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1. 发明授权

US06997664B1 Apparatus for loading/unloading wafers to and from semiconductor fabrication equipment 有权
标题翻译：用于从半导体制造设备加载/卸载晶片的装置
公开(公告)号：US06997664B1
公开(公告)日：2006-02-14
申请号：US09619388
申请日：2000-07-19
申请人： Muh-Wang Liang , Chun-Kai Huang , Jiann-Cherng Chen , Tzong-Ming Wu , Ping-Yu Hu , Kuan-Chou Chen
发明人： Muh-Wang Liang , Chun-Kai Huang , Jiann-Cherng Chen , Tzong-Ming Wu , Ping-Yu Hu , Kuan-Chou Chen
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , Y10S414/14
摘要： The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system. Because the present invention adopts a modular design, the drive source of each unit is isolated and the circuit of each unit is hidden so that the whole structure is most compact and the assembling/disassembling and maintenance are easier.
摘要翻译：本发明提出了一种用于将晶片装载和从半导体制造设备卸载的装置。本发明使用两个具有高刚度的U形端口板支撑件分别与诸如导螺杆，轴轴承和引线装置的驱动装置接合，然后与诸如端口板，端口门和基础。组件由电机通过定时滑轮，同步皮带，惰轮，一对导螺杆，轴轴承和引导装置驱动。编码器匹配反馈控制。因此，可以实现负责向上和向下移动的晶片盒的主机构的精确定位，从而提高晶片定位传送的准确性和可靠性。其次，通过使用进气过滤系统可以减少由主机构的运动引起的颗粒污染。因为本发明采用模块化设计，每个单元的驱动源是隔离的，每个单元的电路都是隐藏的，使得整个结构最紧凑，组装/拆卸和维护更容易。

2. 发明授权

US06669185B2 Wafer loading system positioning method and device 有权
公开(公告)号：US06669185B2
公开(公告)日：2003-12-30
申请号：US09736664
申请日：2000-12-08
申请人： Wu-Lang Lin , Kuan-Chou Chen , Ping-Yu Hu , Muh-Wang Liang , Kuei-Jung Chen , Tzong-Ming Wu
发明人： Wu-Lang Lin , Kuan-Chou Chen , Ping-Yu Hu , Muh-Wang Liang , Kuei-Jung Chen , Tzong-Ming Wu
IPC分类号： B65G6534
CPC分类号： H01L21/67775 , Y10S269/903 , Y10S414/137
摘要： A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

3. 发明授权

US06896470B1 Front-opening unified pod auto-loading structure 有权
标题翻译：前开口统一吊舱自动装载结构
公开(公告)号：US06896470B1
公开(公告)日：2005-05-24
申请号：US09705733
申请日：2000-11-06
申请人： Kuan-Chou Chen , Ping-Yu Hu , Kuei-Jung Chen , Tzong-Ming Wu , Wu-Lang Lin , Wen-Yo Lee
发明人： Kuan-Chou Chen , Ping-Yu Hu , Kuei-Jung Chen , Tzong-Ming Wu , Wu-Lang Lin , Wen-Yo Lee
IPC分类号： B65G65/34 , H01L21/677 , H01L21/68
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/14
摘要： The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.
摘要翻译：本发明主要包括机座，托架，滑动控制机构，闩锁机构，水平移动机构和提升机构。 FOUP（前开口统一吊舱）放在承载架上，并通过闩锁的锁定板在准确的位置锁定。托架向前移动以将FOUP紧密地接合在机座底板上的通道上的门上，因此FOUP的盖子通过位于门后部的主轴箱齿轮打开，然后由FOUP通过水平移动机构，并由提升机构降低。相反，盖子在FOUP上关闭。因此，盖被自动加载和打开，以及在封闭中，其可以是自动化的一部分并防止晶片被污染。

4. 发明授权

US06382896B1 Front-opening unified pod closing/opening control structure 失效
标题翻译：前开口统一吊舱关闭/开启控制结构
公开(公告)号：US06382896B1
公开(公告)日：2002-05-07
申请号：US09705728
申请日：2000-11-06
申请人： Ping-Yu Hu , Kuan-Chou Chen , Tzong-Ming Wu , Wu-Lang Lin
发明人： Ping-Yu Hu , Kuan-Chou Chen , Tzong-Ming Wu , Wu-Lang Lin
IPC分类号： B65G4907
CPC分类号： H01L21/67772 , Y10S414/137 , Y10S414/139
摘要： A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.
摘要翻译：前开口的统一的关闭/打开控制结构包括一个控制传动传动轴旋转的传动马达，使传动轴通过两个蜗杆转动两个蜗轮组，每个蜗轮组包括与一个蜗杆啮合的蜗轮，固定在蜗轮上的径向延伸的定位板，以及具有矩形中心孔的垫圈构件，分别装配在矩形中心孔中的两个致动螺栓，并通过相应的螺母固定到蜗轮组，保持蜗杆的定位板齿轮组保持直角，两个第一止动销适于在第一位置停止蜗轮组的定位板，其中致动螺栓关闭FOUP的盖子，以及两个第二止动销，其适于停止定位板蜗轮组处于第二位置，其中致动螺栓打开FOUP的盖。

5. 发明授权

US06452201B1 Wafer-mapping method of wafer load port equipment 失效
标题翻译：晶圆负载端口设备的晶圆映射方法
公开(公告)号：US06452201B1
公开(公告)日：2002-09-17
申请号：US09619087
申请日：2000-07-19
申请人： Yu-Sheng Wang , Chien-Rong Huang , Kuan-Chou Chen , Ping-Yu Hu , Tzong-Ming Wu
发明人： Yu-Sheng Wang , Chien-Rong Huang , Kuan-Chou Chen , Ping-Yu Hu , Tzong-Ming Wu
IPC分类号： G01N2188
CPC分类号： H01L21/67265 , Y10S414/136
摘要： This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.
摘要翻译：本发明使用基于模式的信号来加速评估过程，作为替代复杂计算过程的手段。通过实施绝对坐标来构建本发明，通过位置和两个光学传感器信号产生基于图案的信号，并且通过进行特征提取处理。该过程产生了侧向和重叠问题的特征信号。此外，通过转换信号，特征信号可以由数字数据处理器处理。因此，本发明可以实现晶片映射的三个主要目的。

6. 发明申请

US20100123381A1 CATHODE DISCHARGE APPARATUS 有权
标题翻译：阴极放电装置
公开(公告)号：US20100123381A1
公开(公告)日：2010-05-20
申请号：US12411797
申请日：2009-03-26
申请人： FU-CHING TUNG , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
发明人： FU-CHING TUNG , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
IPC分类号： H01J17/26
CPC分类号： H01J37/32449 , H01J37/3244
摘要： A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.
摘要翻译：提供阴极放电装置。阴极放电装置包括阳极，阴极和多个阴极室。阴极位于阳极的内部，其中阴极具有多个流动通道和至少一个流动通道孔，并且多个流动通道通过流动通道孔相互连接。多个阴极室位于阴极内，其中每个阴极室具有腔室出口和与至少一个流动通道连接的室入口。

7. 发明申请

US20120240855A1 TRANSMISSION MECHANISM AND THE DEPOSITION APPARATUS USING THE SAME 审中-公开
标题翻译：传输机制和使用它的沉积装置
公开(公告)号：US20120240855A1
公开(公告)日：2012-09-27
申请号：US13177006
申请日：2011-07-06
申请人： Chen-Chung Du , Ming-Tung Chiang , Muh-Wang Liang , Kuan-Chou Chen , Tean-Mu Shen , Jung-Chen Ho
发明人： Chen-Chung Du , Ming-Tung Chiang , Muh-Wang Liang , Kuan-Chou Chen , Tean-Mu Shen , Jung-Chen Ho
IPC分类号： C23C16/50 , F16H57/00
CPC分类号： C23C14/564 , C23C14/568 , C23C16/4401 , C23C16/54 , Y10T74/19642
摘要： The deposition apparatus has a plurality of said transmission mechanisms arranged therein in a symmetrical manner. Each transmission mechanism comprises: a drive shaft, formed with a tapered end; a driving wheel, configured with a shaft hole for the tapered end to bore coaxially therethrough; a plurality of slide pieces, radially mounted to the driving wheel; a first elastic member, mounted enabling the plural slide pieces to be ensheathed thereby; a second elastic member, disposed between the first elastic member and the first axial end of the drive shaft while being mounted to the periphery of the driving wheel; an enclosure, configured with an opening; wherein, the driving wheel that is moving in a reciprocating manner drives the sliding pieces to slide in radial directions, thereby, causing the outer diameter of the first elastic member to change accordingly and enabling the opening of the enclosure to open or close in consequence.
摘要翻译：沉积装置具有以对称的方式布置在其中的多个所述传动机构。每个传动机构包括：形成有锥形端的驱动轴; 驱动轮，其构造有用于锥形端轴同轴地穿过其中的轴孔; 多个滑动件，径向安装在驱动轮上; 第一弹性构件，其安装成使得能够使多个滑动件嵌套; 第二弹性构件，其安装在所述第一弹性构件和所述驱动轴的所述第一轴向端之间，同时安装到所述驱动轮的周边; 一个配有开口的外壳; 其中，以往复方式移动的驱动轮驱动滑动件在径向方向上滑动，从而使第一弹性构件的外径相应地变化，从而能够打开或关闭外壳。

8. 发明授权

US08198793B2 Cathode discharge apparatus 有权
标题翻译：阴极放电装置
公开(公告)号：US08198793B2
公开(公告)日：2012-06-12
申请号：US12411797
申请日：2009-03-26
申请人： Fu-Ching Tung , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
发明人： Fu-Ching Tung , Tean-Mu Shen , Jung-Chen Ho , Pei-Shan Wu , Chia-Ming Chen , Kuan-Chou Chen , Jung-Chen Chien , Muh-Wang Liang
IPC分类号： H01J17/26
CPC分类号： H01J37/32449 , H01J37/3244
摘要： A cathode discharge device is provided. The cathode discharge apparatus includes an anode, a cathode and plural cathode chambers. The cathode is located inside the anode, where the cathode has plural flow channels and at least one flow channel hole, and the plural flow channels are connected to one another through the flow channel hole. The plural cathode chambers are located inside the cathode, wherein each of the cathode chambers has a chamber outlet and a chamber inlet connected with at least one of the flow channels.
摘要翻译：提供阴极放电装置。阴极放电装置包括阳极，阴极和多个阴极室。阴极位于阳极的内部，其中阴极具有多个流动通道和至少一个流动通道孔，并且多个流动通道通过流动通道孔相互连接。多个阴极室位于阴极内，其中每个阴极室具有腔室出口和与至少一个流动通道连接的室入口。

9. 发明申请

US20110132758A1 STRUCTURE FOR INCREASING UTILIZATION RATE OF TARGET 审中-公开
标题翻译：增加目标利用率的结构
公开(公告)号：US20110132758A1
公开(公告)日：2011-06-09
申请号：US12717667
申请日：2010-03-04
申请人： Kang-Feng Lee , Kuan-Chou Chen , Muh-Wang Liang , Chian-Fu Huang
发明人： Kang-Feng Lee , Kuan-Chou Chen , Muh-Wang Liang , Chian-Fu Huang
IPC分类号： C23C14/35
CPC分类号： C23C14/35 , H01J37/3408 , H01J37/3455
摘要： A structure for increasing utilization rate of target is disclosed, which comprises: a magnetic base, capable of moving relative to a target in a reciprocating manner; and two magnetic conductors, disposed respectively at two motion limits with respect to the reciprocating range of the magnetic base. Thereby, when the magnetic base is moved to a position close to any one of magnetic conductors, the surface magnetic field intensity of the target that is caused by the magnetic base is reduced so that the ion bombardment happening at the two ends of the target will be eased off for increasing the utilization rate of the target.
摘要翻译：公开了一种用于提高目标的利用率的结构，其包括：能够以往复方式相对于目标移动的磁性基座; 和两个磁性导体，分别设置在相对于磁性基座的往复运动范围的两个运动极限。因此，当磁性体移动到靠近任何一个磁性导体的位置时，由磁性基底引起的靶的表面磁场强度降低，使得在靶的两端发生的离子轰击缓解目标的利用率。

10. 发明授权

US07618225B2 Six-bar linkage positioning mechanism 有权
标题翻译：六杆联动定位机制
公开(公告)号：US07618225B2
公开(公告)日：2009-11-17
申请号：US10994342
申请日：2004-11-23
申请人： Kuan-Chou Chen , Tzong-Ming Wu
发明人： Kuan-Chou Chen , Tzong-Ming Wu
IPC分类号： B65D85/00
CPC分类号： H01L21/67369 , Y10S414/13 , Y10S414/136 , Y10T74/20
摘要： Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.
摘要翻译：本发明公开了一种六杆连杆定位机构，其安装在由定位构件和四杆联动器形成的清洁容器内部，并且驱动模块在移动时具有停止在清洁容器的基部处的驱动模块的滑动件，被迫相对于定位构件内的滑动方向向上移动，并且使得驱动模块的驱动连杆向上驱动四杆联动装置，并且进一步迫使四杆联动装置的第二连杆件将工件推向相应的插入插槽在清洁容器上的盒子中。六杆连杆定位机构仅具有一个自由度，使得其通过一点处的接触将工件在盒中水平移动到位，防止由摩擦引起的污染并且还提高移动稳定性。

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