERIC PETER , SMITH DANIEL GENE , COOPER ALEXANDER , REZK MINA , SLOTWINSKI ANTHONY , HEDGES THOMAS
IPC分类号： G01S7/481 , G01S7/491 , G01S17/32
CPC分类号： G01S17/102 , G01S7/4812 , G01S7/4817 , G01S7/4818 , G01S7/4917 , G01S17/325 , G01S17/66 , G02B26/101 , G02B26/108
摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
摘要翻译：激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。聚焦光学组件包括用于调节测量光束聚焦的角立方体。基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

10. 发明申请

WO2015155209A1 MEASUREMENT PROBE UNIT FOR METROLOGY APPLICATIONS 审中-公开
标题翻译：计量测量单位用于计量学应用
公开(公告)号：WO2015155209A1
公开(公告)日：2015-10-15
申请号：PCT/EP2015/057570
申请日：2015-04-08
申请人： NIKON METROLOGY NV
发明人： THYS, Frank , THIELEMANS, Hans , NYSEN, Raf , VAN HORENBEEK, Laurens
IPC分类号： G01B21/04 , G01B5/012 , G01B7/012 , G01B11/00
CPC分类号： G01B21/047 , G01B5/012 , G01B7/012 , G01B11/007 , G01R1/067
摘要： The present invention provides a dimensional measurement probe unit (100) for attachment to a probe head (200) of a localizer (300), comprising: a measurement probe (150) for dimensional measurement of an object (400); a revolute joint (170) integrated into the measurement probe (150); and a probe unit interface (120) for repeated dismountable connection to a probe head (200) wherein the probe unit interface (120) is revolutely connected to the measurement probe (150) by the revolute joint (170).
摘要翻译：本发明提供一种用于连接定位器（300）的探针头（200）的尺寸测量探针单元（100），包括：用于物体（400）的尺寸测量的测量探针（150）; 集成到测量探针（150）中的旋转接头（170）; 以及探针单元接口（120），用于重复地可拆卸地连接到探针头（200），其中探针单元接口（120）通过旋转接头（170）旋转地连接到测量探针（150）。

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