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1. 发明申请

WO2009070622A3 CANTILEVER WITH PIVOTING ACTUATION 审中-公开
标题翻译：带刺激促动器的悬臂
公开(公告)号：WO2009070622A3
公开(公告)日：2009-12-17
申请号：PCT/US2008084758
申请日：2008-11-25
申请人： NANOINK INC , SHILE RAYMOND ROGER
发明人： SHILE RAYMOND ROGER
IPC分类号： G01Q60/24 , G03F7/00 , H01H59/00
CPC分类号： G01Q70/02 , G01Q80/00 , H01H1/0094 , H01H2057/006 , H01H2061/006 , Y10T29/49002
摘要： Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.
摘要翻译：用于直写纳米光刻和成像的改进的致动装置包括使用枢轴点用于具有长行程路径的悬臂的向下偏转。一种装置，包括至少一个支架，至少一个悬臂，所述悬臂的延伸部，其中所述延伸部与致动器集成，其中所述悬臂适于致动移动。致动器可以是静电，热或压电的。悬臂可以包括尖端，并且材料可以从尖端转移到表面。

2. 发明申请

WO2012158838A3 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
公开(公告)号：WO2012158838A3
公开(公告)日：2012-11-22
申请号：PCT/US2012/038206
申请日：2012-05-16
申请人： NANOINK, INC. , HENNING, Albert K. , SHILE, Raymond Roger , FRAGALA, Joseph S. , AMRO, Nabil A. , HAAHEIM, Jason R.
发明人： HENNING, Albert K. , SHILE, Raymond Roger , FRAGALA, Joseph S. , AMRO, Nabil A. , HAAHEIM, Jason R.
IPC分类号： B81C99/00 , G03F7/00
摘要： Improved high density, hard tip arrays for use in patterning including an article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. A method comprises preparing a silicon nitride membrane comprising an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane; preparing a handle wafer; and bonding the silicon nitride membrane to at least a portion of the handle wafer to form an bonded tip array. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Another method comprises providing at least one mold for a tip array comprising a plurality of mold regions for tips; filling or coating the mold regions for tips with a refractory material, to form an array of tips comprising a refractory material; and disposing a liquid elastomer precursor material in contact with the refractory material of the tips.

3. 发明申请

WO2012158838A2 HIGH DENSITY, HARD TIP ARRAYS 审中-公开
标题翻译：高密度，硬尖端阵列
公开(公告)号：WO2012158838A2
公开(公告)日：2012-11-22
申请号：PCT/US2012038206
申请日：2012-05-16
申请人： NANOINK INC , HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
发明人： HENNING ALBERT K , SHILE RAYMOND ROGER , FRAGALA JOSEPH S , AMRO NABIL A , HAAHEIM JASON R
IPC分类号： B81C99/00
CPC分类号： B81C99/009 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/10 , Y10T156/1052
摘要： Improved high density, hard tip arrays for use in patterning including an article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. A method comprises preparing a silicon nitride membrane comprising an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane; preparing a handle wafer; and bonding the silicon nitride membrane to at least a portion of the handle wafer to form an bonded tip array. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Another method comprises providing at least one mold for a tip array comprising a plurality of mold regions for tips; filling or coating the mold regions for tips with a refractory material, to form an array of tips comprising a refractory material; and disposing a liquid elastomer precursor material in contact with the refractory material of the tips.
摘要翻译：用于包括制品的图案化中的改进的高密度硬尖头阵列包括手柄芯片; 以及结合到手柄芯片的至少一部分的氮化硅膜。氮化硅膜包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列。一种方法包括制备氮化硅膜，其包括直接从氮化硅膜的表面延伸的多个氮化硅尖端的阵列; 准备一个处理晶圆; 以及将所述氮化硅膜结合到所述处理晶片的至少一部分以形成接合的尖端阵列。另一制品包括弹性体背衬构件; 以及布置在弹性体背衬构件上的尖端阵列。阵列的尖端包括耐火材料。另一种方法包括提供至少一个用于尖端阵列的模具，其包括用于尖端的多个模具区域; 用耐火材料填充或涂覆用于尖端的模具区域，以形成包括耐火材料的尖端阵列; 并且将液体弹性体前体材料设置成与尖端的耐火材料接触。

4. 发明申请

WO2009140440A1 DUAL-TIP CANTILEVER 审中-公开
标题翻译：双线CANTILEVER
公开(公告)号：WO2009140440A1
公开(公告)日：2009-11-19
申请号：PCT/US2009/043863
申请日：2009-05-13
申请人： NANOINK, INC. , HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
发明人： HENNING, Albert, K. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger
IPC分类号： G03F7/00 , G12B21/02 , G12B21/08
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least two tips is described, where the tips have substantially the same tip heights. Methods for making and using such a device are also provided. The height of one tip off of the surface can be more easily determined when the two tips have equal height.
摘要翻译：描述了包括至少一个包括至少两个尖端的悬臂的装置，其中尖端具有基本上相同的尖端高度。还提供了制造和使用这种装置的方法。当两个尖端具有相等的高度时，可以更容易地确定一个尖端离开表面的高度。

5. 发明申请

WO2009140441A3 PIEZORESISTOR HEIGHT SENSING CANTILEVER 审中-公开
公开(公告)号：WO2009140441A3
公开(公告)日：2010-01-28
申请号：PCT/US2009043865
申请日：2009-05-13
申请人： NANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

6. 发明申请

WO2009140442A3 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A3
公开(公告)日：2010-01-14
申请号：PCT/US2009043867
申请日：2009-05-13
申请人： HANOINK INC , FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
发明人： FRAGALA JOSEPH S , HENNING ALBERT K , SHILE RAYMOND ROGER
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

7. 发明申请

WO2009140441A2 HEIGHT SENSING CANTILEVER 审中-公开
标题翻译：高度传感器
公开(公告)号：WO2009140441A2
公开(公告)日：2009-11-19
申请号：PCT/US2009/043865
申请日：2009-05-13
申请人： NANOINK, INC. , FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
发明人： FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
IPC分类号： G12B21/08 , G01N13/16
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device comprising at least one cantilever comprising at least one piezoresistor is described, where the cantilevers comprise silicon nitride or silicon carbide and the piezoresistors comprise doped silicon. Methods for making and using such a device are also provided.
摘要翻译：描述了包括至少一个包括至少一个压敏电阻的悬臂的装置，其中悬臂包括氮化硅或碳化硅，并且压电电阻包括掺杂的硅。还提供了制造和使用这种装置的方法。

8. 发明申请

WO2009070622A2 CANTILEVER WITH PIVOTING ACTUATION 审中-公开
标题翻译：带有起动执行器的CANTILEVER
公开(公告)号：WO2009070622A2
公开(公告)日：2009-06-04
申请号：PCT/US2008/084758
申请日：2008-11-25
申请人： NANOINK, INC. , SHILE, Raymond, Roger
发明人： SHILE, Raymond, Roger
IPC分类号： B81B3/00
CPC分类号： G01Q70/02 , G01Q80/00 , H01H1/0094 , H01H2057/006 , H01H2061/006 , Y10T29/49002
摘要： Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.
摘要翻译：改进的致动装置可用于直写纳米光刻和成像，包括使用枢轴点用于具有长行进路径的悬臂的向下偏转。一种装置，包括至少一个保持器，至少一个悬臂，所述悬臂的延伸部，其中所述延伸部与致动器成一体，其中所述悬臂适于致动运动。致动器可以是静电的，热的或压电的。悬臂可以包括尖端，并且材料可以从尖端传递到表面。

9. 发明申请

WO2009140442A2 HEATED CANTILEVER 审中-公开
标题翻译：加热CANTILEVER
公开(公告)号：WO2009140442A2
公开(公告)日：2009-11-19
申请号：PCT/US2009/043867
申请日：2009-05-13
申请人： HANOINK, INC. , FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
发明人： FRAGALA, Joseph, S. , HENNING, Albert, K. , SHILE, Raymond, Roger
IPC分类号： G03F7/00
CPC分类号： G03F7/0002 , G01Q20/04 , G01Q40/00 , G01Q70/10 , G01Q70/16 , G01Q80/00
摘要： A device is provided comprising at least one cantilever comprising at least one tip and at least one heating element. Methods for making and using such a device are also provided.
摘要翻译：提供了一种装置，其包括至少一个包括至少一个尖端和至少一个加热元件的悬臂。还提供了制造和使用这种装置的方法。

10. 发明申请

WO2008141048A1 COMPACT NANOFABRICATION APPARATUS 审中-公开
标题翻译：紧凑的纳米装置
公开(公告)号：WO2008141048A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/062959
申请日：2008-05-07
申请人： NANOINK, INC. , ROZHOK, Sergey, V. , NELSON, Michael , AMRO, Nabil, A. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger , VANMERKESTYN, Dirk, N. , BUSSAN, John, Edward
发明人： ROZHOK, Sergey, V. , NELSON, Michael , AMRO, Nabil, A. , FRAGALA, Joseph, S. , SHILE, Raymond, Roger , VANMERKESTYN, Dirk, N. , BUSSAN, John, Edward
IPC分类号： G03F7/00 , G03F7/20
CPC分类号： G03F7/0002 , G01Q80/00 , G03F7/70383 , G03F9/00
摘要： An apparatus for use in fabricating structures and depositing materials from tips to surfaces for patterning in direct-write mode, providing ability to travel macroscopic distances and yet provide for nanoscale patterning. Useful in small scale fabrication and nanolithography. The instrument can be compact and used on a laboratory bench or desktop. An apparatus comprising: at least one multi-axis assembly comprising a plurality of nanopositioning stages, at least one pen assembly, wherein the pen assembly and the multi-axis assembly are adapted for delivery of material from the pen assembly to a substrate which is positioned by the multi-axis assembly, at least one viewing assembly, at least one controller. Nanopositioning by piezoelectric methods and devices and motors is particularly useful. The apparatus can include integrated environmental chambers and housings, as well as ink reservoirs for materials to be delivered. The viewing assembly can be a microscope with a long working distance. Particularly useful for fabrication of bioarrays or microarrays. The multi-axis assembly can be a five-axis assembly. Software can facilitate efficient usage.
摘要翻译：一种用于制造结构并从尖端到表面沉积材料的装置，用于以直写式模式进行图案化，提供行进宏观距离并提供纳米尺度图案化的能力。适用于小规模制造和纳米光刻。该仪器可以紧凑，并在实验台或台式机上使用。一种装置，包括：至少一个多轴组件，其包括多个纳米定位阶段，至少一个笔组件，其中所述笔组件和所述多轴组件适于将材料从所述笔组件传送到定位的衬底通过多轴组件，至少一个观察组件，至少一个控制器。通过压电方法和装置和电动机的定位是特别有用的。该设备可以包括集成的环境室和壳体，以及用于要输送的材料的油墨储存器。观察组件可以是具有长工作距离的显微镜。特别适用于制造生物芯片或微阵列。多轴组件可以是五轴组件。软件可以促进有效的使用。

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