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    • 9. 发明授权
    • Fluorine control system with fluorine monitor
    • 氟监控系统
    • US06240117B1
    • 2001-05-29
    • US09191446
    • 1998-11-12
    • Mengxiong GongTom A. WatsonPalash P. DasRichard L. SandstromThomas P. Duffey
    • Mengxiong GongTom A. WatsonPalash P. DasRichard L. SandstromThomas P. Duffey
    • H01S3223
    • G03F7/70558G03F7/70575H01S3/036H01S3/225
    • An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration.
    • 具有实时氟监测器和自动氟控制系统的准分子激光系统,以允许精确控制激光室内的氟浓度。 清洁的激光气体在通过其中一个室窗外壳返回到室之前从激光室中提取并引导通过F2样品池。 UV光束被引导通过F2样品池,并测量光的吸收量。 在优选实施例中,通过用光电检测器检测穿过电池的光量来测量吸收。 光电检测器提供反馈信号,该信号由激光控制器用于将腔室中的氟浓度自动控制在所需范围内。 在另一优选实施例中,声检测器检测由吸收的光脉冲产生的声信号。 本发明提供氟浓度的实质实时测量。