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1. 发明授权

US07346093B2 DUV light source optical element improvements 有权
标题翻译： DUV光源光学元件改进
公开(公告)号：US07346093B2
公开(公告)日：2008-03-18
申请号：US10808157
申请日：2004-03-23
申请人： Richard L. Sandstrom , John Martin Algots , Joshua C. Brown , Raymond F. Cybulski , John Dunlop , James K. Howey , Richard G. Morton , Xiaojiang Pan , William N. Partlo , Firas F. Putris , Tom A. Watson , Thomas A. Yager
发明人： Richard L. Sandstrom , John Martin Algots , Joshua C. Brown , Raymond F. Cybulski , John Dunlop , James K. Howey , Richard G. Morton , Xiaojiang Pan , William N. Partlo , Firas F. Putris , Tom A. Watson , Thomas A. Yager
IPC分类号： H01S3/08 , H01S3/22
CPC分类号： H01S3/02 , G01J1/429 , G01J9/02 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
摘要翻译：公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座从柔性的安装框架开始，挠曲臂将挠性件附接到安装框架。该装置可以包括具有细长杆的挠曲力机构。力机构可以预应力挠曲。镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。光栅可以使用电磁感应元件或磁敏元件进行主动调谐。可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

2. 发明授权

US06904073B2 High power deep ultraviolet laser with long life optics 有权
标题翻译：大功率深紫外线激光器，寿命长
公开(公告)号：US06904073B2
公开(公告)日：2005-06-07
申请号：US10384967
申请日：2003-03-08
申请人： Thomas A. Yager , William N. Partio , Richard L. Sandstrom , Xiaojiang Pan , John T. Melchior , John Martin Algots , Matthew Ball , Alexander I. Ershov , Vladimir Fleurov , Walter D. Gillespie , Holger K. Glatzel , Leonard Lublin , Elizabeth Marsh , Richard G. Morton , Richard C. Ujazdowski , David J. Warkentin , R. Kyle Webb
发明人： Thomas A. Yager , William N. Partio , Richard L. Sandstrom , Xiaojiang Pan , John T. Melchior , John Martin Algots , Matthew Ball , Alexander I. Ershov , Vladimir Fleurov , Walter D. Gillespie , Holger K. Glatzel , Leonard Lublin , Elizabeth Marsh , Richard G. Morton , Richard C. Ujazdowski , David J. Warkentin , R. Kyle Webb
IPC分类号： G03F7/20 , H01S3/00 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/0943 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225 , H01S3/23
CPC分类号： H01S3/2333 , G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/005 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2366
摘要： The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities. Techniques and components are disclosed for minimizing the potential for optical damage and for reducing the pulse energy density to less than 100×10−6 J/cm3. Important improvements described in this specification have been grouped into the following subject matter categories: (1) Solution to CaF2 surface damage discovered by Applicants, (2) description of a high power ArF MOPA laser system, (3) description of beam delivery units, (4) polarization considerations (5) a high speed water-cooled auto shutter energy detector module and (6) other improvements.
摘要翻译：本发明提供了用于产生高重复率高功率输出光束的模块化高重复率紫外线气体放电激光器系统的长寿命光学器件。本发明包括由申请人发现的位于原型激光系统的输出光束的高脉冲强度部分中的CaF 2光学器件的表面损伤问题的解决方案。实施例包括用于束传送数十亿个输出激光脉冲的光束指向控制的封闭和清除的光束路径。本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲，平均输出脉冲强度大于1.75×6 /瓦/ cm 2，并且与与在这些脉冲强度中仅仅几分钟之后失效的现有技术部件和模块相比，数十亿个脉冲的峰值强度或更大的3.5×10 6 / cm 2 / SUP。公开了用于最小化光学损伤的可能性和将脉冲能量密度降低到小于100×10 -6 / cm 3的技术和部件。本说明书中描述的重要改进已分为以下主题类别：（1）由申请人发现的CaF 2 2表面损伤的解决方案，（2）高功率ArF MOPA激光系统的描述（ 3）光束传输单元的描述，（4）偏振考虑（5）高速水冷自动快门能量检测器模块和（6）其他改进。

3. 发明授权

US07088758B2 Relax gas discharge laser lithography light source 有权
标题翻译：放气放电激光光刻光源
公开(公告)号：US07088758B2
公开(公告)日：2006-08-08
申请号：US10956784
申请日：2004-10-01
申请人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Thomas A. Yager , Alexander I. Ershov , Robert J. Rafac , German E. Rylov
发明人： Richard L. Sandstrom , William N. Partlo , Daniel J. W. Brown , Thomas A. Yager , Alexander I. Ershov , Robert J. Rafac , German E. Rylov
IPC分类号： H01S3/22
CPC分类号： G01J1/429 , B23K26/0622 , B23K2101/40 , G01J9/02 , G02B26/002 , G02B26/0875 , G03F7/70041 , G03F7/70575 , H01S3/005 , H01S3/0057 , H01S3/1055 , H01S3/225
摘要： An apparatus and method are disclosed for operating a narrow band short pulse duration gas discharge laser output light pulse beam producing system, producing a beam comprising laser output light pulses at a selected pulse repetition rate, which may comprise: a dispersive center wavelength selection optic selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a tuning mechanism operative to select at least one angle of incidence of a first spatially defined portion of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic; and, the tuning mechanism comprising a variably refractive optical element defining a plurality of refractive angular displacements of the first spatially defined portion of the laser light pulse beam passing through the variably refractive optical element at one of a plurality of positions of incidence of the laser light pulse beam on the variably refractive optical element. The variably refractive optical element may comprise: a first generally flat face defining a surface of incidence for the laser light pulse beam; and, a second multifaceted or curved face defining a plurality of generally flat surfaces of exit or a continuously varying surface of exit for the laser light beam. Other aspects of pulse parameter metrology and pulse modulation control, including in response to signals from the utilization tool are disclosed, e.g., relating to proper dose control with differing center wavelength spectra.
摘要翻译：公开了一种用于操作窄带短脉冲持续时间气体放电激光输出光脉冲束产生系统的装置和方法，产生包括选定脉冲重复频率的激光输出光脉冲的光束，其可以包括：色散中心波长选择光学选择用于每个脉冲的至少一个中心波长至少部分地由分散波长选择光学器件上包含相应脉冲的激光束的入射角确定; 调谐机构，用于在色散中心波长选择光学器件上选择包含相应脉冲的激光束脉冲光束的第一空间限定部分的至少一个入射角; 并且所述调谐机构包括可变折射光学元件，所述可变折射光学元件限定所述激光束的所述第一空间限定部分的多个折射角位移通过所述可变折射光学元件在所述激光的入射的多个位置中的一个位置脉冲光束在可变折射光学元件上。可变折射光学元件可以包括：限定用于激光束脉冲束的入射面的第一大致平坦的面; 以及限定用于激光束的出口的多个大致平坦的表面或出口的连续变化的表面的第二多面或弯曲面。脉冲参数测量和脉冲调制控制的其它方面包括响应来自利用工具的信号，例如涉及具有不同中心波长光谱的适当剂量控制。

4. 发明授权

US09640846B2 Air cathode tubes for rechargeable metal air batteries 有权
公开(公告)号：US09640846B2
公开(公告)日：2017-05-02
申请号：US12999301
申请日：2010-09-28
申请人： Thomas A. Yager , Seth Adrian Miller
发明人： Thomas A. Yager , Seth Adrian Miller
IPC分类号： H01M12/08 , H01M4/86 , H01M4/90 , H01M4/92
CPC分类号： H01M12/08 , H01M4/8626 , H01M4/9016 , H01M4/9041 , H01M4/92 , Y02E60/128
摘要： Implementations and techniques are generally disclosed are generally described for providing a metal air batter comprising, a cathode tube included in the metal air battery, the cathode tube having a conductive outer surface and a hydrophobic inner surface configured to define a tube wall there between, wherein the tube wall includes polymeric material and an anode material that surrounds the cathode tube.

5. 发明授权

US08951682B2 Rechargeable zinc air battery and anode 有权
标题翻译：可充电锌空气电池和阳极
公开(公告)号：US08951682B2
公开(公告)日：2015-02-10
申请号：US12999933
申请日：2010-09-30
申请人： Thomas A. Yager
发明人： Thomas A. Yager
IPC分类号： H01M8/22 , H01M4/42
CPC分类号： H01M12/08 , H01M4/42 , Y02E60/128 , Y10T29/49115
摘要： Implementations and techniques for rechargeable zinc air batteries are generally disclosed.
摘要翻译：通常公开了可再充电锌空气电池的实施和技术。

6. 发明授权

US08492753B2 Directionally recrystallized graphene growth substrates 有权
标题翻译：定向重结晶石墨烯生长底物
公开(公告)号：US08492753B2
公开(公告)日：2013-07-23
申请号：US13129371
申请日：2010-09-28
申请人： Thomas A. Yager
发明人： Thomas A. Yager
IPC分类号： H01L29/08 , H01L35/24 , H01L51/00 , H01L21/00 , H01L51/40
CPC分类号： H01L21/02527 , B82Y30/00 , B82Y40/00 , C01B32/186 , C01B2204/32 , C23C16/0281 , C23C16/26 , C23C16/52 , H01L21/02491 , H01L21/02658
摘要： Implementations and techniques for producing substrates suitable for growing graphene monolayers are generally disclosed.
摘要翻译：通常公开了用于生产适合于生长石墨烯单层的基材的实施方案和技术。

7. 发明申请

US20130021718A1 CHEMICAL VAPOR DEPOSITION GRAPHENE FOAM ELECTRODES FOR PSEUDO-CAPACITORS 有权
标题翻译：化学蒸气沉积石墨电极用于PSEUDO-CAPACITORS
公开(公告)号：US20130021718A1
公开(公告)日：2013-01-24
申请号：US13519569
申请日：2011-04-20
申请人： Thomas A. Yager
发明人： Thomas A. Yager
IPC分类号： H01G9/042 , H01G13/00 , H01G9/058 , H01G9/048 , H01G9/00 , H01G9/155
CPC分类号： H01G11/36 , B82Y30/00 , B82Y40/00 , C01B32/186 , C01P2004/30 , C01P2006/12 , H01G11/24 , H01G11/46 , H01G11/86 , Y02E60/13
摘要： Technologies are generally described for a porous graphene electrode material is described herein that may incorporate a three-dimensional open-cell graphene structure fabricated via chemical vapor deposition onto a metal foam. After the graphene is deposited, the metal foam may be dissolved, leaving a three-dimensional open-cell graphene structure that may include single or few layer graphene. Pseudo-capacitive materials, such as RuO2, Fe3O4, or MnO2, may be deposited within the pores of the a three-dimensional open-cell graphene structure to form the porous graphene electrode material. The porous graphene electrode material may have a specific capacitance comparable to chemically modified graphene (CMG) electrodes. The porous graphene electrode material may also have a conductivity greater than CMG electrodes of equivalent surface area. Use of the porous graphene electrode material in capacitors may result in siginificant improvements in specific power compared to CMG based capacitors.
摘要翻译：一般描述了一种多孔石墨烯电极材料的技术，这里描述了可以将通过化学气相沉积制造的三维开孔石墨烯结构结合到金属泡沫上。在沉积石墨烯之后，可以溶解金属泡沫，留下可以包括单层或几层石墨烯的三维开孔石墨烯结构。伪电容材料，例如RuO 2，Fe 3 O 4或MnO 2可以沉积在三维开孔电池石墨烯结构的孔内，以形成多孔石墨烯电极材料。多孔石墨烯电极材料可以具有与化学改性石墨烯（CMG）电极相当的比电容。多孔石墨烯电极材料也可以具有大于等效表面积的CMG电极的导电率。与基于CMG的电容器相比，在电容器中使用多孔石墨烯电极材料可能导致比功率的显着改善。

8. 发明申请

US20120263921A1 OPTICAL LITHOGRAPHY USING GRAPHENE CONTRAST ENHANCEMENT LAYER 有权
标题翻译：使用石墨对比增强层的光学平版印刷
公开(公告)号：US20120263921A1
公开(公告)日：2012-10-18
申请号：US12999141
申请日：2010-09-29
申请人： Thomas A. Yager , Seth Adrian Miller
发明人： Thomas A. Yager , Seth Adrian Miller
IPC分类号： G03F7/20 , G03B27/42 , B32B3/30 , B82Y30/00 , B82Y40/00
CPC分类号： G03F7/26 , G03F7/091 , G03F7/095 , Y10T428/12625 , Y10T428/24612 , Y10T428/24851
摘要： Technologies are generally described for methods, systems, and structures that include patterns formed by optical lithography. In some example methods, a photoresist layer is applied to a substrate, and a graphene layer can be applied to the photoresist layer. Light can be applied through a mask to the graphene layer, where the mask includes a pattern. The light can form the pattern on the graphene layer such that the pattern forms on the photoresist layer.
摘要翻译：通常描述包括通过光学光刻形成的图案的方法，系统和结构的技术。在一些示例性方法中，将光致抗蚀剂层施加到基底上，并且可以将石墨烯层施加到光致抗蚀剂层。光可以通过掩模施加到石墨烯层，其中掩模包括图案。光可以在石墨烯层上形成图案，使得在光致抗蚀剂层上形成图案。

9. 发明申请

US20120261073A1 CONFORMING GRAPHENE TO A TARGET SUBSTRATE 审中-公开
标题翻译：将石墨结合到目标基底
公开(公告)号：US20120261073A1
公开(公告)日：2012-10-18
申请号：US13319038
申请日：2011-04-13
申请人： Thomas A. Yager
发明人： Thomas A. Yager
IPC分类号： C23F1/08
CPC分类号： C01B32/186 , B82Y30/00 , B82Y40/00 , C01B32/194 , C23C16/26 , C23C16/56 , C23F1/08
摘要： Implementations and techniques for conforming a layer of graphene to a target substrate are generally disclosed.
摘要翻译：通常公开了将石墨烯层与目标基板一致的实施方案和技术。

10. 发明申请

US20120082907A1 Rechargeable Zinc Air Battery and Anode 有权
标题翻译：可充电锌空气电池和阳极
公开(公告)号：US20120082907A1
公开(公告)日：2012-04-05
申请号：US12999933
申请日：2010-09-30
申请人： Thomas A. Yager
发明人： Thomas A. Yager
IPC分类号： H01M8/22 , H01M4/42 , H01M8/00
CPC分类号： H01M12/08 , H01M4/42 , Y02E60/128 , Y10T29/49115
摘要： Implementations and techniques for rechargeable zinc air batteries are generally disclosed.
摘要翻译：通常公开了可再充电锌空气电池的实施和技术。

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