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1. 发明申请

WO2016100504A3 A MEMS GAS CHROMATOGRAPH AND METHOD OF FORMING A SEPARATOR COLUMN FOR A MEMS GAS CHROMATOGRAPH 审中-公开
公开(公告)号：WO2016100504A3
公开(公告)日：2016-06-23
申请号：PCT/US2015/066076
申请日：2015-12-16
申请人： ROBERT BOSCH GMBH , FEYN, Ando , O'BRIEN, Gary , KIM, Bongsang , STEHLE, Jochen
发明人： FEYN, Ando , O'BRIEN, Gary , KIM, Bongsang , STEHLE, Jochen
IPC分类号： G01N30/60 , B81B7/00 , B81C1/00
摘要： A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.

2. 发明申请

WO2016100504A2 A MEMS GAS CHROMATOGRAPH AND METHOD OF FORMING A SEPARATOR COLUMN FOR A MEMS GAS CHROMATOGRAPH 审中-公开
标题翻译： MEMS气体色谱法和MEMS气体色谱分离柱形成方法
公开(公告)号：WO2016100504A2
公开(公告)日：2016-06-23
申请号：PCT/US2015066076
申请日：2015-12-16
申请人： BOSCH GMBH ROBERT , FEYN ANDO , O'BRIEN GARY , KIM BONGSANG , STEHLE JOCHEN
发明人： FEYN ANDO , O'BRIEN GARY , KIM BONGSANG , STEHLE JOCHEN
IPC分类号： G01N30/60 , B81B7/00 , B81C1/00
CPC分类号： G01N30/6095 , B81B1/002 , B81B7/00 , B81C1/00 , B81C1/00119 , G01N30/60 , G01N2030/025
摘要： A micro gas chromatograph includes one or more separator columns formed within a device layer. The separator columns have small channel cross sections and long channel lengths with atomic-smooth channel sidewalls enabling a high channel packaging density, multiple channels positioned on top of each other, and channel segments that are thermally decoupled from the substrates. The micro gas-chromatograph also enables electrostatic and thermal actuators to be positioned in close proximity to the separator columns such that the material passing through the columns is one or more of locally heated, locally cooled, and electrically biased.
摘要翻译：微型气相色谱仪包括在器件层内形成的一个或多个分离器柱。分离柱具有小的通道横截面和长的通道长度以及原子光滑的通道侧壁，从而实现高通道封装密度，多个通道位于彼此的顶部以及与基底热分离的通道区段。微型气相色谱仪还能够使静电和热致动器靠近分离器柱定位，使得通过柱的材料是局部加热，局部冷却和电偏置中的一种或多种。

3. 发明申请

WO2009148677A3 MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT SWITCHES AND APPLICATIONS FOR POWER CONVERTERS AND AMPLIFIERS 审中-公开
标题翻译：微电子机电系统（MEMS）谐振开关和功率转换器和放大器的应用
公开(公告)号：WO2009148677A3
公开(公告)日：2010-02-25
申请号：PCT/US2009036852
申请日：2009-03-11
申请人： UNIV CALIFORNIA , NGUYEN CLARK TU-CUONG , LIN YANG , LI WEI-CHANG , KIM BONGSANG
发明人： NGUYEN CLARK TU-CUONG , LIN YANG , LI WEI-CHANG , KIM BONGSANG
IPC分类号： H01H59/00
CPC分类号： H01P1/127 , H01H1/0036 , H01H50/005
摘要： A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or "resoswitch", with very high Q's, typically above 10000 in air, and higher in vacuum. Due to periodic constrained contacting of the contacts, the bandwidth of the switch is greatly improved. One or more oscillating elements may be vibrationally interconnected with conductive or nonconductive coupling elements, whereby increased bandwidths of such an overall switching system may be achieved. Using the resoswitch, power amplifiers and converters more closely approaching ideal may be implemented. Integrated circuit fabrication techniques may construct the resoswitch with other integrated CMOS elements for highly compact switching devices. Through introduction of specific geometries within the oscillating elements, displacement gains may be made where modal deflections are greatly increased, thereby reducing device drive voltages to 2.5 V or lower.
摘要翻译：模态驱动的振荡元件周期性地接触一个更多的电触点，从而起到开关的作用，否则称为谐振开关或“重启开关”，具有非常高的Q值，在空气中通常高于10000，而在真空中更高。由于触点的周期性约束接触，开关的带宽大大提高。一个或多个振荡元件可以与导电或非导电耦合元件振动地互连，由此可以实现这种整体开关系统的增加的带宽。可以实现使用resoswitch，功率放大器和更接近理想的转换器。集成电路制造技术可以使用其他集成CMOS元件构建重新开关，用于高度紧凑的开关器件。通过在振荡元件中引入特定的几何形状，可以在模态偏转大大增加的情况下进行位移增益，从而将器件驱动电压降低到2.5V或更低。

4. 发明申请

WO2009148677A2 MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT SWITCHES AND APPLICATIONS FOR POWER CONVERTERS AND AMPLIFIERS 审中-公开
标题翻译：微电子机电系统（MEMS）谐振开关和功率转换器和放大器的应用
公开(公告)号：WO2009148677A2
公开(公告)日：2009-12-10
申请号：PCT/US2009/036852
申请日：2009-03-11
申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA , NGUYEN, Clark, Tu-Cuong , LIN, Yang , LI, Wei-Chang , KIM, Bongsang
发明人： NGUYEN, Clark, Tu-Cuong , LIN, Yang , LI, Wei-Chang , KIM, Bongsang
IPC分类号： H01H59/00
CPC分类号： H01P1/127 , H01H1/0036 , H01H50/005
摘要： A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or "resoswitch", with very high Q's, typically above 10000 in air, and higher in vacuum. Due to periodic constrained contacting of the contacts, the bandwidth of the switch is greatly improved. One or more oscillating elements may be vibrationally interconnected with conductive or nonconductive coupling elements, whereby increased bandwidths of such an overall switching system may be achieved. Using the resoswitch, power amplifiers and converters more closely approaching ideal may be implemented. Integrated circuit fabrication techniques may construct the resoswitch with other integrated CMOS elements for highly compact switching devices. Through introduction of specific geometries within the oscillating elements, displacement gains may be made where modal deflections are greatly increased, thereby reducing device drive voltages to 2.5 V or lower.
摘要翻译：模态驱动的振荡元件周期性地接触一个更多的电触点，从而起到开关的作用，否则称为谐振开关或“重启开关”，具有非常高的Q值，在空气中通常高于10000，而在真空中更高。由于触点的周期性约束接触，开关的带宽大大提高。一个或多个振荡元件可以与导电或非导电耦合元件振动地互连，由此可以实现这种整体开关系统的增加的带宽。可以实现使用resoswitch，功率放大器和更接近理想的转换器。集成电路制造技术可以使用其他集成CMOS元件构建重新开关，用于高度紧凑的开关器件。通过在振荡元件中引入特定的几何形状，可以在模态偏转大大增加的情况下进行位移增益，从而将器件驱动电压降低到2.5V或更低。

5. 发明申请

WO2016100218A1 MODULAR DEFORMABLE PLATFORM 审中-公开
标题翻译：模块化可变平台
公开(公告)号：WO2016100218A1
公开(公告)日：2016-06-23
申请号：PCT/US2015/065579
申请日：2015-12-14
申请人： ROBERT BOSCH GMBH , YEE, Seow, Yuen , YAMA, Gary , KIM, Bongsang , SAMARAO, Ashwin
发明人： YEE, Seow, Yuen , YAMA, Gary , KIM, Bongsang , SAMARAO, Ashwin
IPC分类号： H05K1/02 , H05K1/03 , H01L23/48
CPC分类号： H05K1/028 , A61B5/0022 , A61B5/01 , A61B5/11 , A61B5/4519 , A61B5/4528 , A61B5/4542 , A61B5/6833 , A61B2560/0242 , A61B2560/0412 , A61B2562/0204 , A61B2562/0247 , A61B2562/0271 , A61B2562/028 , A61B2562/029 , A61B2562/066 , A61B2562/12 , A61B2562/164 , H01L2924/0002 , H05K1/0278 , H05K1/0281 , H05K1/0393 , H05K1/118 , H05K1/148 , H05K1/189 , H05K3/005 , H05K3/0052 , H05K3/0058 , H05K3/0097 , H05K3/1216 , H05K3/281 , H05K3/285 , H05K3/30 , H05K2201/053 , H05K2201/09063 , H05K2201/10037 , H05K2201/10121 , H05K2201/10151 , H05K2203/1453 , H05K2203/1545 , H01L2924/0001
摘要： A modular deformable electronics platform is attachable to a deformable surface, such as skin. The platform is tolerant to surface deformation and motion, can flex in and out of a plane of the platform without hindering operability of electrical components included on the platform, and is formed via arrangement of discrete flexible tiles, with corners of adjacent tiles connected by a flexible connection material so that individual tiles can translate and rotate relative to each other. Interconnects disposed on bases of separate tiles electrically connect adjacent tiles via their connected corners, and electrically connect components disposed on different tiles. Each pair of adjacent corner connections defines an axis about which at least a portion of the platform can flex without deformation and without hindering connections between tiles. The flexible material and/or bases of the tiles can include Parylene.
摘要翻译：模块化可变形电子平台可附接到可变形表面，例如皮肤。该平台能够容忍表面变形和运动，可以平移平台内的平面，而不会妨碍包括在平台上的电气部件的可操作性，并且通过离散的柔性瓦片的布置形成，相邻瓦片的角部通过柔性连接材料，使得各个瓦片可相对于彼此平移和旋转。设置在单独瓦片基础上的互连件经由其连接的角电连接相邻的瓦片，并且电连接设置在不同瓦片上的部件。每对相邻的角连接件限定一个轴线，围绕该轴线，平台的至少一部分可以在不变形的情况下弯曲并且不阻碍瓦片之间的连接。瓦片的柔性材料和/或基底可以包括帕利灵。

6. 发明申请

WO2016057880A1 METHOD TO MODULATE THE SENSITIVITY OF A BOLOMETER VIA NEGATIVE INTERFERENCE 审中-公开
标题翻译：通过负面干扰来调节玻璃体的灵敏度的方法
公开(公告)号：WO2016057880A1
公开(公告)日：2016-04-14
申请号：PCT/US2015/054855
申请日：2015-10-09
申请人： ROBERT BOSCH GMBH , ROCZNIK, Thomas , PURKL, Fabian , O'BRIEN, Gary , FEYH, Ando , KIM, Bongsang , SAMARAO, Ashwin , YAMA, Gary
发明人： ROCZNIK, Thomas , PURKL, Fabian , O'BRIEN, Gary , FEYH, Ando , KIM, Bongsang , SAMARAO, Ashwin , YAMA, Gary
IPC分类号： G01J5/10 , G01J5/22 , G01J5/00
CPC分类号： G01J5/06 , G01J5/0809 , G01J5/0853 , G01J5/20 , G01J5/24 , G01J2005/066 , G01J2005/067
摘要： A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.
摘要翻译：半导体传感器系统，特别是测辐射热计，包括基板，由基板支撑的电极，与基板间隔开的吸收体，电压源和电流源。电极可以包括反射镜，或者系统可以包括与电极分离的反射镜。吸收器的辐射吸收效率基于吸收器和反射镜之间的最小间隙距离。电流源通过吸收器结构施加直流电流以产生指示由吸收体结构吸收的辐射的信号。电压源为电极供电以产生作用在吸收器上的调制静电场，以调制最小间隙距离。静电场包括用于调节吸收效率的DC分量，以及周期性地驱动吸收体负相干扰信号中的噪声的AC分量。

7. 发明申请

WO2014159946A1 MEMS DEVICE HAVING A GETTER 审中-公开
标题翻译：具有GETTER的MEMS器件
公开(公告)号：WO2014159946A1
公开(公告)日：2014-10-02
申请号：PCT/US2014/025498
申请日：2014-03-13
申请人： ROBERT BOSCH GMBH , SAMARAO, Ashwin , O'BRIEN, Gary , FEYH, Ando , YAMA, Gary , GRAHAM, Andrew , KIM, Bongsang , PURKL, Fabian
发明人： SAMARAO, Ashwin , O'BRIEN, Gary , FEYH, Ando , YAMA, Gary , GRAHAM, Andrew , KIM, Bongsang , PURKL, Fabian
IPC分类号： H01L23/12 , H01L21/322 , B81B7/02
CPC分类号： B81C1/00285 , B81C2201/0115 , B81C2203/0109 , B81C2203/0118 , B81C2203/035 , H01L21/3223 , H01L21/3225 , H01L23/28
摘要： A microelectromechanical system (MEMS) device includes a high density getter. The high density getter includes a silicon surface area formed by porosification or by the formation of trenches within a sealed cavity of the device. The silicon surface area includes a deposition of titanium or other gettering material to reduce the amount of gas present in the sealed chamber such that a low pressure chamber is formed. The high density getter is used in bolometers and gyroscopes but is not limited to those devices.
摘要翻译：微机电系统（MEMS）装置包括高密度吸气剂。高密度吸气剂包括通过孔化形成的硅表面积或通过在该装置的密封腔内形成沟槽。硅表面积包括钛或其它吸气材料的沉积物，以减少密封室中存在的气体的量，从而形成低压室。高密度吸气剂用于测辐射仪和陀螺仪，但不限于这些设备。

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