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    • 1. 发明申请
    • MICROELECTROMECHANICAL SYSTEM (MEMS) RESONANT SWITCHES AND APPLICATIONS FOR POWER CONVERTERS AND AMPLIFIERS
    • 微电子机电系统(MEMS)谐振开关和功率转换器和放大器的应用
    • WO2009148677A2
    • 2009-12-10
    • PCT/US2009/036852
    • 2009-03-11
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIANGUYEN, Clark, Tu-CuongLIN, YangLI, Wei-ChangKIM, Bongsang
    • NGUYEN, Clark, Tu-CuongLIN, YangLI, Wei-ChangKIM, Bongsang
    • H01H59/00
    • H01P1/127H01H1/0036H01H50/005
    • A modally driven oscillating element periodically contacts one of more electrical contacts, thereby acting as a switch, otherwise known as a resonant switch, or "resoswitch", with very high Q's, typically above 10000 in air, and higher in vacuum. Due to periodic constrained contacting of the contacts, the bandwidth of the switch is greatly improved. One or more oscillating elements may be vibrationally interconnected with conductive or nonconductive coupling elements, whereby increased bandwidths of such an overall switching system may be achieved. Using the resoswitch, power amplifiers and converters more closely approaching ideal may be implemented. Integrated circuit fabrication techniques may construct the resoswitch with other integrated CMOS elements for highly compact switching devices. Through introduction of specific geometries within the oscillating elements, displacement gains may be made where modal deflections are greatly increased, thereby reducing device drive voltages to 2.5 V or lower.
    • 模态驱动的振荡元件周期性地接触一个更多的电触点,从而起到开关的作用,否则称为谐振开关或“重启开关”,具有非常高的Q值,在空气中通常高于10000,而在真空中更高。 由于触点的周期性约束接触,开关的带宽大大提高。 一个或多个振荡元件可以与导电或非导电耦合元件振动地互连,由此可以实现这种整体开关系统的增加的带宽。 可以实现使用resoswitch,功率放大器和更接近理想的转换器。 集成电路制造技术可以使用其他集成CMOS元件构建重新开关,用于高度紧凑的开关器件。 通过在振荡元件中引入特定的几何形状,可以在模态偏转大大增加的情况下进行位移增益,从而将器件驱动电压降低到2.5V或更低。
    • 2. 发明申请
    • MICROMECHANICAL RESONANT SWITCHES AND CHARGE PUMPS
    • 微机电谐振器开关和电荷泵
    • WO2015030898A2
    • 2015-03-05
    • PCT/US2014/041440
    • 2014-06-07
    • THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    • NGUYEN, Clark T.-C.LIN, Yang
    • H01H59/00
    • H01H59/0009H01H1/0036H01H50/005H01H2001/0052H02M3/07H03H9/2426H03H9/2436
    • A circuit of N micromechanical resonant switches (resoswitches) is presented, which mimics a Dickson charge pump to amplify an input voltage to an output voltage of N plus 1 times the input voltage, while avoiding the diode voltage drop and breakdown voltage limitations of CMOS-based conventional charge pumps. Important aspects of successful charge pumping are: 1) the long cycle lifetime of resonant micromechanical switches, which has been shown to operate 173.9x10 12 cycles, is orders of magnitude higher than non-resonant switches; 2) the use of gated-sinusoid drive excitation to allow a charging period independent of resoswitch resonance frequency; and 3) the use of resonance operation to lower required drive and DC-bias voltages to below the supply voltage. This mechanical charge pump obviates the need for custom high voltage CMOS for applications where large voltages are needed such as MEMS-based timing references, thereby allowing the use of virtually any CMOS process.
    • 提出了N个微机械谐振开关(重新开关)的电路,其模拟迪克森电荷泵以将输入电压放大到N + 1倍输入电压的输出电压,同时避免了二极管电压 基于CMOS的常规电荷泵的压降和击穿电压限制。 成功的电荷泵浦的重要方面包括:1)共振微机械开关的长周期寿命比其它非谐振开关高出数个数量级,这些开关已被证明可以工作在173.9x10 12个周期; 2)使用门控正弦驱动激励以允许独立于重新开关谐振频率的充电周期; 和3)使用谐振操作将所需的驱动和DC偏置电压降低到低于电源电压。 这款机械电荷泵无需定制高压CMOS,因而可用于需要大电压的应用,例如基于MEMS的时序参考,从而允许使用几乎任何CMOS工艺。