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1. 发明授权

US06914919B2 Six to ten KHz, or greater gas discharge laser system 有权
标题翻译： 6〜10KHz或更大的气体放电激光系统
公开(公告)号：US06914919B2
公开(公告)日：2005-07-05
申请号：US10187336
申请日：2002-06-28
申请人： Tom A. Watson , Richard C. Ujazdowski , Alex P. Ivaschenko , Richard L. Sandstrom , Robert A. Shannon , R. Kyle Webb , Frederick A. Palenschat , Thomas Hofmann , Curtis L. Rettig , Richard M. Ness , Paul C. Melcher , Alexander I. Ershov
发明人： Tom A. Watson , Richard C. Ujazdowski , Alex P. Ivaschenko , Richard L. Sandstrom , Robert A. Shannon , R. Kyle Webb , Frederick A. Palenschat , Thomas Hofmann , Curtis L. Rettig , Richard M. Ness , Paul C. Melcher , Alexander I. Ershov
IPC分类号： H01S3/134 , G03F7/20 , H01S3/00 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/131 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23 , H01S3/10
CPC分类号： H01S3/0385 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides gas discharge laser systems capable of reliable long-term operation in a production line capacity at repetition rates in the range of 6,000 to 10,0000 pulses power second. Preferred embodiments are configured as KrF, ArF and F2 lasers used for light sources for integrated circuit lithography. Improvements include a modified high voltage power supply capable for charging an initial capacitor of a magnetic compression pulse power system to precise target voltages 6,000 to 10,0000 times per second and a feedback control for monitoring pulse energy and determining the target voltages on a pulse-by-pulse basis. Several techniques are disclosed for removing discharge created debris from the discharge region between the laser electrodes during the intervals between discharges. In one embodiment the width of the discharge region is reduced from about 3 mm to about 1 mm so that a gas circulation system designed for 4,000 Hz operation could be utilized for 10,000 Hz operation. In other embodiments the gas flow between the electrodes is increased sufficiently to permit 10,000 Hz operation with a discharge region width of 3 mm. To provide these substantial increased gas flow rates, Applicants have disclosed preferred embodiments utilize tangential forms of the prior art but with improved and more powerful motors and novel bearing designs. New bearing designs include both ceramic bearings and magnetic bearings. In other embodiments, some or all of the gas circulation power is provided with a blower located outside the laser chamber. The outside blower can be located in the laser cabinet or in separate location.
摘要翻译：本发明提供一种气体放电激光系统，其能够以6,000至1000000次脉冲功率秒的重复频率在生产线容量中可靠地长期运行。优选的实施例被配置为用于集成电路光刻的光源的KrF，ArF和F 2 N 2激光器。改进包括一种改进的高压电源，其能够将磁压缩脉冲电源系统的初始电容器充电至每秒精确的目标电压6,000至10,0000次，以及用于监视脉冲能量的反馈控制以及确定脉冲 - 逐脉冲基础。公开了用于在放电间隔期间从激光电极之间的放电区域去除产生的碎屑的几种技术。在一个实施例中，放电区域的宽度从约3mm减小至约1mm，使得设计用于4000Hz操作的气体循环系统可用于10,000Hz操作。在其他实施例中，电极之间的气流充分增加，以允许10,000Hz的操作，放电区域宽度为3mm。为了提供这些显着增加的气体流速，申请人已经公开了使用现有技术的切向形式的优选实施例，但是具有改进的和更强大的电动机和新颖的轴承设计。新的轴承设计包括陶瓷轴承和磁性轴承。在其他实施例中，一些或全部气体循环动力设置有位于激光室外部的鼓风机。外部鼓风机可以位于激光柜内或分开的位置。

2. 发明授权

US6034984A Tangential fan with cutoff assembly and vibration control for electric discharge laser 有权
标题翻译：切向风扇切割组件和放电激光器的振动控制
公开(公告)号：US6034984A
公开(公告)日：2000-03-07
申请号：US310786
申请日：1999-05-12
申请人： Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski , Tom A. Watson , R. Kyle Webb
发明人： Thomas Hofmann , James K. Howey , Robert A. Shannon , Richard C. Ujazdowski , Tom A. Watson , R. Kyle Webb
IPC分类号： G03F7/20 , H01S3/036 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036 , G03F7/708 , H01S3/225
摘要： A tangential fan and cutoff assembly for recirculating a lasing gas mixture has blade members, which vary in circumferential position stepwise from end to end, and/or a tapered anode assembly. The number of blade members can be constant or variable between ends. The circumferential position of blade members can shift monotonically or reversibly between ends. Blade members are stiffened by optimally selecting the number and placement of hub members to control the natural vibration frequency of the fan. Methods of forming tangential fans include casting, and machining from a solid block. Monolithic structures can be joined, typically by electron-beam welding. Casting, welding, and machining processes introduce no additional contaminants. Tangential fans produced have mechanical rigidity, accurate tolerances, and low contaminant concentrations. Blade members can be formed into air foil shapes.
摘要翻译：用于再循环激光气体混合物的切向风扇和切割组件具有叶片构件，其周向位置从端到端逐渐变化，和/或锥形阳极组件。刀片构件的数量可以在端部之间是恒定的或可变的。叶片构件的圆周位置可以在端部之间单调或可逆地移动。叶片构件通过最佳地选择轮毂构件的数量和布置来控制风扇的固有振动频率而变硬。形成切向风扇的方法包括从固体块铸造和加工。通常可以通过电子束焊接来连接整体结构。铸造，焊接和加工过程不会引起额外的污染物。生产的切向风扇具有机械刚度，精度公差和污染物浓度低。叶片构件可以形成为空气箔形状。

3. 发明授权

US6034978A Gas discharge laser with gas temperature control 有权
标题翻译：气体放电激光器采用气体温度控制
公开(公告)号：US6034978A
公开(公告)日：2000-03-07
申请号：US310872
申请日：1999-05-12
申请人： Richard C. Ujazdowski , Robert A. Shannon , Dmitry Berger , William N. Partlo , Tom A. Watson , Paul S. Thompson , Toshihiko Ishihara , Carl E. Tedesco, II , Donald G. Larson , Steven M. Harrington , Richard G. Morton , James H. Azzola , I. Roger Oliver , Thomas P. Duffey , Igor V. Fomenkov
发明人： Richard C. Ujazdowski , Robert A. Shannon , Dmitry Berger , William N. Partlo , Tom A. Watson , Paul S. Thompson , Toshihiko Ishihara , Carl E. Tedesco, II , Donald G. Larson , Steven M. Harrington , Richard G. Morton , James H. Azzola , I. Roger Oliver , Thomas P. Duffey , Igor V. Fomenkov
IPC分类号： H01S3/225 , G03F7/20 , H01S3/036 , H01S3/041 , H01S3/134 , H01S3/04
CPC分类号： G03F7/70025 , H01S3/134 , H01S3/036
摘要： A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.
摘要翻译：一种具有快速响应气体温度控制的气体放电激光器，用于在脉冲串模式操作期间将激光气体温度保持在期望的限度内。优选实施例包括具有散热片的被动温度稳定器，其表面积暴露于至少等于激光气体热交换器的冷却片的表面积的流动激光气体。优选实施例利用加热元件和冷却剂流量控制来调节激光气体温度，使用编程为预期空闲周期的处理器。

4. 发明授权

US07157710B1 Corona discharge detection 有权
标题翻译：电晕放电检测
公开(公告)号：US07157710B1
公开(公告)日：2007-01-02
申请号：US10988052
申请日：2004-11-12
申请人： Robert A. Shannon
发明人： Robert A. Shannon
IPC分类号： G01J5/02 , G01J1/42 , G01J3/30 , G01R31/08
CPC分类号： G01J1/42
摘要： An apparatus and process are provided for detecting whether a corona discharge has occurred external or internal to equipment in which a broadband optical spectra sensor is placed. The broadband optical spectra sensor senses both the ultraviolet energy of the corona discharge and the infrared energy of afterglow of the discharge when the discharge occurs internal to the equipment. The sensed broadband optical spectra signal is processed and a determination is made as to whether the corona discharge occurred external or internal to the equipment from the pulse width of the sensed energy pulse.
摘要翻译：提供了一种用于检测电晕放电是否发生在放置宽带光谱传感器的设备的外部或内部的装置和过程。当放电发生在设备内部时，宽带光谱传感器检测电晕放电的紫外线能量和放电余辉的红外能量。感测到的宽带光谱信号被处理，并且根据感测到的能量脉冲的脉冲宽度确定电晕放电是发生在设备外部还是内部。

5. 发明授权

US06757316B2 Four KHz gas discharge laser 有权
标题翻译：四KHz气体放电激光器
公开(公告)号：US06757316B2
公开(公告)日：2004-06-29
申请号：US09854097
申请日：2001-05-11
申请人： Peter C. Newman , Thomas P. Duffey , William N. Partlo , Richard L. Sandstrom , Paul C. Melcher , David M. Johns , Robert B. Saethre , Vladimir B. Fleurov , Richard M. Ness , Curtis L. Rettig , Robert A. Shannon , Richard C. Ujazdowski , Shahryar Rokni , Xiaojiang J. Pan , Vladimir Kulgeyko , Scott T. Smith , Stuart L. Anderson , John M. Algots , Ronald L. Spangler , Igor V. Fomenkov
发明人： Peter C. Newman , Thomas P. Duffey , William N. Partlo , Richard L. Sandstrom , Paul C. Melcher , David M. Johns , Robert B. Saethre , Vladimir B. Fleurov , Richard M. Ness , Curtis L. Rettig , Robert A. Shannon , Richard C. Ujazdowski , Shahryar Rokni , Xiaojiang J. Pan , Vladimir Kulgeyko , Scott T. Smith , Stuart L. Anderson , John M. Algots , Ronald L. Spangler , Igor V. Fomenkov
IPC分类号： H01S322
CPC分类号： H01S3/225 , G01J1/4257 , G01J3/027 , G01J9/0246 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70483 , G03F7/70575 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0387 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/09702 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2308
摘要： The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.
摘要翻译：本发明提供了一种准分子激光器，其能够以约5mJ或更大的脉冲能量产生脉冲速率约为4000Hz的高质量脉冲激光束。优选的实施方案是专门设计为用于集成电路光刻的光源的ArF准分子激光器。具有特殊软件的改进型波长测量仪监测输出光束参数，并控制非常快的PZT驱动调光镜和脉冲功率充电电压，以将波长和脉冲能量保持在所需的极限内。在优选实施例中，两个风扇马达驱动单个切向风扇，其提供足够的气流以在脉冲之间的大约0.25毫秒期间从放电区域清除放电碎片。

6. 发明授权

US06466602B1 Gas discharge laser long life electrodes 有权
标题翻译：气体放电激光长寿命电极
公开(公告)号：US06466602B1
公开(公告)日：2002-10-15
申请号：US09590961
申请日：2000-06-09
申请人： Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
发明人： Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/041 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译：一种气体放电激光器，其具有具有两个细长可蚀电极元件的激光室，每个具有可蚀刻部分和具有支撑件的电极，其配置为使放电区域激光气体湍流最小化，并且电极元件被配置为允许在超过80亿个脉冲而不会引起电极元件之间放电形状的显着变化。脉冲功率系统以至少2KHz的速率提供至少2J的电脉冲。鼓风机以至少2m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。

7. 发明授权

US5813846A Low NOx flat flame burner 失效
标题翻译：低NOx平火焰燃烧器
公开(公告)号：US5813846A
公开(公告)日：1998-09-29
申请号：US832570
申请日：1997-04-02
申请人： John N. Newby , Robert A. Shannon , Keith J. Nieszczur
发明人： John N. Newby , Robert A. Shannon , Keith J. Nieszczur
IPC分类号： F23D14/84 , F23C6/04 , F23C99/00 , F23D14/22 , F23D14/24 , F23M3/00
CPC分类号： F23D14/24 , F23C6/047 , F23C2201/20 , F23D2900/00011
摘要： A flat flame burner is disclosed having flow passages for admitting fuel and air to a burner tile. A structure for producing a rotational flow cooperates with a divergent burner tile in order to produce a radially-divergent flame with a very small axial component and a high degree of entrainment of inert combustion products in a furnace. A portion of the fuel is injected into the entrained furnace products, in order to suppress the rate of combustion, so as to produce an ultra low NOx flat flame burner. The present invention also permits greater versatility and improved operability over previous flat flame burners.
摘要翻译：公开了一种扁平火焰燃烧器，其具有用于将燃料和空气引入燃烧器砖的流动通道。用于产生旋转流的结构与发散燃烧器瓦协作，以便产生径向发散的火焰，其具有极小的轴向分量和在炉中高惰性燃烧产物的夹带。为了抑制燃烧速度，将一部分燃料注入到夹带的炉子产物中，以产生超低NOx平均火焰燃烧器。本发明还允许比以前的平面火焰燃烧器更大的通用性和改进的可操作性。

8. 发明授权

US4577278A Method and system for controlling a selected zone in a fuel fired furnace 失效
标题翻译：用于控制燃料燃烧炉中的选定区域的方法和系统
公开(公告)号：US4577278A
公开(公告)日：1986-03-18
申请号：US514921
申请日：1983-07-18
申请人： Robert A. Shannon
发明人： Robert A. Shannon
IPC分类号： C21D11/00 , F27B9/36 , F27B9/40 , G05D23/22 , F27D3/00
CPC分类号： C21D11/00 , F27B9/40 , G05D23/1934 , G05D23/22 , F27B2009/3638 , F27M2001/1539
摘要： A method and system is provided for controlling a selected zone in a fuel fired furnace of the type used for heating work as it moves through the zone from an entrant end to an exit end. The method and system includes providing a fuel fired burner at the exit end for propelling a flame toward the entrant end of the zone, controlling the firing rate or capacity of this flame in accordance with the temperature of the work adjacent the exit end of the zone, continuously establishing a gas temperature for the entrant end of the zone corresponding to the firing rate of the flame and then continuously controlling the length of the flame to obtain the established gas temperature at the entrant end of the zone. The combined adjustment of capacity and flame length in accordance with the measured temperature at the entrant end of the zone controls the heating profile through the zone and increases the efficiency of the heating zone. This method and system can be used in one or more zones of a multiple zone throughput gas fired furnace.
摘要翻译：提供了一种方法和系统，用于控制在用于加热工作的类型的燃料燃烧炉中的选定区域，当它从入口端移动到出口端时通过该区域。该方法和系统包括在出口端处提供燃料燃烧的燃烧器，用于将火焰推向区域的入口端，根据邻近出口端的工件的温度来控制该火焰的燃烧速率或容量根据火焰的燃烧速率连续地建立区域入口端的气体温度，然后连续地控制火焰的长度，以获得在区域进入端的建立的气体温度。根据区域入口端的测量温度对容量和火焰长度的组合调整控制通过该区域的加热曲线，并提高加热区的效率。该方法和系统可用于多区域吞吐量燃气炉的一个或多个区域。

9. 发明授权

US4453915A Method and apparatus for underfiring oil country tube reheat furnaces 失效
标题翻译：石油管道再热炉燃烧的方法和装置
公开(公告)号：US4453915A
公开(公告)日：1984-06-12
申请号：US411497
申请日：1982-08-25
申请人： Harry P. Finke , Robert A. Shannon
发明人： Harry P. Finke , Robert A. Shannon
IPC分类号： F27B9/20 , F27B9/30 , F27B9/36 , F27D3/02 , F27D99/00 , F27D3/00 , F27B9/14
CPC分类号： F27D99/0033 , F27B9/201 , F27B9/3005 , F27B9/36 , F27D3/022
摘要： The improvement in a walking beam oil country tube reheat furnace comprises a first row of burners positioned in spaced relationship and transverse the furnace hearth with each of the burners containing a refractory housing positioned in the limited space between the walking beam pass line and the hearth of the furnace. The burner includes a burner body and a centrally disposed fuel tube so as to define an annular air chamber thereabout. The burner includes a 90.degree. bend so as to fire in parallel relationship to the pass line. The method of retrofitting a top fired walking beam furnace includes inserting at least one unitized bung of said spaced burners through the furnace floor and into the space between the pass line and floor and firing the burners in parallel relationship with the pass line.
摘要翻译：步行梁式油管式再热炉的改进包括第一排燃烧器，其间隔开关并且横向于炉膛，每个燃烧器包含位于步行梁通过线和炉膛的有限空间内的耐火材料壳体炉子。燃烧器包括燃烧器本体和居中设置的燃料管，以便在其周围形成环形空气室。燃烧器包括90度弯曲，以便与通过线平行地起火。改装顶烧式步进梁炉的方法包括将所述分开的燃烧器的至少一个单元化的塞子通过炉底插入到通过线和地板之间的空间中，并将燃烧器与通过线并联起来。

10. 发明授权

US6113386A Method and apparatus for uniformly heating a furnace 有权
标题翻译：用于均匀加热炉的方法和装置
公开(公告)号：US6113386A
公开(公告)日：2000-09-05
申请号：US169634
申请日：1998-10-09
申请人： Robert A. Shannon , Lawrence Vincent Rich , Frank Christian Gilbert
发明人： Robert A. Shannon , Lawrence Vincent Rich , Frank Christian Gilbert
IPC分类号： C21D1/52 , C21D9/00 , F27B9/30 , F27B9/36 , F27B9/40 , F27D99/00 , F27B9/28
CPC分类号： F27B9/36 , C21D1/52 , C21D9/0081 , F27B9/40 , F27B2009/3607 , F27B9/3011 , F27D2099/0058
摘要： A method and apparatus is disclosed for heating metal billets or other separate pieces of metal in a continuous furnace using two different burner systems. The primary burner system provides the majority of available heat at relatively high flame temperatures. The secondary high velocity burner system extrains how furnace products of combustion that impinge around on the load. Thus, heat transfer and temperature uniformity is improved by forcing hot gases between the metal pieces.
摘要翻译：公开了一种用于使用两种不同的燃烧器系统在连续炉中加热金属坯料或其它单独的金属片的方法和装置。主燃烧器系统在较高火焰温度下提供大部分可用的热量。二次高速燃烧器系统将如何在燃料上产生的燃烧物质如何在负载上撞击。因此，通过在金属片之间强迫热气体来提高热传递和温度均匀性。

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