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1. 发明申请

US20190252846A1 HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS 审中-公开
公开(公告)号：US20190252846A1
公开(公告)日：2019-08-15
申请号：US16396072
申请日：2019-04-26
申请人： National University Corporation Nagaoka University of Technology , Gigaphoton Inc.
发明人： Weihua JIANG , Hiroshi UMEDA , Hakaru MIZOGUCHI , Takashi MATSUNAGA , Hiroaki TSUSHIMA , Tomoyuki OHKUBO
IPC分类号： H01S3/097 , H01S3/041 , H01S3/225 , H01S3/134 , H01S3/038
CPC分类号： H01S3/09702 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08009 , H01S3/0971 , H01S3/10069 , H01S3/134 , H01S3/225
摘要： A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.

2. 发明申请

US20190006817A1 SOLID-STATE LASER DEVICE, SOLID-STATE LASER SYSTEM, AND LASER DEVICE FOR EXPOSURE DEVICE 审中-公开
公开(公告)号：US20190006817A1
公开(公告)日：2019-01-03
申请号：US16124434
申请日：2018-09-07
申请人： GIGAPHOTON INC.
发明人： Takashi ONOSE , Osamu WAKABAYASHI
IPC分类号： H01S3/23 , H01S3/16 , H01S3/067 , G02F1/35 , G02F1/355 , H01S3/109 , H01S3/115 , H01S3/11 , H01S3/108
CPC分类号： H01S3/2308 , G02F1/353 , G02F1/3532 , G02F1/3551 , G02F2001/354 , H01S3/0092 , H01S3/06716 , H01S3/06754 , H01S3/09415 , H01S3/0971 , H01S3/10007 , H01S3/10015 , H01S3/1003 , H01S3/108 , H01S3/109 , H01S3/11 , H01S3/115 , H01S3/1618 , H01S3/2325 , H01S3/2366 , H01S3/2375 , H01S3/2391
摘要： A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

3. 发明申请

US20180191122A1 LASER GAS PURIFYING SYSTEM 审中-公开
公开(公告)号：US20180191122A1
公开(公告)日：2018-07-05
申请号：US15910689
申请日：2018-03-02
申请人： Gigaphoton Inc.
发明人： Natsushi SUZUKI , Masanori YASHIRO , Osamu WAKABAYASHI
IPC分类号： H01S3/036 , H01S3/225 , H01S3/104
CPC分类号： H01S3/036 , B01D53/04 , B01D53/685 , B01D2251/404 , B01D2251/602 , B01D2251/604 , B01D2253/102 , B01D2253/108 , B01D2255/20753 , B01D2255/20761 , B01D2255/50 , B01D2256/18 , B01D2257/102 , B01D2257/104 , B01D2257/11 , B01D2257/2027 , B01D2257/204 , B01D2257/502 , B01D2257/504 , B01D2257/80 , B01D2258/0216 , H01S3/08004 , H01S3/08009 , H01S3/0971 , H01S3/1024 , H01S3/104 , H01S3/134 , H01S3/2207 , H01S3/2232 , H01S3/225 , H01S3/2251 , Y02C10/08
摘要： A laser gas purifying system is configured to purify emission gas emitted from an ArF excimer laser apparatus using laser gas including xenon gas and to supply the purified gas to the ArF excimer laser apparatus. The laser gas purifying system comprises a xenon trap configured to reduce xenon gas concentration in the emission gas, and a xenon-adding unit configured to add xenon gas to the emission gas passed through the xenon trap.

4. 发明申请

US20170338033A1 PULSE POWER MODULE 审中-公开
公开(公告)号：US20170338033A1
公开(公告)日：2017-11-23
申请号：US15671660
申请日：2017-08-08
申请人： Gigaphoton Inc.
发明人： Hiroshi UMEDA
IPC分类号： H01F27/32 , H01S3/04 , H01F27/12 , H01F27/16 , H01S3/097 , H01S3/041
CPC分类号： H01F27/322 , H01F27/12 , H01F27/16 , H01F27/324 , H01F38/023 , H01S3/0407 , H01S3/041 , H01S3/09702 , H01S3/0971 , H01S3/225
摘要： To reduce the size of a magnetic circuit to be provided in a pulse power module for applying a high voltage in the form of a pulse across a pair of discharge electrodes which are disposed in a laser chamber of a gas laser apparatus, the magnetic circuit may include a magnetic core, an insulation member configured to contain a refrigerant flow path therein and cover the periphery of the magnetic core, and a winding wound around the insulation member.

5. 发明授权

US09590379B2 Gas laser oscillation device 有权
标题翻译：气体激光振荡装置
公开(公告)号：US09590379B2
公开(公告)日：2017-03-07
申请号：US15023687
申请日：2015-02-02
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Hiroyuki Hayashikawa , Hitoshi Hongu
IPC分类号： H01S3/036 , H01S3/104 , H01S3/0971
CPC分类号： H01S3/036 , H01S3/0971 , H01S3/104
摘要： A gas laser oscillation device includes a discharge part, a blower part, and a laser gas path. The discharge part excites a laser gas medium and the blower part blows the laser gas. The laser gas path forms the circulation path of the laser gas between the discharge part and the blower part. The blower part includes an impeller section, a drive section, and an intermediate chamber disposed between the impeller section and the drive section. In the impeller section, a rotating blade to be rotated by a drive section via a rotating shaft is disposed. In the intermediate chamber, a main space and a gas damper space are partially partitioned by a gas shielding member.
摘要翻译：气体激光振荡装置包括排出部，鼓风部和激光气路。放电部件激发激光气体介质，鼓风机部件吹动激光气体。激光气体路径形成排出部分和鼓风机部分之间的激光气体的循环路径。鼓风机部分包括叶轮部分，驱动部分和设置在叶轮部分和驱动部分之间的中间室。在叶轮部中设置有通过旋转轴由驱动部旋转的旋转叶片。在中间室中，主空间和气体阻尼空间被气体屏蔽构件部分地分隔开。

6. 发明申请

US20160336706A1 GAS LASER OSCILLATION DEVICE 有权
标题翻译：气体激光振荡器件
公开(公告)号：US20160336706A1
公开(公告)日：2016-11-17
申请号：US15023687
申请日：2015-02-02
申请人： Panasonic Intellectual Property Management Co., Ltd.
发明人： Hiroyuki HAYASHIKAWA , Hitoshi HONGU
IPC分类号： H01S3/036 , H01S3/104
CPC分类号： H01S3/036 , H01S3/0971 , H01S3/104
摘要： A gas laser oscillation device includes a discharge part, a blower part, and a laser gas path. The discharge part excites a laser gas medium and the blower part blows the laser gas. The laser gas path forms the circulation path of the laser gas between the discharge part and the blower part. The blower part includes an impeller section, a drive section, and an intermediate chamber disposed between the impeller section and the drive section. In the impeller section, a rotating blade to be rotated by a drive section via a rotating shaft is disposed. In the intermediate chamber, a main space and a gas damper space are partially partitioned by a gas shielding member.
摘要翻译：气体激光振荡装置包括排出部，鼓风部和激光气路。放电部件激发激光气体介质，鼓风机部件吹动激光气体。激光气体路径形成排出部分和鼓风机部分之间的激光气体的循环路径。鼓风机部分包括叶轮部分，驱动部分和设置在叶轮部分和驱动部分之间的中间室。在叶轮部中设置有通过旋转轴由驱动部旋转的旋转叶片。在中间室中，主空间和气体阻尼空间被气体屏蔽构件部分地分隔开。

7. 发明授权

US09263849B2 Impedance matching system for slab type lasers 有权
标题翻译：板式激光器阻抗匹配系统
公开(公告)号：US09263849B2
公开(公告)日：2016-02-16
申请号：US14566494
申请日：2014-12-10
申请人： Gerald L Kern
发明人： Gerald L Kern
IPC分类号： H01S3/097 , H05K1/16 , H01R24/44 , H01S3/0971 , H01S3/223 , H01S3/03
CPC分类号： H01S3/09702 , H01R24/44 , H01S3/0315 , H01S3/0971 , H01S3/2232 , H05K1/16
摘要： A system transfers radio frequency energy from a radio frequency power amplifier (RFPA) to a slab laser. The system includes a connector, a printed circuit board, a conductive plate and a first inductor element. The connector is configured to receive a radio frequency power from the RFPA. The printed circuit board has at least one conductive pad etched on the printed circuit board. One of the conductive pads is electrically connected to the connector. The conductive plate is attached beneath the printed circuit board. The first inductor is electrically connected to the connector and electrically connected to a first electrode or top slab of the slab laser.
摘要翻译：系统将射频能量从射频功率放大器（RFPA）传送到平板激光器。该系统包括连接器，印刷电路板，导电板和第一电感元件。连接器被配置为从RFPA接收射频功率。印刷电路板具有在印刷电路板上蚀刻的至少一个导电焊盘。一个导电焊盘电连接到连接器。导电板安装在印刷电路板的下面。第一电感器电连接到连接器并电连接到板式激光器的第一电极或顶板。

8. 发明申请

US20150188277A1 SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS INCLUDING SLAB AMPLIFIER 有权
标题翻译： SLAB放大器，激光装置和超大型紫外线发光装置，包括SLAB放大器
公开(公告)号：US20150188277A1
公开(公告)日：2015-07-02
申请号：US14657640
申请日：2015-03-13
申请人： Gigaphoton Inc.
发明人： Krzysztof NOWAK , Takashi SUGANUMA , Takashi SAITO , Yasufumi KAWASUJI
IPC分类号： H01S3/034 , H01S3/23 , H01S3/223
CPC分类号： H01S3/034 , H01S3/03 , H01S3/076 , H01S3/0971 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S3/2366 , H01S3/2375 , H01S2301/02 , H05G2/008
摘要： There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.
摘要翻译：提供了一种平板放大器，包括设置在室（47）中的光学系统（48,51），以允许从第一窗口进入的种子束进入一对电极（42,43）之间的空间中，以反复反射在空间之间，使得种子束被放大为放大的光束; 设置在所述第一窗口和所述电极之间并且具有等于或大于所述种子束的横截面的尺寸的开口并且等于或小于所述第一窗口的尺寸的第一孔板（61）以及设置在第二窗口和电极之间并具有等于或大于放大光束的横截面的尺寸的开口并且等于或小于第二窗口的尺寸的第二孔板（62）。

9. 发明授权

US09059567B2 CO2 laser device and CO2 laser processing device 有权
标题翻译： CO2激光装置和CO2激光加工装置
公开(公告)号：US09059567B2
公开(公告)日：2015-06-16
申请号：US14362720
申请日：2012-10-23
申请人： Azusa Tanino
发明人： Yoichi Tanino , Junichi Nishimae
IPC分类号： H01S3/223 , H01S3/07 , H01S3/23 , B23K26/06 , G02F1/11 , H01S3/08 , H01S3/117 , H01S3/081 , H01S3/0971 , H01S3/036
CPC分类号： H01S3/2232 , B23K26/06 , B23K26/0626 , B23K26/064 , B23K26/066 , G02F1/11 , H01S3/036 , H01S3/076 , H01S3/08 , H01S3/08054 , H01S3/0816 , H01S3/0971 , H01S3/117 , H01S3/2325 , H01S3/2366
摘要： A CO2 laser device and a CO2 laser processing device for emitting a pulse laser having a high output and a stable beam diameter without depending on a repetition frequency. The CO2 laser device includes: laser gas being a CO2 laser medium; a near-concentric stable optical resonator in which a radius of curvature of at least one resonator mirror is set so as to be equal to a distance from an optical switch to the resonator mirror; an optical switch provided in the stable optical resonator; and transmission mirrors provided so that laser light generated from the stable optical resonator passes through the CO2 laser medium again.
摘要翻译：一种CO 2激光装置和CO2激光加工装置，用于发射具有高输出和稳定的光束直径的脉冲激光，而不依赖于重复频率。 CO2激光装置包括：激光气体是CO2激光介质; 近同心的稳定的光学谐振器，其中至少一个谐振镜的曲率半径被设置为等于从光开关到谐振镜的距离; 设置在所述稳定光谐振器中的光开关; 以及透射反射镜，使得从稳定的光学谐振器产生的激光再次通过CO 2激光介质。

10. 发明申请

US20140253661A1 MARKING DEVICE FOR MARKING AN OBJECT WITH MARKING LIGHT 有权
标题翻译：用标记光标记物体的标记装置
公开(公告)号：US20140253661A1
公开(公告)日：2014-09-11
申请号：US14342493
申请日：2012-07-19
申请人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
发明人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
IPC分类号： B41J2/455
CPC分类号： B41J2/455 , B23K26/03 , B23K26/0604 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/355 , B23K26/361 , H01S3/005 , H01S3/03 , H01S3/036 , H01S3/041 , H01S3/076 , H01S3/08059 , H01S3/0835 , H01S3/0971 , H01S3/2232 , H01S3/2383
摘要： The invention relates to a marking device for marking an object (1) with marking light. The marking device comprises a plurality of marking modules (10a-d) for emitting marking light, and a base unit (20) to which the plurality of marking modules (10a-d) is connected wherein the base unit (20) comprises a control unit (25) for controlling the plurality of marking modules (10a-d). The plurality of marking modules (10a-d) comprises at least a first marking module (10a) and a second marking module (10b) which employ different marking technologies.
摘要翻译：本发明涉及一种用于用标记光来标记物体（1）的标记装置。标记装置包括用于发射标记光的多个标记模块（10a-d）和连接有多个标记模块（10a-d）的基本单元（20），其中基本单元（20）包括控制单元（25），用于控制多个标记模块（10a-d）。多个标记模块（10a-d）至少包括采用不同标记技术的第一标记模块（10a）和第二标记模块（10b）。

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