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1. 发明申请

WO2016023949A1 X-RAY APPARATUS 审中-公开
标题翻译： X-RAY装置
公开(公告)号：WO2016023949A1
公开(公告)日：2016-02-18
申请号：PCT/EP2015/068555
申请日：2015-08-12
申请人： NIKON METROLOGY NV
发明人： PRICE, Ben , BEECHEY, Michael , SMITH, James
IPC分类号： G01N23/20 , G01N23/22 , G01Q30/18 , H01J35/16 , H01J37/16
CPC分类号： G01N23/02 , G01N23/20025 , G01N23/2204 , G01N2223/308 , G01N2223/309 , G01N2223/419
摘要： An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.
摘要翻译：公开了一种用于X射线设备的设备安装座。安装座包括主屏蔽元件，外围屏蔽元件和辅助屏蔽元件，其被布置成允许安装元件以屏蔽方式穿过主屏蔽元件。还公开了一种用于X射线装置的支撑装置。支撑装置包括用于在第一位置和第二位置之间平移支撑部分的可分离轴承和用于将支撑部件从第二位置平移到第三位置的升降机构，从而分离轴承。还公开了一种用于X射线设备的操纵台。舞台包括布置成支撑样本台并且通过第二和第三支撑结构在样品台的任一侧的第一和第二位置处被支撑的第一支撑结构，第二和第三支撑结构构造成允许第一支撑结构升高，较低，同时在两端保持支撑。

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