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1. 发明申请

WO2008048415A2 DRIVE LASER DELIVERY SYSTEMS FOR EUV LIGHT SOURCE 审中-公开
标题翻译：用于EUV光源的DRIVE LASER DELIVERY系统
公开(公告)号：WO2008048415A2
公开(公告)日：2008-04-24
申请号：PCT/US2007/020897
申请日：2007-09-27
申请人： CYMER, INC.(A NEVADA CORPORATION) , BYKANOV, Alexander, N. , FOMENKOV, Igor, V. , KHODYKIN, Oleh, V. , ERSHOV, Alexander, I.
发明人： BYKANOV, Alexander, N. , FOMENKOV, Igor, V. , KHODYKIN, Oleh, V. , ERSHOV, Alexander, I.
IPC分类号： G01J3/10
CPC分类号： H05G2/003 , G03F7/70033 , H01S3/0064 , H01S3/073 , H01S3/0805 , H01S3/08054 , H01S3/08059 , H01S3/083 , H01S3/10092 , H01S3/105 , H01S3/1066 , H01S3/115 , H01S3/121 , H01S3/127 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S3/2383 , H05G2/008
摘要： An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may be configured to expose the optic to a gaseous etchant pressure for optic cleaning while the window is exposed to a lower gaseous etchant pressure to avoid window coating deterioration. In another aspect, an EUV light source may comprise a target material positionable along a beam path to participate in a first interaction with light on the beam path; an optical amplifier; and at least one optic directing photons scattered from the first interaction into the optical amplifier to produce a laser beam on the beam path for a subsequent interaction with the target material to produce an EUV light emitting plasma.
摘要翻译：公开了一种LPP EUV光源，其具有位于等离子体腔室中用于反射其中产生的EUV光的光学器件和激光输入窗口。对于这个方面，EUV光源可以被配置为将光学器件暴露于气体蚀刻剂压力以用于光学清洁，同时窗口暴露于较低的气体蚀刻剂压力以避免窗口涂层劣化。在另一方面，EUV光源可以包括可沿着光束路径定位的目标材料，以参与与光束路径上的光的第一相互作用; 一个光放大器; 以及至少一个光学引导光子，其从第一相互作用中散射到光学放大器中，以在光束路径上产生激光束，用于随后与靶材料相互作用以产生EUV发光等离子体。

2. 发明申请

WO03019739B1 SUPPRESSION OF MODE-BEATING NOISE IN A Q-SWITCHED PULSED LASER USING NOVEL Q-SWITCH DEVICE 审中-公开
标题翻译：使用新型Q开关器件对Q开关脉冲激光器中的模式噪声进行抑制
公开(公告)号：WO03019739B1
公开(公告)日：2004-03-04
申请号：PCT/CA0201285
申请日：2002-08-20
申请人： GENDRON DENIS J
发明人： GENDRON DENIS J
IPC分类号： H01S3/115 , H01S3/098 , H01S3/11 , H01S3/113 , H01S3/117
CPC分类号： H01S3/08031 , H01S3/1061 , H01S3/113 , H01S3/115 , H01S3/117 , H01S3/127 , H01S2301/02
摘要： A novel Q-switch device enables significant quality and value improvement for a Q-switched laser system by achieving a significant reduction of mode-beating noise during the pulsed output. The origin of mode-beating noise in a Q-switched laser is a result of high gain availability and amplification of competing standing-waves in formation, whose optical frequency is a product of natural selection via spatial hole burning in the gain medium. The novel Q-switch device employs an active, electro-optics or acousto-optics, Q-switch in combination with a saturable absorber device, to provide an optimized soft opening of the optical path and a controlled timing of a Q-switched laser. This novel combination offers larger modulation loss than otherwise possible with the active modulator alone, and it allows for higher gain build-up energy extraction efficiency. Specifically, it will enable a low-voltage modulator ( 10) and Q-switched operation at high repetition rate (>10 kHz).
摘要翻译：一种新颖的Q开关器件通过在脉冲输出期间显着降低振荡噪声可以实现Q开关激光器系统的显着质量和价值改进。 Q开关激光器中的抖动噪声的起源是由于增益可用性和形成中的竞争性驻波的放大而导致的，其光频率是通过增益介质中的空间孔燃烧进行自然选择的乘积。新颖的Q开关器件采用有源，电光或声光Q开关与可饱和吸收器件组合，以提供光路的优化软开路和Q开关激光器的受控时序。这种新颖的组合提供比单独的有源调制器更可能的更大的调制损耗，并且其允许更高的增益增加能量提取效率。具体来说，它将使低电压调制器（<100 V）获得高增益（小信号增益> 10）和高重复频率（> 10 kHz）的Q开关操作。

3. 发明申请

WO0229941A2 DEVICES FOR VARYING THE PULSE DURATION AND/OR PULSE ENERGY IN A PASSIVELY Q-SWITCHED LASER 审中-公开
标题翻译： FOR变化的脉冲持续时间和/或脉冲能量的设备以被动Q开关激光
公开(公告)号：WO0229941A2
公开(公告)日：2002-04-11
申请号：PCT/DE0103816
申请日：2001-10-02
申请人： CLYXON LASER GMBH , SCHOENBORN KARL HEINZ
发明人： SCHOENBORN KARL-HEINZ
IPC分类号： H01S3/109 , H01S3/11 , H01S3/121 , H01S3/16 , H01S3/00
CPC分类号： H01S3/1061 , H01S3/08013 , H01S3/113 , H01S3/127
摘要： The invention relates to a device for controlling the pulse duration and/or the pulse energy of a laser pulse in a passively Q-switched laser, or for controlling the repetition rate of the individual pulses of the laser in continuous mode. Said device is characterised by a control mechanism for the mechanical adjustment of the Q-switch system. The invention also relates to a device for controlling the pulse duration and/or the pulse energy of a laser pulse in a passively Q-switched laser comprising a fibre-optic resonator extension, or for controlling the repetition rate of the individual pulses of the laser in continuous mode. The device is characterised in that the control is achieved by the mechanical adjustment of the resonator array. The invention thus provides lasers, whose temporal power emission is variable.
摘要翻译：本发明涉及一种设备，用于控制所述脉冲持续时间和/或激光脉冲，其特征在于通过控制对Q开关组件的机械调整和用于控制与所述激光的各脉冲的重复率的被动Q开关激光器或连续操作的脉冲持续时间的装置的脉冲能量，和 /或与光纤谐振腔延伸或在激光的单个脉冲的重复率的连续动作的被动Q开关激光器的激光脉冲的脉冲能量，其特征在于，所述控制是通过谐振器的机械调节来实现的。因此，提供激光器于其时间输出功率是可变的。

4. 发明申请

WO2017209355A1 피코초 펄스 레이저 장치 및 구동 방법 审中-公开
标题翻译：皮秒脉冲激光装置和驱动方法
公开(公告)号：WO2017209355A1
公开(公告)日：2017-12-07
申请号：PCT/KR2016/011666
申请日：2016-10-18
申请人： 원텍 주식회사
发明人： 김정현
IPC分类号： H01S3/121 , H01S3/127 , G01J1/42
CPC分类号： G01J1/42 , H01S3/121 , H01S3/127
摘要： 본 발명은 피코초 레이저 펄스열의 발생에 과한 것으로서, 보다 상세하게는 높은 피크 출력을 갖는 피코초 레이저 펄스열의 발생에 관한 것이다. 이를 위해서 제1광스위칭 소자(102)와 제2광스위칭 소자(105)를 공진기 내부에 위치시키고, 제1광스위칭 소자(102)와 제2광스위칭 소자(105)를 통해서 고출력 피코초 펄스 레이저를 생성하도록 하는 것을 특징으로 한다.
摘要翻译：本发明涉及皮秒激光脉冲串的产生，并且更具体地涉及具有高峰值输出的皮秒激光脉冲串的产生。为此位置的第一光开关装置102和谐振器内的第二光开关元件（105），第一光开关装置102，并通过光开关装置105中的第二高功率皮秒脉冲，激光。＆lt; / p＆gt;

5. 发明申请

WO2009133546A1 METHOD AND SYSTEM FOR FINE ADJUSTMENT OF OPTICAL ELEMENTS POSITION 审中-公开
标题翻译：精细调整光学元件位置的方法和系统
公开(公告)号：WO2009133546A1
公开(公告)日：2009-11-05
申请号：PCT/IL2009/000368
申请日：2009-04-05
申请人： RAICOL CRYSTALS LTD. , SKLIAR, Alexander , GONEN, David , WAINSTEIN, Vladimir
发明人： SKLIAR, Alexander , GONEN, David , WAINSTEIN, Vladimir
IPC分类号： H01S3/127 , G02B7/18
CPC分类号： H01S3/127 , G02B7/005 , G02F1/0322 , H01S3/107
摘要： An optical device is presented comprising: a cavity defining a cavity axis of light propagation; at least two optical elements having their optical axes, respectively, and being aligned along said cavity axis such that the optical axes of the optical elements coincide with said cavity axis; and a positioning unit associated with at least one of said at least two optical elements. The positioning unit is configured and operable for providing controllable axial rotation of said at least one optical element about the cavity axis, thereby enabling controllable fine adjustment of orientation of said at least one optical element relative to the at least one other optical element, while keeping the aligned positions of the optical elements with respect to said cavity axis.
摘要翻译：提供了一种光学装置，包括：限定光传播的空腔轴的空腔; 至少两个光学元件分别具有它们的光轴并且沿着所述空腔轴线对准，使得光学元件的光轴与所述腔轴线重合; 以及与所述至少两个光学元件中的至少一个相关联的定位单元。所述定位单元被构造和操作用于提供所述至少一个光学元件围绕空腔轴线的可控轴向旋转，从而使所述至少一个光学元件相对于所述至少一个其它光学元件的取向可以可控地微调，同时保持光学元件相对于所述腔轴线的对准位置。

6. 发明申请

WO2007100433A2 INTEGRATED HIGH EFFICIENCY MULTI-STAGE ACCOUSTO-OPTIC MODULATOR 审中-公开
标题翻译：集成高效率多级光电调制器
公开(公告)号：WO2007100433A2
公开(公告)日：2007-09-07
申请号：PCT/US2007002732
申请日：2007-01-31
申请人： OPTRONIC LAB INC , LOVERING DAVID , CHANEY DARREN
发明人： LOVERING DAVID , CHANEY DARREN
IPC分类号： G02F1/11 , H01S3/117
CPC分类号： G02F1/11 , G02F2201/16 , H01S3/1068 , H01S3/117 , H01S3/127
摘要： An acousto-optic modulator includes a monolithic acousto-optic medium, a plurality of spaced apart acoustic transducers comprising a first and at least a second transducer both bonded and positioned on the monolithic acousto-optic medium to form first and second acoustical columns. The first and second transducers are aligned so that an incident optical beam encounters the acoustic beam produced by each of the transducers sequentially on its passage through the modulator. The transducers are oriented so that a diffracted ray from the first acoustical column enters the second acoustical column at an angle outside the acceptance angle of the second acoustical column.
摘要翻译：声光调制器包括单声道声光介质，多个间隔开的声换能器，包括第一和至少第二换能器，其两者结合并定位在整体式声光介质上以形成第一和第二声柱。对准第一和第二换能器，使得入射光束在其通过调制器的过程中顺序地遇到每个换能器产生的声束。换能器被定向成使得来自第一声柱的衍射光线以与第二声柱的接收角以外的角度进入第二声柱。

7. 发明申请

WO2006062744A2 METHODS AND SYSTEMS FOR SYNCHRONIZED PULSE SHAPE TAILORING 审中-公开
标题翻译：同步脉冲形状定制的方法和系统
公开(公告)号：WO2006062744A2
公开(公告)日：2006-06-15
申请号：PCT/US2005042513
申请日：2005-11-21
申请人： ELECTRO SCIENT IND INC , SUN YUNLONG , SUN LEI
发明人： SUN YUNLONG , SUN LEI
IPC分类号： H01S3/082 , B23K26/38 , H01S3/11 , H01S3/127
CPC分类号： H01S3/082 , B23K26/0622 , H01S3/07 , H01S3/0805 , H01S3/0816 , H01S3/0941 , H01S3/10038 , H01S3/10046 , H01S3/117 , H01S3/127 , H01S3/1611 , H01S3/1643
摘要： A plurality of subresonators (12, 14), having different design configurations, share a common resonator section (18) such that the lasing action can be substantially synchronized to provide coherent laser pulses that merge the different respective pulse energy profile and/or pulse width characteristics imparted by the configurations of the subresonators (12, 14). The subresonators (12, 14) may share a laser medium (42) in the common section, or each distinct subresonator section (28, 36) may have its own laser medium (42). Exemplary long and short subresonators (12, 14) generate specially tailored laser pulses having a short rise time and a long pulse width at one wavelength or two different wavelengths that may be beneficial for a variety of laser and micromachining applications including memory link processing.
摘要翻译：具有不同设计配置的多个子共振器（12,14）共享公共谐振器部分（18），使得激光作用可以基本上同步，以提供合并不同的相应脉冲能量分布和/或脉冲宽度的相干激光脉冲通过子共振器（12,14）的构造赋予的特性。子共振器（12,14）可以在公共部分中共享激光介质（42），或者每个不同的子谐振器部分（28,36）可以具有其自己的激光介质（42）。示例性的长和短子谐振器（12,14）产生特定定制的激光脉冲，其具有在一个波长或两个不同波长处具有短的上升时间和长脉冲宽度，这可能对于包括存储器链路处理的各种激光和微加工应用有利。

8. 发明申请

WO2011068712A3 Q-SWITCHED OSCILLATOR SEED-SOURCE FOR MOPA LASER ILLUMINATOR METHOD AND APPARATUS 审中-公开
标题翻译：用于MOPA激光照明器方法和装置的Q开关振荡器种子源
公开(公告)号：WO2011068712A3
公开(公告)日：2012-02-02
申请号：PCT/US2010057696
申请日：2010-11-23
申请人： LOCKHEED CORP , SAVAGE-LEUCHS MATTHIAS , DILLEY CHRISTIAN , LEMAIRE CHARLES
发明人： SAVAGE-LEUCHS MATTHIAS , DILLEY CHRISTIAN , LEMAIRE CHARLES
IPC分类号： H01S3/083 , H01S3/11
CPC分类号： H01S3/06758 , B60Q1/0076 , H01S3/06704 , H01S3/06712 , H01S3/06716 , H01S3/0675 , H01S3/06791 , H01S3/094003 , H01S3/094011 , H01S3/094053 , H01S3/0941 , H01S3/1022 , H01S3/113 , H01S3/115 , H01S3/127 , H01S3/2316 , H01S5/146 , H01S2301/03
摘要： An apparatus, method and system that uses a Q-switched laser or a Q-seed source (180) for a seed pulse signal having a controlled high-dynamic-range amplitude that avoids and/or compensates for pulse steepening in high-gain optical-fiber (113) and/or optical-rod (117) amplification of optical pulses. Optionally, the optical output is used for LIDAR or illumination purposes (e.g., for image acquisition). In some embodiments, well-controlled pulse shapes are obtained having a wide dynamic range, long duration, and not-too-narrow linewidth. In some embodiments, upon the opening of a Q-switch in an optical cavity having a gain medium, the amplification builds relatively slowly, wherein each round trip through the gain medium increases the amplitude of the optical pulse. Other embodiments use quasi-Q-switch devices or a plurality of amplitude modulators to obtain Q-seed pulses. These configurations provide optical pulses having wide dynamic ranges that ameliorate problems of pulse steepening, non-linear spectral broadening and the like in very-high-power MOPA devices.
摘要翻译：一种使用Q开关激光器或Q-种子源（180）用于具有受控的高动态范围幅度的种子脉冲信号的装置，方法和系统，其避免和/或补偿高增益光学中的脉冲陡峭 - 光纤（113）和/或光学棒（117）放大光脉冲。可选地，光输出用于LIDAR或照明目的（例如，用于图像采集）。在一些实施例中，获得具有宽动态范围，长持续时间和不太窄线宽的良好控制的脉冲形状。在一些实施例中，在具有增益介质的光学腔中打开Q开关后，放大相对缓慢地建立，其中通过增益介质的每次往返都增加了光脉冲的幅度。其他实施例使用准Q开关器件或多个幅度调制器来获得Q-种子脉冲。这些配置提供具有宽动态范围的光脉冲，其可改善非常高功率的MOPA器件中的脉冲陡峭度，非线性光谱变宽等问题。

9. 发明申请

WO2008046013A2 MULTIPULSE AGILE LASER SOURCE FOR REAL TIME SPARK SPECTROCHEMICAL HAZARD ANALYSIS 审中-公开
标题翻译：用于实时火山光谱化学危害分析的多种激光源激光源
公开(公告)号：WO2008046013A2
公开(公告)日：2008-04-17
申请号：PCT/US2007081127
申请日：2007-10-11
申请人： JMAR RES INC , RIEGER HARRY
发明人： RIEGER HARRY
IPC分类号： G01J3/30
CPC分类号： G01J3/10 , G01J3/443 , G01N21/718 , H01S3/08054 , H01S3/10038 , H01S3/10046 , H01S3/107 , H01S3/1103 , H01S3/115 , H01S3/127 , H01S3/2316 , H01S3/2341 , H01S3/2383
摘要： A system for analyzing a sample is disclosed. The system is comprised of a laser unit and a spectrometer unit. The laser unit is configured to emit a first laser pulse and a second laser pulse towards the sample with a pulse separation time of between about 1 microsecond to 20 microseconds. The laser unit includes an oscillator unit, a pre-amplifier unit and an amplifier unit. The oscillator unit is configured to generate the first laser pulse and the second laser pulse. The pre-amplifier unit is configured to receive the first laser pulse and the second laser pulse and increase the energy levels of each pulse to a first energy state. The amplifier unit is configured to receive the first laser pulse and the second laser pulse from the pre-amplifier unit and further increase the energy levels of each pulse to a second energy level prior to the pulses being emitted from the laser unit. The spectrometer unit is configured to capture emissions generated by the sample after the sample is struck by the first and second laser pulses then characterize the sample using the emissions.
摘要翻译：公开了一种用于分析样品的系统。该系统由激光单元和光谱仪单元组成。激光单元被配置为以大约1微秒至20微秒的脉冲间隔时间向样品发射第一激光脉冲和第二激光脉冲。激光单元包括振荡器单元，前置放大器单元和放大器单元。振荡器单元被配置为产生第一激光脉冲和第二激光脉冲。前置放大器单元被配置为接收第一激光脉冲和第二激光脉冲，并且将每个脉冲的能量水平增加到第一能量状态。放大器单元被配置为从前置放大器单元接收第一激光脉冲和第二激光脉冲，并且在从激光单元发射脉冲之前，将每个脉冲的能量水平进一步增加到第二能级。光谱仪单元被配置为捕获在样品被第一和第二激光脉冲击中之后由样品产生的辐射，然后使用排放来表征样品。

10. 发明申请

WO2007126514A2 METHOD AND SYSTEM FOR LASER AMPLIFICATION USING A DUAL CRYSTAL POCKELS CELL 审中-公开
标题翻译：使用双晶体晶胞的激光放大的方法和系统
公开(公告)号：WO2007126514A2
公开(公告)日：2007-11-08
申请号：PCT/US2007005050
申请日：2007-02-26
申请人： INTRALASE CORP , ZADOYAN RUBEN , KRAVITIS MICHAEL
发明人： ZADOYAN RUBEN , KRAVITIS MICHAEL
IPC分类号： G02F1/03
CPC分类号： H01S3/127 , G02F1/0322 , H01S3/08054 , H01S3/10038 , H01S3/107 , H01S3/235
摘要： A system for laser amplification includes a dual-crystal Pockels cell which is used to control emission of laser pulses from an ultra-fast laser. The Pockels cell is constructed to enable adjustment of the rotational orientation of one crystal relative to the other crystal. The rotational orientation of one or both crystals in the Pockels cell is adjusted to control sidebands in the laser pulse.
摘要翻译：用于激光放大的系统包括双晶Pockels单元，其用于控制来自超快激光器的激光脉冲的发射。 Pockels单元被构造成能够调节一个晶体相对于另一个晶体的旋转取向。调整Pockels单元中的一个或两个晶体的旋转取向以控制激光脉冲中的边带。

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