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    • 2. 发明授权
    • Front-opening unified pod closing/opening control structure
    • 前开口统一吊舱关闭/开启控制结构
    • US06382896B1
    • 2002-05-07
    • US09705728
    • 2000-11-06
    • Ping-Yu HuKuan-Chou ChenTzong-Ming WuWu-Lang Lin
    • Ping-Yu HuKuan-Chou ChenTzong-Ming WuWu-Lang Lin
    • B65G4907
    • H01L21/67772Y10S414/137Y10S414/139
    • A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.
    • 前开口的统一的关闭/打开控制结构包括一个控制传动传动轴旋转的传动马达,使传动轴通过两个蜗杆转动两个蜗轮组,每个蜗轮组包括与一个蜗杆啮合的蜗轮, 固定在蜗轮上的径向延伸的定位板,以及具有矩形中心孔的垫圈构件,分别装配在矩形中心孔中的两个致动螺栓,并通过相应的螺母固定到蜗轮组,保持蜗杆的定位板 齿轮组保持直角,两个第一止动销适于在第一位置停止蜗轮组的定位板,其中致动螺栓关闭FOUP的盖子,以及两个第二止动销,其适于停止定位板 蜗轮组处于第二位置,其中致动螺栓打开FOUP的盖。
    • 4. 发明授权
    • Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment
    • 用于从半导体制造设备加载/卸载晶片的装置
    • US06997664B1
    • 2006-02-14
    • US09619388
    • 2000-07-19
    • Muh-Wang LiangChun-Kai HuangJiann-Cherng ChenTzong-Ming WuPing-Yu HuKuan-Chou Chen
    • Muh-Wang LiangChun-Kai HuangJiann-Cherng ChenTzong-Ming WuPing-Yu HuKuan-Chou Chen
    • B65G49/07
    • H01L21/67775Y10S414/14
    • The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.
    • 本发明提出了一种用于将晶片装载和从半导体制造设备卸载的装置。 本发明使用两个具有高刚度的U形端口板支撑件分别与诸如导螺杆,轴轴承和引线装置的驱动装置接合,然后与诸如端口板,端口门和 基础。 组件由电机通过定时滑轮,同步皮带,惰轮,一对导螺杆,轴轴承和引导装置驱动。 编码器匹配反馈控制。 因此,可以实现负责向上和向下移动的晶片盒的主机构的精确定位,从而提高晶片定位传送的准确性和可靠性。 其次,通过使用进气过滤系统可以减少由主机构的运动引起的颗粒污染。 因为本发明采用模块化设计,每个单元的驱动源是隔离的,每个单元的电路都是隐藏的,使得整个结构最紧凑,组装/拆卸和维护更容易。
    • 6. 发明授权
    • Six-bar linkage positioning mechanism
    • 六杆联动定位机制
    • US07618225B2
    • 2009-11-17
    • US10994342
    • 2004-11-23
    • Kuan-Chou ChenTzong-Ming Wu
    • Kuan-Chou ChenTzong-Ming Wu
    • B65D85/00
    • H01L21/67369Y10S414/13Y10S414/136Y10T74/20
    • Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.
    • 本发明公开了一种六杆连杆定位机构,其安装在由定位构件和四杆联动器形成的清洁容器内部,并且驱动模块在移动时具有停止在清洁容器的基部处的驱动模块的滑动件, 被迫相对于定位构件内的滑动方向向上移动,并且使得驱动模块的驱动连杆向上驱动四杆联动装置,并且进一步迫使四杆联动装置的第二连杆件将工件推向相应的 插入插槽在清洁容器上的盒子中。 六杆连杆定位机构仅具有一个自由度,使得其通过一点处的接触将工件在盒中水平移动到位,防止由摩擦引起的污染并且还提高移动稳定性。
    • 10. 发明申请
    • VACUUM APPARATUS OF ROTARY MOTION ENTRY
    • 旋转运动入口的真空装置
    • US20110079963A1
    • 2011-04-07
    • US12615811
    • 2009-11-10
    • Kuan-Chou ChenFu-Ching TungChia-Ming ChenPei-Shan WuTean-Mu ShenJung-Chen Ho
    • Kuan-Chou ChenFu-Ching TungChia-Ming ChenPei-Shan WuTean-Mu ShenJung-Chen Ho
    • F16C33/10F16J15/32
    • F16C33/76F16C2300/62Y10S277/913
    • A vacuum apparatus of rotary motion entry is disclosed, which comprises: a shaft sleeve, disposed on a cavity wall of a vacuum system; a rotary shaft, ensheathed by the shaft sleeve; and a transmission set, connected to the rotary shaft for driving the same; wherein, the rotary shaft is disposed passing through a hole formed on the base of the shaft sleeve while there are a first bearing, a second bearing, a sealing ring and a shaft seal being arranged separately inside the hole. Moreover, the shaft seal has a flake-like lip flange formed extending toward the center of the hole, that is capable of being extended away from the vacuum system by the inserting of the rotary shaft into the hole, and thereby, enabling the lip flange to engage with the rotary shaft tightly by the atmospheric pressure and thus isolating the outside world from the vacuum system.
    • 公开了一种旋转运动进入的真空装置,其包括:设置在真空系统的空腔壁上的轴套; 旋转轴,由轴套套管; 以及与驱动该旋转轴的旋转轴连接的变速器组; 其特征在于,所述旋转轴设置成穿过形成在所述轴套的基部上的孔,同时在所述孔内分开设置有第一轴承,第二轴承,密封环和轴密封件。 此外,轴密封件具有形成为朝向孔中心延伸的片状唇缘凸缘,其能够通过将旋转轴插入孔而远离真空系统延伸,从而使得唇缘凸缘 与大气压力紧密地与旋转轴啮合,从而将外界与真空系统隔离开来。