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91. 发明申请

WO2003021727A2 LINE SELECTED F2 TWO CHAMBER LASER SYSTEM 审中-公开
标题翻译：线选择F2两室激光系统
公开(公告)号：WO2003021727A2
公开(公告)日：2003-03-13
申请号：PCT/US2002/026394
申请日：2002-08-19
申请人： CYMER, INC, , KNOWLES, David, S. , BROWN, Daniel, J., W. , SANDSTROM, Richard, L. , RYLOV, German, E. , ONKELS, Eckehard, D. , BESAUCELE, Herve, A. , MYERS, David, W. , ERSHOV, Alexander, I. , PARTLO, William, N. , FOMENKOV, Igor, V. , UJAZDOWSKI, Richard, C. , NESS, Richard, M. , SMITH, Scot, T. , HULBURD, William, G.
发明人： KNOWLES, David, S. , BROWN, Daniel, J., W. , SANDSTROM, Richard, L. , RYLOV, German, E. , ONKELS, Eckehard, D. , BESAUCELE, Herve, A. , MYERS, David, W. , ERSHOV, Alexander, I. , PARTLO, William, N. , FOMENKOV, Igor, V. , UJAZDOWSKI, Richard, C. , NESS, Richard, M. , SMITH, Scot, T. , HULBURD, William, G.
IPC分类号： H01S
CPC分类号： H01S3/2366 , G01J9/00 , G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08 , H01S3/08004 , H01S3/08009 , H01S3/08036 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333
摘要： An injection seeded modular gas discharge laser system capable of producing high quality pulsed laser beams at pulse rates of about 4,000 Hz or greater and at pulse energies of about 5 mJ or greater. Two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. The chambers can be controlled separately permitting separate optimization of wavelength parameters in the master oscillator and optimization of pulse energy parameters in the amplifying chamber. A preferred embodiment in a F 2 laser system configured as a MOPA and specifically designed for use as a light source for integrated circuit lithography. In the preferred MOPA embodiment, each chamber comprises a single tangential fan providing sufficient gas flow to permit operation at pulse rates of 4000 Hz or greater by clearing debris from the discharge region in less time than the approximately 0.25 milliseconds between pulses. The master oscillator is equipped with a line selection package for selecting the strongest F 2 spectral line.
摘要翻译：一种注射种子模块化气体放电激光系统，其能够以约4,000Hz或更大的脉冲速率和约5mJ或更大的脉冲能量产生高质量的脉冲激光束。提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中放大的非常窄的带状晶体束。可以单独控制室，允许主振荡器中的波长参数的单独优化和放大室中的脉冲能量参数的优化。配置为MOPA并被专门设计用作集成电路光刻的光源的F2激光系统中的优选实施例。在优选的MOPA实施例中，每个腔室包括单个切向风扇，其通过在比脉冲之间的大约0.25毫秒更短的时间内清除来自放电区域的碎屑来提供足够的气流以允许以4000Hz或更高的脉冲速率操作。主振荡器配有一个线选择包，用于选择最强的F2谱线。

92. 发明申请

WO02060018A3 SIDE-PUMPED ACTIVE MIRROR SOLID-STATE LASER 审中-公开
标题翻译：侧泵活动镜面固体激光器
公开(公告)号：WO02060018A3
公开(公告)日：2003-01-23
申请号：PCT/US0146477
申请日：2001-12-04
申请人： BOEING CO
发明人： VETROVEC JAN
IPC分类号： H01S3/094 , H01S3/00 , H01S3/042 , H01S3/06 , H01S3/063 , H01S3/0941 , H01S3/02
CPC分类号： H01S3/0941 , H01S3/005 , H01S3/042 , H01S3/0604 , H01S3/0612 , H01S3/0621 , H01S3/063 , H01S3/094057 , H01S3/2333 , H01S2301/02
摘要： Apparatus and method for achieving improved performance n a solid-state laser. The solid-state laser apparatus (10) preferably uses a laser gain medium (12) in the shape of a disk wherein optical pump radiation (36) is injected into the peripheral edge of the disk. In the preferred embodiment the laser gain medium is provided with optical coatings for operation in the active mirror configuration. Furthermore, the laser gain medium is pressure-clamped to a rigid, cooled substrate (46), which allows it to maintain a prescribed shape even when experiencing significant thermal load. A cooling medium (52) can be provided to a heat exchanger internal to the substrate and/or flowed through the passages on the substrate surface, thereby directly cooling the laser gain medium. Sources (68) of optical pump radiation are played around the perimeter of the gain medium. Tapered ducts (20) may be disposed between the sources and the gain medium for the purpose of concentrating optical pump radiation. With the proper choice of laser gain medium doping, pump source divergence and geometry, a uniform laser gain is achieved across large portions of the gain medium.
摘要翻译：一种在固体激光器中实现改进性能的装置和方法。固态激光装置（10）优选地使用盘形的激光增益介质（12），其中光泵辐射（36）被注入到盘的周边边缘。在优选实施例中，激光增益介质设置有用于在主动反射镜配置中操作的光学涂层。此外，激光增益介质被压力夹持到刚性的冷却的基板（46），这使得即使当遇到显着的热负载时也能保持规定的形状。可以将冷却介质（52）提供给基板内部的热交换器和/或流过基板表面上的通道，从而直接冷却激光增益介质。光泵辐射的源（68）围绕增益介质周边进行。锥形管道（20）可以设置在源和增益介质之间，用于集中光泵辐射。通过适当选择激光增益介质掺杂，泵浦源发散和几何形状，在增益介质的大部分上实现均匀的激光增益。

93. 发明申请

WO2002082597A1 INJECTION SEEDED LASER WITH PRECISE TIMING CONTROL 审中-公开
标题翻译：注射式激光与精确时序控制
公开(公告)号：WO2002082597A1
公开(公告)日：2002-10-17
申请号：PCT/US2002/010448
申请日：2002-04-02
申请人： CYMER, INC. , NESS, Richard, M. , SANDSTROM, Richard, L. , PARTLO, William, N. , ERSHOV, Alexander, I.
发明人： NESS, Richard, M. , SANDSTROM, Richard, L. , PARTLO, William, N. , ERSHOV, Alexander, I.
IPC分类号： H01S3/10
CPC分类号： H01S3/2366 , G03F7/70025 , G03F7/70041 , G03F7/70483 , G03F7/70575 , H01S3/0057 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09702 , H01S3/09705 , H01S3/0971 , H01S3/10092 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2258 , H01S3/2325 , H01S3/2333
摘要： A narrow band laser system having two laser subsystems. The first laser subsystem is configured to provide a very narrow band pulsed output beam which is used to injection seed the second laser subsystem where the narrow band pulsed seed beam is amplified to produce a narrow band pulsed output beam. A pulse power supply is provided which is specially configured to precisely time the discharges in the two laser subsystem so that the discharges are properly synchronized. Preferred embodiments include a pulse power system with a pulse transformer unit having two sets of transformer cores. A single upstream pulse compression circuit provides high voltage pulses in parallel to the primary windings of all of the cores in both sets. Separate secondary conductors (one passing through one set of cores and the other passing through the other set of cores) provide very high voltage pulses respectively to separate downstream circuits supplying discharge pulses to the electrodes in each of two separate laser chambers. Preferred embodiments include KrF, ArF and F 2 systems. In these preferred embodiments, line narrowing may be accomplished within the resonant cavity of the seed laser or the output of the seed laser could be line narrowed using a pre-gain filter.
摘要翻译：具有两个激光子系统的窄带激光系统。第一激光子系统被配置为提供非常窄的带状脉冲输出光束，其用于向第二激光子系统注入种子，其中窄带脉冲种子光束被放大以产生窄带脉冲输出光束。提供了一种脉冲电源，其特别配置为精确地对两个激光子系统中的放电进行时间放电，使得放电正确同步。优选实施例包括具有脉冲变压器单元的脉冲功率系统，其具有两组变压器磁芯。单个上游脉冲压缩电路在两组中提供与所有磁芯的初级绕组并联的高电压脉冲。分离的次级导体（一个穿过一组芯，另一组穿过另一组芯）分别提供非常高的电压脉冲，以分离向两个单独的激光室中的每一个中的电极提供放电脉冲的下游电路。优选的实施方案包括KrF，ArF和F2系统。在这些优选实施例中，可以在种子激光器的谐振腔内实现线窄化，或者使用预增益滤波器可以使种子激光器的输出变窄。

94. 发明申请

WO2002060018A2 SIDE-PUMPED ACTIVE MIRROR SOLID-STATE LASER FOR HIGH-AVERAGE POWER 审中-公开
标题翻译：用于高平均功率的侧泵激活镜面固体激光器
公开(公告)号：WO2002060018A2
公开(公告)日：2002-08-01
申请号：PCT/US2001/046477
申请日：2001-12-04
申请人： THE BOEING COMPANY
发明人： VETROVEC, Jan
IPC分类号： H01S3/06
CPC分类号： H01S3/0941 , H01S3/005 , H01S3/042 , H01S3/0604 , H01S3/0612 , H01S3/0621 , H01S3/063 , H01S3/094057 , H01S3/2333 , H01S2301/02
摘要： Apparatus and method for achieving improved performance n a solid-state laser. The solid-state laser apparatus preferably uses a laser gain medium in the shape of a disk wherein optical pump radiation is injected into the peripheral edge of the disk. In the preferred embodiment the laser gain medium is provided with optical coatings for operation in the active mirror configuration. Furthermore, the laser gain medium is pressure-clamped to a rigid, cooled substrate, which allows it to maintain a prescribed shape even when experiencing significant thermal load. A cooling medium cna be provided to a heat exchanger internal to the substrate and/or flowed through the passages on the substrate surface, thereby directly cooling the laser gain medium. Sources of optical pump radiation are played around the perimeter of the gain medium for the purpose of concentrating optical pump radiation. With the proper choice of laser gain medium doping, pump source divergence and geometry, a uniform laser gain is achieved across large portions of the gain medium.
摘要翻译：一种在固体激光器中实现改进性能的装置和方法。固态激光装置优选地使用盘形的激光增益介质，其中光泵辐射被注入盘的周边边缘。在优选实施例中，激光增益介质设置有用于在主动反射镜配置中操作的光学涂层。此外，激光增益介质被压力夹持到刚性冷却的基板，这使得即使当遇到显着的热负载时也能保持规定的形状。向基板内部的热交换器提供冷却介质和/或流过基板表面上的通道，由此直接冷却激光增益介质。光泵浦辐射源围绕增益介质的周边进行，以集中光泵辐射的目的。通过适当选择激光增益介质掺杂，泵浦源发散和几何形状，在增益介质的大部分上实现均匀的激光增益。

95. 发明申请

WO2002033792A2 POWER SCALABLE WAVEGUIDE AMPLIFIER AND LASER DEVICES 审中-公开
标题翻译：功率可调波形放大器和激光器件
公开(公告)号：WO2002033792A2
公开(公告)日：2002-04-25
申请号：PCT/US2001/042451
申请日：2001-10-01
申请人： COHERENT TECHNOLOGIES, INC.
发明人： PELOUCH, Wayne, S. , SMITH, Duane, D. , PRASAD, Narasimha, S.
IPC分类号： H01S3/063
CPC分类号： H01S3/063 , H01S3/042 , H01S3/0621 , H01S3/08095 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/2333 , H01S3/2383 , H01S5/10 , H01S5/2036 , H01S5/50
摘要： The present invention is directed to guided wave systems, beam transport and waveguide techniques. The invention may comprise passive or active, hollow and dielectric core self-imaging mode wave guide systems, beam amplifiers (10, 40), laser resonators (70), beam transports, and waveguides. Embodiments may include rectangular cross-section waveguides, and preferably maintaining spatial profile of an input beam, such as a Gaussian beam, through the self-imaging period of the waveguide while unique new capabilities to mitigate non-linear distortions that corrupt spatial, spectral and temporal coherence and polarization. Additional aspects may include, for example, transport, amplification, phase/frequency control or modulation, deflection, conversion, synthetic aperture, distributed aperture, beam forming, beam steering, beam combining, power sampling, power combining and power splitting, among other features. Some embodiments may provide a self-imaging, multimode, waveguide (10) and self-imaging guided wave systems and beam transport. Embodiments of the present invention may further provide a method of self-imaging, multimode beam transport and other self-imaging wave guidance techniques.
摘要翻译：本发明涉及导波系统，波束传输和波导技术。本发明可以包括无源或有源，中空和介质芯自成像模式波导系统，波束放大器（10,40），激光谐振器（70），光束传输和波导。实施例可以包括矩形横截面波导，并且优选地通过波导的自成像周期保持输入波束（例如高斯波束）的空间分布，同时具有减少破坏空间，频谱和非线性的非线性失真的独特的新能力，时间一致性和极化。附加方面可以包括例如传输，放大，相位/频率控制或调制，偏转，转换，合成孔径，分布式孔径，波束形成，波束转向，波束组合，功率采样，功率组合和功率分配等。。一些实施例可以提供自成像，多模波导（10）和自成像导波系统和波束传输。本发明的实施例还可以提供自成像，多模光束传输和其他自成像波引导技术的方法。

96. 发明申请

WO9822995A3 PICOSECOND LASER 审中-公开
标题翻译： PICOSECOND激光
公开(公告)号：WO9822995A3
公开(公告)日：1998-10-15
申请号：PCT/US9718009
申请日：1997-10-03
申请人： JMAR TECHNOLOGY CO , RIEGER HARRY , SHIELDS HENRY , FOSTER RICHARD M
发明人： RIEGER HARRY , SHIELDS HENRY , FOSTER RICHARD M
IPC分类号： H01S3/127 , G03F7/20 , H01S3/00 , H01S3/0941 , H01S3/098 , H01S3/102 , H01S3/11 , H01S3/23 , H01S
CPC分类号： H01S3/2341 , H01S3/0057 , H01S3/0085 , H01S3/082 , H01S3/094076 , H01S3/0941 , H01S3/09415 , H01S3/1024 , H01S3/1075 , H01S3/1103 , H01S3/1109 , H01S3/1127 , H01S3/115 , H01S3/117 , H01S3/127 , H01S3/23 , H01S3/2316 , H01S3/2333 , H01S3/2383 , H01S2301/08
摘要： A laser system which generates pulses with a duration in the range of about 60 to 300 ps at an energy level of up to a few milli-Joules per pulse with near diffraction limited beam quality. A laser crystal (8) is pumped (excited) by diode lasers (2). A resonator (9) having at least two mirror surfaces defines a beam path passing through the laser crystal (8). The beam path in the resonator (9) is periodically blocked by a first optical shutter (14) permitting pump energy to build up in the laser crystal (8), except for a short period near the end of each pumping period. While the first optical shutter (14) is open a second optical shutter blocks the light in the resonator (9) except for periodic subnano-second intervals, the intervals being spaced such that at least one light pulse traveling at the speed of light in the resonator (9) is able to make a plurality of transits through the resonator (9), increasing in intensity by extracting energy from the excited laser crystal (8) on each transit. After the light pulse has built up in intensity, an optical release mechanism (10) releases the pulse from resonator (9).

97. 发明申请

WO1995022187A1 SYSTEM FOR MINIMIZING THE DEPOLARIZATION OF A LASER BEAM DUE TO THERMALLY INDUCED BIREFRINGENCE 审中-公开
标题翻译：用于最小化激发光束的热分解的系统
公开(公告)号：WO1995022187A1
公开(公告)日：1995-08-17
申请号：PCT/US1995001749
申请日：1995-02-13
申请人： COHERENT, INC. , BISCHEL, William, K. , REED, Murray, K. , NEGUS, Daniel, K. , FRANGINEAS, George
发明人： COHERENT, INC.
IPC分类号： H01S03/23
CPC分类号： H01S3/2333 , H01S3/005 , H01S3/08072 , H01S3/10076 , H01S3/2341 , H01S2301/206
摘要： A system is disclosed for minimizing the depolarization of a laser beam due to thermally induced birefringence in a rod-shaped gain medium over a wide range of excitation levels. After passing through the gain medium (14), the polarization of the beam is rotated (46) by ninety degrees and either redirected back into the same gain medium or a substantially identical gain medium. By this arrangement, the portion of the beam that was radially polarized during the first pass is tangentially polarized during the second pass so that the original polarization is restored. In order to maximize the compensation, a relay image system (34) is used to generate an image of the beam in the gain medium as it existed during the first pass and project that image into the gain medium during the second pass. The magnification of the relayed image is substantially one to one with respect to the actual image. By using a relayed image with a unity magnification, the size of the beam and the angle and the position of the rays in the beam are preserved at varying thermal loads. In this manner, maximum coincidence of the rays during the two passes is achieved. In the case of asymmetric pumping, performance can be enhanced by inverting the image of the beam prior to the second pass through the gain medium. The subject system is particularly useful for maximizing the fidelity of a phase conjugate reflector (18) used in a solid state amplifier.
摘要翻译：公开了一种用于使激光束的去极化最小化的系统，这是由于在宽范围的激发水平下的杆状增益介质中的热诱导双折射。在通过增益介质（14）之后，光束的偏振（46）旋转90度，并且重定向回相同的增益介质或基本相同的增益介质。通过这种布置，在第二次通过期间，在第一遍期间被径向偏振的光束的部分在第二次通过期间被切向极化，使得原始极化恢复。为了最大化补偿，中继图像系统（34）用于在第一次通过期间生成增益介质中的波束的图像，并且在第二遍期间将该图像投影到增益介质中。中继图像的放大率相对于实际图像基本上是一对一的。通过使用具有单位放大率的中继图像，在变化的热负荷下保留光束的大小以及光束在光束中的角度和位置。以这种方式，实现了两次通过期间的射线的最大重合。在不对称泵浦的情况下，可以通过在第二次通过增益介质之前反转光束的图像来增强性能。该主题系统对于使用在固态放大器中的相位共轭反射器（18）的保真度最大化特别有用。

98. 发明申请

WO1991004596A1 PHASE-LOCKED MULTI SLAB ARRAY LASER 审中-公开
标题翻译：相位锁定多层阵列激光
公开(公告)号：WO1991004596A1
公开(公告)日：1991-04-04
申请号：PCT/AU1990000419
申请日：1990-09-14
申请人： AUSTRALIAN ELECTRO OPTICS PTY LTD. , HUGHES, John, Leonard
发明人： AUSTRALIAN ELECTRO OPTICS PTY LTD.
IPC分类号： H01S03/23
CPC分类号： H01S3/07 , H01S3/2316 , H01S3/2333 , H01S3/2383
摘要： This invention relates to a phase locked, multiple slab array, multi-sectioned laser amplifier system consisting of a high quality diode pumped laser beam generator (1) emitting a single mode laser output beam of circular cross-section (2), laser beam expander, laser beam splitter (5) which produces a rectangular array of closely packed laser beams (7), each of circular cross-section (2), which in turn enters a series of laser beam splitters (9, 12, 14), each one of which directs the multi laser beam array into its respective multi-slab laser amplifier (16) whose output is combined with those of similar multi-slab laser beam amplifiers, to produce a rectangular array of phase locked laser beams of circular cross-section (26) which is then directed into the booster laser amplifier stage, which in turn provides the powerful scaleable output beam of the invention.
摘要翻译：本发明涉及一种锁相多板激光放大器系统，由高质量的二极管泵浦激光束发生器（1）组成，该发光器发射圆形横截面的单模激光输出光束（2），激光束扩展器，激光分束器（5），其产生紧密堆积的激光束（7）的矩形阵列，每个圆形横截面（2），其又进入一系列激光束分离器（9,12,14），每个激光束分离器其中一个将多个激光束阵列引导到其相应的多板激光放大器（16）中，其输出与类似的多平板激光束放大器的输出组合，以产生圆形横截面的相位锁定激光束的矩形阵列（26），然后将其引导到增强激光放大器级，这又提供了本发明的强大的可扩展输出光束。

99. 发明申请

WO1988007778A1 IMPROVED MASTER-OSCILLATOR POWER-AMPLIFIER LASER SYSTEM 审中-公开
标题翻译：改进的主振荡器功率放大器激光系统
公开(公告)号：WO1988007778A1
公开(公告)日：1988-10-06
申请号：PCT/US1988000249
申请日：1988-01-25
申请人： HUGHES AIRCRAFT COMPANY
发明人： HUGHES AIRCRAFT COMPANY , O'MEARA, Thomas, R.
IPC分类号： H01S03/23
CPC分类号： H01S3/2333 , H01S3/0064 , H01S3/083 , H01S3/10076
摘要： An improved phase conjugate master-oscillator power-amplifier laser system for providing a high-power low distortion laser output beam. The system includes an improved oscillator (55) such as a ring oscillator which rejects any of the output beam which is inadvertently fed back to the oscillator, thereby preventing unwanted oscillation. The system also includes an attenuator such as a spatial filter (57) or an optical isolator that attenuates any amplified spontaneous emissions that may be reflected from the power amplifier to the oscillator, thereby preventing oscillator degradation that would otherwise result. The invention is particularly well-suited for a laser system which employs an SBS mirror phase conjugation.
摘要翻译：一种改进的相位共轭主振荡器功率放大器激光系统，用于提供大功率低失真的激光输出光束。该系统包括改进的振荡器（55），例如环形振荡器，其拒绝任何不经意地反馈到振荡器的输出光束，从而防止不必要的振荡。该系统还包括衰减器，例如空间滤波器（57）或光隔离器，其衰减可能从功率放大器反射到振荡器的任何放大的自发发射，从而防止否则将导致的振荡器降级。本发明特别适用于采用SBS镜相共轭的激光系统。

100. 发明申请

WO2016207042A1 VERSTÄRKERANORDNUNG 审中-公开
标题翻译：放大器装置
公开(公告)号：WO2016207042A1
公开(公告)日：2016-12-29
申请号：PCT/EP2016/063724
申请日：2016-06-15
申请人： TRUMPF LASER GMBH
发明人： FLAIG, Rainer , SCHAD, Sven-Silvius , KILLI, Alexander , STOLZENBURG, Christian , BAUER, Dominik , BUDNICKI, Aleksander , JANSEN, Florian
IPC分类号： H01S3/00 , H01S3/23 , H05G2/00
CPC分类号： H01S3/0064 , B23K26/00 , B23K26/21 , B23K26/38 , B23K26/704 , H01S3/2333 , H01S3/2341 , H05G2/008
摘要： Eine Verstärkeranordnung (1), umfassend: einen optischen Verstärker (2) zur Verstärkung von Laserstrahlung (3), einen ersten Retrorefiektor (7a) und einen zweiten Retrorefiektor (7b), wobei der Verstärker (2) in einem Strahlweg (6) der Laserstrahlung (3) zwischen dem ersten Retrorefiektor (7a) und dem zweiten Retrorefiektor (7b) angeordnet ist, wobei im Strahl weg (6) zwischen dem ersten Retrorefiektor (7a) und dem Verstärker (3) ein Polarisations-Strahlteiler (8) angeordnet ist, der Laserstrahlung (3) mit einem ersten Polarisationszustand (s) entlang des Strahlwegs (6) zwischen den beiden Retroreflektoren (7a, 7b) passieren lässt und der Laserstrahlung (3) mit einem zweiten Polarisationszustand (p) aus dem Strahlweg (6) zwischen den beiden Retroreflektoren (7a, 7b) auskoppelt, und wobei im Strahlweg (6) zwischen dem Polarisations-Strahlteiler (8) und dem zweiten Retrorefiektor (7b) eine Phasenschtebe-Einrichtung (9) zur Erzeugung einer festen Phasenverschiebung (λ/4) zur Umwandlung von Laserstrahlung (3) mit dem ersten Polarisationszustand (s) in Laserstrahlung (3) mit dem zweiten Polarisationszustand (p) und umgekehrt angeordnet ist, eine Seed-Lasereinrichtung (4) zur Erzeugung der Laserstrahlung (3), sowie einen optischen Modulator (11) der zur Erzeugung einer einstellbaren Phasenverschiebung (λ/2, 0) der Laserstrahlung (3) oder eines einstellbaren Ablenkwinkels der Laserstrahlung (3) ausgebildet ist und der zwischen der Seed-Lasereinrichtung (4) und dem Polarisations-Strahlteiler (8) angeordnet ist, wobei der Polarisations-Strahlteiler (8) ausgebildet ist, Laserstrahlung (3) der Seed- Lasereinrichtung (4), die nach dem Durchlaufen des optischen Modulators (11) den zweiten Polarisationszustand (p) aufweist, in den Strahlweg (6) zwischen den Retroreflektoren (7a, 7b) einzukoppeln, und wobei zum Schutz des optischen Verstärkers (2) vor an einem Objekt (W) rückreflektierter, verstärkter Laserstrahlung (3') entweder der optische Modulator (11, 11a) ausgebildet ist, in einem ersten Betriebszustand (B1), in dem keine gepulste Laserstrahlung (3) aus dem Strahlengang (6) zwischen den Retroreflektoren (7a, 7b) ausgekoppelt wird, Laserstrahlung (3) mit dem zweiten Polarisationszustand (p) in Laserstrahlung (3) mit dem ersten Polarisationszustand (s) umzuwandeln und über den Polarisations- Strahlteiler (8) zu einer Strahlfalle (12) zu leiten, oder in dem ersten Betriebszustand (B1 ) die rückreflektierte Laserstrahlung (3') zu einer Strahlfalle (12, 13) abzulenken.
摘要翻译：的放大器装置（1），包括：一个光放大器（2），用于激光辐射（3），第一Retrorefiektor（7a）和第二Retrorefiektor（7B）的扩增，其中所述放大器（2）的光束路径（6）的激光辐射（3）第一Retrorefiektor（7a）和所述第二Retrorefiektor（7B）之间，所述第一Retrorefiektor（7a）和所述放大器之间的光束（6）的路径（3），一个偏振分束器（8）布置，激光辐射（3），其具有沿着光束路径的第一偏振状态（S）（6）在两个后向反射器之间（7A，7B）可以通过，与激光辐射的（3）从之间的光路（6），其具有第二偏振态（p）的 2周后向反射器（7A，7B）耦合出来，并且其中，在偏振分束器（8）和所述第二Retrorefiektor之间的光路（6）（图7b）一个Phasenschtebe装置（9），用于产生为加密固定相移（λ/ 4）（3）具有在所述激光辐射的第一偏振状态（S）（3）（具有第二偏振状态（对激光辐射）和发展为设置反转，种子激光器装置（4），用于产生激光辐射（3），和光调制器 11）的（用于产生一个可调节的相移/ 2，0）的激光辐射（3）或激光辐射的可调节的偏转角的（3）形成，并且（种子激光器设备4）和所述偏振分束器之间设置（8）λ 中，所述偏振分束器（8）形成，（4）具有通过光调制器（11）在光路通过后的第二偏振状态（p）的激光辐射（3），所述种子激光器装置（6）之间复古反射器（7A，7B）耦合，并且其中所述光放大器（2）的物体（W）的向后反射，放大的激光辐射（3“）之前的保护任一光调制器（11，11A）经过培训的是电弧，在没有脉冲激光辐射（3）从所述后向反射器之间的光路（6）（7A，7B）被耦合在第一运行状态（B1），激光辐射（3）与第二偏振状态（P）（在激光辐射引导转换3）与所述第一偏振状态（S）和（经由偏振光束分离器8），以一个光束收集器（12），或者在第一操作状态（B1）时，背面反射的激光辐射（3“）到束阱（12,13 分散）。

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