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    • 1. 发明申请
    • Method for Producing Trichlorosilane
    • 生产三氯硅烷的方法
    • US20160052791A1
    • 2016-02-25
    • US14929873
    • 2015-11-02
    • MITSUBISHI MATERIALS CORPORATION
    • Toshiyuki IshiiHideo ItoYuji Shimizu
    • C01B33/107
    • C01B33/1071B01J12/007B01J19/02B01J19/243B01J2219/00135B01J2219/00155B01J2219/0272
    • An apparatus for producing trichlorosilane, including: a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to produce a reaction product gas containing trichlorosilane and hydrogen chloride; a heating mechanism that heats the interior of the reaction vessel; a gas supply section that supplies the supply gas in the reaction vessel; and a gas discharge section that discharges the reaction product gas from the reaction vessel to the outside, wherein a reaction passageway is formed in the interior of the reaction vessel, in which a plurality of small spaces partitioned by a plurality of reaction tubular walls that have different inner diameters and are substantially concentrically disposed communicate by flow penetration sections formed alternately in lower portions and upper portions of the reaction tubular walls in order from the inside, and the gas supply section and the gas discharge section are connected to the reaction passageway.
    • 一种三氯硅烷的制造装置,包括:供给含有四氯化硅和氢气的供给气体的反应容器,生成含有三氯硅烷和氯化氢的反应生成气体; 加热反应容器内部的加热机构; 气体供给部,其供给反应容器内的供给气体; 以及气体排出部,其将反应产物气体从反应容器排出到外部,其中反应通道形成在反应容器的内部,其中多个由多个反应管壁分隔的小空间,其具有 不同的内径并且基本上同心设置,由内部依次形成在反应管壁的下部和上部交替形成的流动穿透部分,气体供应部分和气体排出部分连接到反应通道。
    • 4. 发明申请
    • Silicon manufacturing apparatus
    • 硅制造装置
    • US20070034146A1
    • 2007-02-15
    • US10569149
    • 2004-08-17
    • Junichirou NakashimaOda Hiroyuki
    • Junichirou NakashimaOda Hiroyuki
    • C30B11/00C23C16/00
    • C01B33/027B01J19/02B01J2219/0218B01J2219/0227B01J2219/0272C01B33/029C01B33/03C30B11/003C30B29/06Y10T117/10Y10T117/1004
    • A polycrystalline silicon production apparatus is provided whereby when deposited silicon is caused to drip down into an underlying collection part by heating the reaction tube inner surface at a temperature equal to or above the melting point of silicon, the silicon melt can be prevented from solidifying at a lower end portion of the reaction tube due to temperature lowering at the lower end portion. When a reaction tube is heated with a high frequency heating coil, the temperature lowering at a lower end portion of the reaction tube is prevented through temperature lowering prevention means which may be an infrared device capable of heating the outer periphery of the lower end portion by means of infrared rays, or which may be a lower end coil that is constituted by a coil near the lower end of the high frequency heating coil and has an increased heating intensity relative to an upper coil.
    • 提供一种多晶硅制造装置,通过在硅的熔点以上的温度下加热反应管内表面,使沉积的硅滴入下面的收集部分时,可以防止硅熔体固化 由于下端部的温度降低,反应管的下端部。 当用高频加热线圈加热反应管时,通过防止降温装置防止反应管的下端部的温度降低,该装置可以是可以通过下述方式加热下端部的外周的红外线装置 红外线的手段,也可以是由高频加热线圈的下端附近的线圈构成的下端线圈,并且相对于上线圈具有增加的加热强度。
    • 6. 发明授权
    • Silicon carbide product
    • 碳化硅产品
    • US5045398A
    • 1991-09-03
    • US462260
    • 1990-01-09
    • Harry Levin
    • Harry Levin
    • B01J19/02C01B33/029C01B33/03
    • C01B33/03B01J19/02C01B33/029B01J2219/0204B01J2219/0209B01J2219/0272Y10T428/30
    • A silicon carbide product by converting carbon preforms by utilizing a reactor apparatus (10) adapted for continuously producing molten, solar grade purity elemental silicon by thermal reaction of a suitable precursor gas, such as silane (SiH.sub.4), is disclosed. The reactor apparatus (10) includes an elongated reactor body (32) having graphite or carbon walls which are heated to a temperature exceeding the melting temperature of silicon. The precursor gas enters the reactor body (32) through an efficiently cooled inlet tube assembly (22) and a relatively thin carbon or graphite septum (44). The septum (44), being in contact on one side with the cooled inlet (22) and the heated interior of the reactor (32) on the other side, provides a sharp temperature gradient for the precursor gas entering the reactor (32) and renders the operation of the inlet tube assembly (22) substantially free of clogging. The precursor gas flows in the reactor (32) in a substantially smooth, substantially axial manner. Liquid silicon formed in the initial stages of the thermal reaction reacts with the graphite or carbon walls to provide a silicon carbide coating on the walls. The silicon carbide coated reactor is highly adapted for prolonged use for production of highly pure solar grade silicon. Liquid silicon (20) produced in the reactor apparatus (10) may be used directly in a Czochralski or other crystal shaping equipment.
    • 公开了通过利用适于通过合适的前体气体例如硅烷(SiH 4)的热反应连续生产熔融的太阳能级纯度元素硅的反应器装置(10)来转换碳预制件的碳化硅产品。 反应器装置(10)包括具有石墨或碳壁的细长反应器主体(32),其被加热到超过硅的熔融温度的温度。 前体气体通过有效冷却的入口管组件(22)和相对薄的碳或石墨隔膜(44)进入反应器主体(32)。 在一侧与冷却的入口(22)接触的隔膜(44)和另一侧的反应器(32)的加热内部,为进入反应器(32)的前体气体提供了急剧的温度梯度,以及 使得入口管组件(22)的操作基本上没有堵塞。 前体气体以基本平滑,基本上轴向的方式在反应器(32)中流动。 在热反应的初始阶段形成的液态硅与石墨或碳壁反应,在壁上提供碳化硅涂层。 碳化硅涂层反应器高度适用于长时间用于生产高纯度太阳能级硅。 在反应器装置(10)中生产的液态硅(20)可以直接用于切克劳斯(Czochralski)或其它晶体成形设备。
    • 7. 发明授权
    • Apparatus for making molten silicon
    • 用于制造熔融硅的设备
    • US4737348A
    • 1988-04-12
    • US618712
    • 1984-06-08
    • Harry Levin
    • Harry Levin
    • B01J19/02C01B33/029C01B33/03C01B33/02
    • C01B33/03B01J19/02C01B33/029B01J2219/0204B01J2219/0209B01J2219/0272Y10S117/90Y10T117/1056
    • A reactor apparatus (10) adapted for continuously producing molten, solar grade purity elemental silicon by thermal reaction of a suitable precursor gas, such as silane (SiH.sub.4), is disclosed. The reactor apparatus (10) includes an elongated reactor body (32) having graphite or carbon walls which are heated to a temperature exceeding the melting temperature of silicon. The precursor gas enters the reactor body (32) through an efficiently cooled inlet tube assembly (22) and a relatively thin carbon or graphite septum (44). The septum (44), being in contact on one side with the cooled inlet (22) and the heated interior of the reactor (32) on the other side, provides a sharp temperature gradient for the precursor gas entering the reactor (32) and renders the operation of the inlet tube assembly (22) substantially free of clogging. The precursor gas flows in the reactor (32) in a substantially smooth, substantially axial manner. Liquid silicon formed in the initial stages of the thermal reaction reacts with the graphite or carbon walls to provide a silicon carbide coating on the walls. The silicon carbide coated reactor is highly adapted for prolonged use for production of highly pure solar grade silicon. Liquid silicon (20) produced in the reactor apparatus (10) may be used directly in a Czochralski or other crystal shaping equipment.
    • 公开了一种用于通过合适的前体气体如硅烷(SiH 4)的热反应连续生产熔融的太阳能级纯度元素硅的反应器装置(10)。 反应器装置(10)包括具有石墨或碳壁的细长反应器主体(32),其被加热到超过硅的熔融温度的温度。 前体气体通过有效冷却的入口管组件(22)和相对薄的碳或石墨隔膜(44)进入反应器主体(32)。 在一侧与冷却的入口(22)接触的隔膜(44)和另一侧的反应器(32)的加热内部,为进入反应器(32)的前体气体提供了急剧的温度梯度,以及 使得入口管组件(22)的操作基本上没有堵塞。 前体气体以基本平滑,基本上轴向的方式在反应器(32)中流动。 在热反应的初始阶段形成的液态硅与石墨或碳壁反应,在壁上提供碳化硅涂层。 碳化硅涂层反应器高度适用于长时间用于生产高纯度太阳能级硅。 在反应器装置(10)中生产的液态硅(20)可以直接用于切克劳斯(Czochralski)或其它晶体成形设备。