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2. 发明申请

WO2014140099A2 X-RAY SOURCE, HIGH-VOLTAGE GENERATOR, ELECTRON BEAM GUN, ROTARY TARGET ASSEMBLY, ROTARY TARGET, AND ROTARY VACUUM SEAL 审中-公开
标题翻译： X射线源，高压发生器，电子束枪，旋转靶组件，旋转靶和旋转真空密封
公开(公告)号：WO2014140099A2
公开(公告)日：2014-09-18
申请号：PCT/EP2014/054837
申请日：2014-03-12
申请人： NIKON METROLOGY NV
发明人： HADLAND, Roger
IPC分类号： H01J35/02
CPC分类号： H01J35/025 , F16C33/768 , F16C35/042 , F16J15/16 , H01J29/48 , H01J35/04 , H01J35/06 , H01J35/101 , H01J35/106 , H01J35/108 , H01J35/16 , H01J37/065 , H01J2235/0236 , H01J2235/083 , H01J2235/086 , H01J2235/087 , H01J2235/1046 , H01J2235/1204 , H01J2235/1262 , H01J2235/20 , H01J2237/2482 , H02M1/32 , H02M7/106 , H05G1/12
摘要： Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft. The rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target has a plurality of target plates supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
摘要翻译：本文公开了一种用于x射线源，x射线枪，电子束装置，旋转真空密封件，用于x射线源的靶组件，旋转x射线发射靶和一个x射线源。这些各个方面可以单独地和/或一起实现能够在高达500kV及以上的能量下运行的x射线源，其适用于商业和研究的X射线应用如计算机断层摄影。特别地，高电压发生器包括电连接在第一电压倍增器和第二电压倍增器之间的屏蔽电极。电子束装置包括控制光电检测器和光电发射器，其间布置有透明导电屏蔽。旋转真空密封件包括位于中间位于用于旋转轴的孔的高压和低压端之间的位置的可泵送室。旋转目标组件被构造成使得当轴承壳体和真空壳体之间的扭矩超过预定扭矩时，轴承壳体相对于真空壳体旋转。旋转X射线发射目标具有支撑在轮毂上的多个目标板，所述板布置在轮毂上以围绕轮毂的轴线旋转提供环形目标区域。 X射线枪设置有相对于与电子束发射阴极不同的x射线靶保持在电位差的屏蔽电极。

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