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1. 发明授权

US11726341B2 Method and system for multispectral beam combiner 有权
公开(公告)号：US11726341B2
公开(公告)日：2023-08-15
申请号：US17159313
申请日：2021-01-27
申请人： RAM Photonics LLC
发明人： John R. Marciante
IPC分类号： G02B27/10 , H01S3/00 , H01S3/23 , G02B27/30 , G02B17/08 , G02B27/42 , H01S3/067 , H01S3/07 , H01S3/08 , H01S3/081
CPC分类号： G02B27/1006 , G02B17/086 , G02B27/30 , G02B27/4233 , H01S3/0675 , H01S3/07 , H01S3/08059 , H01S3/2391 , H01S3/005 , H01S3/0812 , H01S3/0815
摘要： A spectral beam combining system includes a plurality of input fibers and a prism having a curved input surface. The plurality of input fibers are attached to the curved input surface. The spectral beam combining system also includes an immersion grating defined on a second surface of the prism, a protective cap disposed over the immersion grating, and an output surface.

2. 发明申请

US20180097334A1 WIDELY TUNABLE INFRARED SOURCE SYSTEM AND METHOD 审中-公开
公开(公告)号：US20180097334A1
公开(公告)日：2018-04-05
申请号：US15800429
申请日：2017-11-01
申请人： Bien Chann , Robin Huang , Parviz Tayebati
发明人： Bien Chann , Robin Huang , Parviz Tayebati
IPC分类号： H01S3/105
CPC分类号： H01S3/105 , B01L3/50851 , B01L2200/147 , B01L2300/046 , B01L2300/0654 , B01L2300/0851 , G01N1/31 , G01N1/38 , H01S3/0085 , H01S3/0635 , H01S3/08009 , H01S3/0812 , H01S3/10 , H01S3/10023 , H01S3/101 , H01S3/1055 , H01S5/0071 , H01S5/0085 , H01S5/02288 , H01S5/02292 , H01S5/06253 , H01S5/143 , H01S5/4012 , H01S2301/20
摘要： A system and method for tuning and infrared source laser in the Mid-IR wavelength range. The system and method comprising, at least, a plurality of individually tunable emitters, each emitter emitting a beam having a unique wavelength, a grating, a mirror positioned after the grating to receive at least one refracted order of light of at least one beam and to redirect the beam back towards the grating, and a micro-electro-mechanical systems device containing a plurality of adjustable micro-mirrors.

3. 发明申请

US20150009508A1 WAVELENGTH-TUNABLE LIGHT SOURCE 有权
标题翻译：波长可调光源
公开(公告)号：US20150009508A1
公开(公告)日：2015-01-08
申请号：US14372946
申请日：2013-01-09
申请人： EXALOS AG
发明人： Adrian Bachmann , Marcus Dulk
IPC分类号： H01S3/10 , H01S5/30 , G01B9/02
CPC分类号： H01S3/10023 , G01B9/02091 , H01S3/07 , H01S3/08059 , H01S3/0812 , H01S3/0826 , H01S3/105 , H01S3/106 , H01S5/02248 , H01S5/141 , H01S5/142 , H01S5/30 , H01S5/4031
摘要： An external cavity semiconductor laser light source comprises includes a semiconductor gain device operable to provide light amplification; a wavelength selection element including a diffraction grating; and light re-directors. The gain device, light re-directors and grating are arranged so that an optical resonator is established for light portions emitted by the gain device and diffracted by the diffraction grating. The resonator is an external cavity laser resonator. The light source is capable of varying an angle of incidence of radiation circulating in the resonator onto wavelength selection element to select a resonator radiation wavelength dependent on the angle of incidence.
摘要翻译：外腔半导体激光源包括可操作以提供光放大的半导体增益器件; 包括衍射光栅的波长选择元件; 和轻重任董事。增益器件，光导向器和光栅被布置成使得由增益器件发射并由衍射光栅衍射的光部分建立光学谐振器。谐振器是外腔激光谐振器。光源能够改变在谐振器中循环的波长入射到波长选择元件上的入射角，以选择取决于入射角的谐振器辐射波长。

4. 发明申请

US20120195342A1 Configuration for Multiwavelength Emission with a CO2 Laser 审中-公开
标题翻译：使用CO2激光器进行多波长发射的配置
公开(公告)号：US20120195342A1
公开(公告)日：2012-08-02
申请号：US13017739
申请日：2011-01-31
申请人： David B. Cohn
发明人： David B. Cohn
IPC分类号： H01S3/03
CPC分类号： H01S3/076 , H01S3/08045 , H01S3/0812 , H01S3/0816 , H01S3/0971 , H01S3/1055 , H01S3/2232
摘要： Multiple independent electrode sets of a CO2 gas laser are arranged in series within a single optical resonator with each electrode set energized by an independent power source. The total length of the electrode sets together and their maximum power are optimized for output energy at the weakest laser wavelength, and one or several of the independent electrode sets is turned off and/or their power reduced to achieve laser output on strong lines without damage to the laser optics. The total resonator length is chosen to produce an output laser beam with single transverse mode.
摘要翻译： CO 2气体激光器的多个独立电极组被串联布置在单个光学谐振器内，每个电极组由独立的电源激励。将电极的总长度集中在一起，并且其最大功率针对最弱激光波长处的输出能量进行了优化，并且独立电极组中的一个或几个被关闭和/或其功率降低以在强线上实现激光输出而没有损坏到激光光学器件。选择总谐振器长度以产生具有单横模的输出激光束。

5. 发明申请

US20120081769A1 Ring Resonator with a Holographic Reflector 有权
标题翻译：环形谐振器与全息反射器
公开(公告)号：US20120081769A1
公开(公告)日：2012-04-05
申请号：US13251794
申请日：2011-10-03
申请人： Alex Dergachev
发明人： Alex Dergachev
IPC分类号： G03H1/02
CPC分类号： G02B5/32 , H01S3/08031 , H01S3/0812 , H01S3/083 , H01S3/113
摘要： A laser device includes a pump source, a ring resonator, a gain medium disposed in the ring resonator, and a holographic output coupler to partially transmit the laser radiation. The gain medium is configured to receive radiation from the pump source and generate laser radiation.
摘要翻译：激光装置包括泵浦源，环形谐振器，设置在环形谐振器中的增益介质和全息输出耦合器以部分地透射激光辐射。增益介质被配置为接收来自泵浦源的辐射并产生激光辐射。

6. 发明申请

US20070014319A1 Continuously Tunable External Cavity Diode Laser Sources With High Tuning And Switching Rates And Extended Tuning Ranges 审中-公开
标题翻译：连续可调谐的外腔二极管激光源具有高调谐和切换速率和扩展调谐范围
公开(公告)号：US20070014319A1
公开(公告)日：2007-01-18
申请号：US11457025
申请日：2006-07-12
申请人： Henry Hill , Steven Hamann , Peter Shifflett
发明人： Henry Hill , Steven Hamann , Peter Shifflett
IPC分类号： H01S3/10 , H01S3/08
CPC分类号： H01S5/141 , H01S3/08059 , H01S3/0811 , H01S3/0812 , H01S3/107
摘要： An external cavity structure including: a light source for generating a light beam; a dispersive system which in combination with the light source defines a cavity, the dispersive system for directing a selected wavelength of the light beam back into the light source, the dispersive system including a grating for selecting said wavelength of the light beam; and a beam-conditioner positioned within the cavity along a light path between the light source and the dispersive system, the beam conditioner including a beam deflecting element for changing the direction of propagation of the light beam as that light beam that travels between the light source and the dispersive system.
摘要翻译：一种外部空腔结构，包括：用于产生光束的光源; 与光源组合的分散系统限定空腔，用于将所述光束的选定波长引导回光源的色散系统，所述色散系统包括用于选择所述光束的所述波长的光栅; 以及沿着所述光源和所述分散系统之间的光路定位在所述空腔内的光束调节器，所述光束调节器包括用于改变所述光束的传播方向的光束偏转元件，所述光束偏转元件作为在所述光源和分散体系。

7. 发明申请

US20060198417A1 Apparatus and method for adjusting external-cavity lasers 有权
公开(公告)号：US20060198417A1
公开(公告)日：2006-09-07
申请号：US11352189
申请日：2006-02-10
申请人： George Clifford , Geraint Owen
发明人： George Clifford , Geraint Owen
IPC分类号： H01S3/08 , H01S3/10
CPC分类号： H01S5/02248 , H01S3/0812 , H01S3/105 , H01S5/143
摘要： Adjustment of a tunable external-cavity laser is simplified by incorporating a mount that includes a base, a main body, a reflecting surface, a diffracting surface and a hinge coupling the main body to the base. The laser additionally includes a light source, a converging lens located to receive light from the light source, a tuning mirror and a pivoting arm on which the tuning mirror is mounted. The main body is bounded in part by two plane, external surfaces orthogonal to a common reference plane and angularly separated from one another by an angle. The reflecting surface has a spatial orientation defined by one of the external surfaces and is arranged to receive light from the lens. The diffracting surface has a spatial orientation defined by the other of the external surfaces, and diffracts light received from the reflecting surface towards the tuning mirror. The hinge is located opposite the angle and parallel to the reference plane.

8. 发明授权

US07031353B2 Apparatus and method for adjusting external-cavity lasers 有权
标题翻译：用于调整外腔激光器的装置和方法
公开(公告)号：US07031353B2
公开(公告)日：2006-04-18
申请号：US10374169
申请日：2003-02-25
申请人： George M. Clifford, Jr. , Geraint Owen
发明人： George M. Clifford, Jr. , Geraint Owen
IPC分类号： H01S3/10
CPC分类号： H01S5/02248 , H01S3/0812 , H01S3/105 , H01S5/143
摘要： Adjustment of a tunable external-cavity laser is simplified by incorporating a mount that includes a base, a main body, a reflecting surface, a diffracting surface and a hinge coupling the main body to the base. The laser additionally includes a light source, a converging lens located to receive light from the light source, a tuning mirror and a pivoting arm on which the tuning mirror is mounted. The main body is bounded in part by two plane, external surfaces orthogonal to a common reference plane and angularly separated from one another by an angle. The reflecting surface has a spatial orientation defined by one of the external surfaces and is arranged to receive light from the lens. The diffracting surface has a spatial orientation defined by the other of the external surfaces, and diffracts light received from the reflecting surface towards the tuning mirror. The hinge is located opposite the angle and parallel to the reference plane.
摘要翻译：通过结合包括底座，主体，反射表面，衍射表面和将主体联接到基座的铰链的安装座来简化可调谐外腔激光器的调整。激光器还包括光源，位于接收来自光源的光的会聚透镜，调光镜和安装调谐镜的枢转臂。主体部分地由两个平面限定，外表面与公共参考平面正交并且彼此成角度地分开一角度。反射表面具有由外表面中的一个限定的空间取向，并且被布置成接收来自透镜的光。衍射表面具有由另一个外表面限定的空间取向，并且将从反射表面接收的光衍射到调谐镜。铰链与角度相反并平行于参考平面。

9. 发明申请

US20050068997A1 Laser spectral engineering for lithographic process 有权
公开(公告)号：US20050068997A1
公开(公告)日：2005-03-31
申请号：US10915517
申请日：2004-08-09
申请人： Ronald Spangler , Jacob Lipcon , John Rule , Robert Jacques , Armen Kroyan , Ivan Lalovic , Igor Fomenkov , John Algots
发明人： Ronald Spangler , Jacob Lipcon , John Rule , Robert Jacques , Armen Kroyan , Ivan Lalovic , Igor Fomenkov , John Algots
IPC分类号： B41C20060101 , B41C1/00 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/081 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

10. 发明申请

US20050041701A1 Laser spectral engineering for lithographic process 有权
标题翻译：激光光谱工程用于光刻工艺
公开(公告)号：US20050041701A1
公开(公告)日：2005-02-24
申请号：US10912933
申请日：2004-08-05
申请人： Ronald Spangler , Jacob Lipcon , John Rule , Robert Jacques , Armen Kroyan , Ivan Lalovic , Igor Fomenkov , John Algots
发明人： Ronald Spangler , Jacob Lipcon , John Rule , Robert Jacques , Armen Kroyan , Ivan Lalovic , Igor Fomenkov , John Algots
IPC分类号： B41C20060101 , B41C1/00 , G03F7/20 , H01L21/027 , H01S3/036 , H01S3/038 , H01S3/04 , H01S3/041 , H01S3/08 , H01S3/081 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/10 , H01S3/102 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/11 , H01S3/13 , H01S3/134 , H01S3/137 , H01S3/139 , H01S3/22 , H01S3/223 , H01S3/225
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/0812 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/13 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258
摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.
摘要翻译：一种称为光电工程的集成电路光刻技术，用于放电激光器的带宽控制。在优选的方法中，使用计算机模型来模拟光刻参数以确定产生所需光刻结果所需的所需激光光谱。然后使用快速响应的调谐机构来调整脉冲串中的激光脉冲的中心波长，以实现接近所需激光光谱的脉冲串的集成光谱。控制激光束带宽以产生具有至少两个光谱峰值的有效光束光谱，以便在光致抗蚀剂膜中产生改进的图案分辨率。提供了具有至少一个压电驱动器和具有小于约2.0毫秒的时间响应的快速带宽检测控制系统的线窄设备。在优选实施例中，波长调谐镜以与激光器的重复频率相位的每秒超过500次抖动的抖动速率抖动。在一种情况下，用方波信号驱动压电驱动，在第二种情况下，它是用正弦波信号驱动的。在另一个实施例中，最大位移与激光脉冲在一对一的基础上匹配，以便为一系列激光脉冲产生具有两个峰值的所需平均光谱。其它优选实施例利用三个独立的波长调谐位置，产生具有三个独立峰值的光谱。

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