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1. 发明授权

US5748656A Laser having improved beam quality and reduced operating cost 失效
标题翻译：激光器具有改善的光束质量和降低的操作成本
公开(公告)号：US5748656A
公开(公告)日：1998-05-05
申请号：US583302
申请日：1996-01-05
申请人： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
发明人： Tom A. Watson , William N. Partlo , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
IPC分类号： H01S3/03 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/225 , H01S3/045
CPC分类号： H01S3/036 , H01S3/04 , H01S3/041 , F28D2021/0077 , H01S3/225
摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
摘要翻译：公开了一种可用于例如光刻或医疗手术中的激光。在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。还提供了减少调节空气量的方法。在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率热交换器保持激光温度恒定。公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

2. 发明授权

US6021150A Laser having baffled enclosure 失效
标题翻译：激光具有挡板外壳
公开(公告)号：US6021150A
公开(公告)日：2000-02-01
申请号：US41832
申请日：1998-03-12
申请人： William N. Partio , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
发明人： William N. Partio , Donald G. Larson , Igor V. Fomenkov , Anthony J. de Ruyter , Palash P. Das
IPC分类号： H01S3/03 , H01S3/036 , H01S3/04 , H01S3/041 , H01S3/225 , H01S3/22
CPC分类号： H01S3/036 , H01S3/04 , H01S3/041 , F28D2021/0077 , H01S3/225
摘要： Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
摘要翻译：公开了一种可用于例如光刻或医疗手术中的激光。在一个实施例中，激光器包括放电室和发热电子器件，其封闭在挡板外壳中，其需要较少的冷却空气以可靠地冷却外壳中的部件比先前的未封闭的外壳。还提供了减少调节空气量的方法。在另一个实施例中，激光器具有热交换系统，其响应于激光气体温度的变化而快速作用，通过调节调节通过热交换器的水流的流量比例阀，由此通过所述热交换系统提供连续可变的热交换速率热交换器保持激光温度恒定。公开了提供激光束并提高激光束的均匀性的方法，以及利用激光的光刻方法和本发明的方法。

3. 发明授权

US5596590A Beam diverting shutter for a laser beam 失效
标题翻译：用于激光束的光束转向快门
公开(公告)号：US5596590A
公开(公告)日：1997-01-21
申请号：US591754
申请日：1996-01-25
申请人： Anthony J. de Ruyter , David W. Means
发明人： Anthony J. de Ruyter , David W. Means
IPC分类号： G02B26/08 , B23K26/42 , G02B26/04 , H01S3/00 , H01S3/101 , H01S3/121
CPC分类号： H01S3/005 , B23K26/704 , G02B26/04 , G01J3/0232
摘要： A shutter mechanism having a slide element coupled to a support base by a plurality of roller bearings journaled between opposing pairs of guide rods is disclosed. The slide element and support base have corresponding beam apertures in alignment when the shutter is in its open position. Angularly mounted on the slide, adjacent to the slide's beam aperture, is a UV reflective mirror. When the shutter is commended to close, an actuator forces the slide and support base apertures out of alignment, while simultaneously positioning the UV reflective mirror into the position previously occupied by the slide's aperture. A laser beam, previously being transmitted through the aligned apertures, will be reflected by the mirror to a beam stop as a diagnostic instrument mounted on the support base.
摘要翻译：公开了一种快门机构，其具有通过在相对的导向杆对之间轴颈的多个滚子轴承而联接到支撑基座的滑动元件。当快门处于其打开位置时，滑动元件和支撑基座具有对准的对应的光束孔。倾斜安装在滑板上，与滑板的光束孔相邻，是一个UV反射镜。当快门被关闭时，执行器迫使滑块和支撑基座孔不对准，同时将UV反射镜定位在先前被滑块的孔径占据的位置。先前通过对准的孔传输的激光束将被反射镜反射到作为安装在支撑基座上的诊断仪器的光束停止点。

4. 发明授权

US4757399A Flexible cassette for use with a reel periphery driven transport 失效
标题翻译：用于卷轴外围驱动运输的柔性盒
公开(公告)号：US4757399A
公开(公告)日：1988-07-12
申请号：US865310
申请日：1986-05-21
申请人： Dean M. Peterson , Anthony J. de Ruyter
发明人： Dean M. Peterson , Anthony J. de Ruyter
IPC分类号： G11B15/26 , G11B15/675 , G11B23/087 , G11B5/008 , G11B15/00 , G11B17/00
CPC分类号： G11B15/675 , G11B23/087
摘要： A plastic cassette, having reel hub spindles and tape guides which are accurately machined inserts, is used as a tape supply and take-up container for a reel periphery driven tape transport. The reel hub spindle and the tape guide bases are accurately machined reference surfaces, and the spindles and guides are flexibly captive in the cassette shell with their reference surfaces extending below the cassette shell. Upon insertion into the transport, the reel hub spindle and tape guide bases are forced into abutment with a reference surface of the transport, causing the cassette tape path to conform to the transport tape path, substantially independent of the orientation of the plastic cassette body relative to the transport.
摘要翻译：具有作为精密加工的插入件的卷轴轴心和带引导件的塑料盒被用作用于卷轴外围带式输送带的带供应和收带容器。卷盘轴心和胶带导向座是精确加工的参考表面，并且主轴和导轨在磁带盒外壳中灵活地固定，其参考表面延伸到盒壳的下方。在插入传送装置中时，卷盘轴心和带引导件基座被迫与传送装置的参考表面邻接，导致盒带路径与输送带路径相符，基本上与塑料盒体相对的方向到运输。

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