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    • 6. 发明授权
    • Plasma focus light source with improved pulse power system
    • 等离子聚焦光源具有改进的脉冲电源系统
    • US06815700B2
    • 2004-11-09
    • US10189824
    • 2002-07-03
    • Stephan T. MelnychukWilliam N. PartloIgor V. FomenkovI. Roger OliverRichard M. NessNorbert BoweringOleh Khodykin
    • Stephan T. MelnychukWilliam N. PartloIgor V. FomenkovI. Roger OliverRichard M. NessNorbert BoweringOleh Khodykin
    • H05H104
    • H05G2/003B82Y10/00G03F7/70033G03F7/70166G03F7/70916H05G2/005H05H1/06
    • The present invention provides a high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. Preferably the electrodes are configured co-axially. The central electrode is preferably hollow and the active gas is introduced out of the hollow electrode. This permits an optimization of the spectral line source and a separate optimization of the buffer gas. In preferred embodiments the central electrode is pulsed with a high negative electrical pulse so that the central electrode functions as a hollow cathode. Preferred embodiments present optimization of capacitance values, anode length and shape and preferred active gas delivery systems are disclosed. Preferred embodiments also include a pulse power system comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer. Special techniques are described for cooling the central electrode. In one example, water is circulated through the walls of the hollow electrode. In another example, a heat pipe cooling system is described for cooling the central electrode.
    • 本发明提供了一种高能量光子源。 一对等离子体夹紧电极位于真空室中。 该室包含工作气体,其包括贵重缓冲气体和被选择用于提供所需光谱线的活性气体。 脉冲电源在电压足够高的电压下提供电脉冲,以在电极之间产生放电,以在工作气体中产生非常高温度,高密度的等离子体夹持,从而在源或活性气体的光谱线处提供辐射。 优选地,电极被同轴配置。 中心电极优选是中空电极,并且活性气体从中空电极引出。 这允许对光谱线源进行优化和缓冲气体的单独优化。 在优选的实施例中,中心电极用高的负电脉冲脉冲,使得中心电极用作空心阴极。 本发明优选的实施例公开了电容值的优化,阳极长度和形状以及优选的活性气体输送系统。 优选实施例还包括脉冲功率系统,其包括充电电容器和包括脉冲变压器的磁压缩电路。 描述了用于冷却中心电极的特殊技术。 在一个实例中,水通过中空电极的壁循环。 在另一个实例中,描述了用于冷却中心电极的热管冷却系统。