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1. 发明授权

US06353658B1 Miniature x-ray source 失效
标题翻译：微型x射线源
公开(公告)号：US06353658B1
公开(公告)日：2002-03-05
申请号：US09391578
申请日：1999-09-08
申请人： James E. Trebes , Gary F. Stone , Perry M. Bell , Ronald B. Robinson , Victor I. Chornenky
发明人： James E. Trebes , Gary F. Stone , Perry M. Bell , Ronald B. Robinson , Victor I. Chornenky
IPC分类号： H01J3520
CPC分类号： A61N5/1001 , H01J35/16 , H01J35/32 , H01J2235/0233
摘要： A miniature x-ray source capable of producing broad spectrum x-ray emission over a wide range of x-ray energies. The miniature x-ray source comprises a compact vacuum tube assembly containing a cathode, an anode, a high voltage feedthru for delivering high voltage to the anode, a getter for maintaining high vacuum, a connection for an initial vacuum pump down and crimp-off, and a high voltage connection for attaching a compact high voltage cable to the high voltage feedthru. At least a portion of the vacuum tube wall is highly x-ray transparent and made, for example, from boron nitride. The compact size and potential for remote operation allows the x-ray source, for example, to be placed adjacent to a material sample undergoing analysis or in proximity to the region to be treated for medical applications.
摘要翻译：能够在宽范围的x射线能量上产生广谱X射线发射的微型X射线源。微型x射线源包括一个紧凑的真空管组件，它包含一个阴极，一个阳极，一个用于向阳极输送高电压的高压馈电，一个用于保持高真空的吸气剂，一个用于初始真空泵的连接和卷曲，以及用于将紧凑型高压电缆连接到高压馈电的高压连接。真空管壁的至少一部分是高度X射线透明的，例如由氮化硼制成。紧凑的尺寸和远程操作的可能性允许例如将x射线源放置在正在进行分析的材料样品附近，或靠近待处理的区域用于医疗应用。

2. 发明授权

US06787788B2 Electrode insulator materials for use in extreme ultraviolet electric discharge sources 有权
标题翻译：用于极紫外放电源的电极绝缘体材料
公开(公告)号：US06787788B2
公开(公告)日：2004-09-07
申请号：US10349740
申请日：2003-01-21
申请人： Melissa Shell , Bryan J. Rice
发明人： Melissa Shell , Bryan J. Rice
IPC分类号： H01J3520
CPC分类号： B82Y10/00 , G03F7/70033 , H05G2/003
摘要： An insulator may be operable to electrically insulate a cathode from an anode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The insulator may be made of an aluminosilicate or a SiN/SiC material. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
摘要翻译：绝缘体可操作以使阴极与EUV光刻工具的极紫外（EUV）源中的阳极电绝缘。绝缘体可以由铝硅酸盐或SiN / SiC材料制成。极紫外光源可操作以产生发射极紫外辐射的等离子体。

3. 发明授权

US06586757B2 Plasma focus light source with active and buffer gas control 失效
公开(公告)号：US06586757B2
公开(公告)日：2003-07-01
申请号：US09875719
申请日：2001-06-06
申请人： Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , Richard M. Ness , Daniel L. Birx late of , Richard L. Sandstrom , John E. Rauch
发明人： Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , Richard M. Ness , Daniel L. Birx late of , Richard L. Sandstrom , John E. Rauch
IPC分类号： H01J3520
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70908 , G03F7/70916 , H05G2/005 , H05H1/06
摘要： A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at repetition rates of 1000 Hz or greater and at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. A fourth generation unit is described which produces 20 mJ, 13.5 nm pulses into 2 &pgr; steradians at repetition rates of 2000 Hz with xenon as the active gas. This unit includes a pulse power system having a resonant charger charging a charging capacitor bank, and a magnetic compression circuit comprising a pulse transformer for generating the high voltage electrical pulses at repetition rates of 2000 Hz or greater. Gas flows in the vacuum chamber are controlled to assure desired concentration of active gas in the discharge region and to minimize active gas concentration in the beam path downstream of the pinch region. In a preferred embodiment, active gas is injected downstream of the pinch region and exhausted axially through the center of the anode. In another preferred embodiment a laser beam generates metal vapor at a location close to but downstream of the pinch region and the vapor is exhausted axially through the anode.

4. 发明授权

US06200494B1 Combination of getter materials and device for containing the same 失效
标题翻译：吸气剂材料和装置的组合包含相同
公开(公告)号：US06200494B1
公开(公告)日：2001-03-13
申请号：US08683386
申请日：1996-07-18
申请人： Paolo Manini , Claudio Boffito
发明人： Paolo Manini , Claudio Boffito
IPC分类号： H01J3520
CPC分类号： H01J7/186 , B01J20/06 , H01J7/183 , Y02E60/321
摘要： A combination of getter materials particularly suitable to maintain vacuum in devices which cannot be heated at temperatures higher than about 200° C. The getter comprises: a mixture MO/Pd between an oxide of a transition metal MO chosen among cobalt oxide, copper oxide or their combinations and metallic palladium, wherein the latter is present up to about 2% by weight; and a moisture sorbing material. In some applications it is possible to add to this combination a barium- and lithium-based alloy, preferably BaLi4. Getter devices for containing such a combination are also described.
摘要翻译：吸气剂的组合特别适用于在高于约200℃的温度下不能加热的装置中保持真空。吸气剂包括：过渡金属MO的氧化物之间的混合物MO / Pd，其选自氧化钴，氧化铜或它们的组合和金属钯，其中后者存在至多约2重量％; 和吸湿材料。在一些应用中，可以向该组合添加钡和锂基合金，优选BaLi 4。还描述了用于包含这种组合的吸气装置。

5. 发明授权

US06605233B2 Gas generant composition with coolant 失效
标题翻译：气体发生剂组成与冷却剂
公开(公告)号：US06605233B2
公开(公告)日：2003-08-12
申请号：US09798640
申请日：2001-03-02
申请人： Gregory D. Knowlton , Christopher P. Ludwig
发明人： Gregory D. Knowlton , Christopher P. Ludwig
IPC分类号： H01J3520
CPC分类号： C06D5/06 , C06B23/04
摘要： A low-solids gas generating composition and a method of producing a gas. The gas is produced by combusting a mixture of a fuel selected from the group consisting of guanidine nitrate, nitroguanidine, cellulose, cellulose acetate, hexamine, 5 amino-tetrazole, 5 nitro-uracil, guanidine salt of 5 nitro-uracil, and mixtures thereof, an oxidizer selected from the group consisting of ceric ammonium nitrate, strontium nitrate, basic copper nitrate, a mixture of ammonium perchlorate and at least one alkali metal salt, and mixtures thereof, and a cupric oxalate hemi-hydrate coolant. The oxidizer-fuel mixture is within about 4 percent of stoichiometric balance, and the low-solids gas generating composition produces no more than about 0.082 cubic centimeters of solids per gram of gas generating composition on combustion.
摘要翻译：一种低固体产气组合物和一种生产气体的方法。通过燃烧选自硝酸胍，硝基胍，纤维素，乙酸纤维素，六胺，5氨基四唑，5硝基尿嘧啶，5硝基尿嘧啶的胍盐和其混合物的混合物的混合物来生产气体，选自硝酸铈铵，硝酸锶，碱式硝酸铜，高氯酸铵和至少一种碱金属盐的混合物及其混合物的氧化剂和草酸二乙酯半水合物冷却剂。氧化剂 - 燃料混合物在化学计量平衡的约4％以内，低固体气体产生组合物在燃烧时产生不大于约0.082立方厘米固体/克燃气产生组合物。

6. 发明授权

US06570959B1 X-ray tube metal frame gettering device 失效
标题翻译： X射线管金属框吸气装置
公开(公告)号：US06570959B1
公开(公告)日：2003-05-27
申请号：US09908338
申请日：2001-07-18
申请人： Daniel E. Kuzniar
发明人： Daniel E. Kuzniar
IPC分类号： H01J3520
CPC分类号： H01J35/20 , H01J2235/205
摘要： A metal frame x-ray tube (1), includes a gettering system (90) which, when activated, provides a layer (147) of gettering material (98) on a grounded conductive portion (72, 74) of a metal frame or envelope (14). The envelope defines an evacuated chamber (12), which houses an anode (10) and a cathode (18). Moving the gettering material to larger diameter portions of the frame enables substantially larger amounts of gettering material to be provided than in a conventional gettering system, which is typically housed in the cathode assembly (26). Moreover, multiple independently controllable gettering wires (92, 94) facilitate reactivating the gettering material plural times both during the manufacturing process and in the field. This ability to rejuvenate vacuum pumping capability in an x-ray tube that is starting to arc in the field allows for extended x-ray tube life.
摘要翻译：金属框架X射线管（1）包括吸气系统（90），该吸气系统（90）当被激活时，在金属框架的接地导电部分（72,74）上提供吸气材料层（147）信封（14）。信封限定了一个真空室（12），其容纳阳极（10）和阴极（18）。将吸气材料移动到框架的较大直径部分使得能够提供比通常容纳在阴极组件（26）中的常规吸气系统中更大量的吸气材料。此外，多个可独立控制的吸气丝（92,94）有助于在制造过程中和在现场中多次重新吸收吸气材料。这种在现场开始弧形的x射线管中恢复真空泵送能力的能力可以延长X射线管寿命。

7. 发明授权

US06563908B1 High reliability high voltage device housing system 失效
标题翻译：高可靠性高压设备外壳系统
公开(公告)号：US06563908B1
公开(公告)日：2003-05-13
申请号：US09438169
申请日：1999-11-11
申请人： Richard S. Enck, Jr.
发明人： Richard S. Enck, Jr.
IPC分类号： H01J3520
CPC分类号： H05G1/04
摘要： A high voltage device housing assembly includes a housing and a high voltage assembly arranged in combination with an improved insulation system. The high voltage assembly is disposed within the enclosure defined by the housing, and the outer surface of the high voltage device, such as a vacuum tube, bears an insulator including a first portion generally continuously covering the side surface of the high voltage and an integral second portion comprising a plurality of spaced apart projections extending around the side surface and between the first portion and the inner wall of the housing. Air gaps are present between the respective projections, and the spacing of the ribs is established in a manner that inhibits ionic conduction from occurring between the housing and the high voltage device, which otherwise could lead to high voltage breakdowns.
摘要翻译：高压器件壳体组件包括与改进的绝缘系统组合布置的壳体和高压组件。高压组件设置在由壳体限定的壳体内，并且高压装置（例如真空管）的外表面承载包括通常连续地覆盖高压侧表面的第一部分和绝缘体第二部分包括围绕侧表面延伸并且在壳体的第一部分和内壁之间延伸的多个间隔开的突起。在相应的突起之间存在气隙，肋的间隔以抑制壳体和高压装置之间的离子传导的方式建立，否则可能导致高压击穿。

8. 发明授权

US06192106B1 Field service flashable getter for x-ray tubes 失效
标题翻译：现场服务用于x射线管的可闪光吸气剂
公开(公告)号：US06192106B1
公开(公告)日：2001-02-20
申请号：US09248599
申请日：1999-02-11
申请人： Lester D. Miller , Allan D. Kautz
发明人： Lester D. Miller , Allan D. Kautz
IPC分类号： H01J3520
CPC分类号： H01J9/385 , H01J35/20 , H01J2235/205
摘要： An evacuated tube (24) includes an envelope (50) and an electrode (78) in the tube envelope (50). The electrode (78) is electrically connected to conductors (74a, 74b) that extend through the tube envelope (50). A getter (72) is included in the tube envelope (50) and is electrically connected to the conductors (74a, 74b) extending through the tube envelope (50). Diodes (82a, 82b) are connected to the electrode (78) and the getter (72) for selectively providing electrical energy through the conductors (74a, 74b) extending through the tube envelope (50) to one of the electrode (78) and the getter (72).
摘要翻译：真空管（24）包括管壳（50）和管壳（50）中的电极（78）。电极（78）电连接到延伸穿过管壳（50）的导体（74a，74b）。吸气剂（72）包括在管壳（50）中，并且电连接到延伸穿过管壳（50）的导体（74a，74b）。二极管（82a，82b）连接到电极（78）和吸气器（72），用于通过延伸穿过管壳（50）的导体（74a，74b）选择性地提供电能到电极（78）和吸气剂（72）。

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